1. A sensor comprising:
a sensor main body in which a cavity is formed by joining outer peripheral portions of a first substrate and second substrates made of an insulating material;
a first electrode and second electrode which are formed on inner surfaces of the first substrate and the second substrate which face each other through the cavity;
a first electrode extraction hole formed through the first substrate in correspondence with said second electrode; and
a first interconnection member which guides said second electrode outside the first substrate through the cavity and said first electrode extraction hole,
wherein said first interconnection member is formed by thermal spraying of metal powder into the cavity from outside said sensor main body through said first electrode extraction hole.
2. A sensor according to claim 1, wherein said first interconnection member comprises a deposition layer which is deposited around said first electrode extraction hole on an outer surface of the first substrate, a deposition layer which is deposited on an inner circumferential surface of said first electrode extraction hole and electrically conductive with the deposition layer, and a deposition layer which is deposited on a pad portion of said second electrode, crosses the cavity, and is electrically conductive with the deposition layer.
3. A sensor according to claim 1, wherein
the second substrate includes an elastically deformable diaphragm portion on a central portion thereof,
said second electrode comprises a movable electrode formed on an inner surface of the diaphragm portion, and
said first electrode comprises a stationary electrode facing said movable electrode.
4. A sensor according to claim 3, wherein
the first substrate further comprises a second electrode extraction hole communicating with the cavity and a second interconnection member which guides said first electrode outside the first substrate trough the second electrode extraction hole, and
the second interconnection member being formed by thermal spraying of metal powder from outside said sensor main body into the cavity through the second electrode extraction hole.
5. A sensor according to claim 4, further comprising a stationary electrode extraction pad portion which is formed on the inner surface of the second substrate in correspondence with the second electrode extraction hole, said pad portion and said first electrode being bridged by the second interconnection member.
6. A sensor according to claim 1, further comprising a first adhesion strengthening film which is formed on an inner circumference surface of said first electrode extraction hole and around said first electrode extraction hole on an outer surface of the first substrate,
wherein said first interconnection member is formed on said first adhesion strengthening film.
7. A sensor according to claim 4, further comprising a second adhesion strengthening film which is formed on an inner circumference surface of said second electrode extraction hole and around the second electrode extraction hole on an outer surface of the first substrate,
wherein the second interconnection member is formed on said second adhesion strengthening film.
8. An electrode extraction structure comprising:
a sensor main body in which a cavity is formed by joining outer peripheral portions of a first substrate and second substrates made of an insulating material;
an electrode extraction hole which is formed in the first substrate and communicates with the cavity;
an electrode which is formed on an inner surface of the second substrate in correspondence with said electrode extraction hole; and
an interconnection member which guides said electrode outside the first substrate through the cavity and said electrode extraction hole,
wherein said interconnection member is formed by thermal spraying of metal powder from outside said sensor main body to said electrode through said electrode extraction hole.
9. An electrode extraction method comprising the steps of:
forming a sensor main body having a cavity inside by joining an outer peripheral edge portion of a first substrate including a first electrode extraction hole, a second electrode extraction hole, and a first electrode to an outer peripheral edge portion of a second substrate including a second electrode such that the first electrode faces the second electrode; and
forming a first interconnection member by thermal spraying of metal powder from the first electrode extraction hole to a pad portion of the second electrode in the cavity, and guiding the second electrode outside the first substrate.
10. A method according to claim 9, wherein the step of forming the first interconnection member and guiding the second electrode outside the first substrate comprises the steps of: forming a deposition layer deposited around the first electrode extraction hole on an outer surface of the first substrate; forming a deposition layer deposited on an inner circumferential surface of the first electrode extraction hole; and forming a deposition layer which is deposited on the pad portion of the second electrode, crosses the cavity, and is electrically conductive with the deposition layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A variable valve apparatus of an internal combustion engine comprising:
a camshaft provided rotatably in an internal combustion engine;
a cam formed in the camshaft;
a rocking cam provided movably in the combustion engine and driven by the cam;
a intake valve or an exhaust valve driven by the rocking cam;
a control shaft which is rotatably provided side by side with the camshaft in the combustion engine, and has an oil passage inside to flow oil;
a control arm whose one end is held by the control shaft, and the other end is projected from the control shaft;
an actuator which rotates the control shaft, and displaces the control arm;
a transmission arm which is rotatably connected to the other end of the control arm, and transmits the displacement of the control arm to the rocking cam; and
a lubricant passage which is provided inside the control arm, and supplies oil in the oil passage of the control shaft to a part connecting the control arm and transmission arm.
2. The variable valve apparatus of an internal combustion engine according to claim 1, further comprising an adjustment mechanism, which adjusts a distance from the part connecting the control arm and transmission arm to the axial center of the control shaft.
3. The variable valve apparatus of an internal combustion engine according to claim 2, wherein a depression is formed in the control shaft to house a part of a connected part connecting the transmission arm and control arm.
4. The variable valve apparatus of an internal combustion engine according to claim 2,
wherein one end of the control arm is inserted into the control shaft, and
the adjustment mechanism has an adjusting screw member which is inserted movably forwardrearward in the control shaft on the side opposite to the control arm, and contacts one end of the control arm; and the part contacting one end of the control arm and adjusting screw member is positioned within the oil passage of the control shaft.
5. The variable valve apparatus of an internal combustion engine according to claim 4, wherein a depression is formed in the control shaft to house a part of a connected part connecting the transmission arm and control arm.
6. The variable valve apparatus of an internal combustion engine according to claim 4, wherein a notch to connect the oil passage of the control shaft and the lubricant passage of the control arm is formed on at least one of the end of the control arm and the end of the adjusting screw member contacting that end.
7. The variable valve apparatus of an internal combustion engine according to claim 6, wherein a depression is formed in the control shaft to house a part of a connected part connecting the transmission arm and control arm.
8. The variable valve apparatus of an internal combustion engine according to claim 1, wherein a depression is formed in the control shaft to house a part of a connected part connecting the transmission arm and control arm.