1. A solution comprising:
a cobalt salt;
a complexing agent configured to deposit a cobalt layer on copper using the cobalt salt, the complexing agent comprising an amine compound; and
a pH adjuster configured to adjust a pH of the solution to below 7.0.
2. The solution of claim 1, wherein the amine compound comprises a triamine.
3. The solution of claim 1, wherein the amine compound comprises a polyamine of the form R\u2033\u2014NH\u2014R\u2032\u2014R\u2014NH\u2014R\u2033.
4. The solution of claim 1, wherein the amine compound comprises a polyamine of the form R\u2033\u2014NH\u2014R\u2032\u2014NH\u2014R\u2014NH\u2014R\u2033.
5. The solution of claim 1, wherein the amine compound comprises a polyamine of the form R\u2033\u2014NH\u2014R\u2032\u2014NHn,\u2014R\u2032\u2014NHm,\u2014R\u2014NH\u2014R\u2033\u2033.
6. The solution of claim 1, wherein the amine compound is aromatic.
7. The solution of claim 1, further including a reducing agent.
8. The solution of claim 7, wherein the reducing agent comprises DMAB.
9. The solution of claim 1, wherein the solution is prepared using de-oxygenated liquids.
10. The solution of claim 1, wherein the cobalt salt has a concentration of 1\xd710\u22124 M or less.
11. A method comprising:
preparing a solution configured to deposit a cobalt layer on copper, having a pH below
7.0 and comprising:
a cobalt(II) salt;
a complexing agent including at least two amine groups; and
a pH adjuster configured to adjust the pH to below 7.0;
immersing a copper surface into the solution; and
depositing a cobalt-alloy layer on the copper surface using the solution.
12. The method of claim 11, further comprising depositing a dielectric layer on the cobalt-alloy layer.
13. The method of claim 11, wherein the solution has a pH below 6.0.
14. The method of claim 11, wherein the cobalt salt comprises a cobalt(II) salt.
15. The method of claim 11, wherein the cobalt salt comprises an amine group.
16. The method of claim 11, wherein the complexing agent comprises an amine compound.
17. The method of claim 11, wherein solution further includes a reducing agent.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A liquid crystal composition having a nematic phase comprising first, second and third components, wherein the first component is at least one compound selected from the group of compounds represented by formula (1), the second component is at least one compound selected from the group of compounds represented by formulas (2-1) to (2-3), and the third component is at least one compound selected from the group of compounds represented by formula (3):
wherein R1, R2 and R4 are each independently alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R3 is fluorine, alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R5 is fluorine, chlorine, alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R6 is alkenyl having 2 to 12 carbons; Y1 is fluorine, chlorine or trifluoromethoxy; X1, X2, X3 and X4 are each independently hydrogen or fluorine; and one of X5 and X6 is fluorine, and the other is hydrogen.
2. A liquid crystal composition having a nematic phase comprising first, second and third components, wherein the first component is at least one compound selected from the group of compounds represented by formulas (1-1) to (1-4), the second component is at least one compound selected from the group of compounds represented by formulas (2-1) to (2-3), and the third component is at least one compound selected from the group of compounds represented by formula (3):
wherein R1, R2 and R4 are each independently alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R3 is fluorine, alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R5 is fluorine, chlorine, alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R6 is alkenyl having 2 to 12 carbons; and one of X5 and X6 is fluorine, and the other is hydrogen.
3. A liquid crystal composition having a nematic phase comprising first, second and third components, wherein the first component is at least one compound selected from the group of compounds represented by formulas (1-1) to (1-4), the second component is at least one compound selected from the group of compounds represented by formulas (2-1) to (2-3), and the third component is at least one compound selected from the group of compounds represented by formulas (3-1) and (3-2):
wherein R1 and R2 are alkyl having 1 to 12 carbons; R3 is fluorine; R4 is alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R5 is fluorine, chlorine, alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; X5 is fluorine; and X6 is hydrogen.
4. The liquid crystal composition according to claim 3, wherein the first component is at least one compound selected from the group of compounds represented by formula (1-1), and the second component is at least one compound selected from the group of compounds represented by formula (2-1) and at least one compound selected from the group of compounds represented by formula (2-3).
5. The liquid crystal composition according to claim 3, wherein the first component is at least one compound selected from the group of compounds represented by formula (1-1) and at least one compound selected from the group of compounds represented by formula (1-4), and the second component is at least one compound selected from the group of compounds represented by formula (2-1) and at least one compound selected from the group of compounds represented by formula (2-3).
