1. A method of packaging and mounting a quartz SAW sensor having at least two SAW devices electrically connected to each other on to a shaft, comprising the steps of:
providing a glass cover wafer having a diameter substantially the same as said quartz SAW sensor;
adding a glass frit paste having a desired pattern on said glass cover wafer to form a pattern of glass frit spacers and thereafter pre-consolidating said glass frit paste, said glass frit spacers having a TCE substantially the same as said glass cover wafer;
aligning of said glass cover wafer on said SAW sensor and making direct contact there between to thereby isolate said glass cover wafer and said SAW sensor by said glass frit spacers, said glass frit spacers further isolating said at least two SAW devices;
consolidating said glass frit paste at a temperature below the Curie temperature of said quartz SAW sensor to form consolidated solid glass material;
slicing said glass cover wafer to expose said at least two SAW devices for making electrical contact therewith;
thereafter directly attaching the back of said quartz SAW sensor to a shaft by applying a gel phase of a glass frit composition to a place on said shaft and consolidating said gel phase to a cured glass frit, said glass frit composition having a TCE bridging the TCE of said shaft and the TCE of said back of said quartz SAW sensor; and
bonding said back of said quartz SAW sensor to said glass frit composition.
2. The method of claim 1, wherein said glass frit composition has a TCE intermediate of the TCE of said shaft and the TCE of said quartz sensor back.
3. The method of claim 1, wherein said glass frit composition when consolidated to a glass is from about 30 to 50 micrometers in thickness and said desired pattern is applied by direct printing.
4. The method of claim 1, wherein said glass frit composition comprises a first composition applied directly to said shaft and having a TCE near said TCE of said shaft and a second composition applied to said first composition and having a TCE near said TCE of said quartz sensor back, said quartz sensor back being applied to said second composition.
5. The method of claim 4, wherein said first composition of said glass frit is a metal-like glass frit layer formed from a mixture of metal oxide powder and silica powder.
6. The method of claim 5, wherein said second composition of said glass frit is a silica glass frit having a TCE substantially equal to the average TCE of said quartz sensor back.
7. A quartz SAW sensor having at least two SAW devices electrically connected to each other in a hermetic package and mounted on to a shaft, comprising:
a quartz SAW sensor;
a glass cover wafer having a diameter substantially the same as said quartz SAW sensor;
a glass frit paste having a desired pattern placed on said glass cover wafer to form a pattern of glass frit spacers, said glass frit spacers having a TCE substantially the same as said glass cover wafer;
said glass cover wafer being aligned on said SAW sensor and making direct contact there between after first pre-conditioning said glass frit paste to thereby isolate said glass cover wafer and said SAW sensor by said glass frit spacers, said glass frit spacers further isolating said at least two SAW devices;
said glass frit paste having been consolidated at a temperature below the Curie temperature of said quartz SAW sensor to form consolidated solid glass material;
said at least two SAW devices being exposed for making electrical contact therewith;
the back of said quartz SAW sensor being attached to a shaft by applying a gel phase of a glass frit composition to a place on said shaft and consolidating said gel phase to a cured glass frit, said glass frit composition having a TCE bridging the TCE of said shaft and the TCE of said back of said quartz SAW sensor; and
said back of said quartz SAW sensor being bonded to said glass frit composition.
8. The device of claim 7, wherein said glass frit composition has a TCE intermediate of the TCE of said shaft and the TCE of said quartz sensor back.
9. The device of claim 7, wherein said glass frit composition when consolidated to a glass is from about 30 to 50 micrometers in thickness.
10. The device of claim 7, wherein said glass frit composition comprises a first composition applied directly to said shaft and having a TCE near said TCE of said shaft and a second composition applied to said first composition and having a TCE near said TCE of said quartz sensor back, said quartz sensor back being applied to said second composition.
11. The device of claim 10, wherein said first composition of said glass frit is a metal-like glass frit layer formed from a mixture of metal oxide powder and silica powder.
12. The device of claim 11, wherein said second composition of said glass frit is a silica glass frit having a TCE substantially equal to the average TCE of said quartz sensor back.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A clock signal generating system for generating an output clock signal comprising:
a phase locked loop (PLL) circuit which requires a reference clock signal of at least a predetermined first frequency, an output of the PLL circuit being coupled to generate the output clock signal; and
a clock signal multiplication circuit having:
an oscillator;
a counter circuit that is clocked by an oscillator clock signal produced by the oscillator and that is coupled to receive a first clock signal of a second frequency that is substantially lower than the first frequency, wherein the counter circuit samples its contents in response to the first clock signal;
a clock filter and clock period estimator circuit that is coupled to receive the sampled contents of the counter circuit;
a first delta-sigma modulator that is coupled to receive an estimate which is representative of the period of the first clock signal multiplied by a ratio of the first frequency to the second frequency, and which is produced by the clock filter and clock period estimator circuit for producing an integer representation of the estimate;
a memory for receiving a predetermined number of the integer representations; and
a first divider circuit coupled to divide the oscillator clock signal by the predetermined number of the integer representations to generate a second clock signal which has a frequency at least as high as the first frequency, wherein the output clock signal is phase-locked with respect to the first clock signal, and wherein a reference clock input of the PLL circuit is coupled to receive the second clock signal.
