1. A salicide process, comprising:
forming a metal layer over a silicon layer, wherein the metal layer is selected from a group consisting of titanium, cobalt, platinum, palladium and an alloy thereof;
performing a first thermal process; and
performing a second thermal process, wherein the second thermal process comprises a first step performed at 600\u02dc700 degrees centigrade for 1 0\u02dc60 seconds and a second step performed at 750\u02dc850 degrees centigrade for 1 0\u02dc60 seconds.
2. The salicide process according to claim 1, wherein the first step of the second thermal process is performed at 630\u02dc670 degrees centigrade for 20\u02dc40 seconds.
3. The salicide process according to claim 1, wherein the second step of the second thermal process is performed at 780\u02dc820 degrees centigrade for 20\u02dc40 seconds.
4. The salicide process according to claim 1, wherein the first thermal process is a one-step thermal process.
5. The salicide process according to claim 4, wherein the one-step thermal process performed at 450\u02dc550 degrees centigrade for 1 0\u02dc60 seconds.
6. The salicide process according to claim 1, wherein the first and second steps of the second thermal process is a rapid thermal annealing process, respectively.
7. The salicide process according to claim 1, wherein the first thermal process is a rapid thermal annealing process.
8. The salicide process according to claim 1, further comprising performing a selective etching step before the second thermal process is performed.
9. A salicide process, comprising:
forming a metal layer over a silicon layer, wherein the metal layer is selected from a group consisting of nickel and an alloy thereof;
performing a first thermal process; and
performing a second thermal process, wherein the second thermal process comprises a first step performed at 300\u02dc400 degrees centigrade for 1 0\u02dc60 seconds and a second step performed at 450\u02dc550 degrees centigrade for 1 0\u02dc60 seconds.
10. The salicide process according to claim 9, wherein the first step of the second thermal process is performed at 330\u02dc370 degrees centigrade for 20\u02dc40 seconds.
11. The salicide process according to claim 9, wherein the second step of the second thermal process is performed at 480\u02dc520 degrees centigrade for 20\u02dc40 seconds.
12. The salicide process according to claim 9, wherein the first thermal process is a one-step thermal process.
13. The salicide process according to claim 12, wherein the one-step thermal process performed at 250\u02dc400 degrees centigrade for 1 0\u02dc60 seconds.
14. The salicide process according to claim 9, wherein the second thermal process is a rapid thermal annealing process.
15. The salicide process according to claim 9, wherein the first and second steps of the second thermal process is a rapid thermal annealing process, respectively.
16. The salicide process according to claim 9, further comprising performing a selective etching step before the second thermal process is performed.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of creating a surround experience for headphones, the method comprising:
receiving a first input audio channel signal and a second input audio channel signal;
splitting each of the first and second input audio channel signals into a high-pass audio signal and a low-pass audio signal;
cross-mixing the low-pass audio signal of the first input audio channel signal and the low-pass audio signal of the second input audio channel signal;
adjusting each of the low-pass audio signals by applying artificial reverberation, wherein the applying artificial reverberation comprises applying a different delay profile to each of the low-pass audio signals;
adding the high-pass audio signal and the adjusted and cross-mixed low-pass audio signal for each of the first and second input audio channel signals to generate a first output audio channel signal and a second output audio channel signal.
2. The method of claim 1 wherein the splitting is performed by a first audio crossover for the first input audio channel signal and by a second audio crossover for the second input audio channel signal, wherein each of the first and second audio crossovers is implemented using a second order infinite impulse response low-pass filter.
3. The method of claim 1 wherein the artificial reverberation is applied to each of the low-pass audio signals after the cross-mixing.
4. The method of claim 1 wherein the artificial reverberation is applied using a plurality of all-pass filters in series, wherein the applying the different delay profile to each of the low-pass audio signals comprises applying different delays at different positions in the series of all-pass filters between each of the low-pass audio signals.
5. The method of claim 1 wherein the applying artificial reverberation comprises:
applying a first delay profile to the low-pass audio signal of the first input audio channel signal using one or more all-pass filters; and
applying a second delay profile to the low-pass audio signal of the second input audio channel signal using one or more all-pass filters;
wherein the first delay profile is different from the second delay profile.
6. The method of claim 5 wherein the one or more all-pass filters used to apply the first delay profile are Schroeder all-pass filters, and wherein the one or more all-pass filters used to apply the second delay profile are Schroeder all-pass filters.
