1. A fluorine-containing compound represented by formula (1),
wherein R1 represents a polymerizable double-bond containing group, R2 represents an acid-labile protecting group, R3 represents a fluorine atom or fluorine-containing alkyl group, and W represents a bivalent linking group.
2. A fluorine-containing compound according to claim 1, wherein R3 represents a fluorine atom.
3. A fluorine-containing compound according to claim 1, wherein a partial structure R1\u2014W\u2014 in formula (1) comprises a group selected from the group consisting of the following groups,
4. A fluorine-containing compound according to claim 1, wherein W represents a bivalent linking group selected from the group consisting of a single bond, \u2014(CR7R8)n\u2014 (wherein n represents an integer of 1-10, each of R7 and R8 independently represents a monovalent organic group, and R7 and R8 may be combined to form a ring), \u2014O\u2014, \u2014C(\u2550O)\u2014, \u2014C(\u2550O)O\u2014, \u2014O\u2014C(\u2550O)\u2014, a bivalent alicyclic hydrocarbon group, a bivalent aromatic hydrocarbon group, a thioether group, an ester group, an amide group, a sulfonamide group, a urethane group, a urea group, and combinations of these.
5. A fluorine-containing compound according to claim 1, which is selected from the group consisting of the following compounds,
wherein R2 is defined as in claim 1, R3 represents a fluorine atom or trifluoromethyl group, R7 represents a hydrogen atom or a straight-chain, branched or cyclic alkyl or fluoroalkyl group, R8 represents a straight-chain, branched or cyclic alkyl or fluoroalkyl group, and R7 and R8 may be combined to form a ring.
6. A fluorine-containing compound according to claim 5, wherein each of R7 and R8 independently represents a C1-C4 straight-chain or branched alkyl or fluoroalkyl group or a C3-C10 cyclic alkyl or fluoroalkyl group, or R7 and R8 are bonded together to form a C4-C8 alicyclic hydrocarbon group.
7. A fluorine-containing compound according to claim 5, wherein R7 represents a hydrogen atom or a monovalent organic group selected from the group consisting of methyl group, ethyl group, propyl group, butyl group, cyclopentyl group, cyclohexyl group, norbornyl group, adamantyl group, trifluoromethyl group, 2,2,2-trifluoroethyl group, 1-(trifluoromethyl)ethyl group, and 3,3,3-trifluoropropyl group,
R8 represents a monovalent organic group selected from the group consisting of methyl group, ethyl group, propyl group, butyl group, cyclopentyl group, cyclohexyl group, norbornyl group, adamantyl group, trifluoromethyl group, 2,2,2-trifluoroethyl group, 1-(trifluoromethyl)ethyl group, and 3,3,3-trifluoropropyl group, or
R7 and R8 are bonded together to form a cyclopentyl group, cyclohexyl group or cycloheptyl group.
8. A fluorine-containing compound according to claim 7, wherein R3 represents a fluorine atom.
9. A fluorine-containing compound according to claim 1, which is represented by one of the following formulas,
wherein R2 is defined as in claim 1.
10. A fluorine-containing compound according to claim 1, wherein R2 is a monovalent organic group selected from the group consisting of R11\u2014O\u2014C(\u2550O)\u2014, R11\u2014O\u2014CHR12\u2014, CR13R14R15\u2014, SiR13R14R15\u2014, and R11\u2014C(\u2550O)\u2014, where R11 represents an alkyl group, alicyclic hydrocarbon group, or aryl group; R12 represents a hydrogen atom, alkyl group, alicyclic hydrocarbon group, alkenyl group, aralkyl group, alkoxy group, or aryl group; each of R13, R14 and R15 independently represents an alkyl group, alicyclic hydrocarbon group, alkenyl group, aralkyl group, or aryl group; and at least two groups of R13, R14 and R15 may be combined to form a ring.
