1. A semiconductor device having a bonding pad, comprising:
a first metal film formed on a first interlayer insulating film;
a second interlayer insulating film formed on the first metal film;
a metal plug formed so as to pierce the second interlayer insulating film; and
the bonding pad formed on the second interlayer insulating film so as to make electrical connection via the metal plug, the bonding pad being formed of a second metal film,
wherein the metal plug comprises a first metal plug having a large diameter, and
wherein the second metal film enters the first metal plug so that a surface of the bonding pad directly above the first metal plug has a recessed portion formed therein.
2. A semiconductor device according to claim 1, wherein the metal plug further comprises a second metal plug having a diameter smaller than the diameter of the first metal plug.
3. A semiconductor device according to claim 2,
wherein the first metal plug comprises a high melting point metal film and the second metal film,
wherein the second metal plug comprises only the high melting point metal film, and
wherein a surface of the second metal film directly above the second metal plug is flat.
4. A semiconductor device according to claim 2, wherein the second metal plug is arranged outside a region of the bonding pad.
5. A semiconductor device according to claim 2, wherein the first metal plugs and the second metal plugs are alternately arranged in a region of the bonding pad.
6. A semiconductor device according to claim 2, wherein the metal plugs are arranged in a shape of concentric circles in a region of the bonding pad.
7. A semiconductor device according to claim 2, wherein the metal plugs are arranged in a shape of concentric circles in a region of the bonding pad, except for directions toward corner portions of the bonding pad.
8. A semiconductor device according to claim 2, wherein the metal plugs are arranged in a shape of a spiral in a region of the bonding pad.
9. A semiconductor device according to claim 2, wherein the metal plugs are arranged in a shape of a circle at a center portion of the bonding pad, and further, are arranged in a shape of a whirlpool outside the circle.
10. A semiconductor device according to claim 1, wherein a plurality of the metal plugs gather to be a trapezoidal region and four trapezoidal regions are arranged along four sides, respectively, of the bonding pad in a region of the bonding pad.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An oral liquid composition for reducing nerve sensitivity comprising: (a) from about 0.01% by weight to about 5% by weight of an orally-acceptable, soluble potassium salt; (b) from about 0.01% by weight to about 10% by weight of a sodium (C8-C24) alkylsulfate; (c) from about 0.01% by weight to about 20% by weight of an orally-acceptable polar surfactant, said surfactant selected from the group consisting of a C6-C30), fatty acid mono or diester of ethoxylated sorbitan, a (C6-C30) fatty acid diester of polyethylene glycol, a sodium salt of a (C6-C30) fatty acyl sarcosinate, a (C6-C30) fatty acyl ester of sarcosine acid, a sodium salt of a (C6-C30) fatty acyl taurate, a sodium salt of a (C6-C30) fatty acyl methyltaurate, a (C6-C30) fatty acyl ester of taurine, a (C6-C30) fatty acyl ester of methyltaurine acid, a (C6-C30) fatty acyl betaine, a (C6-C30) fatty acyl quaternary ammonium chloride, dimethicone copolyols, polydimethylsiloxane phosphate esters, polydimethylsiloxane copolyol phosphate esters, polydimethylsiloxane phosphobetaines, polydimethylsiloxane copolyol phosphobetaines, polydimethylsiloxane taurates, polydimethylsiloxane copolyol taurates, acetylated polydimethylsiloxane copolyols, and polydimethylsiloxane quaternium compounds, polydimethylsiloxane copolyol quaternium compounds; and (d) an orally-acceptable aqueous vehicle comprising from about 50% by weight to about 85% by weight water; wherein the potassium salt is dissolved in the composition and wherein the molar ratio of the surfactant of (c) to the sodium (C8-C24) alkylsulfate is greater than or equal to about 1:1 such that when a.), b.), c) are dissolved in d.), the resultant composition is free of visible potassium alkyl sulfate precipitates.
2. The oral liquid composition according to claim 1, wherein the soluble potassium salt of the composition comprises a potassium pyrophosphate salt in an amount effective, optionally in combination with other pyrophosphate salts, to remove or loosen plaque andor stains when the composition is orally applied to a dental surface.
3. The oral liquid composition according to claim 2, wherein the soluble potassium salt of the composition comprises soluble potassium salt that possesses activity in reducing dental nerve andor dentin sensitivity in an amount effective to reduce dental nerve andor dentin sensitivity when the composition is orally applied to a dental surface.
