1. An extreme ultraviolet light generation apparatus comprising:
a target supplier configured to output a target into a chamber as a droplet, the target generating extreme ultraviolet light when being irradiated with a laser beam in the chamber;
a droplet measurement unit configured to measure a predetermined measured number or passing number of parameters for a state of the droplet outputted into the chamber;
a pressure regulator configured to regulate a pressure in the target supplier in which the target is accommodated; and
a target generation controller configured to control the pressure regulator, based on an average value of the predetermined measured number or passing number of parameters measured by the droplet measurement unit.
2. The extreme ultraviolet light generation apparatus according to claim 1, wherein the droplet measurement unit includes:
an imaging part configured to image droplets sequentially outputted into the chamber; and
a parameter calculating part configured to calculate the parameter, based on image data of the droplets captured by the imaging part.
3. The extreme ultraviolet light generation apparatus according to claim 2, wherein the target generation controller forms the droplets such that the droplets are outputted into the chamber at a predetermined frequency.
4. The extreme ultraviolet light generation apparatus according to claim 3, wherein the target generation controller determines a pressure setting value to be set in the pressure regulator, based on a difference between a measurement value of the parameters measured by the droplet measurement controller and a targeted value of the parameters, and controls the pressure regulator.
5. The extreme ultraviolet light generation apparatus according to claim 4, wherein:
the image data contains images of the droplets sequentially outputted into the chamber; and
the parameter calculating part calculates at least one of a diameter and a position of the droplet as the parameters, by using an image of the droplet.
6. The extreme ultraviolet light generation apparatus according to claim 4, wherein:
the image data contains images of two adjacent droplets sequentially outputted into the chamber; and
the parameter calculating part calculates at least one of a distance between the two adjacent droplets, a traveling speed of the droplets, and a flow rate of the droplets, as the parameters, by using the images of the two adjacent droplets.
7. An extreme ultraviolet light generation apparatus configured to generate extreme ultraviolet light by introducing a laser beam and irradiating a target with the laser beam, comprising:
a chamber into which the laser beam is introduced;
a target supplier configured to output the target into the chamber as a droplet by applying a pressure to the target;
a droplet measurement unit configured to measure a predetermined measured number or passing number of parameters for a state of the droplet;
a pressure regulator connected to the target supplier and configured to regulate the pressure; and
a target generation controller connected to the droplet measurement unit and the pressure regulator, and configured to control the pressure based on an average value of the predetermined measured number or passing number of parameters.
8. An extreme ultraviolet light generation apparatus comprising:
a target supplier configured to output a target into a chamber as a droplet, the target generating extreme ultraviolet light when being irradiated with a laser beam in the chamber; and
a droplet measurement unit configured to measure a parameter for a state of the droplet outputted into the chamber, wherein:
a traveling speed of the droplet is measured as the parameter; and
a timing at which the droplet is irradiated with the laser beam is controlled based on the measured traveling speed.
9. The extreme ultraviolet light generation apparatus according to claim 8, further comprising:
a pressure regulator configured to regulate a pressure in the target supplier in which the target is accommodated; and
a target generation controller configured to control the pressure regulator, based on the parameter measured by the droplet measurement unit.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A product management display system comprising:
at least one shelf for displaying products, the shelf defining a shelf surface,
a pusher mechanism having a pusher surface and a pusher floor extending forwardly from the pusher surface,
a coiled spring defining a first end that is mounted directly to the shelf, and a coiled second end configured to be operatively connected behind the pusher surface, and
at least one divider for dividing displayed products into rows, the at least one divider extending upwardly from the shelf surface,
wherein the at least one divider defines a divider base and wherein the divider base is positioned under the pusher floor, and
wherein the pusher floor is configured to slide across at least a portion of the divider base.
2. The product management display system of claim 1, wherein the coiled second end is coiled about an axis and wherein the axis is perpendicular to the pusher surface.
3. The product management display system of claim 1, wherein the pusher surface is curve shaped.
4. The product management display system of claim 1, wherein the first spring end is secured to the shelf at two anchoring points.
5. The product management display system of claim 4, wherein one of the anchoring points defines a pin or rivet.
6. The product management display system of claim 1, wherein the first spring end is secured to the shelf at more than two anchoring points.
7. A product management display system comprising:
at least one shelf for displaying products, the shelf defining a shelf surface,
a pusher mechanism having a pusher surface and a pusher floor extending forwardly from the pusher surface, wherein the pusher floor is configured to permit product to be positioned thereon,
a coiled spring defining a first end that is mounted directly to the shelf at one or more anchoring points, and a coiled second end configured to be operatively connected behind the pusher surface, and
a plurality of dividers for dividing displayed products into rows, each of the plurality of dividers extending upwardly from the shelf surface,
wherein each of the plurality of dividers defines a divider base and wherein one or more of the divider bases is positioned under the pusher floor, and
wherein the pusher floor is configured to slide across at least a portion of one or more of the divider bases.
8. The product management display system of claim 7, wherein the coiled second end is coiled about an axis and wherein the axis is perpendicular to the pusher surface.
9. The product management display system of claim 7, wherein the pusher surface defines a planar shape.
10. The product management display system of claim 7, wherein the first spring end is secured to the shelf at two or more anchoring points.
11. The product management display system of claim 10, wherein one of the anchoring points defines a pin or rivet.
12. The product management display system of claim 11, wherein the rivet or pin is mounted to a hole located in the at least one shelf.
13. The product management display system of claim 10, wherein the first spring end defines a spring tip, and wherein one of the anchoring points is the spring tip.
14. The product management display system of claim 7, wherein the first spring end defines a spring tip, and wherein one of the anchoring points is the spring tip.
15. The product management display system of claim 14, wherein the spring tip is mounted to a hole located in the at least one shelf.