1. A method of communicating data between a wireless unit and at least one base station comprising the steps of:
transmitting by said wireless unit according to an autonomous mode where data is transmitted autonomously after said wireless unit switches from a scheduling mode after a request for transmission of data is made by said wireless unit; and
transmitting a sequence of bits on a control channel to said base station to indicate operation in said autonomous mode.
2. The method of claim 1 comprising:
receiving an indication of a waiting period by said wireless unit while in said scheduling mode prior to a schedule grant that grants a request by said wireless unit for transmission of said data from said wireless unit.
3. The method of claim 1 comprising:
receiving rate control information from said base station to control transmission of data from said wireless unit in said autonomous mode.
4. A method of communicating data between a wireless unit and at least one base station comprising the steps of:
receiving a sequence of bits on a control channel from said wireless unit to indicate operation in an autonomous mode or a scheduling mode; and
receiving data in an autonomous mode where data is received from said wireless unit autonomously after said wireless unit has switched from a scheduling mode and after a request is made by said wireless unit for transmission of data.
5. The method of claim 4 comprising:
transmitting an indication of a waiting period prior to a schedule grant that grants a request by said wireless unit while in said scheduling mode for transmission of said data from said wireless unit.
6. The method of claim 4 comprising:
transmitting rate control information from said base station to control transmission of data from said wireless unit in said autonomous mode.
7. A method of communicating data between a wireless unit and a plurality of base stations comprising the steps of:
receiving a first schedule grant from a first base station of said plurality of base stations and a second schedule grant, which is independent of said first schedule grant, from a second base station of said plurality of base stations for transmission of said data from said wireless unit; and
transmitting said data by said wireless unit according to said first schedule grant and receiving an acknowledgment from at least said second base station that said data was received.
8. The method of claim 7 comprising:
transmitting encoder packet format information for said transmission.
9. The method of claim 7 comprising:
receiving said first and second scheduling grants over a time division multiplexed common control channel.
10. A method of communicating data between a wireless unit and a plurality of base stations comprising the steps of:
transmitting a first schedule grant by a first base station of said plurality of base stations for transmission of data from said wireless unit which receives a second scheduling grant, which is independent from said first schedule grant, from a second base station;
receiving said data according to said second schedule grant; and
transmitting an acknowledgment by at least said first base station that said data was received.
11. The method of claim 10 comprising:
receiving encoder packet format information for said transmission.
12. The method of claim 10 comprising:
transmitting said first scheduling grant over a time division multiplexed said common control channel.
13. A method of transmitting data between a wireless unit and a plurality of base stations, said method comprising the steps of:
transmitting data by said wireless unit using an autonomous mode established for
transmitting data autonomously to at least a first base station of said plurality of base stations; and
transmitting data by said wireless unit using a scheduling mode after a request is granted for transmission of data, which is independent from said the autonomous mode, established for transmitting data between said wireless unit and at least a second base station of said plurality of base stations.
14. The method of claim 13 comprising: autonomously transmitting data at lower data rates; and scheduling transmissions of data at higher data rates.
15. A method of receiving data between a wireless unit and a plurality of base stations, said method comprising the steps of:
receiving data transmitted by a wireless unit using an autonomous mode established for transmitting data autonomously to at least a first base station of said plurality of base stations; and
receiving data transmitted by said wireless unit using a scheduling mode where data is transmitted after a request is made for transmission of data, which is independent from said the autonomous mode, established for transmitting data between said wireless unit and at least a second base station of said plurality of base stations.
16. The method of claim 15 comprising:
autonomously receiving data at lower data rates; and
scheduling transmissions of at higher data rates.
17. A wireless unit for use in communicating data with at least one base station, said wireless unit comprising:
transmission circuitry configured to transmit according to an autonomous mode where data is transmitted autonomously after said wireless unit switches from a scheduling mode after a request for transmission of data is made by said wireless unit, said transmission circuitry further configured to transmit a sequence of bits on a control channel to said base station to indicate operation in said autonomous mode.
18. A data communication system for use in communicating data between a wireless unit and at least one base station, said system comprising:
receiver circuitry configured to receive a sequence of bits on a control channel from said wireless unit to indicate operation in an autonomous mode or a scheduling mode, said receiver circuitry further configured to receive data in an autonomous mode where data is received from said wireless unit autonomously after said wireless unit has switched from a scheduling mode after a request is made by said wireless unit for transmission of data.
19. A wireless unit for use in communicating data with a plurality of base stations, said wireless unit comprising:
transceiver circuitry configured to receive a first schedule grant from a first base station of said plurality of base stations and a second schedule grant, which is independent of said first schedule grant, from a second base station of said plurality of base stations for transmission of said data from said wireless unit, to transmit said data by said wireless unit according to said first schedule grant, and to receive an acknowledgment from at least said second base station that said data was received.
20. A data communication system for use in communicating data between a wireless unit and a plurality of base stations, said system comprising:
transceiver circuitry configured to transmit a first schedule grant by a first base station of said plurality of base stations for transmission of data from said wireless unit which receives a second scheduling grant, which is independent from said first schedule grant, from a second base station, to receive said data according to said second schedule grant, and to transmit an acknowledgment by at least said first base station that said data was received.
