1. A method of forming a thin film containing a doping element in a vacuum atmosphere, comprising:
supplying a source gas into a processing vessel being under the vacuum atmosphere through a source gas supply unit such that a source of the source gas is adsorbed onto a substrate in the processing vessel;
repeating, a plurality of times, a sequence of operations of supplying a doping gas containing the doping element into the processing vessel through a doping gas supply unit, followed by sealing the doping gas inside the processing vessel, followed by vacuum-exhausting the processing vessel;
supplying a reaction gas into the processing vessel through a reaction gas supply unit such that the reaction gas reacts with the source to produce a reaction product; and
replacing an internal atmosphere of the processing vessel, the replacing being performed between the operations,
wherein the repeating includes supplying a backflow prevention gas into the processing vessel through the source gas supply unit, the doping gas supply unit and the reaction gas supply unit.
2. The method of claim 1, wherein the doping element includes at least one of boron and carbon.
3. The method of claim 1, wherein the reaction product includes silicon and at least one of nitrogen and oxygen.
4. The method of claim 1, wherein the thin film is formed in a state in which a plurality of substrates are held by a substrate holding unit provided in a vertical reaction tube used as the processing vessel,
wherein the operation of supplying a doping gas is performed in a state in which the vacuum-exhaust operation of the processing vessel is stopped, and
wherein the vacuum-exhaust operation is resumed before a supply amount of the backflow prevention gas reaches a predetermined level of a supply amount of the doping gas.
5. An apparatus of forming a thin film containing a doping element in a vacuum atmosphere, comprising:
a processing vessel configured to air-tightly accommodate a plurality of substrates;
a source gas supply unit configured to supply a source gas into the processing vessel;
a doping gas supply unit configured to supply a doping gas containing the doping element into the processing vessel;
a reaction gas supply unit configured to supply a reaction gas into the processing vessel such that the reaction gas reacts with a source contained in the source gas to produce a reaction product;
a vacuum pump configured to vacuum-exhaust the processing vessel through an exhaust port; and
a control unit configured to output a control signal to perform a doping process, a reaction gas supply process using the reaction gas supply unit, and a replacement process,
wherein the doping process includes repeating, a plurality of times, a sequence of operations of controlling the source gas supply unit to supply the source gas into the processing vessel being under the vacuum atmosphere such that a source of the source gas is adsorbed onto the substrate; followed by controlling the doping gas supply unit to supply the doping gas into the processing vessel such that the doping gas is sealed in the processing vessel; followed by controlling the vacuum pump to vacuum-exhaust the processing vessel, and
wherein the replacement process includes replacing an internal atmosphere of the processing vessel and is performed between the control operations of the doping process,
wherein the control unit outputs a control signal to perform the doping process while controlling the source gas supply unit, the doping gas supply unit and the reaction gas supply unit to inject a backflow prevention gas into the processing vessel.
6. The apparatus of claim 5, wherein the doping element includes at least one of boron and carbon.
7. The apparatus of claim 5, wherein the reaction product includes silicon and at least one of nitrogen and oxygen.
8. The apparatus of claim 5, further comprising:
a reaction tube used as the processing vessel; and
a substrate holding unit provided in the reaction tube and configured to hold the plurality of substrates,
wherein the control unit outputs a control signal for: controlling the doping gas supply unit to supply the doping gas into the processing vessel in a state where the vacuum-exhaust operation of the processing vessel is stopped; and controlling the vacuum pump to resume the vacuum-exhaust operation of the processing vessel before a supply amount of the backflow prevention gas reaches a predetermined level of a supply amount of the doping gas
9. A non-transitory computer-readable storage medium storing a computer program operating on a computer,
wherein the computer program comprises a group of steps for performing the method according to claim 1.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An information processing device configured to measure power consumption of a specific function of said information processing device, and execute predetermined processing when a remaining amount of power of said information processing device becomes equal to or smaller than an amount of power consumption necessary for executing the specific function for a specific period of time with the measured power consumption, said information processing device comprising:
a power consumption calculator configured to calculate, for each processing executed by said information processing device, power consumption information concerning an amount of power consumed by executing each processing;
a request generator configured to compare the amount of power indicated by the power consumption information and a remaining amount of power of said information processing device, and to generate a request to execute the predetermined processing according to a result of the comparison; and
a request processor configured to execute the predetermined processing in response to the request generated by said request generator,
wherein the power consumption information includes: an ensured minimum execution time period, which is a minimum period of time for which a user wishes to execute the processing, and power consumption, which is an amount of power consumed when the processing is executed for a unit of time, and
said power consumption calculator is further configured to manage the power consumption information through historical management based upon previously calculated power consumption information.
