1. An apparatus for controlling the temperature of a substrate in a plasma processing chamber comprising a plasma reactor having a reaction chamber including a chuck; a source of cooling gas communicating with the chuck; and a computer coupled to the reactor chamber and to the cooling gas source for adjusting the temperature of a substrate supported by the chuck in accordance with a calculated pressure based on a determined constant and the difference between the measured temperature of the substrate and the desired temperature of the substrate.
2. A computer readable storage medium storing program code for causing a processing system to perform the steps of: flowing a cooling gas to a substrate at a flow pressure; determining a temperature of the substrate; determining the difference between the temperature of the substrate and a desired temperature of the substrate; determining a pressure by which the flow pressure of the cooling gas is to be adjusted; and adjusting the flow pressure of the cooling gas to the substrate in accordance with the determined pressure.
3. The computer readable storage medium of claim 2 wherein determining the pressure comprises using the formula P=K(Tw\u2212Tsp), wherein P is the determined pressure, K is a constant, Tw is the temperature of the substrate, and Tsp is the desired temperature.
4. The computer readable storage medium of claim 3 wherein K is from about 0.5 to about 6.0.
5. The computer readable storage medium of claim 3 wherein the cooling gas is a first gas and the flow pressure is a first flow pressure, and wherein the steps are in a process further comprising:
flowing a second gas to the substrate through a substrate support at a second flow pressure.
6. The computer readable storage medium of claim 5 wherein the process further comprises
adjusting the second flow pressure using a predetermined ratio and the adjusted first flow pressure.
7. The computer readable storage medium of claim 5 wherein the first and second gases are respectively directed to inner and outer zones of the substrate support, and wherein the process further comprises:
determining if the adjusted first flow pressure is between a minimum and a maximum inner pressure; and
determining if the adjusted second flow pressure is between a minimum and a maximum outer pressure.
8. The computer readable storage medium of claim 3 wherein the steps are in a process, and wherein the process further comprises:
repeating determining the temperature of the substrate, determining the pressure, and adjusting the flow pressure, after a predetermined sampling time has elapsed.
9. The computer readable storage medium of claim 3 wherein the gas comprises a noble gas.
10. The computer readable storage medium of claim 3 wherein the substrate is supported by an electrostatic chuck.
11. The apparatus of claim 1 wherein the calculated pressure is determined using the formula P=K(Tw\u2212Tsp), wherein P is the calculated pressure, K is a constant, Tw is the temperature of the substrate, and Tsp is the desired temperature.
12. The apparatus of claim 11 wherein K is from about 0.5 to about 6.0.
13. The apparatus of claim 11 wherein the cooling gas is a first gas and the flow pressure is a first flow pressure, and wherein the apparatus is further adapted to
flow a second gas to the substrate through the chuck at a second flow pressure.
14. The apparatus of claim 13 wherein the apparatus is adapted to adjust the first flow pressure, and wherein the apparatus is further adapted to adjust
the second flow pressure using a predetermined ratio and the adjusted first flow pressure.
15. The apparatus of claim 13 wherein the
apparatus is further adapted to determine if the first flow pressure is between a minimum and a maximum inner pressure; and
determine if the second flow pressure is between a minimum and a maximum outer pressure.
16. The apparatus of claim 11 wherein the computer is also for
repeating determining the temperature of the substrate, determining the pressure, and adjusting the flow pressure, after a predetermined sampling time has elapsed.
17. The apparatus of claim 11 wherein the gas comprises a noble gas.
18. The apparatus of claim 11 wherein the chuck is an electrostatic chuck.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for determining discharge readiness condition of a patient, the method comprising:
receiving, by a health monitoring computing device, at least one of one or more physiological data from plurality of sensors placed on the patient and one or more non-physiological data from a mobile device associated to the patient;
assigning, by the health monitoring computing device, a first weighted ratio to each of the physiological data received from the plurality of sensors and the non-physiological data received from the mobile device to generate a weighted physiological data and a weighted non-physiological data;
generating, by the health monitoring computing device, a recovery score using the weighted physiological data and the weighted non-physiological data; and
determining, by the health monitoring computing device, the discharge readiness condition of the patient when the recovery score exceeds a reference recovery score, wherein the reference recovery score is generated using a weighted personal reference score of the patient and a weighted Electronic Medical Record (EMR) reference score.