7. The method of claim 1 wherein the applying artificial reverberation comprises:
for the low-pass audio signal of the first input audio channel signal, passing the low-pass audio signal through a series of three Schroeder all-pass filters, wherein each of the three Schroeder all-pass filters introduces a delay;
for the low-pass audio signal of the second input audio channel signal, passing the low-pass audio signal through a series of three Schroeder all-pass filters, wherein each of the three Schroeder all-pass filters introduces a delay corresponding to the delay introduced by the Schroeder all-pass filter of the low-pass audio signal of the first input audio channel signal at the same stage of the series;
wherein one of the three Schroeder all-pass filters for the low-pass audio signal of the first input audio channel signal introduces a small additional delay when passing the low-pass audio signal through the series of three Schroeder all-pass filters;
wherein one of the three Schroeder all-pass filters for the low-pass audio signal of the second input audio channel signal introduces the small additional delay when passing the low-pass audio signal through the series of three Schroeder all-pass filters, wherein the small additional delay for the low-pass audio signal of the second input audio channel signal is introduced using a Schroeder all-pass filter at a different stage of the series than the small additional delay for the low-pass audio signal of the first input audio channel signal.
8. The method of claim 7 further comprising:
receiving a user-settable parameter used to control the small additional delay.
9. The method of claim 1 further comprising:
receiving a user-settable parameter that controls the cross-mixing by indicating an amount of channel cross-mixing to apply between the low-pass audio signal of the first input audio channel signal and the low-pass audio signal of the second input audio channel signal.
10. The method of claim 1, wherein the method is performed using integer calculations.
11. The method of claim 1, wherein the method is implemented by a portable computing device.
12. One or more computer-readable media comprising computer-executable instructions for causing a computing device to perform the method of claim 1.
13. A system for creating a surround experience for headphones, the system comprising:
an input module for receiving two input audio channel signals;
a crossover module for splitting each channel signal of the two input audio channel signals into a high-pass audio signal and a low-pass audio signal;
a channel cross-mixing module for cross-mixing the low-pass audio signals;
a reverberation module for applying artificial reverberation to each of the cross-mixed low-pass audio signals, wherein the reverberation module applies a different delay profile to each of the low-pass audio signals;
an adder module for combining the high-pass audio signal and the reverberation-applied and cross-mixed low-pass audio signal for each channel signal of the two input audio channel signals to generate two output audio channel signals.
14. The system of claim 13 wherein the crossover module comprises an audio crossover for each channel signal of the two input audio channel signals, and wherein each crossover is implemented using a second order infinite impulse response low-pass filter.
15. The system of claim 13 wherein the reverberation module comprises a plurality of Schroeder all-pass filters in series for each of the cross-mixed low-pass audio signals, wherein applying the different delay profile to each of the low-pass audio signals comprises applying different delays at different positions in the series of Schroeder all-pass filters between each of the low-pass audio signals.
16. The system of claim 13 wherein the reverberation module comprises:
two sets of three Schroeder all-pass filters in series, one set for each of the low-pass audio signals, for introducing delay in each of the low-pass audio signals, wherein delay amount is different between corresponding Schroeder all-pass filters in the series for each of the low-pass audio signals.
17. The system of claim 13 further comprising:
a user input module for receiving a user-settable parameter used to control a delay amount applied by the reverberation module.
18. The system of claim 13 further comprising:
a user input module for receiving a user-settable parameter that controls the cross-mixing by indicating an amount of cross-mixing between the low-pass audio signals.
19. A system for creating a surround experience for headphones, the system comprising:
an input module for receiving a mono input audio channel signal;
a crossover module for splitting the mono input audio channel signal into a high-pass audio signal and a low-pass audio signal;
a reverberation module for applying artificial reverberation to two copies of the low-pass audio signal, wherein the reverberation module applies a different delay profile to each copy of the low-pass audio signal, and wherein the reverberation module produces a left and right low-pass audio signal; and
an adder module for combining the high-pass audio signal with each of the left and right low-pass audio signals to generate left and right output audio channel signals.
20. The system of claim 19 wherein the reverberation module comprises:
two sets of three Schroeder all-pass filters in series, one set for each copy of the low-pass audio signal, for introducing delay in each copy of the low-pass audio signal, wherein delay amount is different between corresponding Schroeder all-pass filters in the series for each copy of the low-pass audio signal.