1. An exposure apparatus that exposes a substrate to an energy beam while scanning the substrate in a first direction, the apparatus comprising:
a substrate holding member that holds the substrate;
a first supporting member that supports the substrate holding member from below;
a second supporting member that supports the first supporting member from below such that the first supporting member and the second supporting member are capable of moving relative to each other; and
a driving system that moves the substrate holding member, the first supporting member and the second supporting member, the driving system including a first driving device and a second driving device, the first driving device moving the substrate holding member and the first supporting member in a direction along a predetermined axis, and the second driving device moving the second supporting member in the direction along the predetermined axis.
2. A movable body apparatus, comprising:
a movable body that holds an object;
a first supporting member that supports the movable body from below;
a second supporting member that supports the first supporting member from below such that the first supporting member and the second supporting member are capable of moving relative to each other; and
a driving system that moves the movable body, the first supporting member and the second supporting member, the driving system including a first driving device and a second driving device, the first driving device moving the movable body and the first supporting, member in a direction along, a predetermined axis, and the second driving device moving the second supporting member in the direction along the predetermined axis.
3. The exposure apparatus according to claim 1, wherein
the driving system includes a third driving device which moves the substrate holding member relative to the first supporting member, wherein
the first driving device moves the third driving device in the direction along the predetermined axis and moves the substrate holding member by moving the third driving device.
4. The exposure apparatus according to claim 3, wherein
the driving system includes a connecting member with which the first supporting member and the third driving device are connected such that the first supporting member is movable relative to the third driving device, and
the first driving device moves the third driving device in the direction along the predetermined axis and moves the first supporting member via the connecting member by moving the third driving device.
5. The exposure apparatus according to claim 4, wherein
the first supporting member has a supporting surface to support the substrate holding member such that the substrate holding member is movable relative to the supporting surface, and
the third driving device is arranged outside a space between the substrate holding member and the supporting surface.
6. The exposure apparatus according to claim 5, wherein
the substrate holding member is supported by the supporting surface in a state where the substrate holding member is levitated above the supporting surface.
7. The exposure apparatus according to claim 3, wherein
the first supporting member has a supporting surface to support the substrate holding member such that the substrate holding member is movable relative to the supporting surface, and
the third driving device is arranged outside a space between the substrate holding member and the supporting surface.
8. The exposure apparatus according to claim 7, wherein
the substrate holding member is supported by the supporting surface in a state where the substrate holding member is levitated above the supporting surface.
9. The exposure apparatus according to claim 1, wherein
a size of the substrate is not less than 500 mm.
10. The movable body apparatus according to claim 2, wherein
the driving system includes a third driving device which moves the movable body relative to the first supporting member, wherein
the first driving device moves the third driving device in the direction along the predetermined axis and moves the movable body by moving the third driving device.
11. The movable body apparatus according to claim 10, wherein
the driving system includes a connecting member with which the first supporting member and the third driving device are connected such that the first supporting member is movable relative to the third driving device, and
the first driving device moves the third driving device in the direction along the predetermined axis and moves the first supporting member via the connecting member by moving the third driving device.
12. The movable body apparatus according to claim 11, wherein
the first supporting member has a supporting surface to support the movable body such that the movable body is movable relative to the supporting surface, and
the third driving device is arranged outside a space between the movable body and the supporting surface.
13. The movable body apparatus according to claim 12, wherein
the movable body is supported by the supporting surface in a state where the movable body is levitated above the supporting surface.
14. The movable body apparatus according to claim 10, wherein
the first supporting member has a supporting surface to support the movable body such that the movable body is movable relative to the supporting surface, and
the third driving device is arranged outside a space between the movable body and the supporting surface.
15. The movable body apparatus according to claim 14, wherein
the movable body is supported by the supporting surface in a state where the movable body is levitated above the supporting surface.
16. A device manufacturing method, comprising:
exposing a substrate using the exposure apparatus according to claim 1; and
developing the substrate that has been exposed.
The claims below are in addition to those above.
All refrences to claims which appear below refer to the numbering after this setence.
1. An inspection port comprising a viewing assembly for rotatable securement about an axis of rotation at an inspection opening of a panel defining a side of an interior volume to be inspected, the viewing assembly having an inspection enclosure for extending into the interior volume, and wherein the inspection enclosure has a region with a window opening having a window axis angled relative to the axis of rotation.
2. An inspection port according to claim 1 further comprising an inspection window structure attached to the enclosure at the window opening.
3. An inspection port according to claim 2 wherein the inspection window structure comprises an infrared filter window.
4. An inspection port according to claim 3 wherein the window axis is angled relative to the axis of rotation in the range of about 45 to 55 degrees.
5. An inspection port according to claim 4 wherein the window axis is angled relative to the axis of rotation at about 50 degrees.
6. An inspection port according to claim 1 wherein the window axis is angled relative to the axis of rotation in the range of about 45 to 55 degrees.
7. An inspection port according to claim 6 wherein the window axis is angled relative to the axis of rotation at about 50 degrees.
8. A housing comprising:
a housing enclosure, defining an interior volume, the housing enclosure having an inspection opening; and,
a viewing assembly rotatably secured to the housing enclosure for rotation about an axis of rotation at the inspection opening, the viewing assembly having an inspection enclosure extending into the interior volume, and wherein the inspection enclosure has a region with a window opening having a window axis angled relative to the axis of rotation.
9. A housing as claimed in claim 8 further comprising an inspection window structure attached to the enclosure at the window opening.
10. A housing as claimed in claim 9 wherein the inspection window structure comprises an infrared filter window.
11. A housing as claimed in claim 10 wherein the window axis is angled relative to the axis of rotation in the range of about 45 to 55 degrees.
12. A housing as claimed in claim 11 wherein the window axis is angled relative to the axis of rotation at about 50 degrees.
13. A housing as claimed in claim 8 wherein the window axis is angled relative to the axis of rotation in the range of about 45 to 55 degrees.
14. A housing as claimed in claim 13 wherein the window axis is angled relative to the axis of rotation at about 50 degrees.