2. The method as claimed in claim 1, wherein the physiological data is at least one of body temperature data, blood pressure data, activity data, electrocardiography (ECG) data and respiratory data and the non-physiological data is at least one of medicine intake data, food intake data and discomfort level data.
3. The method as claimed in claim 1, wherein the sensors are at least one of a motion sensor, emotion sensor, physiological sensor and activity sensor.
4. The method as claimed in claim 1 further comprising displaying, by the health monitoring computing device, the recovery score on a display unit associated to the computing unit.
5. The method as claimed in claim 1, wherein the weighted EMR reference score is retrieved from an EMR database associated to the computing unit.
6. The method as claimed in claim 1, wherein the weighted EMR reference score is determined, by the health monitoring computing device, by assigning a second weighted ratio to an EMR reference score stored in the EMR database.
7. The method as claimed in claim 1, wherein the weighted personal reference score of the patient is determined, by the health monitoring computing device, by assigning a third weighted ratio to each of the physiological data and the non-physiological data recorded during normal health condition of the patient using one of one or more sensors placed on the patient and one or more previous health reports of the patient.
8. The method as claimed in claim 1 further comprising providing, by the health monitoring computing device, suggestions to the patient based on the recovery score.
9. A health monitoring computing device comprising:
a processor;
a memory, wherein the memory coupled to the processor which are configured to execute programmed instructions stored in the memory comprising:
receiving at least one of one or more physiological data from plurality of sensors placed on the patient and one or more non-physiological data from a mobile device associated to the patient;
assigning a first weighted ratio to each of the physiological data received from the plurality of sensors and the non-physiological data received from the mobile device to generate a weighted physiological data and a weighted non-physiological data;
generating a recovery score using the weighted physiological data and the weighted non-physiological data; and
determining the discharge readiness condition of the patient when the recovery score exceeds a reference recovery score, wherein the reference recovery score is generated using a weighted personal reference score of the patient and a weighted Electronic Medical Record (EMR) reference score.
10. The device of claim 9, wherein the sensors are at least one of a motion sensor, emotion sensor, physiological sensor and activity sensor.
11. The device of claim 9, wherein the instructions further configure the at least one processor to display the recovery score on a display unit associated to the computing unit.
12. The device of claim 9, wherein the instructions further configure the at least one processor to determine the weighted EMR reference score by assigning a second weighted ratio to an EMR reference score.
13. The device of claim 9, wherein the instructions further configure the at least one processor to determine the weighted personal reference score of the patient by assigning a third weighted ratio to each of the physiological data and the non-physiological data recorded during normal health condition of the patient using one of one or more sensors placed on the patient and one or more previous health reports of the patient.
14. The device of claim 9, further comprising providing suggestions to the patient based on the recovery score.
15. The device of claim 9, wherein the physiological data is at least one of body temperature data, blood pressure data, activity data, electrocardiography (ECG) data and respiratory data and the one or more non-physiological data is at least one of medicine intake data, food intake data and discomfort level data.
16. A non-transitory computer readable medium having stored thereon instructions for determining discharge readiness condition of a patient comprising machine executable code which when executed by at least one processor, causes the processor to perform steps comprising:
receiving at least one of one or more physiological data from plurality of sensors placed on the patient and one or more non-physiological data from a mobile device associated to the patient;
assigning a first weighted ratio to each of the physiological data received from the plurality of sensors and the one or more non-physiological data received from the mobile device to generate a weighted physiological data and a weighted non-physiological data;
generating a recovery score using the weighted physiological data and the weighted non-physiological data; and
determining the discharge readiness condition of the patient when the recovery score exceeds a reference recovery score, wherein the reference recovery score is generated using a weighted personal reference score of the patient and a weighted Electronic Medical Record (EMR) reference score.
17. The medium of claim 16, wherein the instructions further cause the at least one processor to determine the weighted EMR reference score by assigning a second weighted ratio to an EMR reference score.
18. The medium of claim 16, wherein the instructions further cause the at least one processor to determine the weighted personal reference score of the patient by assigning a third weighted ratio to each of the physiological data and the non-physiological data recorded during normal health condition of the patient using one of one or more sensors placed on the patient and one or more previous health reports of the patient.
19. The medium of claim 16, wherein the instructions further cause the at least one processor to provide suggestions to the patient based on the recovery score.
20. The medium of claim 16, wherein the instructions further cause the at least one processor to retrieve the weighted EMR reference score from an EMR database associated to the computing unit.