1. A liquid processing apparatus comprising:
a substrate holding unit configured to hold a substrate horizontally;
a nozzle configured to supply a processing liquid to the substrate held by the substrate holding unit;
an elevating member configured to ascenddescend with respect to the substrate holding unit; and
an elevation driving unit configured to raiselower the elevating member,
wherein the substrate holding unit includes a holding base, and a first engagement member and a second engagement member which are provided to be movable in the holding base, and each of the first and second engagement members is moved by a biasing force of a biasing force giving mechanism between an engaging position where each of the first and second engagement members is engaged with the peripheral edge of the substrate and a releasing position where each of the first and second engagement members releases the substrate,
the first engagement member is connected with a first contact unit contacted with the outer peripheral surface of the elevating member,
the second engagement member is connected to a second contact unit contacted with the outer peripheral surface of the elevating member,
the elevating member includes a first portion to be contacted and a second portion to be contacted at a lower position than the first portion which are provided in the outer peripheral surface of the elevating member and disposed at different positions in the ascendingdescending direction of the elevating member,
when the first contact unit is in contact with the first portion to be contacted, the first engagement member is located at the engaging position and the second engagement member is located at the releasing position, and
when the second contact unit is in contact with the second portion to be contacted, the second engagement member is located at the engaging position and the first engagement member is located at the releasing position.
2. The liquid processing apparatus of claim 1, wherein, when the first contact unit and the second contact unit are in contact with the outer peripheral surface of the elevating member other than the first portion to be contacted and the second portion to be contacted, the first engagement member and the second engagement member are located at the releasing position.
3. The liquid processing apparatus of claim 2, wherein when the first contact unit is in contact with the first portion to be contacted, the second contact unit is in contact with an outer peripheral surface of the elevating member other than the first portion to be contacted and the second portion to be contacted.
4. The liquid processing apparatus of claim 3, wherein a lower portion of the first portion to be contacted is located at the same position or below an upper portion of the second portion to be contacted in the ascendingdescending direction of the elevating member.
5. The liquid processing apparatus of claim 4, wherein the first portion to be contacted and the second portion to be contacted are formed in a concave shape with respect to the outer peripheral surface of the elevating member.
6. The liquid processing apparatus of claim 5, wherein each of the first contact unit and the second contact unit includes a roller capable of being rotated in the ascendingdescending direction in the outer peripheral surface of the elevating member.
7. The liquid processing apparatus of claim 6, further comprising a rotation driving unit that includes a rotating shaft which rotates the substrate holding unit,
wherein the elevating member is connected to the rotating shaft and rotated together with the substrate holding unit.
8. The liquid processing apparatus of claim 7, wherein the substrate holding unit includes three first engagement members and three second engagement members which are disposed alternately in the circumference direction of the substrate, and
the elevating member includes three first portions to be contacted and three second portions to be contacted which correspond the first engagement members and the second engagement members, respectively.
9. The liquid processing apparatus of claim 2, wherein, while the processing liquid is being supplied from the nozzle,
the first contact unit is moved from the first portion to be contacted to a position where the first contact unit is in contact with an outer peripheral surface of the elevating member other than first portion to be contacted and the second portion to be contacted, and the second contact unit is moved from a position where the second contact unit is in contact with an outer peripheral surface of the elevating member other than the first portion to be contacted and the second portion to be contacted to the second portion to be contacted.
10. The liquid processing apparatus of claim 9, wherein a time period where the first contact unit is in contact with the first portion to be contacted and a time period where the second contact unit is in contact with the second portion to be contacted are overlapped.
11. The liquid processing apparatus of claim 10, wherein a lower portion of the first portion to be contacted is located at the same position or below an upper portion of the second portion to be contacted in the ascendingdescending direction of the elevating member.
12. The liquid processing apparatus of claim 11, wherein each of the first contact unit and the second contact unit includes a roller capable of being rotated in the ascendingdescending direction in the outer peripheral surface of the elevating member.
13. The liquid processing apparatus of claim 12, further comprising a rotation driving unit that includes a rotating shaft which rotates the substrate holding unit,
wherein the elevating member is connected to the rotating shaft and rotated together with the substrate holding unit.
14. The liquid processing apparatus of claim 13, wherein the substrate holding unit includes three first engagement members and three second engagement members which are disposed alternately in the circumference direction of the substrate, and
the elevating member includes three first portions to be contacted and three second portions to be contacted which correspond the first engagement members and the second engagement members, respectively.