6. The liquid crystal composition according to any one of claim 3, wherein the first component is at least one compound selected from the group of compounds represented by formula (1-3), and the second component is at least one compound selected from the group of compounds represented by formula (2-1) and at least one compound selected from the group of compounds represented by formula (2-3).
7. The liquid crystal composition according to claim 3, wherein the first component is at least one compound selected from the group of compounds represented by formula (1-3) and at least one compound selected from the group of compounds represented by formula (1-4), and the second component is at least one compound selected from the group of compounds represented by formula (2-1) and at least one compound selected from the group of compounds represented by formula (2-3).
8. The liquid crystal composition according to claim 3, wherein the first component is at least one compound selected from the group of compounds represented by formula (1-4), and the second component is at least one compound selected from the group of compounds represented by formula (2-1) and at least one compound selected from the group of compounds represented by formula (2-3).
9. The liquid crystal composition according to claim 3, wherein the ratio of the first component is in a range of from approximately 5% to approximately 40% by weight, the ratio of the second component is in a range of from approximately 5% to approximately 60% by weight, and the ratio of the third component is in a range of from approximately 10% to approximately 55% by weight, based on the total weight of the liquid crystal composition.
10. The liquid crystal composition according to claim 3, wherein the composition further comprises at least one compound selected from the group of compounds having a group represented by formulas (4-1) and (4-2) as a fourth component:
wherein R1 is alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; Y2 is fluorine or trifluoromethoxy; X7 is hydrogen or fluorine; and A is 1,4-cyclohexylene or 1,4-phenylene.
11. The liquid crystal composition according to claim 10, wherein the fourth component is at least one compound selected from the group of compounds represented by formula (4-1).
12. The liquid crystal composition according to claim 10, wherein the ratio of the first component is in a range of from approximately 5% to approximately 40% by weight, the ratio of the second component is in a range of from approximately 5% to approximately 60% by weight, the ratio of the third component is in a range of from approximately 10% to approximately 55% by weight, and the ratio of the fourth component is in a range of from approximately 10% to approximately 35% by weight, based on the total weight of the liquid crystal composition.
13. The liquid crystal composition according to claim 1, wherein the composition further comprises at least one compound selected from the group of compounds having a group represented by formulas (5-1) and (5-2) as a fifth component:
wherein R1 is alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R7 is hydrogen or group D,
wherein at least one of R7 is group D; R8 is hydrogen, alkyl having 1 to 12 carbons or alkoxy having 1 to 12 carbons; R9 is alkyl having 1 to 8 carbons; R10 and R11 are independently hydrogen or alkyl having 1 to 5 carbons; B is 1,4-cyclohexylene, 1,4-phenylene or 3-fluoro-1,4-phenylene; Z is a single bond, ethylene, carbonyloxy or oxycarbonyloxy; m is an integer of 1 to 20; and n is 1 or 2.
14. The liquid crystal composition according to claim 10, wherein the composition further comprises at least one compound selected from the group of compounds having a group represented by formulas (5-1) and (5-2) as a fifth component:
wherein R1 is alkyl having 1 to 12 carbons or alkenyl having 2 to 12 carbons; R7 is hydrogen or group D,
wherein at least one of R7 is group D; R8 is hydrogen, alkyl having 1 to 12 carbons or alkoxy having 1 to 12 carbons; R9 is alkyl having 1 to 8 carbons; R10 and R11 are independently hydrogen or alkyl having 1 to 5 carbons; B is 1,4-cyclohexylene, 1,4-phenylene or 3-fluoro-1,4-phenylene; Z is a single bond, ethylene, carbonyloxy or oxycarbonyl; m is an integer of 1 to 20; and n is 1 or 2:
15. The liquid crystal composition according to claim 13, wherein the ratio of the first component is in a range of from approximately 5% to approximately 40% by weight, the ratio of the second component is in a range of from approximately 5% to approximately 60% by weight, the ratio of the third component is in a range of from approximately 10% to approximately 55% by weight, and the ratio of the fifth component is in a range of from approximately 0.001% to approximately 5% by weight, based on the total weight of the liquid crystal composition.
16. The liquid crystal composition according to claim 14, wherein the ratio of the first component is in a range of from approximately 5% to approximately 40% by weight, the ratio of the second component is in a range of from approximately 5% to approximately 60% by weight, the ratio of the third component is in a range of from approximately 10% to approximately 55% by weight, the ratio of the fourth component is in a range of from approximately 10% to approximately 3 5% by weight, and the ratio of the fifth component is in a range of from approximately 0.001% to approximately 5% by weight, based on the total weight of the liquid crystal composition.
17. A liquid crystal display device comprising the liquid crystal composition according to claim 1.