What is claimed is:
1. A laser processing apparatus for performing light ablation process using laser beam from a laser oscillator continuously emitting light pulse having large spatial and temporal energy concentration at pulse emission time of 1 pico second or less, comprising:
beam dividing means for dividing laser beam from said laser oscillator into plural beams, and optical systems provided separately for each of said divided beams, wherein
plural processing portions are processed together by irradiating laser to plural processing portions at a time through said optical systems.
2. A laser processing apparatus according to claim 1, wherein said beam dividing means is means for dividing the energy intensity of said laser beam into plural stages, and said energy intensity is equally divided by Nth power of 2 (N being an integer) or divided by an arbitral ratio of energy intensity into multiple stages, not necessarily limited to said equal division.
3. A laser processing apparatus according to claim 1, wherein said beam dividing means is provided with a wavelength plate for changing the states of light polarization and a polarization beam splitter, and structured to divide said laser beam by separating laser beam from said laser oscillator to vertically polarized wave and horizontally polarized wave by use of said means.
4. A laser processing apparatus according to claim 1, wherein said beam dividing means is structured to divide said laser beam by separating laser beam from said laser oscillator by use of a beam splitter for non-polarized light.
5. A laser processing apparatus according to claim 1, wherein said laser oscillator continuously emitting light pulse of large spatial and temporal energy concentration at pulse emission time of 1 pico second or less is a laser oscillator having a space compression device for light propagation.
6. A laser processing apparatus according to claim 5, wherein said space compression device for light propagation comprises means for generating chirped pulse and vertical mode synchronizing means utilizing light wavelength dispersion characteristics.
7. A laser processing apparatus according to claim 1, wherein said laser beam emitted at pulse emission time of 1 pico second or less is laser being oscillated in single mode for the horizontal mode therefor.
8. A laser processing method for performing light ablation process using laser beam from a laser oscillator continuously emitting light pulse having large spatial and temporal energy concentration at pulse emission time of 1 pico second or less, comprising the following steps of:
dividing laser beam from said laser oscillator into plural beams; and
processing plural processing portions altogether by irradiating laser to plural processing portions simultaneously through individual optical system per divided beam.
9. A laser processing method according to claim 8, wherein said laser beam division is provided with a step to separate energy intensity of said laser beam into plural stages, and effectuated by equally dividing said energy intensity to Nth power of 2 (N being integer) or multiply dividing said energy intensity by arbitral energy intensity coefficient, not necessarily limited to said equal division.
10. A laser processing method according to claim 8, wherein said laser beam division is effectuated by the separation of vertically polarized wave and horizontally polarized wave using wavelength plate for changing the states of polarization and polarized light beam splitter.
11. A laser processing method according to claim 8, wherein said laser beam division is effectuated by separating laser beam from said laser oscillator by use of a beam splitter for non-polarized light.
12. A laser processing method according to claim 8, wherein said processing of plural processing portions altogether is a processing of a work piece of one and the same material in one and the same processing shape or a processing of work pieces of different materials in different processing shapes.
13. A laser processing method according to claim 8, wherein said laser oscillator continuously emitting light pulse of large spatial and temporal energy concentration at pulse emission time of 1 pico second or less is a laser oscillator having a space compression device for light propagation.
14. A laser processing method according to claim 13, wherein said space compression device for light propagation comprises means for generating chirped pulse and vertical mode synchronizing means utilizing light wavelength dispersion characteristics.
15. A laser processing method according to claim 8, wherein said laser beam emitted at pulse emission time of 1 pico second or less is laser being oscillated in single mode for the horizontal mode therefor.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A glass coating method comprising coating a glass bottle with a glass coating agent while maintaining the temperature of the glass 450 to 750\xb0 C. to form a metal oxide layer on the surface of the glass, wherein said glass coating agent comprises a metallic compound represented by formula (I):
R1k-mM(OCOR2)m\u2003\u2003(I)
wherein M represents a metal atom selected from the group consisting of tin, titanium, indium, silicon, zirconium, and aluminum;
R1 represents a straight-chain, branched, or cyclic alkyl, alkenyl, or aryl group having 1 to 6 carbon atoms;
R2 represents a branched alkyl group having 3 to 6 carbon atoms;
k is a number representing the valence of the metal atom M, and
m is 2, and
wherein said glass coating agent is in the form of a liquid, in the form of a dispersion or solution in a solvent, or in the form of a gas.
2. A glass coating method comprising coating a glass plate with a glass coating agent while maintaining the temperature of the glass at 450 to 750\xb0 C. to form a metal oxide layer on the surface of the glass, wherein said glass coating agent comprises a metallic compound represented by formula (1):
R1k-mM(OCOR2)m\u2003\u2003(I)
wherein M represents a metal atom selected from the group consisting of tin, titanium, indium, silicon, zirconium, and aluminum;
R1 represents a straight-chain, branched, or cyclic alkyl, alkenyl, or aryl group having 1 to 6 carbon atoms;
R2 represents a branched alkyl group having 3 to 6 carbon atoms;
k is a number representing the valence of the metal atom M, and
m is 2, and
wherein said glass coating agent is in the form of a liquid, in the form of a dispersion or solution in a solvent, or in the form of a gas.
3. A glass coating method according to claim 1, wherein the metallic compound is dibutyltin dipivalate, dibutyltin diisobutylate, dibutyltin dineoheptate, dibutyltin diisolactate, monobutyltin tripivalate, monomethyltin tripivalate, monobutyltin triisobutylate, dimethyltin dipivalate, dimethyltin diisobutylate, stannous pivalate, stannic pivalate, tributylsilyl pivalate, triisopropylsilyl pivalate, triisopropylsilyl isobutylate, dibutylsilyl dipivalate, diisopropylsilyl dipivalate, diphenylsilyl dipivalate, monophenylsilyl tripivalate, dimethyltitanium dipivalate, monobutylindium dipivalate, or diethylzirconium dipivalate.
4. A glass coating method according to claim 2, wherein the metallic compound is dibutyltin dipivalate, dibutyltin diisobutylate, dibutyltin dineoheptate, dibutyltin diisolactate, monobutyltin tripivalate, monomethyltin tripivalate, monobutyltin triisobutylate, dimethyltin dipivalate, dimethyltin diisobutylate, stannous pivalate, stannic pivalate, tributylsilyl pivalate, triisopropylsilyl pivalate, triisopropylsilyl isobutylate, dibutylsilyl dipivalate, diisopropylsilyl dipivalate, diphenylsilyl dipivalate, monophenylsilyl tripivalate, dimethyltitanium dipivalate, monobutylindium dipivalate, or diethylzirconium dipivalate.
5. A glass coating method according to claim 1, wherein the metallic compound is dibutyltin dipivalate.
6. A glass coating method according to claim 2, wherein the metallic compound is dibutyltin dipivalate.
7. A glass coating method according to claim 1, wherein said glass bottles are continuously coated with said coating agent by CVD while carrying the glass bottles at given intervals and constant speed on a conveyor belt.
8. A glass coating method according to claim 2, wherein said glass plates are continuously coated with said coating agent by CVD while carrying the glass plates at given intervals and constant speed on a conveyor belt.