What is claimed is:
1. An etching gas having a good chemical property for silicon etch back, comprising of:
a sulfur hexafluoride (SF6) gas; and
a chlorine (Cl2) gas.
2. The etching gas of claim 1, wherein the SF6 gas and the Cl2 gas are mixed in a ratio of about 1:2.
3. The etching gas of claim 1, wherein the SF6 gas has a flow rate of about 10-50 standard cubic centimeters per minute (SCCM).
4. The etching gas of claim 3, wherein the Cl2 gas has a flow rate of about 20-100 SCCM.
5. The etching gas of claim 1, wherein the Cl2 gas has a flow rate of about 20-100 SCCM.
6. The etching gas of claim 1, wherein the SF6 gas has a flow rate of about 30 SCCM.
7. The etching gas of claim 6, wherein the Cl2 gas has a flow rate of about 60 SCCM.
8. The etching gas of claim 1, wherein the Cl2 gas has a flow rate of about 60 SCCM.
9. The etching gas of claim 1, further comprising an inert gas.
10. An etching gas applicable to silicon etch back, the etching gas comprising:
a SF6 gas; and
a Cl2 gas, wherein the SF6 gas and the Cl2 gas are mixed in a ratio of about 1:2.
11. The etching gas of claim 10, wherein the SF6 gas has a flow rate of about 10-50 SCCM.
12. The etching gas of claim 10, wherein the Cl2 gas has a flow rate of about 20-100 SCCM.
13. The etching gas of claim 10, wherein the SF6 gas has a flow rate of about 30 SCCM.
14. The etching gas of claim 10, wherein the Cl2 gas has a flow rate of about 60 SCCM.
15. The etching gas of claim 10, further comprising an inert gas.
16. The etching gas of claim 10, wherein the silicon etch back is a process applicable to formation of a silicon plug, formation of a deep trench capacitor, or formation of a silicon spacer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An image processing apparatus comprising:
a recognizer for recognizing a facial image of a person from an object scene image;
a specifier for specifying a partial background image being a background of a head of said person out of a background image of said person from said object scene image on the basis of a recognition result of said recognizer; and
a blurring processor for performing blurring processing on the partial background image specified by said specifier.
2. An image processing apparatus according to claim 1, further comprising a detector for detecting an outline of the head of said person from a partial image surrounding the facial image recognized by said recognizer, wherein
said specifier specifies said partial background image with reference to the outline detected by said detector.
3. An image processing apparatus according to claim 2, wherein said specifier includes a first definer for providing a definition by a line horizontally extending along a lower edge of said partial background image.
4. An image processing apparatus according to claim 2, wherein said specifier includes a second difiner for providing a definition by a line extending obliquely downwardly and outwardly along a lower edge of said partial background image.
5. An image processing apparatus according to claim 1, wherein said blurring processor increases a degree of blurring of said partial background image upwardly.
6. An image processing apparatus according to claim 1, further comprising an imager for producing an object scene image, and
a writer for writing the object scene image produced by said imager into a memory, wherein
said recognizer executes recognizing processing with respect to the object scene image stored in said memory by said writer.
7. An image processing apparatus according to claim 6, further comprising a reader for reading the object scene image stored in said memory by said writer for displaying processing on a monitor, wherein
said imager repeatedly produces said object scene image.
8. An image processing apparatus according to claim 7, further comprising:
an adjuster for adjusting an imaging condition in response to a condition adjustment operation; and
an activator for activating said blurring processor in association with the adjusting processing by said adjuster.
9. An image processing apparatus according to claim 1, further comprising:
a first recorder for recording the object scene image stored in said memory by said writer in a recording medium in response to a recording operation; and
a second recorder for recording an object scene image having a partial background image on which blurring processing is performed by said blurring processor in said recording medium in association with the recording processing by said first recorder.
10. An computer-readable recording medium including an image processing program, said image processing program causes a processor of an image processing apparatus to execute
a recognizing step for recognizing a facial image of a person from an object scene image,
a specifying step for specifying a partial background image being a background of a head of said person out of a background image of said person from said object scene image on the basis of a recognition result of said recognizing step, and
a blurring processing step for performing blurring processing on the partial background image specified by said specifying step.
11. An image processing method executed by an image processing apparatus, including following steps of:
a recognizing step for recognizing a facial image of a person from an object scene image;
a specifying step for specifying a partial background image being a background of a head of said person out of a background image of said person from said object scene image on the basis of a recognition result of said recognizing step; and
a blurring processing step for performing blurring processing on the partial background image specified by said specifying step.