11. A fluorine-containing compound according to claim 1, wherein R2 represents a methoxymethyl or t-butyl group.
12. A fluorine-containing polymer compound comprising a repeating unit (a) represented by formula (2),
wherein R2 represents an acid-labile protecting group, R3 represents a fluorine atom or fluorine-containing alkyl group, W represents a bivalent linking group, each of R4, R5 and R6 independently represents a hydrogen atom, fluorine atom or monovalent organic group, and at least two of R4, R5 and R6 may be combined to form a ring,
wherein the fluorine-containing polymer compound has a weight-average molecular weight of 1,000 to 1,000,000.
13. A fluorine-containing polymer compound according to claim 12, wherein a partial structure in formula (2), which is represented by formula (9-1),
comprises a structure formed by cleavage of a polymerizable double bond of a group selected from the group consisting of the following groups,
14. A fluorine-containing polymer compound according to claim 12, wherein W represents a bivalent linking group selected from the group consisting of a single bond, \u2014(CR7R8)n\u2014 (wherein n represents an integer of 1-10, each of R7 and R8 independently represents a monovalent organic group, and R7 and R8 may be combined to form a ring), \u2014O\u2014, \u2014C(\u2550O)\u2014, \u2014C(\u2550O)O\u2014, \u2014O\u2014C(\u2550O)\u2014, a bivalent alicyclic hydrocarbon group, a bivalent aromatic hydrocarbon group, a thioether group, an ester group, an amide group, a sulfonamide group, a urethane group, a urea group, and combinations of these.
15. A fluorine-containing polymer compound according to claim 12, which comprises a structure formed by cleavage of a polymerizable double bond of a compound selected from the group consisting of the following compounds,
wherein R2 and R3 are defined as in claim 12, R7 represents a hydrogen atom or a straight-chain, branched or cyclic alkyl or fluoroalkyl group, R8 represents a straight-chain, branched or cyclic alkyl or fluoroalkyl group, and R7 and R8 may be combined to form a ring.
16. A fluorine-containing polymer compound according to claim 15, wherein each of R7 and R8 independently represents a C1-C4 straight-chain or branched alkyl or fluoroalkyl group or a C3-C10 cyclic alkyl or fluoroalkyl group, or R7 and R8 are bonded together to form a C4-C8 alicyclic hydrocarbon group.
17. A fluorine-containing polymer compound according to claim 15, wherein R7 represents a hydrogen atom or a monovalent organic group selected from the group consisting of methyl group, ethyl group, propyl group, butyl group, cyclopentyl group, cyclohexyl group, norbornyl group, adamantyl group, trifluoromethyl group, 2,2,2-trifluoroethyl group, 1-(trifluoromethyl)ethyl group, and 3,3,3-trifluoropropyl group,
R8 represents a monovalent organic group selected from the group consisting of methyl group, ethyl group, propyl group, butyl group, cyclopentyl group, cyclohexyl group, norbornyl group, adamantyl group, trifluoromethyl group, 2,2,2-trifluoroethyl group, 1-(trifluoromethyl)ethyl group, and 3,3,3-trifluoropropyl group, or
R7 and R8 are bonded together to form a cyclopentyl group, cyclohexyl group or cycloheptyl group.
18. A fluorine-containing polymer compound according to claim 17, wherein R3 represents a fluorine atom.
19. A fluorine-containing polymer compound according to claim 12, which comprises a structure formed by cleavage of a polymerizable double bond of one of the following compounds,
wherein R2 is defined as in claim 12.
20. A fluorine-containing polymer compound according to claim 12, wherein R2 is a monovalent organic group selected from the group consisting of R11\u2014O\u2014C(\u2550O)\u2014, R11\u2014O\u2014CHR12\u2014, CR13R14R15\u2014, SiR13R14R15\u2014, and R11\u2014-C(\u2550O)\u2014, where R11 represents an alkyl group, alicyclic hydrocarbon group, or aryl group; R12 represents a hydrogen atom, alkyl group, alicyclic hydrocarbon group, alkenyl group, aralkyl group, alkoxy group, or aryl group; each of R13, R14 and R15 independently represents an alkyl group, alicyclic hydrocarbon group, alkenyl group, aralkyl group, or aryl group; and at least two groups of R13, R14 and R15 may be combined to form a ring.
