1. A fluorescence detection apparatus which irradiates a sample with an excitation light having different wavelengths, and spectrally detects fluorescence from the sample, comprising:
a comparison unit comparing each wavelength of the excitation light with a starting wavelength of a fluorescent spectrum detection bandwidth of the fluorescence detection bandwidth; and
a determination unit determining an excitation light irradiation timing such that irradiation of the excitation wavelength is stopped when the wavelength of the excitation light is longer than the starting wavelength.
2. The apparatus according to claim 1, further comprising
a setting unit setting a width of the detection bandwidth of the fluorescent spectrum, an amount of a detecting step, and a range of a fluorescent spectrum to be detected, wherein
the determination unit controls excitation light irradiation timing based on the detection bandwidth of the fluorescent spectrum and the range of the fluorescent spectrum set by the setting unit.
3. The apparatus according to claim 1, wherein
the determination unit stops irradiation also when the excitation wavelength is in a predetermined offset range on a side of a wavelength shorter than the starting wavelength of the detection bandwidth.
4. The apparatus according to claim 1, wherein
the apparatus is a laser scanning confocal microscope apparatus, comprising:
a laser beam source generating a laser beam as the excitation light; and
an optical scanner for scanning the sample using the laser beam.
5. A fluorescence detection method of irradiating a sample with an excitation light having different wavelengths, and spectrally detects fluorescence from the sample, comprising:
comparing a wavelength of the excitation light with a starting wavelength of a fluorescent spectrum detection bandwidth; and
stopping irradiation when the wavelength of the excitation light is longer than the starting wavelength, and determining irradiation timing of the excitation light.
6. A computer-readable record medium storing a program for irradiating a sample with an excitation light having different wavelengths, and spectrally detecting the fluorescence from the sample by directing a computer to perform a process comprising:
a comparing function of comparing each wavelength of the excitation light with a starting wavelength of a fluorescent spectrum detection bandwidth; and
a determining function of determining irradiation timing of the excitation wavelength by stopping irradiation when the wavelength of the excitation light is longer than the starting wavelength.
7. A fluorescence detection apparatus which irradiates a sample with an excitation light having different wavelengths, and spectrally detects the fluorescence from the sample, comprising:
a spectroscopical system converting the fluorescence to a spectrum;
a measurement unit detecting the fluorescent spectrum formed by the spectroscopical system for each detection bandwidth from a starting wavelength to an ending wavelength;
comparison means for comparing each wavelength of the excitation light with the starting wavelength of the detection bandwidth; and
determination means for determining irradiation timing of the excitation light such that irradiation of the excitation wavelength is stopped when the wavelength is longer than the starting wavelength.
8. The apparatus according to claim 7, wherein the determination means stops irradiation of the wavelength of the excitation light also when the wavelength is in a predetermined offset range on a side of a wavelength shorter than the starting wavelength.
9. The apparatus according to claim 7, wherein
the apparatus is a laser scanning confocal microscope apparatus, comprising:
a laser beam source generating a laser beam as the excitation light; and
an optical scanner for scanning a sample using the laser beam.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for detecting a particle on a substrate, wherein the substrate is used in the fabrication of an integrated device, the method comprising:
contacting the integrated-device substrate with a monomer, wherein a particle that catalyzes the polymerization of the monomer is disposed on the substrate, and
detecting the particle using a particle counter.
2. The method of claim 1, wherein the particle counter detects a property selected from the group consisting of number of particles, sizes of the particles, positions of the particles, and combinations thereof.
3. The method of claim 1, wherein the particle counter is capable of detecting particles on both sides of the substrate without unmounting the substrate.
4. The method of claim 1, wherein the particle counter detects particles optically.
5. The method of claim 4, wherein the particle counter is a laser scanner.
6. The method of claim 4, wherein the particle counter detects a property selected from the group consisting of absorbance, fluorescence, reflectance, refractive index, and polarization.
7. The method of claim 1, wherein a composition of the particle is identified.
8. The method of claim 7, wherein the composition of the particle is identified by the polymerization rate of the monomer.
9. The method of claim 8, wherein the monomer is polymerized by a plurality of particle types.
10. The method of claim 8, further comprising repeating the contacting and detecting steps.
11. The method of claim 1, wherein the substrate is contacted with a plurality of monomers.
12. The method of claim 11, wherein the plurality of monomers contact the substrate simultaneously.
13. The method of claim 11, wherein the plurality of monomers contact the substrate sequentially.
14. The method of claim 1, wherein the particle is a metal.
15. The method of claim 14, wherein the metal is copper.
16. The method of claim 1, wherein the substrate comprises silicon.
17. The method of claim 16, wherein the substrate comprises a single crystal silicon wafer.
18. The method of claim 1, wherein the monomer is in a vapor phase.
19. The method of claim 1, wherein the monomer is an alkene.
20. The method of claim 19, wherein the alkene is selected from the group consisting of styrene, methyl acrylate, ethyl acrylate, methyl methacrylate, and acrylonitrile.
21. The method of claim 1, wherein the monomer is selected from the group consisting of aniline and thiophene.
22. The method of claim 1, further comprising an initiator.
23. The method of claim 22, wherein the initiator is benzyl bromide.
24. The method of claim 1, wherein the substrate is irradiated with electromagnetic radiation.