21. A wireless unit for use in communicating data with a plurality of base stations, said wireless unit comprising:
transmitter circuitry configured to transmit data by said wireless unit using an autonomous mode established for transmitting data autonomously to at least a first base station of said plurality of base stations, and to transmit data by said wireless unit using a scheduling mode after a request us granted for transmission of data, which is independent from said the autonomous mode, established for transmitting data between said wireless unit and at least a second base station of said plurality of base stations.
22. A data communication system for use in communicating data between a wireless unit and a plurality of base stations, said system comprising:
receiver circuitry configured to receive data transmitted by a wireless unit using an autonomous mode established for transmitting data autonomously to at least a first base station of said plurality of base stations, and to receive data transmitted by said wireless unit using a scheduling mode after a request us granted for transmission of data, which is independent from said the autonomous mode, established for transmitting data between said wireless unit and at least a second base station of said plurality of base stations.
23. A method of transmitting data between a wireless unit and a plurality of base stations, said method comprising the steps of:
transmitting data by said wireless unit using a first scheduling mode established for transmitting data to at least a first base station of said plurality of base stations, where data is transmitted after a request is granted for transmission of data; and
transmitting data by said wireless unit using a second scheduling mode, which is independent from said first schedule mode established for transmitting data between said wireless unit and at least a second base station of said plurality of base stations, where data is transmitted after a request is granted for transmission of data.
24. A method of receiving data between a wireless unit and a plurality of base stations, said method comprising the steps of:
receiving data transmitted by a wireless unit using a first schedule mode established for transmitting data after a request is made by the wireless unit to at least a first base station of said plurality of base stations; and
receiving data transmitted by said wireless unit using a second schedule mode after a request is made by the wireless unit, which is independent from said first schedule mode, established for transmitting data between said wireless unit and at least a second base station of said plurality of base stations.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of fabricating a memory device, comprising:
forming a plurality of first contacts connected to a plurality of peripheral transistors on a substrate;
forming a plurality of data storages two-dimensionally arranged on a cell region of the substrate;
forming an interlayered dielectric covering uppermost surfaces of the plurality of first contacts and uppermost surfaces of the plurality of data storages;
patterning the interlayered dielectric to form a plurality of first trenches exposing the uppermost surfaces of the plurality of data storages;
patterning the interlayered dielectric to form a plurality second trenches exposing the uppermost surfaces of the plurality of first contacts;
forming a plurality of first bit lines connected to the plurality of data storages in the plurality of first trenches; and
forming a plurality of second bit lines connected to the plurality of first contacts in the plurality of second trenches,
wherein the plurality of first trenches and the plurality of second trenches are formed using different etching processes.
2. The method of claim 1, wherein the plurality of second trenches each have a lowermost surface lower than a lowermost surface of each of the plurality of data storages.
3. The method of claim 1, wherein the plurality of first and second bit lines are formed at a process temperature lower than a process temperature used to form the plurality of first contacts.
4. The method of claim 1, wherein forming the plurality of first and second bit lines includes,
forming a conductive layer filling the plurality of first and second trenches; and
performing a planarization process to expose the interlayered dielectric.
5. A method of fabricating a memory device, comprising:
forming a first contact electrically connected to a peripheral transistor in a peripheral circuit region of a substrate;
forming a data storage in a cell region of the substrate;
forming an interlayered dielectric layer covering uppermost surfaces of the first contact and uppermost surfaces of the data storage;
forming a first trench exposing the uppermost surfaces of the data storage by patterning the interlayered dielectric layer only over the cell region using a first etching process;
forming a second trench exposing the uppermost surfaces of the first contact by patterning the interlayered dielectric layer only over the peripheral circuit region using a second etching process;
forming a first bit line connected to the data storage in the first trench; and
forming a second bit line contacting the first contact in the second trench.
6. The method of claim 5, wherein the data storage includes a magnetic tunnel junction.
7. The method of claim 6, wherein a lowermost surface of the second bit line is lower than a lowermost surface of the magnetic tunnel junction.
8. The method of claim 6, further comprising:
providing a cell transistor in the cell region electrically connected to the data storage via a second contact, prior to forming the data storage,
wherein the first contact and the second contact are formed of different materials.
9. The method of claim 8, wherein the second contact is formed of a material containing tungsten.
10. The method of claim 1, wherein the plurality of peripheral transistors each include a sourcedrain region, and
wherein the plurality of first contacts are each connected to the sourcedrain region of one of the plurality of peripheral transistors.
11. The method of claim 5, wherein the peripheral transistor includes a sourcedrain region, and
wherein the first contact is connected to the sourcedrain region of the peripheral transistor.
12. The method of claim 2, wherein the plurality of second bit lines each have an uppermost surface that is higher than the uppermost surface of each of the plurality of data storages.
13. The method of claim 7, wherein an uppermost surface of the second bit line is higher than the uppermost surface of the data storage.