2. The clock signal generating system of claim 1, wherein the clock signal multiplication circuit further comprises set up logic for providing a shift factor for the clock filter and clock period estimator circuit and a PLL multiplier factor for the PLL circuit in response to the sampled contents.
3. The clock signal generating system of claim 1, wherein the memory further comprises a first in, first out (FIFO) circuit coupled between an output of the first delta-sigma modulator and a divide input of the first divider circuit.
4. The clock signal generating system of claim 1, wherein the clock filter and clock period estimator circuit further comprises low pass filtering and period estimating circuitry.
5. The clock signal generating system of claim 2, wherein the clock filter and clock period estimator circuit further comprises:
a right-shift circuit having input coupled to receive the shift factor, and an output on which the estimate is produced; and
a left-shift circuit which has an input coupled to receive the estimate, another input coupled to receive the shift factor, and an output coupled by an accumulator circuit to a digital summer which also receives the sampled contents.
6. The clock signal generating system of claim 5, wherein the first delta sigma modulator performs 2S operations on the estimate, wherein S is the shift factor.
7. The clock signal generating system of claim 1, wherein the oscillator is a free-running oscillator.
8. The clock signal generating system of claim 1, wherein the clock signal multiplication circuit further comprises calibration circuitry for initially calibrating the oscillator to a predetermined frequency and then allowing the oscillator to run freely.
9. The clock signal generating system of claim 8, wherein the first delta sigma modulator has an architecture which ensures that the second clock signal is phase-locked with respect to the first clock signal.
10. The clock signal generating system of claim 2, wherein the clock signal multiplication circuit further comprises a second clock divider having an input coupled to an output of the PLL circuit and an output on which the output clock signal is produced.
11. The clock signal generating system of claim 1, wherein the oscillator is a programmable ring oscillator which receives a first control value that sets a nominal frequency of the oscillator clock signal which, after being divided by the first divider circuit, can be tolerated by the PLL circuit.
12. The clock signal generating system of claim 11, the clock signal multiplication circuit further comprises a second delta-sigma modulator which operates on a second control value to produce a digital value which is provided as a frequency multiplier factor input to the clock filter and clock period estimator circuit.
13. The clock signal generating system of claim 12, wherein the first delta sigma modulator further comprises an accumulator having an input coupled to an output of a quantizer which generates the integer representations, another input coupled to an accumulator reset signal, and an output which produces an estimate of a period of the first clock signal, the estimate of the period of the first clock signal being applied to a phase feedback accumulator input of the clock filter and clock period estimator circuit.
14. An apparatus comprising:
a clock signal multiplication circuit having:
an oscillator that generates an oscillator signal;
a counter circuit that is clocked by the oscillator signal and that receives a reference clock signal;
a filter and estimator circuit that is coupled to the counter circuit;
a delta-sigma modulator that is coupled to the filter and estimator circuit, wherein the delta-sigma modulator produces a plurality of integer representations of an estimate of the period of the reference clock signal multiplied by a ratio of the frequency of the reference clock signal to a predetermined frequency;
a memory that is coupled to the delta-sigma modulator that stores the integer representations; and
a divider that divides the oscillator signal by the integer representations; and
a PLL having a reference input that is coupled to the divider, wherein the predetermined frequency is a lower threshold frequency for the operation of the PLL.
15. The apparatus of claim 14, wherein the divider further comprises a first divider, and wherein apparatus further comprises a second divider that is coupled to the PLL.
16. The apparatus of claim 15, wherein the a clock signal multiplication circuit further comprises:
set up logic that provides shift factor to the a filter and estimator circuit and the delta-sigma modulator and that provides a multiplier factor to the PLL and the second divider; and
calibration logic that is coupled to the oscillator.
17. The apparatus of claim 15, wherein the memory is a FIFO memory.
18. A method comprising:
producing an estimate that is representative of a period of a first clock signal multiplied by a ratio of a predetermined frequency to a frequency of the first clock signal;
producing a plurality of integer representations of the estimate with a sigma-delta modulator;
storing the integer representations in a memory;
dividing an oscillator clock signal by each integer representation from the memory to generate a pulse which lasts during a number of cycles of the oscillator clock signal equal to the value of that integer representation so as to generate the second clock signal;
receiving the second clock signal at a reference clock input of a PLL, wherein the predetermined frequency is a lower threshold frequency for the operation of the PLL; and
generating an output clock signal with the PLL, wherein the output clock signal is phase-locked with respect to the first clock signal.
19. The method of claim 18, wherein the step of producing an estimate further comprises:
sampling the first clock signal with a counter circuit that is clocked by the oscillator clock signal; and
producing the estimate that is representative of a period of a first clock signal multiplied by a ratio of a predetermined frequency to a frequency of the first clock signal base at least in part on the sampling of the first clock signal.
20. The method of claim 19, wherein the method further comprises:
generating a shift factor for the sigma-delta modulator; and
generating a multiplier factor for the PLL.