2. The information processing device according to claim 1,
wherein said power consumption calculator is configured to calculate, as the power consumption, an average of the power consumption managed through historical management.
3. The information processing device according to claim 1,
wherein said power consumption calculator is configured to update the power consumption when the power consumption managed through historical management and current power consumption satisfy a predetermined condition.
4. The information processing device according to claim 1,
wherein the power consumption information further includes a processing operation mode in which processing is executed, and
said power consumption calculator is configured to calculate power consumption based on the power consumption managed through historical management and on the processing operation mode.
5. The information processing device according to claim 1,
wherein said power consumption calculator is configured to calculate power consumption by dividing, by an execution time period, an amount of power consumption for execution, the execution time period being a period of time for which processing is executed, and the amount of power consumption for execution being an amount of power consumed when the processing is executed for the execution time period.
6. The information processing device according to claim 5,
wherein the amount of power consumption for execution is calculated based on: a remaining amount of power of said information processing device at a start of the processing;
and a remaining amount of power of said information processing device at termination of the processing, and
the execution time period is calculated based on a time at the start of the processing and a time at the termination of the processing.
7. The information processing device according to claim 1,
wherein said power consumption calculator is configured to calculate power consumption based on: an amount of power consumption for execution, which is an amount of power consumed when the processing is executed for an execution time period, the execution time period, which is a period of time for which processing is executed and an external factor coefficient, which is a value determined based on an external factor affecting the power consumption.
8. The information processing device according to claim 7,
wherein said power consumption calculator is configured to calculate power consumption by multiplying, by the external factor coefficient, a value calculated by dividing the amount of power consumption for execution by the execution time period.
9. The information processing device according to claim 7,
wherein the external factor coefficient is determined based on an operation mode of a processor of said information processing device.
10. The information processing device according to claim 1,
wherein the ensured minimum execution time period is a value set in advance.
11. The information processing device according to claim 1,
wherein said power consumption calculator is configured to update the ensured minimum execution time period at a predetermined timing.
12. The information processing device according to claim 1,
wherein said power consumption calculator is configured to calculate the power consumption information when periodically occurs event is processed.
13. The information processing device according to claim 1,
wherein the power consumption information further includes an ensured amount of power, which is, an amount of power necessary for ensuring execution of processing for the ensured minimum execution time period, and
said request generator is configured to generate the request to execute the predetermined processing when a total ensured amount of power and the remaining amount of power satisfy a predetermined condition, the total ensured amount of power being a sum of ensured amounts of power of all processing.
14. The information processing device according to claim 1, the historical management being based upon a previously calculated history of power consumption, an ensured minimum execution time period and an operation mode.
15. A mobile terminal configured to measure power consumption of a specific function of an information processing device, and execute predetermined processing when a remaining amount of power of the information processing device becomes equal to or smaller than an amount of power consumption necessary for executing, with the measured power consumption, the specific function for a specific period of time, said mobile terminal comprising:
a power consumption calculator configured to calculate, for each processing executed by said information processing device, power consumption information concerning an amount of power consumed by executing each processing;
a request generator configured to compare the amount of power indicated by the power consumption information and a remaining amount of power of said information processing device, and to generate a request to execute the predetermined processing according to a result of the comparison; and
a request processor configured to execute the predetermined processing in response to the request generated by said request generator,
wherein the power consumption information includes: an ensured minimum execution time period, which is a minimum period of time for which a user wishes to execute the processing, and power consumption, which is an amount of power consumed when the processing is executed for a unit of time, and
said power consumption calculator is further configured to manage the power consumption information through historical management based upon previously calculated power consumption information.
16. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to display a message on said mobile terminal.
17. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to switch said mobile terminal to a power-saving mode.
18. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to notify another terminal of predetermined information.
19. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to either prohibit or permit execution of a specific function of said mobile terminal.
20. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to display, on said mobile terminal a location of a charging facility.
21. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to switch between operation modes of a specific function of said mobile terminal.
22. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to power off said mobile terminal.
23. The mobile terminal according to claim 15,
wherein the predetermined processing executed by the information processing device comprises processing to cause another mobile terminal to continue with execution of an operation which has been executed by said mobile terminal.
24. The mobile terminal according to claim 15, the historical management being based upon a previously calculated history of power consumption, an ensured minimum execution time period and an operation mode.