1. A vacuum processing plant for processing substrates in semiconductor manufacture, having
a plurality of independent vacuum processing blocks arranged in a row and containing vacuum processing chambers for processing of the substrate,
a continuous cassette table adapted for holding plural substrate-carrying cassettes always in the atmosphere, extending along said row in front of said independent vacuum processing blocks, and
transfer means for transferring substrates from cassettes on the cassette table to and from the vacuum processing blocks, the transfer means being always in the atmosphere and having a common track on the continuous cassette table and at least one transfer robot running on the common track.
2. A vacuum processing plant according to claim 1, wherein said transfer means has a plurality of said transfer robots on said common track.
3. A vacuum processing plant according to claim 1 or 2, wherein said vacuum processing blocks are in a first space and said continuous cassette table and said transfer means are in a second space separated from said first space by a partition.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A camera for capturing a multicolor image of a multicolor scene, comprising:
a color detector determining from the multicolor scene andor a captured multicolor image of the scene, a predominant color in the captured image andor multicolor scene; and
a display showing a predominant color determined by said color detector, whereby one is alerted to color predominance.
2. The camera of claim 1 wherein said predominant color is red, green, blue, or whiteneutral.
3. The camera of claim 1 wherein said predominant color is whiteneutral unless one of said red, green, and blue signals exceeds 60 percent of a total intensity of a combination of the red, green, and blue signals.
4. The camera of claim 1 further comprising a second display showing said captured image.
5. The camera of claim 4 wherein said display showing the predominant single color is adjacent to said display showing said captured image.
6. The camera of claim 4 wherein said display showing the predominant single color surrounds said display showing said captured image.
7. The camera of claim 4 wherein said displays are first and second parts of a continuous, pixellated panel.
8. A method in a camera for showing a predominant color in a multicolor scene andor a captured multicolor captured image of the scene, comprising the steps of:
determining from the multicolor scene andor the multicolor captured image, a predominant color in the captured image andor multicolor scene; and
displaying the predominant color, whereby one is alerted to color predominance.
9. The method of claim 8 wherein said predominant color is red, green, blue, or whiteneutral.
10. The method of claim 8 wherein said predominant color is whiteneutral unless one of said red, green, and blue signals exceeds 60 percent of a total intensity of a combination of the red, green, and blue signals.
11. The method of claim 8 further comprising displaying said captured image concurrent with said displaying of said predominant single color.
12. A camera for showing a predominant color in a multicolor scene andor a captured multicolor captured image of the scene, comprising:
means for determining from the multicolor scene andor the multicolor captured image, a predominant color in the captured image andor multicolor scene; and
means for displaying the predominant color, whereby one is alerted to color predominance.
13. The camera of claim 12 wherein said predominant color is red, green, blue, or whiteneutral.
14. The camera of claim 12 wherein said predominant color is whiteneutral unless one of said red, green, and blue signals exceeds 60 percent of a total intensity of a combination of the red, green, and blue signals.
15. The method of claim 12 further comprising means for displaying said captured image concurrent with said displaying of said predominant single color.
16. A camera comprising:
an electronic imager capturing a multicolor light image as a multicolor electronic image;
a color detector determining a predominant color in said electronic image; and
a user interface showing an indication of said predominant color.
17. The camera of claim 16 further comprising a body supporting said electronic imager, color detector, and user interface.
18. The camera of claim 17 wherein said user interface includes an image display mounted on said body, said image display showing said electronic image; and
an indication display mounted on said body, said indication display showing said indication.
19. The camera of claim 18 wherein said indication display emits light at the wavelength of said predominant color.
20. The camera of claim 18 wherein said displays are first and second parts of a continuous, pixellated panel.