1. An imprint apparatus for transferring a pattern to an imprint material supplied to a substrate using a mold on which the pattern is formed, the apparatus comprising:
a substrate holding mechanism configured to be divided into a plurality of areas, capable of varying an attracting force for attracting the substrate in each of the plurality of the areas and to hold the substrate; and
a control unit;
wherein the control unit is configured to, when a plurality of shots is formed on the substrate, control an imprint operation of transferring the pattern to the plurality of shots which are not adjacent to one another, and to make the attracting force in the area of the substrate holding mechanism corresponding to the shot to which the pattern is transferred among the plurality of the areas smaller than the attracting force at the time of the imprint operation and suck the substrate.
2. The imprint apparatus according to claim 1, wherein the control unit is configured to transfer the pattern to shots which are not adjacent to one another among the plurality of shots of the substrate corresponding to any area of the substrate holding mechanism, release the attracting force of the substrate holding mechanism in the any area, and suck the substrate.
3. The imprint apparatus according to claim 1, wherein the control unit is configured to transfer the pattern to shots which are not adjacent to one another, release the attracting force of the substrate holding mechanism in the area corresponding to the shots to which the pattern is transferred among the plurality of areas after a predetermined time period elapses, and suck the substrate.
4. The imprint apparatus according to claim 1, wherein the control unit is configured not to transfer the pattern after the substrate holding mechanism sucks the substrate again to the shots adjacent to the shot to which the pattern is formed immediately before the substrate holding mechanism releases the attracting force of the substrate holding mechanism.
5. The imprint apparatus according to claim 1, wherein the substrate is sucked by the attracting force to such an extent that the substrate partially floats over the substrate holding mechanism when the mold is detached from the imprint material in the area where the pattern is transferred to the shots which are not adjacent to one another among the plurality of areas of the substrate holding mechanism.
6. The imprint apparatus according to claim 1, wherein the attracting force in at least one area other than the areas corresponding to the shots to which the pattern is transferred among the plurality of areas of the substrate holding mechanism is the one that does not distort the substrate when the mold is detached from the imprint material.
7. The imprint apparatus according to claim 1, wherein, when the pattern is transferred to the shots which are not adjacent to one another, the shots are distant by at least one shot or more.
8. The imprint apparatus according to claim 1, wherein the pattern is transferred to shots which are not adjacent to one another among the plurality of shots of the substrate corresponding to any area of the substrate holding mechanism, then the attracting force of the substrate holding mechanism in the any area is released and then the substrate is sucked again while the pattern is being transferred to shots corresponding to an area different from the any area.
9. An imprint method for transferring a pattern to an imprint material supplied to a substrate using a mold on which the pattern is formed, the method comprising:
holding the substrate by a substrate holding mechanism which is configured to be divided into a plurality of areas and capable of varying an attracting force for attracting the substrate in each of the areas;
transferring the pattern to the shots which are not adjacent to one another among the plurality of shots; and
lowering the attracting force for attracting the substrate in the area of the substrate holding mechanism corresponding to the shot to which the pattern is transferred among the plurality of the areas, and sucking the substrate.
10. A method for producing a device comprising:
forming a pattern on a substrate using an imprint apparatus; and
processing a substrate on which the pattern is formed by the forming process,
wherein the imprint apparatus for transferring a pattern to an imprint material supplied to a substrate using a mold on which the pattern is formed, the apparatus comprising:
a substrate holding mechanism configured to be divided into a plurality of areas, to be capable of varying an attracting force for attracting the substrate in each of the plurality of the areas and to hold the substrate; and
a control unit;
wherein the control unit is configured to, when a plurality of shots is formed on the substrate, control an imprint operation of transferring the pattern to the plurality of shots which are not adjacent to one another, and to make the attracting force in the area of the substrate holding mechanism corresponding to the shot to which the pattern is transferred among the plurality of the areas smaller than the attracting force at the time of the imprint operation and suck the substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An LED lighting fixture comprising:
a housing portion;
a light-emitting portion supporting at least one illuminator;
the housing portion and the light-emitting portion defining an open space therebetween permitting airwater-flow therethrough; and
at least one wall extending within the open space and open for airwater-flow along at least two sides thereof.
