1. A detector arrangement for energy measurement of pulsed x-ray radiation, particularly for monitoring the radiation dose of pulsed EUV radiation sources, comprising:
a closed vessel having an inlet opening for radiation to be detected;
said vessel being filled with a suitable gas under defined pressure for absorbing the radiation and having a linear extension, at least in the direction of incidence of the radiation, which is adapted to the absorption behavior of the gas so that the radiation to be detected is absorbed before it can reach a wall of the vessel; and
at least one pressure sensor which is arranged in the vessel for measuring a pressure wave generated due to the local temperature change occurring as a result of temporary intensive radiation absorption.
2. The detector arrangement according to claim 1, wherein the gas in the vessel is adjusted with respect to type and density in such a way that the product of absorption coefficient, gas density and linear dimension of the gas vessel in the direction of incidence of the radiation is much greater than one so that the radiation to be measured is virtually completely absorbed in the exposed gas volume.
3. The detector arrangement according to claim 2, wherein the vessel has measuring devices for monitoring the gas density.
4. The detector arrangement according to claim 3, wherein a static pressure sensor and a temperature sensor are arranged in the vessel.
5. The detector arrangement according to claim 2, wherein an inert gas with an atomic number of Z>4 which favorably absorbs the radiation to be measured is provided as gas in the vessel.
6. The detector arrangement according to claim 5, wherein a noble gas is provided as gas.
7. The detector arrangement according to claim 5, wherein a gas mixture comprising gases with atomic numbers Z>4 is used as gas.
8. The detector arrangement according to claim 1, wherein acoustic sensors are provided as dynamic pressure sensors for energy measurement of the pressure wave generated by the absorption of radiation.
9. The detector arrangement according to claim 8, wherein one or more condenser microphones are provided as dynamic pressure sensors.
10. The detector arrangement according to claim 1, characterized in that one or more piezoelectric sensors are provided as dynamic pressure sensors.
11. The detector arrangement according to claim 1, wherein the dynamic pressure sensor is positioned in such a way that it is not directly struck by the radiation and preferably is arranged lateral to the direction of the radiation entering through the inlet opening.
12. The detector arrangement according to claim 1, wherein a gas supply device and a vacuum pump is provided for regular exchange of the gas to ensure identical conditions with respect to purity and density of the gas over long periods of time.
13. The detector arrangement according to claim 12, wherein xenon is provided in energy measurement of EUV radiation sources based on a gas discharge as gas for the energy absorption in the vessel and as work gas for plasma generation, wherein the gas pressure in the vessel is adjusted so as to be greater than the gas pressure in the discharge chamber of the EUV radiation source.
14. The detector arrangement according to claim 13, wherein the inlet opening of the vessel for the radiation is connected directly to the discharge chamber of the EUV radiation source by a connection flange and an inlet diaphragm unit limits the inlet opening in such a way that the xenon in the vessel is kept at a higher partial pressure relative to the discharge chamber by differential pumping and the vessel is a quasi-closed system.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of adapting digital content to be delivered to a computing device, the method comprising:
receiving, by a digital-content optimization gateway operating on a mobile-telecommunications network, a communication requesting that the digital content be provided to the computing device;
determining by the digital-content optimization gateway that a version of the digital content should be transformed into an adapted version of the digital content, which is to be provided to the computing device in response to the communication;
requesting, by the digital-content optimization gateway, that a callout server transform the version of the digital content into the adapted version of the digital content;
splitting by the callout server the version of the digital content into a plurality of digital-content segments;
transmitting by the callout server each digital-content segment of the plurality of digital-content segments to a respective adaptation server included among a plurality of adaptation servers, wherein the callout server further transmits a session description to the digital-content optimization gateway, the session description comprising one or more addresses of one or more servers from which a plurality of adapted digital-content segments are retrievable;
adapting the plurality of digital-content segments in parallel by the plurality of adaptation servers to create the plurality of adapted digital-content segments;
transmitting the one or more addresses that identify the plurality of adaptation servers to the computing device;
receiving from the computing device one or more requests utilizing the one or more addresses that identify the plurality of adaptation servers to provide the respective adapted digital-content segment; and
transmitting by the plurality of adaptation servers the plurality of adapted digital-content segments to the computing device in response to receiving the one or more requests.
