1. An electron microscope device, comprising a scanning electron microscope provided with scanning means for scanning an electron beam and an electron detector for detecting an electron issued from a specimen where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from said electron detector,
wherein said electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from said fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving said fluorescent light transmitted through said wavelength filter and for performing photoelectric conversion.
2. An electron microscope device according to claim 1, further comprising an optical microscope for projecting an illumination light to said specimen, for receiving a reflection light from said specimen, and for acquiring an optical image, wherein said illumination light is designed to have a wavelength deviated from a transmission wavelength range of said wavelength filter.
3. An electron microscope device according to claim 1, further comprising a foreign object detecting device for projecting an inspection light to a surface of said specimen and for detecting a foreign object by detecting a scattered light from the foreign object, wherein said inspection light is designed to have a wavelength deviated from the transmission wavelength range of said wavelength filter.
4. An electron microscope device according to claim 1, further comprising an interferometer for projecting an interference light to the surface of said specimen and for detecting a position in height direction of said specimen by using a reflection of said interference light from the surface of said specimen, wherein said interference light is designed to have a wavelength deviated from the transmission wavelength range of said wavelength filter.
5. An electron microscope device according to claim 1, further comprising an optical microscope for projecting an illumination light to said specimen and for acquiring an optical image by receiving a reflection light from said specimen, a foreign object detecting device for projecting an inspection light to the surface of said specimen and for detecting a foreign object by detecting a scattered light from the foreign object, and an interferometer for projecting an interference light to the surface of said specimen and for detecting a position in height direction of said specimen by using the reflection of said interference light from the surface of said specimen,
wherein said illumination light, said inspection light, and said interference light have wavelengths deviated from the transmission wavelength range of said wavelength filter, and wherein said illumination light, said inspection light, and said interference light are designed to have wavelength bands different from each other.
6. An electron microscope device according to one of claims 1 to 5, wherein said illumination light is a white light, and a wavelength filter for allowing a light of wavelength range deviated from said transmission wavelength range of said wavelength filter to transmit is removably provided on an optical path of said illumination light, and when the scanning electron image is observed by said scanning electron microscope, said wavelength filter is inserted, and observation of an optical image can also be carried out at the same time, and when said scanning electron image is not observed, said wavelength filter is removed, and the optical image can be observed separately from the observation of the scanning electron image.
7. An electron microscope device according to one of claims 1 to 5, wherein said wavelength filter is removably mounted, and said wavelength filter is restricted so that all or almost all lights wavelength ranges of the fluorescent lights from said fluorescent substance layer can be transmitted.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An exercise apparatus, comprising:
a body;
a resistance unit to provide a resistance, the resistance unit comprising:
flex members to bend to provide the resistance;
a first end piece provided on one end of the flex members to rotatably secure the one end of the flex members to the body;
a second end piece provided another end of the flex members to secure the flex members to rotate and translate within the body according to a bending motion of the flex members;
a main pulley provided on the second end piece to rotate with respect to the second end piece; and
auxiliary pulleys rotatably provided on the first end piece.
2. The exercise apparatus of claim 2, further comprising a first cable and a second cable, wherein:
the auxiliary pulleys comprise a first pulley drum, a second pulley drum, and a third pulley drum, the first, second, and third pulley drums each sharing an axis of rotation;
the first, second, and third pulley drums to selectively rotate together;
the first cable runs between the auxiliary pulleys and the main pulley to form a loop therebetween, the first cable to run from the first pulley drum to the main pulley to the second pulley drum to close the loop when the cable is pulled in a first direction and to open the loop when the cable is pulled in a second direction; and
the second cable is provided on the third pulley drum to rotate the auxiliary pulleys when the first, second, and third pulley drums are selected to rotate together.
3. The exercise apparatus of claim 2, wherein the first and third pulley drums have a first diameter and the second pulley drum has a second diameter to create a mechanical advantage.
4. The exercise apparatus of claim 2, further comprising a cable, wherein:
the auxiliary pulleys comprise a pulley body having first pulley diameter, a second pulley diameter, and a third pulley diameter;
the cable runs between the auxiliary pulleys and the main pulley to form a loop therebetween, the cable to run from the first pulley diameter to the main pulley to the second pulley diameter; and
the cable runs to the third pulley diameter from to rotate the pulley body.
5. The exercise apparatus of claim 1, further comprising a pulley arm to connect the main pulley to the second end piece.
6. The exercise apparatus of claim 1, wherein the auxiliary pulleys rotate on a same axis as the first end piece.
7. The exercise apparatus of claim 1, wherein the flex members are tubular structural members having a variable resistance, and
further comprising a flex member rotator to rotate the flex members with respect to the first and second end pieces.
8. The exercise apparatus of claim 1, wherein the auxiliary pulleys comprise a plurality of pulley drums.
9. The exercise apparatus of claim 6, wherein the plurality of pulley drums have one or more stop holes defined therein to lock the pulley drums to rotate together.
10. The exercise apparatus of claim 1, wherein:
the first end piece is rotatably connected to the body on a first axis,
the auxiliary pulleys rotate on a second axis,
and the second axis is offset from the first axis.
11. A resistance unit, comprising:
one or more flex members arranged in a planar direction to have a bending resistance when compressed;
pulleys provided on each end of the one or more flex members, the pulleys on each of the ends of the one or more flex members with an axis of rotation offset from a plane formed by the one or more flex members; and
a cable provided across the one or more flex members to each of the pulleys to apply a compressive load to the one or more flex cables when the cable is pulled.
12. A resistance unit, comprising:
one or more flex members arranged in a planar direction to have a bending resistance when compressed;
a first end piece provided on a first end of each of the one or more flex members to secure each of the first ends in a planar direction;
a second end piece provided on a second end of each of the one or more flex members to secure each second end in the planar direction;
first end pulleys provided on the first end piece;
second end pulleys on the second end piece; and
a cable to connect the first end pulleys and the second pulleys to provide a compressive load to the one or more flex members when the cable is pulled.
13. The resistance unit of claim 8, wherein the one or more flex members have a variable bending resistance.
14. The resistance unit of claim 8, wherein the one or more flex members are tubular structural members that have a directionally variable resistance.
15. The resistance unit of claim 13, further comprising:
a tube rotation device to rotate the tubular structural members to change the bending resistance.