1. A probabilistic vending machine comprising:
a fixed shaft having an empty space in a center and extending in a first direction;
a fixed plate connected with the fixed shaft and having a stopper;
a driving gear connected with the fixed shaft;
a driving plate connected with the driving gear and rotating in a first rotational direction or a second rotational direction opposite to the first rotational direction;
a first transfer gear connected with the driving gear;
a driving shaft connected with the first transfer gear;
a rotary shaft disposed in the empty space of the fixed shaft and extending in the first direction;
a rotary plate connected with rotary shaft;
a second transfer gear connected to the driving shaft;
a third transfer gear connected to the rotary shaft to correspond to the second transfer gear;
a gear control mechanism moving the driving shaft in the first direction; and
a rotary shaft deceleration mechanism reducing a rotational speed of the rotary shaft.
2. The probabilistic vending machine of claim 1, wherein the gear control mechanism includes a gear control motor that rotates, and is moved straight in the first direction by operation of the gear control motor.
3. The probabilistic vending machine of claim 1, wherein the rotary shaft deceleration device includes a rotary shaft deceleration motor that rotates and a power transmission mechanism connected to the rotary shaft and transmits torque from the rotary shaft deceleration motor to the rotary shaft.
4. The probabilistic vending machine of claim 1, further comprising a plurality of supports spaced from each other in the first direction and supporting positions of the fixed shaft, the driving shaft, and the rotary shaft by passing through at least one of the fixed shaft, the driving shaft, and the rotary shaft.
5. The probabilistic vending machine of claim 1, further comprising a shield disposed on the fixed plate and covering the rotary plate.
6. The probabilistic vending machine of claim 1, further comprising a shield disposed on the driving plate and covering the driving plate.
7. A probabilistic vending machine comprising:
a first fixed shaft being a hollow shaft and extending in a first direction;
a driving gear connected with the first fixed shaft;
a driving plate connected with the driving gear and rotating in a first rotational direction or a second rotational direction opposite to the first rotational direction;
a rotary shaft being a hollow shaft, disposed inside the first fixed shaft, and extending in the first direction;
a rotary plate connected with the rotary shaft;
a second fixed shaft disposed inside the rotary plate and extending in the first direction;
a fixed plate connected to the second fixed shaft and having a stopper;
a first transfer gear connected with the driving gear;
a driving shaft connected with the first transfer gear;
a second transfer gear connected to the driving shaft;
a third transfer gear connected to the rotary shaft to correspond to the second transfer gear;
a gear control mechanism moving the driving shaft in the first direction; and
a rotary shaft deceleration mechanism reducing a rotational speed of the rotary shaft.
8. The probabilistic vending machine of claim 7, wherein the gear control mechanism includes a gear control motor that rotates, and is moved straight in the first direction by operation of the gear control motor.
9. The probabilistic vending machine of claim 7, wherein the rotary shaft deceleration device includes a rotary shaft deceleration motor that rotates and a power transmission mechanism connected to the rotary shaft and transmits torque from the rotary shaft deceleration motor to the rotary shaft.
10. The probabilistic vending machine of claim 7, further comprising a plurality of supports spaced from each other in the first direction and supporting positions of the first and second fixed shafts, the driving shaft, and the rotary shaft by passing through at least one of the first and second fixed shaft, the driving shaft, and the rotary shaft.
11. The probabilistic vending machine of claim 7, further comprising a shield disposed on the fixed plate and covering the rotary shaft.
12. The probabilistic vending machine of claim 7, further comprising a shield disposed on the driving plate and covering the driving plate.
13. A probabilistic vending machine comprising:
a driving plate rotating in a first rotational direction or a second rotational direction opposite to the first rotational direction;
a fixed shaft having an empty space in a center and extending in a first direction;
a driving gear connected with the driving shaft;
a fixed shaft extending in the first direction in the empty space of the driving shaft;
a rotary shaft disposed in an empty space of the fixed shaft and extending in the first direction;
a rotary plate connected with rotary shaft;
a fixed plate disposed on the fixed shaft and having a stopper;
a first gear connected with the driving shaft;
a second gear engaging with the first gear or disengaging from the first gear by moving in the first direction;
a third gear engaged with the second gear and connected with the rotary shaft;
a gear control mechanism moving the second gear in the first direction; and
a rotary shaft deceleration mechanism reducing a rotational speed of the rotary shaft.
14. The probabilistic vending machine of claim 13, wherein the gear control mechanism includes a gear control motor that rotates, and is moved straight in the first direction by operation of the gear control motor.
15. The probabilistic vending machine of claim 13, wherein the rotary shaft deceleration device includes a rotary shaft deceleration motor that rotates and a power transmission mechanism connected to the rotary shaft and transmits torque from the rotary shaft deceleration motor to the rotary shaft.
16. The probabilistic vending machine of claim 13, further comprising a shield disposed on the driving plate and covering the driving plate.