15. The liquid processing apparatus of claim 9, wherein the nozzle is configured to supply a processing liquid to the top surface of the substrate held by the substrate holding unit,
the elevating member is formed in a cylindrical shape, and
in the inner side of the elevating member, a bottom side processing liquid supply pipe that supplies a processing liquid to the bottom surface of the substrate held by the substrate holding unit is provided.
16. The liquid processing apparatus of claim 15, further comprising a rotation driving unit that includes a rotating shaft which rotates the substrate holding unit,
wherein the elevating member is connected to the rotating shaft and rotated together with the substrate holding unit.
17. The liquid processing apparatus of claim 16, wherein the substrate holding unit includes three first engagement members and three second engagement members which are disposed alternately in the circumference direction of the substrate, and
the elevating member includes three first portions to be contacted and three second portions to be contacted which correspond the first engagement members and the second engagement members, respectively.
18. The liquid processing apparatus of claim 2, wherein a lower portion of the first portion to be contacted is located at the same position or below an upper portion of the second portion to be contacted in the ascendingdescending direction of the elevating member.
19. The liquid processing apparatus of claim 18, wherein the first portion to be contacted and the second portion to be contacted are formed in a concave shape with respect to the outer peripheral surface of the elevating member.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An imaging apparatus which uses a defect correction circuit to perform predetermined signal processing with respect to image signals respectively output from an imaging section in which a plurality of pixels each formed of a photoelectric transducer with a color filter provided thereon are two-dimensionally arranged,
wherein the defect correction circuit includes:
a pattern extraction circuit which extracts image pattern information based on a signal of an adjacent pixel that is adjacent to a judgment target pixel and signals of peripheral pixels that are placed around the adjacent pixel with the adjacent pixel as the center and have the same color as the adjacent pixel in the image signals, the peripheral pixels excluding the judgment target pixel;
a substitution circuit which substitutes a signal of the judgment target pixel by signals of peripheral pixels that are close to the judgment target pixel and have the same color as the judgment target pixel; and
wherein the pattern extracting circuit performs:
sorting the signal of the judgment target pixel and signals of peripheral pixels having the same color as the judgment target pixel in order of level;
calculating a subtraction result by subtracting a signal at a predetermined rank excluding a smallest one in a smaller signal side from a signal at a predetermined rank excluding a largest one in a larger signal side and multiplying the subtraction result by a predetermined coefficient to obtain a first signal;
adding the first signal to the signal at a predetermined rank in a larger signal side to obtain a second signal;
subtracting the first signal from the signal at a predetermined rank in a smaller signal side to obtain a third signal;
determining whether the signal of the judgment target pixel is larger than the second signal;
determining whether the signal of the judgment target pixel is smaller than the third signal; and
producing a control signal to control the substitution circuit in accordance with determination.
2. The imaging apparatus according to claim 1, wherein a color filter arrangement is a tetragonal arrangement based on R, G and B colors.
3. The imaging apparatus according to claim 1, wherein a color filter arrangement is an inclined arrangement which is based on a R, G and B colors and inclined at 45 degrees in arrangement.
4. The imaging apparatus according to claim 1, wherein the pattern extraction circuit includes:
difference signal calculation processing of calculating a difference signal between the signal of the adjacent pixel and each of the signals of the peripheral pixels;
level judgment processing of determining that a signal of a corresponding peripheral pixel is equal to the signal of the adjacent pixel in level when the difference signal is smaller than a predetermined threshold level; and
extraction processing of extracting the image pattern information that is supplied to the substitution circuit depending on a direction of the adjacent pixel along which the peripheral pixel having the signal equal to the signal of the adjacent pixel in level is present.
5. The imaging apparatus according to claim 4, wherein the pattern extraction circuit further includes a generating section that generates a control signal that is used to control the substitution circuit based on a result of the level judgment processing with respect to each of the signals of the peripheral pixels, and
the control signal is generated to execute substitution processing for the adjacent pixel when the signals of all the peripheral pixels are not equal to the signal of the adjacent pixel in level.
6. The imaging apparatus according to claim 4, wherein the pattern extraction circuit extracts the image pattern information in eight directions of an upper direction, a lower direction, a left direction, a right direction, an upper left direction, a lower left direction, an upper right direction, and a lower right direction of the adjacent pixel to control the substitution circuit.