21. A fluorine-containing polymer compound according to claim 12, further comprising a repeating unit having a side chain with a lactone ring.
22. A fluorine-containing polymer compound according to claim 12, further comprising a repeating unit (b) derived from a polymerizable monomer selected from the group consisting of acrylates, fluorine-containing acrylates, methacrylates, fluorine-containing methacrylates, styrene compounds, fluorine-containing styrene compounds, vinyl ethers, fluorine-containing vinyl ethers, allyl ethers, fluorine-containing allyl ethers, acrylamides, methacrylamides, vinyl esters, allyl esters, olefins, fluorine-containing olefins, norbornene compounds, fluorine-containing norbornene compounds, sulfur dioxide, and vinyl silanes.
23. A fluorine-containing polymer compound according to claim 12, wherein the fluorine-containing polymer compound further comprises a repeating unit (b), and wherein the repeating unit (a) represented by formula (2) and the repeating unit (b) are respectively in 0.1-99.9 mol % and 99.9-0.1 mol %, based on a total mole number of all repeating units contained in the fluorine-containing polymer compound.
24. A resist composition comprising:
a fluorine-containing polymer compound according to claim 12;
an acid generator; and
a solvent.
25. A process for forming a pattern, comprising the steps of:
(a) applying a resist composition according to claim 24 on a substrate to form a resist film;
(b) exposing the resist film to a high-energy ray having a wavelength of 300 nm or shorter or electron beam through a photomask;
(c) heating the exposed resist film; and
(d) developing the heated resist film.
26. A process according to claim 25, further comprising the step of (e) heating the resist film, between the steps (a) and (b).
27. A process according to claim 25, wherein the high-energy ray of step (b) is a F2 excimer laser, ArF excimer laser, KrF excimer laser, or soft X-ray.
28. An electronic device comprising a pattern formed by a process according to claim 25.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An energy storage cooling system for a vehicle energy storage pack, the vehicle energy storage pack including a plurality of ultracapacitor cells and an external housing configured to enclose the plurality of ultracapacitor cells, the energy storage cooling system comprising:
a plurality of terminal heat exchangers, each terminal heat exchanger thermally coupled to one terminal of one of the plurality of ultracapacitor cells and configured to convect heat from its respective one terminal to a gas coolant, the plurality of terminal heat exchangers located inside the external housing;
a blower including a blower inlet and a blower exhaust, the blower configured to blow the gas coolant from the blower exhaust across the plurality of terminal heat exchangers with the gas coolant convecting heat from the plurality of terminal heat exchangers, the blower located inside the external housing;
a liquid coolant heat exchanger configured to receive and cool heated gas coolant, and further configured to feed cooled gas coolant to the blower inlet, the liquid coolant heat exchanger located inside the external housing;
a closed loop gas coolant flow path inside the external housing, the closed loop gas coolant flow path configured to direct the gas coolant from the blower across the plurality of terminal heat exchangers and to the liquid coolant heat exchanger;
an external liquid cooling source configured to receive heated liquid coolant from the liquid coolant heat exchanger and return cooled liquid coolant back to the liquid coolant heat exchanger;
a liquid coolant loop interfacing with the external liquid cooling source and the liquid coolant heat exchanger, liquid coolant loop configured to circulate liquid coolant between the liquid coolant heat exchanger and the external liquid cooling source.
2. The energy storage cooling system of claim 1, wherein each of the plurality of terminal heat exchangers includes a plurality of fin surfaces, and is configured to screw on to its respective terminal.
3. The energy storage cooling system of claim 1, further comprising:
at least one temperature sensor associated with the plurality of ultracapacitor cells; and,
a controller configured to actively control cooling of the plurality of ultracapacitor cells in response to the at least one temperature sensor, and wherein the controller is configured to meter at least one of liquid coolant flow, liquid coolant temperature, and gas coolant flow.
