1. An axle assembly comprising:
a carrier housing having a first body portion, a pair of hollow tube mounts, and a second body portion, the first body portion defining a differential mechanism cavity and a cover flange, the cover flange defining a plurality of bolt holes, the tube mounts extending from opposite lateral sides of the first body portion and being in fluid communication with the differential mechanism cavity, the second body portion extending from the first body portion on a side of the first body portion that is opposite the cover flange, a pinion bore being formed through the second body portion and intersecting the differential mechanism cavity;
an input pinion having a stem and a pinion gear, the stem being received in the pinion bore, the pinion gear being disposed in the differential mechanism cavity;
a differential mechanism received in the cavity in the carrier housing;
a ring gear coupled to the differential mechanism, the ring gear being received in the differential mechanism cavity and meshed with the pinion gear;
a cover pan assembly sealingly coupled to the cover flange to close a side of the differential mechanism cavity opposite to the second body portion, the cover pan assembly comprising a cover pan and a plurality of bolts that are received through the cover pan and threadably engaged to the bolt holes in the cover flange;
first and second axle tubes received in the first and second axle tube bores and fixedly coupled to the carrier housing;
wherein the carrier housing includes a pair of strengthening ribs that are located on top and bottom sides of the carrier housing, each of the strengthening ribs having a first rib portion, which extends outwardly from the first body portion and at least partly defines the cover flange, and a pair of second rib portions, each second rib portion extending from an end of the first rib portion and extending laterally outwardly and forwardly toward the second body portion, each second rib portion terminating at an associated one of the tube mounts.
2. The axle assembly of claim 1, wherein the second rib portions of each of the strengthening ribs extend in an oblique manner relative to the associated one of the tube mounts and the first rib portions.
3. The axle assembly of claim 2, wherein the second rib portions on each lateral side of the carrier housing intersect the associated one of the tube mounts along a path that is defined by an ellipse.
4. The axle assembly of claim 1, wherein the first rib portions of the strengthening ribs intersect one another and cooperate to fully define the cover flange.
5. The axle assembly of claim 1, wherein the second rib portions of each of the strengthening ribs extend at least to a centerline of the associated one of the tube mounts.
6. The axle assembly of claim 1, wherein the carrier housing comprises a pair of intermediate ribs, each intermediate rib extending between one of the tube mounts and the first body portion, each intermediate rib terminating at a corresponding one of the second rib portions of the strengthening rib on the top side of the carrier housing.
7. The axle assembly of claim 6, wherein each of the second rib portions of the strengthening rib on the top side of the carrier housing has a proximal end, which intersects the first rib portion of the strengthening rib on the top side of the carrier housing, and a distal end that is opposite the proximal end and which intersects one of the intermediate ribs.
8. The axle assembly of claim 6, wherein each of the intermediate ribs is shaped differently so that the intermediate ribs are not symmetric about a plane that includes the first axis and which is intersects the second axis.
9. The axle assembly of claim 1, wherein the second rib portions on a first lateral side of the carrier housing are formed differently than the second rib portions on a second, opposite lateral side of the carrier housing.
10. An axle assembly comprising:
a carrier housing having a first body portion, a pair of hollow tube mounts, and a second body portion, the first body portion defining a differential mechanism cavity and a cover flange, the tube mounts extending from opposite lateral sides of the first body portion and being in fluid communication with the differential mechanism cavity, the second body portion extending from the first body portion on a side of the first body portion that is opposite the cover flange, a pinion bore being formed through the second body portion and intersecting the differential mechanism cavity;
an input pinion having a stem and a pinion gear, the stem being received in the pinion bore, the pinion gear being disposed in the differential mechanism cavity;
a tail bearing received in the pinion bore and supporting the stem for rotation relative to the carrier housing;
a head bearing received in the pinion bore and supporting the stem for rotation relative to the carrier housing, the head bearing being disposed between the tail bearing and the pinion gear;
a differential mechanism received in the cavity in the carrier housing;
a ring gear coupled to the differential mechanism, the ring gear being received in the differential mechanism cavity and meshed with the pinion gear;
a cover pan assembly sealingly coupled to the cover flange to close a side of the differential mechanism cavity opposite to the second body portion;
first and second axle tubes received in the first and second axle tube bores and fixedly coupled to the carrier housing;
wherein the carrier housing further includes a pair of gussets and first and second sets of tail bearing support ribs, the gussets being disposed on opposite lateral sides of the second body portion, each gusset coupling one of the tube mounts to the second body portion to resist bending of the one of the tube mounts toward the second body portion and vice-versa, the first set of tail bearing support ribs being disposed on the top side of the carrier housing and including first and second upper ribs that are disposed on opposite lateral side of the second body portion, each of the first and second upper ribs extending perpendicularly from an associated one of the gussets and intersecting the second body portion at an associated location that is configured to support the tail bearing, the second set of tail bearing support ribs being disposed on the bottom side of the carrier housing and including first and second lower ribs that are disposed on opposite lateral side of the second body portion, each of the first and second lower ribs extending perpendicularly from an associated one of the gussets and terminating at the second body portion at a corresponding location that is configured to support the tail bearing.