7. The imaging apparatus according to claim 6, wherein the substitution circuit substitutes the signal of the judgment target pixel by a signal of each peripheral pixel close to the judgment target pixel and having the same color as the judgment target pixel selected based on the image pattern information or the average value of the signals of the peripheral pixels close to the judgment target pixel and having the same color as the judgment target pixel.
8. The imaging apparatus according to claim 4, wherein the pattern extraction circuit extracts the image pattern information in four directions of an up-and-down direction, a right-and-left direction, a direction from top left to bottom right, and a direction from upper right to lower bottom of the adjacent pixel to control the substitution circuit.
9. The imaging apparatus according to claim 8, wherein the pattern extraction circuit further judges a level relationship of difference signals between the signal of the adjacent pixel and two signals of corresponding peripheral pixels in each of the four directions, and selects the single signal of the peripheral pixel having the smaller difference signal.
10. The imaging apparatus according to claim 8, wherein the substitution circuit substitutes the signal of the judgment target pixel by the average signal of the signals of the peripheral pixels close to the judgment target pixel and having the same color as the judgment target pixel selected based on the image pattern information.
11. The imaging apparatus according to claim 8, wherein the substitution circuit sorts one signal of the judgment pixel and four signals of peripheral pixels close to the judgment target pixel in a plus-sign-like direction and having the same color as the judgment target pixel or four signals of peripheral pixels close to the judgment target pixel in an X-shaped direction and having the same color as the judgment target pixel selected based on the image pattern information in order of level, calculates a first averaged signal and a first difference signal from two signals having large levels and also calculates a second averaged signal and a second difference signal from two signals having small levels in three signals having intermediate values excluding a maximum value and a minimum value in the one signal of the judgment target pixel and the four signals of the peripheral pixels sorted in order of level, judges a level relationship between the first difference signal and the second difference signal, substitutes the one signal of the judgment target pixel by the first averaged signal when the second difference signal is larger than the first difference signal, and substitutes the one signal of the judgment pixel by the second averaged signal when the first difference signal is larger than the second difference signal.
12. The imaging apparatus according to claim 8, wherein the pattern extraction circuit judges whether difference signals between the signal of the adjacent pixel and two signals of corresponding peripheral pixels in each of the four directions are smaller than the threshold level, and selects the single signal of the peripheral pixel having the smaller difference signal.
13. The imaging apparatus according to claim 8, wherein the pattern extraction circuit further judges presenceabsence of a correlation in the four directions based on whether a difference signal between the average value of two signals of corresponding peripheral pixels in each of the four directions and the signal of the adjacent pixel is smaller than the predetermined threshold level.
14. The imaging apparatus according to claim 4, wherein the pattern extraction circuit judges presenceabsence of correlations with respect to two directions of a plus-sign-like direction including an up-and-down direction and a right-and-left direction and an X-shaped direction including a direction from top left to bottom right and a direction from top right to bottom left based on whether a difference signal between the average value of two signals of corresponding peripheral pixels in each of the four directions of the up-and-down direction, the right-and-left direction, the direction from top left to bottom right, and the direction from top right to bottom left of the adjacent pixel and the signal of the adjacent pixel is smaller than the predetermined threshold level, and extracts the image pattern information in the two direction to control the substitution circuit.
15. The imaging apparatus according to claim 1, wherein the pattern extraction circuit performs:
sorting one signal of the adjacent pixel and four signals of peripheral pixels close to the adjacent pixel in a plus-sign-like direction and having the same color as the adjacent pixel in order of level, calculating a first averaged signal and a first difference signal from two signals having large levels and also calculating a second averaged signal and a second difference signal from two signals having small levels in three signals having intermediate values excluding a maximum value and a minimum value in the one signal of the adjacent pixel and the four signals of the peripheral pixels sorted in order of level, and selecting the first averaged signal when the second difference signal is smaller than the first difference signal;
sorting one signal of the adjacent pixel and four signals of peripheral pixels close to the adjacent pixel in an X-shaped direction and having the same color as the adjacent pixel in order of level, calculating a third averaged signal and a third difference signal from two signals having large levels and also calculating a fourth averaged signal and a fourth difference signal from two signals having small levels in three signals having intermediate values excluding a maximum value and a minimum value in the one signal of the adjacent pixel and the four signals of the peripheral pixels sorted in order of level, and selecting the third averaged signal when the fourth difference signal is smaller than the third difference signal; and
selecting a smaller one or a larger one of the first averaged signal and the third averaged signal to judge presenceabsence of correlations in the two directions of the plus-sign-like direction and the X-shaped direction, and extracting the image pattern information in the two directions to control the substitution circuit.
