1. A method of manufacturing capacitive elements for a capacitive device comprising one or more layers, the method comprising:
etching from a first surface to a second surface of at least one layer to form two sections of the layer, such that the sections are movable relative to one another, and such that a wall extending from the first surface to the second surface is formed on each of the two sections, the walls defining a gap therebetween; and
etching to form a plurality of recesses in connection with each wall such that capacitive elements are respectively defined between adjacent recesses, the capacitive elements of one wall being offset from those of the other wall when the sections are stationary with respect to one another.
2. The method according to claim 1, further comprising providing an insulating layer on the walls formed between the first and the second surfaces.
3. The method according to claim 2, wherein providing an insulating layer comprises growing an oxide layer.
4. The method according to claim 1, further comprising providing conductive material on the walls to form the capacitive elements in the form of a plurality of electrical conductors, which are insulated from the at least one layer by the insulating layer, thereon, such that the gap defined by the walls is maintained.
5. The methods according to claim 4, wherein providing the conductive material includes:
filling the gap between the walls with electrically conductive material; and
etching the electrically conductive material to form the multiple electrical conductors.
6. The method according to claim 4, wherein providing the conductive material includes:
filling the gap between the walls with a layer of polymer material;
masking the polymer layer;
etching the polymer layer to form multiple holes therein; and
patterning the conductive material such that the multiple electrical conductors are provided in the holes.
7. The method according to claim 4, further comprising:
patterning a plurality of conductive elements on at least one of the first and second surfaces, wherein the conductive elements are positioned to allow connection to the electrical conductors formed on the walls.
8. The method according to claim 7, the method further comprising:
providing a layer of polymer material on at least one of the first and second surfaces; and
etching the polymer layer such that the conductive elements patterned on at least one of the first and second surfaces are at least partially exposed.
9. A capacitive device, comprising:
at least one layer having two sections that are movable relative to one another, wherein a wall extending from a first surface to a second surface of the layer is formed on each of the two sections, the walls defining a gap therebetween;
wherein each section of the layer comprises a plurality of recesses in connection with each wall such that capacitive elements are respectively defined between adjacent recesses, the capacitive elements of one wall being offset from those of the other wall when the two sections are stationary with respect to one another.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A sowing heart for a single-seed drill, the sowing heart comprising:
a seed disc rotatable in one direction (R) of rotation, the seed disc including seed holes in a defined arrangement,
a receiving region for receiving seed into the seed holes and a delivery region for delivery of the seed, and
a cleaning apparatus located between the delivery region and the receiving region, the cleaning apparatus cleaning the seed holes during operation of the sowing heart, wherein the cleaning apparatus is formed as a rotating wheel having at least one projection which meshes with the seed holes.
2. The sowing heart as claimed in claim 1, wherein the wheel can be driven by at least temporary contact with the seed disc.
3. The sowing heart as claimed in claim 1, wherein the at least one projection at least partially punches through the seed holes.
4. The sowing heart as claimed in claim 1, wherein the at least one projection tapers to the outside, the at least one projection having the shape of a circular cone.
5. The sowing heart as claimed in claim 1, wherein a maximum, cross section of at least one projection is smaller than a minimum, cross section of the seed holes.
6. The sowing heart as claimed in claim 1, wherein the at least one projection has a circular cross section.
7. The sowing heart as claimed in claim 1, wherein the at least one projection is located on the outer circumference of the wheel.
8. The sowing heart as claimed in claim 1, wherein an axis of rotation of the wheel is located perpendicular to an axis of rotation of the seed disc.
9. The sowing heart as claimed in claim 1, wherein the wheel is located on the side of the seed disc facing away from a suction chamber of the sowing heart.
10. The sowing heart as claimed in claim 1, wherein the sowing heart further comprises a pressing apparatus which forces the wheel onto the surface of the seed disc.
11. The sowing heart as claimed in claim 1, wherein the wheel rolls along the front-end, surface of the seed disc with its outer circumference.
12. The sowing heart as claimed in claim 1, wherein the wheel has a plurality of projections which are spaced apart from one another, wherein the distance of adjacent projections corresponds to the distance of adjacent seed holes.
13. The sowing heart as claimed in claim 12, wherein at least one projection of the plurality of projections in operation always meshes with one seed hole.
14. The sowing heart as claimed in claim 12, wherein in operation at least temporarily at least two projections mesh with each one seed hole at a time.
15. A single-seed drill comprising:
a sowing heart including:
a seed disc rotatable in one direction (R) of rotation, the seed disc including seed holes in a defined arrangement,
a receiving region for receiving seed into the seed holes and a delivery region for delivery of the seed, and
a cleaning apparatus located between the delivery region and the receiving region, the cleaning apparatus cleaning the seed holes during operation of the sowing heart, wherein the cleaning apparatus is formed as a rotating wheel having at least one projection which meshes with the seed holes.
16. The sowing heart as claimed in claim 4, wherein said at least one projection is pointed.
17. The sowing heart as claimed in claim 7, wherein said wheel is shaped as a round disc.
18. The sowing heart as claimed in claim 10, wherein said pressing apparatus is spring-loaded.
19. The sowing heart as claimed in claim 12, wherein said plurality of projections are uniformly spaced apart from one another.