4. The energy storage cooling system of claim 3, wherein the controller is configured to cool multiple vehicle energy storage cell packs simultaneously.
5. The energy storage cooling system of claim 1, wherein the closed loop gas coolant flow path comprises ducting configured to direct the gas coolant from the blower, across the plurality of terminal heat exchangers, and back to the liquid coolant heat exchanger.
6. The energy storage cooling system of claim 1, wherein the external liquid cooling source comprises a vehicle cooling system.
7. The energy storage cooling system of claim 1, wherein the external liquid cooling source comprises a vehicle cooling system, a central water chiller, or a dedicated cooling supply.
8. The energy storage cooling system of claim 1, wherein the external liquid cooling source is configured to cool multiple vehicle energy storage cell packs simultaneously.
9. The energy storage cooling system of claim 1, wherein the gas coolant comprises air.
10. An energy storage cooling system for a propulsion energy storage pack in a vehicle, the vehicle having an electric drive system and a vehicle cooling system, the propulsion energy storage pack including a plurality of energy storage cells and an external housing configured to enclose the plurality of energy storage cells, the energy storage cooling system comprising:
a plurality of terminal heat exchangers, each terminal heat exchanger thermally coupled to one terminal of one of the plurality of energy storage cells and configured to convect heat from its respective one terminal to a gas coolant;
a liquid coolant heat exchanger configured to cool heated gas coolant;
a closed loop gas coolant flow path at least partially inside the propulsion energy storage pack, and configured to guide gas coolant across the plurality of terminal heat exchangers, then to the liquid coolant heat exchanger, the closed loop gas coolant flow path sealed from ambient air and contaminants outside the propulsion energy storage pack;
means to circulate gas coolant through the closed loop gas coolant flow path, convecting heat from the plurality of terminal heat exchangers, and convecting heat to the liquid coolant heat exchanger;
an external liquid cooling source;
a liquid coolant loop at least partially outside the propulsion energy storage pack interfacing with the external liquid cooling source and the liquid coolant heat exchanger, liquid coolant loop configured to circulate liquid coolant between and interface with the liquid coolant heat exchanger and the external liquid cooling source.
11. The energy storage cooling system of claim 10, wherein the energy storage cells are ultracapacitors.
12. The energy storage cooling system of claim 10, wherein the means to circulate gas coolant through the closed loop gas coolant flow path comprises a blower, the blower having a blower inlet and a blower exhaust.
13. The energy storage cooling system of claim 12, wherein the liquid coolant heat exchanger is coupled to the blower such that cooled gas coolant is delivered from the liquid coolant heat exchanger to the blower inlet.
14. The energy storage cooling system of claim 10, wherein the external liquid cooling source comprises the vehicle cooling system, the external liquid cooling source configured to receive heated liquid coolant from the liquid coolant heat exchanger and to return cooled liquid coolant to the liquid coolant heat exchanger via the liquid coolant loop.
15. The energy storage cooling system of claim 10, wherein the external liquid cooling source comprises a central water chiller or cooling supply, the external liquid cooling source configured to receive heated liquid coolant from the liquid coolant heat exchanger and to return cooled liquid coolant to the liquid coolant heat exchanger via the liquid coolant loop.
16. The energy storage cooling system of claim 10, wherein both the liquid coolant heat exchanger and the means to circulate gas coolant through the closed loop gas coolant flow path are located outside the external housing of the propulsion energy storage pack.
17. The energy storage cooling system of claim 10, wherein at least part of one inner surface of the external housing forms at least part of the closed loop gas coolant flow path.
18. The energy storage cooling system of claim 10, wherein the closed loop gas coolant flow path comprises ducting configured to direct gas coolant across the plurality of terminal heat exchangers and limit gas coolant from bleeding out or otherwise escaping the closed loop gas coolant flow path.
19. The energy storage cooling system of claim 10, wherein the gas coolant is air and the liquid coolant is water-based.