1. A method for making a conditioner disk used in a chemical mechanical polishing (CMP) process, comprising:
applying a first layer of at least one binder over a substrate;
disposing a plurality of diamond particles on the first layer of the at least one first binder at a plurality of locations; and
fixing the plurality of diamond particles to the substrate by heating the substrate to a raised temperature and then cooling the substrate,
wherein the plurality of diamond particles disposed over the substrate are configured to provide a working diamond ratio higher than 50% when the conditioner disk is used in a CMP process.
2. The method of claim 1, further comprising coating a second layer of at least one second binder, wherein a material of the at least one second binder is the same as the at least one first binder.
3. The method of claim 2, wherein the second binder layer is heated concurrently while the first binder layer is heated.
4. The method of claim 2, wherein the first binder layer and the second binder layer are coated through a process selecting from the group consisting of spin coating, dip coating, screen printing, spraying coating and electroplating.
5. The method of claim 1, further comprising controlling distribution of the plurality of diamond particles during the steps of heating and cooling the substrate.
6. The method of claim 1, wherein the at least one first binder is a metal or metal alloy.
7. The method of claim 6, wherein the one first binder comprises a metal selected from a group consisting of nickel, titanium, iron and chromium.
8. The method of claim 1, wherein the at least one first binder is a material comprising a thermosetting polymer which is formed through curing a cross-linkable polymer in a liquid or paste form.
9. The method of claim 1, wherein the plurality of the diamond particles are of substantially the same particle size as each other.
10. The method of claim 1, wherein the plurality of the diamond particles are oriented in substantially the same direction as each other.
11. The method of claim 1 further comprising masking the substrate after applying the first layer of the at least one first binder at a plurality of locations over the substrate, the first layer of the at least one binder is configured to provide a plurality of exposed portions at the plurality of locations for disposing a plurality of diamond particles.
12. A conditioner disk used in a chemical mechanical process (CMP), comprising:
a substrate;
a first binder layer comprising at least one binder disposed over the substrate; and
a plurality of diamond particles disposed on the first binder layer at a plurality of locations,
wherein the conditioner disk is configured to provide a working diamond ratio higher than 50%.
13. The conditioner disk of claim 12, wherein the at least one first binder is a metal or metal alloy.
14. The conditioner disk of claim 13, wherein the one first binder comprises a metal selected from a group consisting of nickel, titanium, iron and chromium.
15. The conditioner disk of claim 12, wherein the at least one first binder is a material comprising a thermosetting polymer which is formed through curing a cross-linkable polymer in a liquid or paste form.
16. The conditioner disk of claim 12, further comprising a second binder layer comprising at least one second binder.
17. The conditioner disk of claim 16, wherein a material of the at least one second binder layer is the same as the at least one first binder.
18. The conditioner disk of claim 12, wherein the plurality of the diamond particles are of substantially the same particle size.
19. The conditioner disk of claim 12, wherein the plurality of the diamond particles are oriented in substantially the same direction as each other.
20. A method for making a conditioner disk used in a chemical mechanical polishing (CMP) process, comprising:
applying a first layer of at least one binder over a substrate at a plurality of locations, such that the first layer of at least one binder does not completely cover the substrate;
disposing a plurality of diamond particles on the first layer of the at least one first binder at the plurality of locations; and
fixing the plurality of diamond particles to the substrate by heating the substrate to a raised temperature and then cooling the substrate,
wherein the plurality of diamond particles disposed over the substrate are configured to provide a working diamond ratio higher than 50% when the conditioner disk is used in a CMP process.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An ultrasonic Doppler blood flow measuring device, comprising: a velocity calculating unit for calculating a blood flow velocity value of a blood within a subject biological body from a Doppler-shift detected from echo signals of ultrasonic pulses transmitted to said subject biological body; and
a blood flow velocity filter means for performing filter processing of said blood flow velocity value outputted from said velocity calculating unit without being influenced by aliasing, wherein
the blood flow velocity filter means comprises:
a first difference calculating means for subtracting a first blood flow velocity value of a first focus point adjacent to an arbitrary focus point supplied to said blood flow velocity filter means from a blood flow velocity value of said arbitrary focus point supplied to said blood flow velocity filter means and calculating a first difference value thereof;
a second difference calculating means for subtracting said blood flow velocity value of said arbitrary focus point supplied to said blood flow velocity filter means from a second blood flow velocity value of a second focus point adjacent to said arbitrary focus point supplied to said blood flow velocity filter means and calculating a second difference value thereof;
a filter means for performing filter processing on said first and second difference values; and
an addition processing means for adding said blood flow velocity value of said arbitrary focus point to a filter processing result from said filter means,
wherein said filter means comprises:
a first multiplier for multiplying said first difference value by a coefficient;
a second multiplier for multiplying said second difference value by a coefficient; and
an adder for adding outputted data from said first and second multipliers, and
wherein said first and second difference calculating means and said adder perform a fixed decimal point calculation.
2. The ultrasonic Doppler blood flow measuring device according to claim 1, wherein said first focus point, said arbitrary focus point and said second focus point are spatially consecutive.
3. The ultrasonic Doppler blood flow measuring device according to claim 1, wherein said first focus point, said arbitrary focus point and said second focus point are temporally consecutive.