4. The oral liquid composition according to claim 3, wherein the soluble potassium salt that possesses activity in reducing dental nerve andor dentin sensitivity is potassium nitrate.
5. The oral liquid composition according to claim 4, further comprising a flavoring that does not comprise a substantial amount of menthol.
6. The oral liquid composition according to claim 5 wherein the flavoring that does not comprise a substantial amount of menthol is a mint flavoring.
7. The oral liquid composition according to claim 1, wherein the soluble potassium salt is selected from the group consisting of a potassium pyrophosphate salt, potassium nitrate, and mixtures thereof.
8. An oral composition in the form of a rinse for reducing dental nerve andor dentin sensitivity comprising (a) from about 0.1% to about 5% potassium nitrate; (b) from about 0.02% to about 2% SLS; (c) from about 0.1% to about 20% by weight of an orally-acceptable polar surfactant, said surfactant selected from the group consisting of a (C6-C30) fatty acid mono diester of ethoxylated sorbitan, a (C6-C30) fatty acid diester of polyethylene glycol, a sodium salt of a (C6-C30) fatty acyl sarcosinate, a (C6-C30) fatty acyl ester of sarcosine acid, a sodium salt of a (C6-C30) fatty acyl taurate, a sodium salt of a (C6-C30) fatty acyl methyltaurate, a (C6-C30) fatty acyl ester of taurine, a (C6-C30) fatty acyl ester of methyltaurine acid, a (C6-C30) fatty acyl betaine, a (C6-C30) fatty quaternary ammonium chloride, dimethicone copolyols, polydimethylsiloxane phosphate esters, polydimethylsiloxane copolyol phosphate esters, polydimethylsiloxane phosphobetaines, polydimethylsiloxane, copolyol phosphobetaines, polydimethylsiloxane taurates, polydimethylsiloxane copolyol taurates, acetylated polydimethylsiloxane copolyols, and polydimethylsiloxane quaternium compounds, polydimethylsiloxane copolyol quaternium compounds; and (d) an orally-acceptable aqueous vehicle comprising from about 50% by weight to about 85% by weight water; wherein the potassium salt is dissolved in the composition and wherein the molar ratio of the surfactant of (c) to the sodium (C8-C24) alkylsulfate is greater than or equal to about 1:1 such that when a.), b.), c.) are dissolved in d.), the resultant composition is free of visible potassium alkyl sulfate precipitates.
9. An oral composition in the form of a rinse for removing or loosening plaque andor stains from dental surfaces comprising (a) from about 0.1% to about 5% of a potassium salt selected from the group consisting of dipotassium pyrophosphate, tetrapotassium pyrophosphate, tripotassium pyrophosphate, monopotassium pyrophosphate, and combinations thereof; (b) from about 0.02% to about 2% SLS; (c) from about 0.1% to about 20% by weight of an orally-acceptable polar surfactant, said surfactant selected from the group consisting of a (C6-C30) fatty acid mono or diester of ethoxylate sorbitan, a (C6-C30) fatty acid diester of polyethylene glycol, a sodium salt of a (C6-C30) fatty acyl sarcosinate, a (C6-C30) fatty acyl ester of sarcosine acid, a sodium salt of a (C6-C30) fatty acyl taurate, a sodium salt of a (C6-C30) fatty acyl methyltaurate, a (C6-C30) fatty acyl ester of taurine, a (C6-C30) fatty acyl ester of methyltaurine acid, a (C6-C30) fatty acyl betaine, a (C6-C30) fatty acyl quaternary ammonium chloride, dimethicone copolyols, polydimethylsiloxane phosphate esters, polydimethylsiloxane copolyol phospohate esters, polydimethylsiloxane phosphobetaines, polydimethylsiloxane copolyol phosphobetaines, polydimethylsiloxane taurates, polydimethylsioxane copolyol taurates, acetylated polydimethylsiloxane copolyols, and polydimethylsiloxane quaternium compounds, polydimethylsiloxane copolyol quaternium compounds; and (d) an orally-acceptable aqueous vehicle comprising from about 50% by weight to about 85% by weight water; wherein the potassium salt is dissolved in the composition and wherein the molar ratio of the surfactant of (c) to the sodium (C8-C24)alkylsulfate is greater than or equal to about 1:1 such that when a.), b.), c.) are dissolved in d.), the resultant composition is free of visible potassium alkyl sulfate precipitates.