1. An organic electroluminescence device, comprising:
an anode electrode comprising a first conductive film which is formed on a substrate and has light reflectivity, a second conductive film which has light transmittance and is formed on the first conductive film so as to be wider than the first conductive film and so as to cover the first conductive film, and a third conductive film which is partially formed between the first conductive film and the second conductive film and is electrically connected to each of the first conductive film and the second conductive film;
an organic electroluminescence layer which is formed on the anode electrode; and
a cathode electrode which is formed on the organic electroluminescence layer and has light transmittance,
wherein the third conductive film is in direct contact with each of the first conductive film and the second conductive film.
2. The organic electroluminescence device of claim 1, wherein the third conductive film is formed on a peripheral edge portion of the first conductive film.
3. The organic electroluminescence device of claim 1, wherein the third conductive film comprises Mo, W, Ta, Ti, Cr, or an alloy comprising at least any one of these as a main component.
4. The organic electroluminescence device of claim 1, wherein the first conductive film is partially formed in a luminescence region where the anode electrode and the cathode electrode overlap each other.
5. The organic electroluminescence device of claim 1, wherein irregularities are formed on a surface of the substrate.
6. The organic electroluminescence device of claim 1, wherein the first conductive film comprises Al, Ag, Nd, Si, Ti, W, Cu, Nb, Ta, C, or an alloy comprising at least any one of these as a main component.
7. The organic electroluminescence device of claim 1, wherein the second conductive film comprises ITO, IZO, or ZnO.
8. A display apparatus, comprising the organic electroluminescence device of claim 1 in the pixel region.
9. The display apparatus of claim 8, further comprising a switching device which is formed on the substrate and controls a driving voltage which is applied to the organic electroluminescence device.
10. A manufacturing method for an organic electroluminescence device, comprising steps of:
forming, on a substrate, an anode electrode which comprises a first conductive film having light reflectivity, and a second conductive film which has light transmittance and is formed on the first conductive film so as to be wider than the first conductive film and so as to cover the first conductive film, and a third conductive film which is electrically connected to each of the first conductive film and the second conductive film and is partially formed on the first conductive film before the second conductive film is formed;
forming an organic electroluminescence layer on the anode electrode; and
forming a cathode electrode having light transmittance on the organic electroluminescence layer,
wherein the third conductive film is in direct contact with each of the first conductive film and the second conductive film.
11. The manufacturing method for an organic electroluminescence device of claim 10, wherein the step of forming the anode electrode comprises:
a step of forming the third conductive film on the first conductive film;
a step of forming a resist film on the third conductive film, and partially varying the film thickness of the resist film;
a step of etching the third conductive film and the first conductive film, using the resist film of which the film thickness has been varied, as a mask;
a step of removing a portion of the resist film that is thinner in film thickness to form an aperture part in the resist film; and
a step of etching the third conductive film which is exposed at the bottom in the aperture part, using the resist film in which the aperture part has been formed, as a mask, to partially form the third conductive film on the first conductive film.
12. The manufacturing method for an organic electroluminescence device of claim 11, wherein, at the step of partially varying the film thickness of the resist film, an exposure amount of the resist film is partially changed to vary the film thickness of the resist film.
13. The manufacturing method for an organic electroluminescence device of claim 10, wherein, at the step of partially forming the third conductive film, the third conductive film is formed on a peripheral edge portion of the first conductive film.
14. A manufacturing method for a display apparatus, comprising steps of:
forming a switching device on a substrate;
forming a first insulating layer on the substrate on which the switching device is formed;
forming a first conductive film having light reflectivity on the first insulating layer;
forming, on the first insulating layer on which the first conductive film is formed, a second insulating layer which has a first aperture part above an electrode of the switching device and is made from a photosensitive resin and has light transmittance;
etching the first insulating layer using the second insulating layer as a mask to form a second aperture part which reaches the electrode of the switching device;
forming, on the second insulating layer, an anode electrode which is electrically connected to the electrode of the switching device through the first aperture part and the second aperture part, and comprises a second conductive film having light transmittance;
forming an organic electroluminescence layer on the anode electrode; and
forming a cathode electrode having light transmittance on the organic electroluminescence layer,
wherein, at the step of forming the anode electrode, a third conductive film which is electrically connected to each of the first conductive film and the second conductive film is partially formed on the first conductive film before the second conductive film is fondled, and the third conductive film is in direct contact with each of the first conductive film and the second conductive film.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A sensor comprising a plurality of antennas or a plurality of antenna groups which are arranged apart from each other by a predetermined distance in at least one direction so as to have a phase difference in at least one direction.
2. The sensor as claimed in claim 1, wherein the plurality of antennas or the plurality of antenna groups have at least one of a vertical phase difference and a horizontal phase difference, the vertical phase difference being generated when the antennas or the antenna groups are arranged apart from each other by a predetermined vertical distance in the vertical direction, the horizontal phase difference being generated when the antennas or the antenna groups are arranged apart from each other by a predetermined horizontal distance in the horizontal direction.