16. The imaging apparatus according to claim 1, wherein the pattern extraction circuit performs:
sorting one signal of the adjacent pixel and four signals of peripheral pixels close to the adjacent pixel in a plus-sign-like direction and having the same color as the adjacent pixel in order of level, and obtaining a first difference signal from one signal having a median value of the one signal of the adjacent pixel and the four signals of the peripheral pixels sorted in order of level and the one signal of the adjacent pixel;
sorting the one signal of the adjacent pixel and four signals of peripheral pixels close to the adjacent pixel in an X-shaped direction and having the same color as the adjacent pixel in order of level, and obtaining a second difference signal from one signal having a median value of the one signal of the adjacent pixel and the four signals of the peripheral pixels sorted in order of level and the one signal of the adjacent pixel; and
selecting a smaller one or a larger one of the first difference signal and the second difference signal to judge presenceabsence of correlations in the two directions of the plus-sign-like direction and the X-shaped direction, and extracting the image pattern information in the two directions to control the substitution circuit.
17. The imaging apparatus according to claim 1, wherein the pattern extraction circuit performs:
obtaining a first averaged signal from one signal of the adjacent pixel and four signals of peripheral pixels close to the adjacent pixel in a plus-sign-like direction and having the same color as the adjacent pixel, and calculating a first difference signal from the first averaged signal and the one signal of the adjacent pixel;
obtaining a second averaged signal from the one signal of the adjacent pixel and four signals of peripheral pixels close to the adjacent pixel in an X-shaped direction and having the same color as the adjacent pixel, and calculating a second difference signal from the second averaged signal and the one signal of the adjacent pixel; and
selecting a smaller one or a larger one of the first difference signal and the second difference signal to judge presenceabsence of correlations in the two directions of the plus-sign-like direction and the X-shaped direction, and extracting the image pattern information in the two directions to control the substitution circuit.
18. The imaging apparatus according to claim 1, wherein the pattern extraction circuit performs:
obtaining a first averaged signal from four signals of peripheral pixels close to the adjacent pixel in a plus-sign-like direction and having the same color as the adjacent pixel, and calculating a first difference signal from the first averaged signal and one signal of the adjacent pixel;
obtaining a second averaged signal from four signals of peripheral pixels close to the adjacent pixel in an X-shaped direction and having the same color as the adjacent pixel, and calculating a second difference signal from the second averaged signal and the one signal of the adjacent pixel; and
selecting a smaller one or a larger one of the first difference signal and the second difference signal to judge presenceabsence of correlations in two directions of the plus-sign-like direction and the X-shaped direction, and extracting the image pattern information in the two directions to control the substitution circuit.
19. The imaging apparatus according to claim 1, wherein the pattern extraction circuit performs:
obtaining a first averaged signal from four signals of peripheral pixels close to a first adjacent pixel neighboring to a judgment target pixel in a plus-sign-like direction and having the same color as the first adjacent pixel, and calculating a first difference signal from the first averaged signal and one signal of the first adjacent pixel;
obtaining a second averaged signal from four signals of peripheral pixels close to a second adjacent pixel neighboring to the judgment target pixel in the plus-sign-like direction and having the same color as the second adjacent pixel, and calculating a second difference signal from the second averaged signal and one signal of the second adjacent pixel;
selecting a smaller one of the first difference signal and the second difference signal as a third difference signal;
obtaining a third averaged signal from four signals of peripheral pixels close to the first adjacent pixel neighboring to the judgment target pixel in an X-shaped direction and having the same color as the first adjacent pixel, and calculating a fourth difference signal from the third averaged signal and the one signal of the first adjacent pixel;
obtaining a fourth averaged signal from four signals of peripheral pixels close to the second adjacent pixel neighboring to the judgment target pixel in the X-shaped direction and having the same color as the second adjacent pixel, and calculating a fifth difference signal from the fourth averaged signal and the one signal of the second adjacent pixel;
selecting a smaller one of the fourth difference signal and the fifth difference signal as a sixth difference signal; and
selecting a smaller one or a larger one of the third difference signal and the sixth difference signal to judge presenceabsence of correlations in the two directions of the plus-sign-like direction and the X-shaped direction, and extracting the image pattern information in the two directions to control the substitution circuit.