17. A driving device of a probabilistic vending machine, comprising:
a rotary shaft state sensing unit sensing an operation state of a rotary shaft and outputting a signal showing a corresponding state;
a control unit connected with the rotary shaft state sensing unit;
a gear control motor connected to the control unit; and
a rotary shaft deceleration motor connected to the control unit,
wherein when a rotational speed of the rotary shaft determined on the basis of a rotary shaft state sensing signal outputted from the rotary shaft state sensing unit is a second setup speed or more, the control unit disengages a driving shaft and a rotary shaft from each other by operating the gear control motor, and
when the rotational speed of the rotary shaft determined on the basis of a rotary shaft state sensing signal outputted from the rotary shaft state sensing unit is a third setup speed or more, the control unit controls deceleration state of the rotary shaft deceleration motor, using a current stopper position, a final stop section of the stopper, and a final stop state of the stopper.
18. The driving device of claim 17, wherein the final stop section and the final stop state of the stopper are determined in accordance with the number of driving times of the probabilistic vending machine.
19. The driving device of claim 17, wherein the control unit performs deceleration control with a predetermined deceleration degree of the rotary shaft motor in accordance with a change of the rotational speed of the rotary shaft.
20. The driving device of claim 17, wherein when the rotational speed of the rotary shaft determined on the basis of the rotary shaft state sensing signal outputted from the rotary shaft state sensing unit is a first setup speed or more, the control unit determines whether or not the rotational speed of the rotary shaft determined on the basis of a rotary shaft state sensing signal outputted from the rotary shaft state sensing unit is a second setup speed or more.
21. The driving device of claim 17, wherein when the rotational speed of the rotary shaft determined on the basis of the rotary shaft state sensing signal outputted from the rotary shaft state sensing unit is a first setup speed or more, the control unit increases the number of driving times by \u20181\u2019, and
when the increased number of driving times is less than a setup number of driving times, the control unit determines whether or not the rotational speed of the rotary shaft determined on the basis of a rotary shaft state sensing signal outputted from the rotary shaft state sensing unit is a second setup speed or more.
22. The driving device of claim 17, wherein when the rotational speed of the rotary shaft determined on the basis of the rotary shaft state sensing signal outputted from the rotary shaft state sensing unit less than a first setup speed, the control unit increases the number of rotation times of a driving plate by \u20181\u2019, and
when the increased number of rotation times of the driving shaft is a setup number of times or more, the control unit restricts a current user using the probabilistic vending machine.
23. The driving device of claim 22, wherein when the number of rotation times of the rotary shaft is a setup number of times or more, the control unit disengages the driving shaft and the rotary shaft from each other by operating the gear control motor.
24. The driving device of claim 17, further comprising a money sensing unit sensing whether money has been put into a slot and outputting a signal showing a corresponding state,
wherein the control unit determines via the money sensing unit whether a predetermined amount of money has been put into the slot through, and
when the money sensing unit senses the predetermined amount of money put in the slot, the control unit engages the rotary shaft and the driving shaft with each other by operating the gear control motor.
25. The driving device of claim 24, further comprising a driving shaft state sensing unit sensing an operation state of the driving shaft and outputting a signal showing a corresponding state,
wherein when a speed of the driving shaft determined on the basis of a driving shaft state sensing signal outputted from the driving shaft state sensing unit is in a stop state, the control unit engages the rotary shaft and the driving shaft with each other by operating the gear control motor.
26. The driving device of claim 17, wherein when the rotational speed of the rotary shaft determined on the basis of the rotary shaft state sensing signal outputted from the rotary shaft state sensing unit is a first setup speed or more, the control unit increases an accumulated amount of money by a one-time fee and keeps the increased amount of money in a storage.
27. The driving device of claim 26, further comprising:
a communication unit communicating with a user terminal and a management server; and
a cash box locking device connected with the control unit and controlling a locking state of a cash box in the probabilistic vending machine,
wherein the control unit performs identification with the user terminal, and
when the identification is finished, the control unit transmits the accumulated amount of money to a management server through the user terminal by transmitting the accumulated money for a fee to the user terminal through the communication unit, and unlocks the cash box locking device.
28. A method of driving a probabilistic vending machine, comprising:
determining whether a rotational speed of a rotary shaft is a second setup speed or more on the basis of a signal outputted from a rotary shaft state sensing unit;
disengaging a driving shaft and the rotary shaft from each other by operating a gear control motor, when the rotational speed of the rotary shaft is the second setup speed or more;
determining whether the rotational speed of the rotary shaft is a third setup speed or more on the basis of a signal outputted from the rotary shaft state sensing unit;
determining the number of driving times of a probabilistic vending machine, using data kept in a storage, when the rotational speed of the rotary shaft is the third setup speed or more;
determining a final stop section and a final stop state of a stopper corresponding to the determined number of driving times; and
positioning the stopper to the final stop section in the final step state by reducing the rotational speed of the rotary shaft at a predetermined deceleration degree by operating a rotary shaft deceleration motor on the basis of the rotational speed of the rotary shaft.
29. The method of claim 28, further comprising:
determining money put into a slot on the basis of a signal outputted from a money sensing unit;
determining whether the money put in the slot is the same as a setup amount of money;
determining whether the driving shaft is in a stop state on the basis of a driving shaft state sensing signal, when the money put in the slot is the same as the setup amount of money; and
engaging the driving shaft with the rotary shaft by operating a gear control motor, when the driving shaft is in a stop state.