11. The axle assembly of claim 10, wherein the first and second upper ribs taper outwardly from the gussets in a manner that increases with increasing distance away from the tail bearing.
12. The axle assembly of claim 11, wherein the first and second lower ribs taper outwardly from the gussets in a manner that increases with decreasing distance toward the tube mounts.
13. The axle assembly of claim 10, wherein the first upper and lower ribs intersect one another.
14. The axle assembly of claim 10, wherein a least one lightening hole is formed in each of the gussets.
15. The axle assembly of claim 10, wherein the second upper rib is formed about a centerline that extends between one of the tube mounts and the second body portion, wherein the centerline is disposed in a plane that intersects the first and second axes.
16. The axle assembly of claim 10, wherein the first upper rib is formed about a centerline that is not contained in a single plane that interests the first and second axes.
17. The axle assembly of claim 16, wherein a first upper intermediate rib extends between the second body portion and the first upper rib and a second upper intermediate rib extends between the second body portion and the second upper rib, and wherein the first and second intermediate upper ribs connect to the second body portion in an area that supports the head bearing.
18. The axle assembly of claim 16, wherein a first lower intermediate rib extends between the second body portion and the first lower rib and a second lower intermediate rib extends between the second body portion and the second lower rib, and wherein the first and second intermediate lower ribs connect to the second body portion in an area that supports the head bearing.
19. An axle assembly comprising:
a carrier housing having a first body portion, a pair of hollow tube mounts, and a second body portion, the first body portion defining a differential mechanism cavity and a cover flange, the tube mounts extending from opposite lateral sides of the first body portion and being in fluid communication with the differential mechanism cavity, the second body portion extending from the first body portion on a side of the first body portion that is opposite the cover flange, a pinion bore being formed through the second body portion and intersecting the differential mechanism cavity;
an input pinion having a stem and a pinion gear, the stem being received in the pinion bore, the pinion gear being disposed in the differential mechanism cavity;
a tail bearing received in the pinion bore and supporting the stem for rotation relative to the carrier housing;
a head bearing received in the pinion bore and supporting the stem for rotation relative to the carrier housing, the head bearing being disposed between the tail bearing and the pinion gear;
a differential mechanism received in the cavity in the carrier housing;
a ring gear coupled to the differential mechanism, the ring gear being received in the differential mechanism cavity and meshed with the pinion gear;
a cover pan assembly sealingly coupled to the cover flange to close a side of the differential mechanism cavity opposite to the second body portion;
first and second axle tubes received in the first and second axle tube bores and fixedly coupled to the carrier housing;
wherein the carrier housing further includes a pair of gussets and a pair of first head bearing support ribs, the gussets being disposed on opposite lateral sides of the second body portion, each gusset coupling one of the tube mounts to the second body portion to resist bending of the one of the tube mounts toward the second body portion and vice-versa, each of the first head bearing support ribs being coupled to a corresponding one of the gussets and the second body portion at a first location that is configured to support the head bearing.
20. The axle assembly of claim 19, wherein the carrier housing further includes a pair of second head bearing support ribs, the second head bearing support ribs being coupled to a side of the gussets that is opposite a side to which the first head bearing support ribs are coupled, the second head bearing support ribs being coupled the second body portion at a second location that is configured to support the head bearing.