20. The imaging apparatus according to claim 1, wherein the pattern extracting circuit includes:
difference signal calculation processing of determining the judgment target pixel as a defective pixel when a signal of the judgment target pixel is larger than a maximum value of respective signals of peripheral pixels thereof or smaller than a minimum value of the same, and calculating a difference signal between a signal of the adjacent pixel and each of signals of peripheral pixels neighboring to the adjacent pixel in a plus-sign-like direction and a difference signal between the signal of the adjacent pixel and each of signals of peripheral pixels neighboring to the adjacent pixel in an X-shaped direction;
correlation judgment processing of judging correlations with respect to the peripheral pixels in the plus-sign-like direction of the adjacent pixel and the peripheral pixels in the X-shaped direction of the same based on a result of the difference signal calculation; and
generation processing of generating a control signal that is used to control the substitution circuit in accordance with a result of the correlation judgment processing.
21. The imaging apparatus according to claim 1, wherein the pattern extracting circuit further performs:
obtaining a first averaged signal from four signals of peripheral pixels close to the adjacent pixel in a plus-sign-like direction and having the same color as the adjacent pixel, and obtaining a first difference signal from the first averaged signal and one signal of the adjacent pixel;
obtaining a second averaged signal from four signals of peripheral pixels close to the adjacent pixel in an X-shaped direction and having the same color as the adjacent pixel, and obtaining a second difference signal from the second averaged signal and one signal of the adjacent pixel; and
selecting a smaller one or a larger one of the first difference signal and the second difference signal to judge presenceabsence of correlations in the two directions of the plus-sign-like direction and the X-shaped direction, and extracting the image pattern information in the two directions to control the substitution circuit.
22. An imaging apparatus which uses a defect correction circuit to perform predetermined signal processing with respect to image signals respectively output from an imaging section in which a plurality of pixels each formed of a photoelectric transducer are two-dimensionally arranged,
wherein the defect correction circuit includes:
a pattern extraction circuit which extracts image pattern information based on a signal of an adjacent pixel that is adjacent to a judgment target pixel and signals of peripheral pixels that are placed around the adjacent pixel with the adjacent pixel as the center and have the same color as the adjacent pixel in the image signals, the peripheral pixels excluding the judgment target pixel;
a substitution circuit which substitutes a signal of the judgment target pixel by signals of peripheral pixels that are close to the judgment target pixel and have the same color as the judgment target pixel; and
wherein the pattern extracting circuit performs:
sorting the signal of the judgment target pixel and signals of peripheral pixels having the same color as the judgment target pixel in order of level;
calculating a subtraction result by subtracting a signal at a predetermined rank excluding a smallest one in a smaller signal side from a signal at a predetermined rank excluding a largest one in a larger signal side and multiplying the subtraction result by a predetermined coefficient to obtain a first signal;
adding the first signal to the signal at a predetermined rank in a larger signal side to obtain a second signal;
subtracting the first signal from the signal at a predetermined rank in a smaller signal side to obtain a third signal;
determining whether the signal of the judgment target pixel is larger than the second signal;
determining whether the signal of the judgment target pixel is smaller than the third signal; and
producing a control signal to control the substitution circuit in accordance with determination.
23. An imaging apparatus which uses a defect correction circuit to perform predetermined signal processing with respect to image signals respectively output from an imaging section in which a plurality of pixels each formed of a photoelectric transducer with a color filter provided thereon are two-dimensionally arranged,
wherein the defect correction circuit performs:
sorting the signal of a judgment target pixel and signals of peripheral pixels having the same color as the judgment target pixel in order of level in the image signals;
calculating a subtraction result by subtracting a signal at a predetermined rank excluding a smallest one in a smaller signal side from a signal at a predetermined rank excluding a largest one in a larger signal side and multiplying the subtraction result by a predetermined coefficient to obtain a first signal;
adding the first signal to the signal at a predetermined rank in a larger signal side to obtain a second signal;
subtracting the first signal from the signal at a predetermined rank in a smaller signal side to obtain a third signal;
determining whether the signal of the judgment target pixel is larger than the second signal;
determining whether the signal of the judgment target pixel is smaller than the third signal; and
substituting the signal of the judgment target pixel in accordance with determination.