3. The sensor as claimed in claim 2, wherein the vertical phase difference is calculated based on the horizontal phase difference and a phase difference between antennal channels in the plurality of antennas or the plurality of antenna groups.
4. The sensor as claimed in claim 2, wherein the sensor adjusts a beam direction by assigning a weight to each antenna channel with respect to the plurality of antennas or the plurality of antenna groups, which have at least one of the vertical phase difference and the horizontal phase difference, or selects one of the plurality of antennas or the plurality of antenna groups, which have at least one of the vertical phase difference and the horizontal phase difference, thereby adjusting a beam direction of a transmission or reception signal with respect to at least one of vertical and horizontal directions.
5. The sensor as claimed in claim 4, wherein the sensor senses a peripheral target in real time through a beamforming with respect to at least one direction of the vertical and horizontal directions.
6. The sensor as claimed in claim 4, wherein the sensor adjusts a beam direction of the transmission signal or a beam direction of the reception signal with respect to at least one direction of the vertical and horizontal directions based on at least one of the vertical phase difference and the horizontal phase difference, thereby compensating for mis-alignment in at least one of the vertical and horizontal directions, which is caused by a vehicle tolerance generation in a vehicle production line.
7. The sensor as claimed in claim 4, wherein, when a vehicle equipped with the sensor recognizes a target on a slope having a wave in a vertical direction, the sensor assigns a weight to each antenna channel of the plurality of antennas or the plurality of antenna groups having the vertical phase difference, or selects at least one of the plurality of antennas or the plurality of antenna groups having the vertical phase difference, based on information on the wave of the slope, and adjusts a beam direction of the transmission or reception signal with respect to the vertical direction, thereby adjusting mis-alignment with respect to the vertical direction; and
when a vehicle equipped with the sensor recognizes a target on a curve having a curvature in a horizontal direction, the sensor assigns a weight to each antenna channel of the plurality of antennas or the plurality of antenna groups having the horizontal phase difference, or selects at least one of the plurality of antennas or the plurality of antenna groups having the horizontal phase difference, based on information on the curve of the curvature, and adjusts a beam direction of the transmission or reception signal with respect to the horizontal direction, thereby adjusting mis-alignment with respect to the horizontal direction.
8. The sensor as claimed in claim 4, wherein the sensor assigns a weight to each antenna channel of the plurality of antennas or the plurality of antenna groups, or can select at least one of the plurality of antennas or the plurality of antenna groups based on a height of a peripheral target, and adjusts a beam direction of the transmission or reception signal with respect to the vertical direction, thereby identifying the target.
9. The sensor as claimed in claim 2, wherein, when the plurality of antennas or the plurality of antenna groups having at least one of the vertical and horizontal phase differences is included in a transmission antenna unit, the sensor assigns a weight to each antenna channel of the plurality of antennas or the plurality of antenna groups, or selects one antenna or one antenna group from among the plurality of antennas or the plurality of antenna groups, and adjusts a beam direction of a transmission signal with respect to at least one of the vertical and horizontal directions.
10. The sensor as claimed in claim 9, wherein the sensor further comprises a reception antenna for receiving a reception signal obtained when the transmission signal is reflected from a peripheral target,
wherein the plurality of antennas or the plurality of antenna groups have different transmission antenna beam regions to transmit the transmission signal at different angles with respect to at least one of the vertical and horizontal directions, and the reception antenna has a single reception antenna beam region including all the different transmission antenna beam regions.
11. The sensor as claimed in claim 2, wherein, when the plurality of antennas or the plurality of antenna groups having at least one of the vertical and horizontal phase differences is included in a reception antenna unit, the sensor assigns a weight to each antenna channel of the plurality of antennas or the plurality of antenna groups, or selects one antenna or one antenna group from among the plurality of antennas or the plurality of antenna groups, and adjusts a beam direction of a reception signal with respect to at least one of the vertical and horizontal directions.
12. The sensor as claimed in claim 11, wherein the sensor further comprises a transmission antenna for transmitting a transmission signal, and one antenna or one antenna group selected from the plurality of antennas or the plurality of antenna groups receives the reception signal obtained when the transmission signal is reflected from a peripheral target,
wherein the plurality of antennas or the plurality of antenna groups have different reception antenna beam regions to receive the reception signal at different angles with respect to at least one of the vertical and horizontal directions, and the transmission antenna has a single transmission antenna beam region including all the different reception antenna beam regions.
13. An alignment adjusting method of a sensor, the alignment adjusting method comprising:
collecting data between antenna channels from a plurality of antennas or a plurality of antenna groups, which are arranged apart from each other by a predetermined distance in at least one direction so as to have a phase difference in at least one direction;
calculating a phase difference in the at least one direction based on the data between the antenna channels;
determining if an antenna beam is directed in a desired direction; and
adjusting directivity of the antenna beam with respect to the at least one direction when the antenna beam is currently directed in an undesired direction, by either assigning a weight to each antenna channel of the plurality of antennas or the plurality of antenna groups, or by selecting one antenna or one antenna group from among the plurality of antennas or the plurality of antenna groups.