2. The LED lighting fixture of claim 1 wherein the light-emitting portion has an illuminator-supporting region supporting the at least one illuminator and having a proximal end adjacent to the housing portion, the open space being between the housing portion and the proximal end.
3. The LED lighting fixture of claim 2 wherein:
the housing portion includes a substantially closed chamber enclosing at least one power-circuitry driver; and
the light-emitting portion comprises a heat sink including the illuminator-supporting region and heat-dissipating surfaces extending therefrom; and
the open space is between the chamber and the illuminator-supporting region.
4. The LED light fixture of claim 3 wherein
the heat sink includes central and peripheral portions;
the central portion including the illuminator-supporting region and a plurality of elongate fins protruding in a direction opposite the illuminator, at least a subset of such elongate fins extends from the central heat-sink portion across the open space and have proximal fin-ends secured to the housing portion; and
the peripheral portion having peripheral heat-dissipating surfaces along the heat sink sides and including the at least one wall within the open space.
5. The LED light fixture of claim 1 wherein the light-emitting portion comprises a central and peripheral portions, the central portion including an illuminator-supporting region supporting the at least one illuminator, the peripheral portion having peripheral heat-dissipating surfaces along central-portion sides and including the at least one wall within the open space.
6. The LED light fixture of claim 5 wherein at least one of the peripheral heat-dissipating surfaces extends across the open space and has a proximal fin-end secured to the housing portion.
7. The LED light fixture of claim 1 wherein the at least one wall within the open space includes a plurality of fins extending across the open space and having two opposite fin ends each connected to one of the housing portion and the light-emitting portion.
8. The LED lighting fixture of claim 1 wherein the at least one wall extends within the open space substantially along the light-emitting portion.
9. The LED lighting fixture of claim 8 wherein:
the light-emitting portion comprises an illuminator-supporting region with the at least one illuminator secured with respect thereto;
the housing portion includes a substantially closed chamber enclosing at least one power-circuitry driver; and
the at least one wall divides the open space into an illuminator-adjacent flow region and a chamber-adjacent flow region.
10. The LED lighting fixture of claim 9 wherein the light-emitting portion comprises at least one fin which extends from the illuminator-supporting region and has a fin-end secured to the at least one wall within the open space.
11. The LED lighting fixture of claim 10 wherein the light-emitting portion comprises a plurality of fins extending from the illuminator-supporting region across the illuminator-adjacent flow region to the at least one wall.
12. The LED light fixture of claim 1 wherein the housing portion and the light-emitting portion are formed as a single piece, at least one illuminator being secured with respect to an illuminator-supporting region of the light-emitting portion.
13. An LED lighting fixture comprising a housing portion and a light-emitting portion supporting at least one illuminator, the housing portion and the light-emitting portion defining an open space therebetween permitting airwater-flow therethrough.
14. The LED lighting fixture of claim 13 wherein:
the housing portion includes a substantially closed chamber enclosing at least one power-circuitry driver; and
the at least one illuminator of the light-emitting portion comprises at least one LED module; and
the open space is between the chamber and the at least one LED module.
15. The LED lighting fixture of claim 13 wherein the light-emitting portion has an illuminator-supporting region supporting the at least one illuminator and having a proximal end adjacent to the housing portion, the open space being between the housing portion and the proximal end.
16. The LED light fixture of claim 13 wherein the housing portion and the light-emitting portion are each formed as part of a one piece which comprises at least one frame member supporting the light-emitting portion with respect to the housing portion.
17. The LED light fixture of claim 16 wherein the frame member has two ends secured to the housing portion and extends therefrom around the light-emitting portion with through-space(s) between the frame member and the light-emitting portion.
18. The LED light fixture of claim 17 wherein the frame member defines a forward region and a rearward region with the open space therebetween, the forward region has the light-emitting portion, and the rearward region has the housing portion.
19. The LED light fixture of claim 18 wherein the rearward region has an enclosure defining a chamber enclosing at least one power-circuitry driver, the enclosure having upper and lower shells, the upper shell being part of the one piece, the lower shell being movably secured with respect to the upper shell.
20. The LED light fixture of claim 13 wherein the housing portion and the light-emitting portion are formed as a single piece, at least one illuminator being secured with respect to an illuminator-supporting region of the light-emitting portion.