1. A nonvolatile memory device comprising:
a memory array having a plurality of memory cells arranged in rows and columns and each executing data storage;
a sense amplifier amplifying read data read from the memory cell in said memory array in a data read operation;
a write driver providing write data to be written into the memory cell in said memory array in a data write operation;
a data line electrically coupled to said sense amplifier and said write driver, and electrically coupled to said memory array for transmitting said read data and said write data in said data read operation and said data write operation, respectively; and
an isolation circuit electrically isolating said sense amplifier from said data line in said data write operation, and wherein
said write driver has a first field-effect transistor having a gate oxide film,
said sense amplifier has a second field-effect transistor having a gate oxide film, and
the gate oxide film of said first field-effect transistor is thicker than the gate oxide film of said second field-effect transistor.
2. The nonvolatile memory device according to claim 1, wherein
said sense amplifier includes:
a constant current producing portion supplying a constant current to an output node,
a first transistor arranged between said output node and said data line, and
a voltage adjusting portion adjusting a gate voltage of said first transistor according to a voltage level of said data line; and
said voltage adjusting portion includes:
a second transistor arranged between a first voltage and a gate of said first transistor, and being turned on in accordance with the voltage level of said data line, and
a third transistor arranged between the gate of said first transistor and a second voltage, and being turned on complementarily with said second transistor in accordance with the voltage level of said data line.
3. The nonvolatile memory device according to claim 1, further comprising:
a reset circuit electrically coupling a fixed voltage to said data line before data reading.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A program for causing a computer to implement a substrate processing method, the program comprising:
a substrate removal module for carrying out removal of substrates from a sealed container that houses substrates and is mounted on a mounting stage;
a first substrate transferring module for transferring substrates into a substrate processing apparatus via a sealed station unit having a cleaned atmosphere therein;
a substrate processing module for subjecting substrates that have been transferred into the substrate processing apparatus to plasma processing in a cleaned atmosphere;
a first sealed container storage module for storing a sealed container housing substrates that have not been subjected to the plasma processing;
a second substrate transferring module for transferring substrates out of the substrate processing apparatus via the sealed station unit;
a substrate housing module for carrying out housing of the substrates that have been transferred out of the substrate processing apparatus into the sealed container;
a second sealed container storage module for removing from the mounting stage and storing a sealed container housing substrates that have been subjected to the plasma processing; and
a sealed container moving module for moving the stored sealed container housing the substrates that have not been subjected to the plasma processing onto the mounting stage.
2. A computer-readable storage medium storing a program for causing a computer to implement a substrate processing method, the program comprising:
a substrate removal module for carrying out removal of substrates from a sealed container that houses substrates and is mounted on a mounting stage;
a first substrate transferring module for transferring substrates into a substrate processing apparatus via a sealed station unit having a cleaned atmosphere therein;
a substrate processing module for subjecting substrates that have been transferred into the substrate processing apparatus to plasma processing in a cleaned atmosphere;
a first sealed container storage module for storing a sealed container housing substrates that have not been subjected to the plasma processing;
a second substrate transferring module for transferring substrates out of the substrate processing apparatus via the sealed station unit;
a substrate housing module for carrying out housing of the substrates that have been transferred out of the substrate processing apparatus into the sealed container;
a second sealed container storage module for removing from the mounting stage and storing a sealed container housing substrates that have been subjected to the plasma processing; and
a sealed container moving module for moving the stored sealed container housing the substrates that have not been subjected to the plasma processing onto the mounting stage.