1. A method of manufacturing a solar cell, the method comprising the steps of:
providing a substrate having a front side, a back side and a doped region adjacent to the front side;
forming a lower conductor layer on the front side of the substrate;
firing the lower conductor layer at a first temperature such that the lower conductor layer is formed with a first portion embedded into the doped region and a second portion other than the first portion;
forming an anti-reflection coating (ARC) layer on the front side of the substrate and the second portion of the lower conductor layer, wherein the ARC layer covers the lower conductor layer such that the second portion of the lower conductor layer is disposed in the ARC layer;
forming an upper conductor layer, which corresponds to the lower conductor layer, on the ARC layer; and
firing the upper conductor layer at a second temperature such that the upper conductor layer is formed with a first portion embedded into the ARC layer and a second portion other than the first portion of the upper conductor layer, wherein the second portion of the upper conductor layer is exposed out of the ARC layer, and the upper conductor layer is electrically connected to the lower conductor layer.
2. The method according to claim 1, further comprising the step of:
forming a backside electrode layer on the back side of the substrate.
3. The method according to claim 1, wherein the lower conductor layer is formed by way of screen printing or injection printing.
4. The method according to claim 1, wherein the second temperature is higher than the first temperature.
5. The method according to claim 1, wherein the ARC layer is formed by way of chemical vapor deposition (CVD), sputtering or spin coating.
6. The method according to claim 1, wherein the upper conductor layer is formed by way of screen printing or injection printing.
7. The method according to claim 1, wherein the substrate is a silicon substrate.
8. The method according to claim 1, wherein a material of the ARC layer comprises silicon nitride.
9. The method according to claim 1, wherein both of the upper and lower conductor layers are made of silver.
10. The method according to claim 1, wherein the lower conductor layer is in Ohmic contact with the doped region.
11. The method according to claim 1, wherein a thickness of the lower conductor layer ranges from 20 to 30 microns.
12. The method according to claim 1, wherein the second temperature is lower than 850\xb0 C.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An inkjet dispensing apparatus comprising:
a cartridge including a first channel and a second channel, wherein the first channel has a first kind of liquid therein, and the second channel has a second kind of liquid therein;
a chip, disposed on the cartridge, including a first conductor and a second conductor, wherein the first conductor is in contact with the first kind of liquid, and the second conductor is in contact with the second kind of liquid; and
a sensor controller, coupled to the first conductor and the second conductor, to detect leakage between the first channel and the second channel, wherein the sensor controller is a multimeter.
2. The inkjet dispensing apparatus as claimed in claim 1, further comprising:
a first terminal coupled to the first conductor such that the sensor controller is, in turn, coupled to the first conductor via the first terminal; and
a second terminal coupled to the second conductor such that the sensor controller is, in turn, coupled to the second conductor via the second terminal.
3. The inkjet dispensing apparatus as claimed in claim 1, wherein the chip farther comprises;
an isolation layer, including a plurality of contact holes, upon which the first conductor and the second conductor are disposed; and
a conductive layer upon which the isolation layer is disposed, wherein the first conductor and the second conductor are coupled to the conductive layer via the contact holes.
4. The inkjet dispensing apparatus as claimed in claim 3, wherein the isolation layer comprises SiN and SiC.
5. The inkjet dispensing apparatus as claimed in claim 3, wherein the conductive layer comprises Al.
6. The inkjet dispensing apparatus as claimed in claim 3, wherein the conductive layer is coupled to the sensor controller such that the first conductor and the second conductor are, in turn, coupled to the sensor controller via the conductive layer.
7. The inkjet dispensing apparatus as claimed in claim 1, wherein the chip further comprises an actuator therein.
8. The inkjet dispensing apparatus as claimed in claim 7, wherein the actuator is a heating layer comprising TaAl.
9. The inkjet dispensing apparatus as claimed in claim 1, wherein the first conductor and the second conductor comprises Ta.
10. The inkjet dispensing apparatus as claimed in claim 1, further comprising:
a barrier layer disposed on the chip; and
a nozzle plate, disposed on the barrier layer, including a plurality of orifices communicating with the first channel and the second channel respectively.
11. The inkjet dispensing apparatus as claimed in claim 10, wherein the nozzle plate comprises polyimide.
12. The inkjet dispensing apparatus as claimed in claim 1, wherein the chip comprises glass.
13. The inkjet dispensing apparatus as claimed in claim 1, wherein the chip comprises silicon, and includes an electric-isolating layer therein.
14. The inkjet dispensing apparatus as claimed in claim 1, wherein the sensor controller includes a voltage supply device providing voltage to the first conductor and the second conductor.
15. An inkjet dispensing apparatus comprising:
a cartridge including a first channel and a second channel, wherein the first channel has a first kind of liquid therein, and the second channel has a second kind of liquid therein;
a chip, disposed on the cartridge, including:
a first conductor, wherein the first conductor is in contact with the first kind of liquid;
a second conductor, wherein the second conductor is in contact with the second kind of liquid;
an isolation layer, including a plurality of contact holes, upon which the first conductor and the second conductor are disposed;
a conductive layer upon which the isolation layer is disposed, wherein the first conductor and the second conductor are coupled to the conductive layer via the contact holes; and
a sensor controller, coupled to the first conductor and the second conductor, to detect leakage between the first channel and the second channel, wherein the conductive layer is coupled to the sensor controller such that the first conductor and second conductor are, in turn, coupled to the sensor controller via the conductive layer.
16. An inkjet dispensing apparatus comprising:
a cartridge including a first channel and a second channel, wherein the first channel has a first kind of liquid therein, and the second channel has a second kind of liquid therein;
a chip, disposed on the cartridge, including a first conductor and a second conductor, wherein the first conductor is in contact with the first kind of liquid, and the second conductor is in contact with the second kind of liquid;
a sensor controller, coupled to the first conductor and the second conductor, to detect leakage between the first channel and the second channel;
a barrier layer disposed on the chip; and
a nozzle plate, disposed on the barrier layer, including a plurality of orifices communicating with the first channel and the second channel respectively, wherein the nozzle plate comprises polyimide.