What is claimed is:
1. A method of manufacturing a semiconductor device, comprising the steps of:
forming a resist mask on a silicon oxide film laid on a silicon nitride film having a step portion on a semiconductor substrate, in such a way as to have an opening above said step portion; and
etching the silicon oxide film through said opening of the resist mask, by means of plasma etching through use of a processing gas comprising a mixture of a rare gas and a CF-based gas, thereby tapering the shoulder of said step portion of said silicon nitride film.
2. The semiconductor device manufacturing method as defined in claim 1, wherein a mix ratio of said rare gas and said CF-based gas is adjusted to control the position where said step portion of said the silicon nitride film is tapered.
3. The method of manufacturing a semiconductor device as defined in claim 1, further comprising the step of:
anisotropically etching said silicon nitride film through said opening by means of plasma etching through use of a mixed gas including Cl2 and HBr.
4. The method of manufacturing a semiconductor device as defined in claim 1, wherein a C4F4 gas is used as said CF-based gas.
5. The method of manufacturing a semiconductor device as defined in claim 4, wherein a CH2F2 gas is added to said mixed gas including a rare gas and a C4F8 gas.
6. The semiconductor device manufacturing method as defined in claim 5, wherein a mix ratio of the rare gas and the CH2F2 gas is adjusted according to the height of said step portion of said silicon nitride film.
7. The method of manufacturing a semiconductor device as defined in claim 5, further comprising the steps of:
forming another opening in said resist mask above a silicon conductive film which is disposed under said silicon nitride film;
etching said silicon oxide film and said silicon nitride film through said opening, thereby forming a hole reaching said silicon conductive film.
8. The method of manufacturing a semiconductor device as defined in claim 1, wherein said semiconductor device includes said silicon nitride film formed on an underlying film on a semiconductor substrate, said silicon nitride film having a step portion for forming a groove with predetermined width and height, and said silicon oxide film formed on said silicon nitride film, and the method comprising the steps of:
forming said resist mask on said silicon oxide film so as to have said opening above said step portion of said silicon nitride film; said opening being formed to extend on the upper surface of said step portion of said silicon nitride film by at least 0.1 times the width of said groove; and
etching said silicon oxide film through said opening.
9. The method of manufacturing a semiconductor device as defined in claim 1, comprising the step of:
forming said etching stopper film on an underlying layer on said semiconductor substrate, said etching stopper film being formed so as to have a groove with a width of less than 0.2 m and height of not less than 2.5 times of said width.
10. The method of manufacturing a semiconductor device as defined in claim 1, wherein said silicon nitride film is substituted by a SiOxNy film.
11. A method of manufacturing a semiconductor including a silicon oxide film formed on an underlying layer on a semiconductor substrate, the method comprising the steps of:
forming on said silicon oxide film a resist mask having an opening formed at a predetermined location thereon; and
etching said silicon oxide film through said opening of the resist mask to form a hall reaching said silicon nitride film, by means of plasma etching through use of a mixed gas including a rare gas and a C3F6 gas or CF3OCFHCF3 gas.
12. A semiconductor device manufactured by the semiconductor device manufacturing method as defined in claim 1.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A disk reproducing apparatus for reproducing a video and sound signal recorded on an optical disk, comprising:
reproducing device that reproduces the video and sound signal recorded on the optical disk in a predetermined low-speed mode;
first retry device that retries reading of the video and sound signal of a sector in which a read error occurs in the predetermined first speed mode when the read error of the video and sound signal occurs during the reproduction of the optical disk by the reproducing device;
second retry device that increases a rotational speed of the optical disk to retry reading of the video and sound signal of a sector in which a read error occurs in a predetermined second speed mode when the read error of the video and sound signal occurs during the retry of the reading of the video and sound signal by the first retry device, and
reproducing control device that returns the rotational speed of the optical disk to the original rotational speed to reproduce the video and sound signal recorded on the optical disk in the predetermined first speed mode when the video and sound signal of a sector in which a read error occurs can be read by the retry of the reading of the video and sound signal by the second retry device.
2. A disk reproducing apparatus for reproducing a video and sound signal recorded on an optical disk, comprising:
reproducing device that reproduces the video and sound signal recorded on the optical disk;
first retry device that retrying reading of the video and sound signal when a read error of the video and sound signal occurs during the reproduction of the optical disk by the reproducing device;
second retry device that increases a rotational speed of the optical disk to retry reading of the video and sound signal when a read error of the video and sound signal occurs during the retry of the reading of the video and sound signal by the first retry device, and
reproducing control device that returns the rotational speed of the optical disk to the original rotational speed to reproduce the video and sound signal recorded on the optical disk when the video and sound signal can be read by the retry of the reading of the video and sound signal by the second retry device.
3. The disk reproducing apparatus according to claim 2, wherein
the reproducing device reproduces the video and sound signal recorded on the optical disk in a predetermined first speed mode.
4. The disk reproducing apparatus according to claim 2, wherein
the first retry device retries reading of the video and sound signal of a sector in which a read error occurs in a predetermined first speed mode.
5. The disk reproducing apparatus according to claim 2, wherein
the second retry device increases a rotational speed of the optical disk to retry reading of the video and sound signal of a sector in which a read error occurs in a predetermined second speed mode.
6. The disk reproducing apparatus according to claim 2, wherein
the reproducing control device returns the rotational speed of the optical disk to the original rotational speed to reproduce the video and sound signal recorded on the optical disk in a predetermined first speed mode when the video and sound signal of a sector in which a read error occurs can be read by the retry of the reading of the video and sound signal by the second retry device.
7. A reproducing method of a disk reproducing apparatus for reproducing a video and sound signal recorded on an optical disk, comprising the steps of:
reproducing the video and sound signal recorded on the optical disk in a predetermined first speed mode;
retrying reading of the video and sound signal of a sector in which a read error occurs in a predetermined first speed mode when the read error of the video and sound signal occurs during the reproduction of the optical disk;
increasing a rotational speed of the optical disk to retry reading of the video and sound signal of a sector in which a read error occurs in a predetermined second speed mode when the read error of the video and sound signal occurs during the retry of the reading of the video and sound signal, and
returning the rotational speed of the optical disk to the original rotational speed to reproduce the video and sound signal recorded on the optical disk in a predetermined first speed mode when the reading of the video and sound signal is retried in the predetermined second speed mode and the video and sound signal of a sector in which a read error occurs can be read.