21. An axle assembly comprising:
a carrier housing having a first body portion, a pair of hollow tube mounts, and a second body portion, the first body portion defining a differential mechanism cavity and a cover flange, the cover flange defining a plurality of bolt holes, the tube mounts extending from opposite lateral sides of the first body portion and being in fluid communication with the differential mechanism cavity, the second body portion extending from the first body portion on a side of the first body portion that is opposite the cover flange, a pinion bore being formed through the second body portion and intersecting the differential mechanism cavity;
an input pinion having a stem and a pinion gear, the stem being received in the pinion bore, the pinion gear being disposed in the differential mechanism cavity;
a differential mechanism received in the cavity in the carrier housing;
a ring gear coupled to the differential mechanism, the ring gear being received in the differential mechanism cavity and meshed with the pinion gear;
a cover pan assembly sealingly coupled to the cover flange to close a side of the differential mechanism cavity opposite to the second body portion, the cover pan assembly comprising a cover pan and a plurality of bolts that are received through the cover pan and threadably engaged to the bolt holes in the cover flange;
first and second axle tubes received in the first and second axle tube bores and fixedly coupled to the carrier housing;
wherein the carrier housing includes a pair of strengthening ribs, a pair of gussets, first and second sets of tail bearing support ribs, and first and second sets of head bearing support ribs,
the strengthening ribs being located on top and bottom sides of the carrier housing, each of the strengthening ribs having a first rib portion, which extends outwardly from the first body portion and at least partly defines the cover flange, and a pair of second rib portions, each second rib portion extending from an end of the first rib portion and extending laterally outwardly and forwardly toward the second body portion, each second rib portion terminating at an associated one of the tube mounts, the gussets being disposed on opposite lateral sides of the second body portion, each gusset coupling one of the tube mounts to the second body portion to resist bending of the one of the tube mounts toward the second body portion and vice-versa, the first set of tail bearing support ribs being disposed on the top side of the carrier housing and including first and second upper ribs that are disposed on opposite lateral sides of the second body portion, each of the first and second upper ribs extending perpendicularly from an associated one of the gussets and intersecting the second body portion at an associated location that is configured to support the tail bearing, the second set of tail bearing support ribs being disposed on the bottom side of the carrier housing and including first and second lower ribs that are disposed on opposite lateral side of the second body portion, each of the first and second lower ribs extending perpendicularly from an associated one of the gussets and terminating at the second body portion at a corresponding location that is configured to support the tail bearing, the first set of head bearing support ribs being disposed on the top side of the carrier housing and including first and second upper head bearing support ribs that are disposed on opposite lateral sides of the second body portion, each of the first and second upper head bearing support ribs being coupled to a corresponding one of the gussets and to the second body portion to support the head bearing, the second set of head bearing support ribs being disposed on the bottom side of the carrier housing and including first and second lower head bearing support ribs that are disposed on opposite lateral sides of the second body portion, each of the first and second lower bearing support ribs being coupled to an associated one of the gussets and to the second body portion to support the head bearing.
The claims below are in addition to those above.
All refrences to claims which appear below refer to the numbering after this setence.
1. A method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology and a coordinate measuring machine, wherein the substrate on a measuring stage is positioned in a plane on three support points, comprising the following steps:
measuring a position in X, Y and Z coordinate directions at each of a plurality of positions on a surface of the substrate;
tilting the substrate about an axis parallel to the XY plane of the coordinate measuring machine, to set a tilted position;
measuring an edge position of at least one edge in the X, Y and Z coordinate directions at a plurality of positions of structures on the surface of the substrate at positions on the substrate which coincide with the positions on the substrate prior to tilting;
determining a deviation of the lateral position of the at least one edge from the two measurements made at the same position on the substrate; and
obtaining a correction value on the basis of the deviation determined from the two measurements made at the same position on the substrate, to minimize a deviation of the lateral position of the at least one edge.
2. The method according to claim 1, wherein a spacer element is placed on one of said support points so that the substrate is inclined about the axis parallel to the XY plane of the coordinate measuring machine.
3. The method according to claim 1, wherein the axis parallel to the XY plane of the coordinate measuring machine is oriented along the X coordinate direction or the Y coordinate direction.
4. The method according to claim 1, wherein the substrate topology to be measured depends on a wedge shape of the substrate andor an unevenness of the substrate andor a geometry of the substrate holder andor a systematic error resulting from the coordinate measuring machine.
5. The method according to claim 1, wherein the correction comprises either a correction function or correction values.
6. The method according to claim 1, wherein the plane corresponds to the XY plane defined by the measuring stage.
7. The method according to claim 1, wherein the geometric displacement of the structures as a result of tilting is taken into consideration in obtaining the correction.
8. The method according to claim 1, wherein the position of the substrate is determined relative to the position of a coordinate system of the support points.
9. The method according to claim 1, wherein an apparatus is provided for determining the position of edges of a plurality of structures on the surface of the substrate in the Z coordinate direction, comprising a measuring lens, a lens with great depth of focus, a mechanical detector.
10. The method according to claim 9, wherein the position in the Z coordinate direction is determined by focus adjustment using a measuring lens.