30. The method of claim 28, further comprising:
determining whether time that has elapsed after money has been put in a slot exceeds a setup time, when the money put in the slot is not the same as a setup amount of money; and
discharging the money, which has been put in the slot, through the slot when the time elapsed exceeds the setup time.
31. The method of claim 28, further comprising:
determining whether the rotational speed of the rotary shaft is a first setup speed or more on the basis of a signal outputted from a rotary shaft state sensing unit; and
proceeding to determining whether the rotational speed of the rotary shaft is the second setup speed or more, after increasing the number of driving times of the probabilistic vending machine by \u20181\u2019 when the speed of the driving shaft is the first setup speed or more.
32. The method of claim 31, further comprising:
increasing the number of rotation times of a driving plate by \u20181\u2019, when the rotational speed of the rotary shaft is less tan the first setup speed;
determining whether the number of rotation times of the driving plate is the same as a setup number of times; and
discharging a money put in a slot to the slot, when the number of rotation times of the driving plate is the same as the setup number of times.
33. The method of claim 28, further comprising:
determining whether the rotational speed of the rotary shaft is the first setup speed or more on the basis of a signal outputted from the rotary shaft state sensing unit; and
increasing the accumulated amount of money by a one-time fee, when the rotational speed of the rotary shaft is the first setup speed or more.
34. The method of claim 33, further comprising:
performing identification with a user terminal;
transmitting information about the accumulated amount of money for a fee to the identified user terminal;
storing a record of taking out cash and then initializing the accumulated amount of money, after transmitting the information about the accumulated amount of money; and
unlocking a cash box after transmitting the information about the accumulated amount of money.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for forming a pattern of a semiconductor device, the method comprising:
(a) forming a first mask pattern over a semiconductor substrate;
(b) forming a spacer film over the resulting structure of (a) including the first mask pattern;
(c) forming a polysilicon layer over the resulting structure of (b) including the spacer film;
(d) performing a planarizing process on the structure of (c) to expose the spacer film;
(e) forming a photoresist pattern over a portion of the resulting structure of (d) such that a part of the polysilicon layer of (c) is exposed;
(f) etching the polysilicon layer of (c) using the photoresist pattern as a mask to form a second mask pattern;
(g) removing the photoresist pattern; and
(h) removing the exposed spacer film.
2. The method according to claim 1, further comprising forming a hard mask layer over the semiconductor substrate prior to forming the first mask pattern over the semiconductor substrate.
3. The method according to claim 1, comprising forming the first mask pattern of polysilicon.
4. The method according to claim 1, comprising forming the spacer film of an oxide film.
5. The method according to claim 1, comprising removing the spacer film by a dip-out process.
6. A method for manufacturing a semiconductor device, the method comprising:
(a) sequentially forming a hard mask layer and a first polysilicon layer over a semiconductor substrate including a cell region, an inter-connection region, and a peripheral circuit region;
(b) etching the first polysilicon layer to form a first mask pattern;
(c) forming a spacer film over the resulting structure of (b) including the first mask pattern;
(d) forming a second polysilicon layer over the resulting structure of (c);
(e) performing a planarizing process on the structure of (d) to expose the spacer film over a top portion of the first mask pattern;
(f) forming a photoresist pattern over a part of the resulting structure of (e) such that a part of the second polysilicon layer of (d) is exposed;
(g) etching the second polysilicon layer of (d) using the photoresist pattern as a mask to form a second mask pattern;
(h) removing the photoresist pattern;
(i) removing the spacer film exposed on sidewalls and the top portion of the first mask pattern; and
(j) etching the hard mask layer using the first and second mask patterns as a mask to form a hard mask pattern.
7. The method according to claim 6, wherein the cell region of the semiconductor substrate comprises a word line pattern, a drain select line (DSL) pattern, and a source select line (SSL) pattern.
8. The method according to claim 6, comprising forming the hard mask layer from a material selected from the group consisting of oxide films, nitride films, and combinations thereof.
9. The method according to claim 7, comprising forming elements of the first mask pattern in the cell region to define a word line pattern, a DSL pattern, and a SSL pattern.
10. The method according to claim 9, comprising forming the first mask pattern element that defines the word line pattern to have a pitch twice as large as that of the word line pattern.
11. The method according to claim 6, comprising forming the spacer film of an oxide film.
12. The method according to claim 6, comprising performing the planarizing process by a chemical mechanical polishing (CMP) process.
13. The method according to claim 7, comprising forming the photoresist pattern such that a region that defines a SSL pattern and a DSL pattern of the cell region is exposed.
14. The method according to claim 6, comprising forming the photoresist pattern to overlap with a part of a first mask pattern element formed in the inter-connection region and a part of the second polysilicon layer adjacent to the first mask pattern element.
15. The method according to claim 6, comprising forming the photoresist pattern such that the peripheral circuit region is exposed.
16. The method according to claim 6, comprising removing the exposed spacer film by a dip out process.
17. The method according to claim 6, comprising removing the exposed spacer film such that the spacer film formed on a bottom portion of the first mask pattern is not removed.