1. An intermediate layer composition for multilayer resist process, the composition comprising polymer (A) having a repeating unit represented by the following formula (I):
wherein R1 to R7 are the same or different, and each represents ahydrogen atom, an alkyl group, analkoxyl group, anaryl group, an aralkyl group, a cycloalkyl group or an alkenyl group; one of X, Y and Z represents a hydroxyl group, and the another one of X, Y and Z is \u2014O\u2014, and the other one of X, Y and Z is a group represented by following formula (IA) which is linked on the oxygen atom side; and
n represents from 0 to 10;
wherein R11 to R14 are the same or different, and each represents a hydrogen atom, an alkyl group, an alkoxyl group, an aryl group, an aralkyl group, a cycloalkyl group or an alkenyl group; R15 to R17 are the same or different, and each represents a single bond or an alkylene group;
R18 represents a single bond or \u2014O\u2014; and
m represents from 0 to 10.
2. The intermediate layer composition according to claim 1, further comprising: (B) a radical generator.
3. The intermediate layer composition according to claim 1, further comprising: (C) a crosslinking agent.
4. The intermediate layer composition according to claim 1, further comprising: (D) a compound that generates an acid by heating.
5. The intermediate layer composition according to claim 1, further comprising: (E) a radical polymerizable compound.
6. The intermediate layer composition according to claim 1, further comprising: (F) an organic solvent.
7. The intermediate layer composition according to claim 1, further comprising: (G) a surfactant.
8. A multilayer resist pattern-forming process comprising:.
(a) forming a lower resist layer comprising an organic material on a substrate;
(b) laminating on the lower resist layer an intermediate layer and an upper resist layer comprising an organic material crosslinkable or decomposable upon irradiation with radiation; and
(c) forming a prescribed pattern on the upper resist layer, and then etching the intermediate layer, the lower layer and the substrate successively,
wherein the intermediate layer composition according to claim 1 is used in the intermediate layer.
9. The multilayer resist pattern-forming process according to claim 8, wherein after coating the intermediate layer composition on the lower resist, the intermediate layer is insolubilized in an organic solvent by being baked.
10. A laminate comprising: a substrate, a lower resist layer comprising an organic material, an intermediate layer and an upper resist layer comprising an organic material crosslinkable or decomposable upon irradiation with radiation, in this order,
wherein the intermediate layer comprises polymer (A) having a repeating unit represented by the following formula (I):
wherein R1 to R7 are the same or different, and each represents ahydrogen atom, an alkyl group, an alkoxyl group, an aryl group, an aralkyl group, a cycloalkyl group or an alkenyl group; one of X, Y and Z represents a hydroxyl group, and the another one of X, Y and Z is -O-, and the other one of X, Y and Z is a group represented by following formula (IA) which is linked on the oxygen atom side; and
n represents from 0 to 10;
wherein R11 to R14 are the same or different, and each represents ahydrogen atom, analkyl group, an alkoxyl group, an aryl group, an aralkyl group, a cycloalkyl group or an alkenyl group; R15 to R17 are the same or different, and each represents a single bond or an alkylene group;
R18 represents a single bond or \u2014O\u2014; and
m represents from 0 to 10.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A snorkel breathing tube regulator, comprising:
a tubular hollow base having an end formed with an insertion hole and an opposite end formed with a bent portion, wherein the bent portion has an opening that faces downward and forms a venting hole;
a supplementary tube fitted below the venting hole at a lateral side of the base, wherein the supplementary tube has an end connected to the venting hole and provided with a watertight packing and an opposite end having an opening that converges toward a lower side of the base; and
a float movably retained in the supplementary tube.
2. The snorkel breathing tube regulator of claim 1, wherein the end of the base that is formed with the insertion hole is provided with a tenon.
3. The snorkel breathing tube regulator of claim 1, wherein the end of the supplementary tube that is connected to the venting hole is provided with an engaging portion, and the opposite end of the supplementary tube is formed with an inclined surface, such that the float is retained between the engaging portion and the inclined surface.
4. The snorkel breathing tube regulator of claim 1, wherein the base and the supplementary tube are integrally formed.