2. The method of claim 1 further comprising,
determining by the callout server workloads and capabilities of the plurality of adaptations servers,
based on the workloads and capabilities, assigning by the callout server a respective adaptation task to each adaptation server of the plurality of adaptation servers, wherein the each digital-content segment is transmitted to the respective adaptation server based on the respective adaptation task.
3. The method of claim 1,
wherein the plurality of adaptation servers includes a recombination server, and
wherein the method comprises compiling by the recombination server the plurality of adapted digital-content segments into the adapted version of the digital content, the adapted version of the digital content being retrievable from the recombination server.
4. The method of claim 3, wherein transmitting the plurality of adapted digital-content segments to the computing device includes transmitting the adapted version to the computing device.
5. A system that adapts digital content to be delivered to a computing device, the system comprising:
a digital-content optimization gateway including a computer processor that receives a communication requesting that the digital content be provided to the computing device, wherein the digital-content optimization gateway determines that a version of the digital content should be transformed into an adapted version of the digital content;
a callout server including a computer processor that receives a request from the digital-content optimization gateway to transform the version of the digital content, wherein the callout server splits the version of the digital content into a plurality of digital-content segments, which are transmitted to a plurality of adaptation servers, and wherein the callout server further transmits a session description to the digital-content optimization gateway, the session description comprising one or more addresses of the plurality of adaptation servers from which a plurality of adapted digital-content segments are retrievable; and
the plurality of adaptation servers, each of which receives a respective digital-content segment of the plurality of digital-content segments and adapts the respective digital-content segment,
wherein the plurality of adaptation servers adapts the plurality of digital-content segments in parallel to create the plurality of adapted digital-content segments,
wherein the one or more addresses that identify the plurality of adaptation servers are provided to the computing device;
wherein one or more requests are received from the computing device utilizing the one or more addresses that identify the plurality of adaptation servers to provide the respective adapted digital-content segment; and
wherein the plurality of adapted digital-content segments is provided to the computing device in response to receiving the one or more requests.
6. Non-transitory computer-storage media storing computer-useable instructions thereon that, when executed, perform a method of adapting digital content to be delivered to a computing device, the method comprising:
receiving from the computing device a communication requesting that the digital content be provided to the computing device;
determining by a digital-content optimization gateway that a version of the digital content should be transformed into an adapted version of the digital content, which is to be provided to the computing device in response to the communication;
transmitting by the digital-content optimization gateway a request for adaptation services to a callout server;
splitting by the callout server the version of the digital content into a plurality of digital-content segments;
transmitting by the callout server each digital-content segment of the plurality of digital-content segments to a respective adaptation server included among a plurality of adaptation servers, wherein the callout server further transmits a session description to the digital-content optimization gateway, the session description comprising one or more addresses of the plurality of adaptation servers from which a plurality of adapted digital-content segments are retrievable;
adapting the plurality of digital-content segments in parallel by the plurality of adaptation servers to create the plurality of adapted digital-content segments;
transmitting the one or more addresses that identify the plurality of adaptation servers to the computing device;
receiving from the computing device one or more requests utilizing the one or more addresses that identify the plurality of adaptation servers to provide the respective adapted digital-content segment; and
transmitting by the plurality of adaptation servers the plurality of adapted digital-content segments to the computing device in response to receiving the one or more requests.
7. The media of claim 6, wherein the method further comprises,
determining by the callout server workloads and capabilities of the plurality of adaptations servers, and
transmitting by the callout server the plurality of digital-content segments to the plurality of adaptations servers based on the workloads and capabilities.