1. A method of depositing a silicon carbide film, the method comprising:
providing a substrate;
flowing a first organo-silicon precursor onto the substrate;
flowing a second organo-silicon precursor onto the substrate, wherein the first organo-silicon precursor is different from the second organo-silicon precursor, and wherein the first organo-silicon precursor and the second organo-silicon precursor are flowed together onto the substrate; and
introducing radicals from a source gas generated from a plasma source, wherein all or substantially all the radicals are in a substantially low energy state to react with the first and the second organo-silicon precursors to deposit the silicon carbide film on the substrate under conditions that break one or both of silicon-hydrogen bonds and silicon-silicon bonds but preserve silicon-oxygen, silicon-nitrogen, andor silicon-carbon bonds, the broken silicon-hydrogen bonds and broken silicon-silicon bonds capable of cross-linking, the reaction occurring in a reaction space adjacent to the substrate and remote from the plasma source, the source gas being selected from a group consisting of: hydrogen, ammonia, and amine.
2. The method of claim 1, wherein the silicon carbide film is doped with nitrogen andor oxygen.
3. The method of claim 2, wherein the silicon carbide film is a nitrogen doped silicon carbide film, the first organo-silicon and the second organo-silicon precursor each having different ratios of silicon-carbon bonds to silicon-nitrogen bonds.
4. The method of claim 2, wherein the silicon carbide film is an oxygen doped silicon carbide filch, the first organo-silicon precursor and the second organo-silicon precursor each having different ratios of silicon-carbon bonds to silicon-oxygen bonds.
5. The method of claim 2, wherein the silicon carbide film is an oxygen and nitrogen doped silicon carbide film, the first organo-silicon precursor having one or more silicon-oxygen bonds and the second organo-silicon precursor having one or more silicon-nitrogen bonds.
6. The method of claim 1, wherein introducing the radicals comprises applying a remote plasma to react with the first and the second organo-silicon precursors, the remote plasma including at least 90% of the radicals in the reaction space being in the ground state.
7. The method of claim 1, wherein a ratio of the flow rates between the first organo-silicon precursor and the second organo-silicon precursor is between about 1:1 and about 2:1.
8. The method of claim 1, wherein a ratio of the flow rates between the first organo-silicon precursor and the second organo-silicon precursor is greater than about 2:1.
9. The method of claim 1, wherein each of the first organo-silicon precursor and the second organo-silicon precursor has one or more silicon-hydrogen bonds andor silicon-silicon bonds.
10. The method of claim 1, wherein the radicals are produced from a source gas of hydrogen.
11. The method of claim 1, wherein the silicon carbide film has a varying concentration of oxygen and nitrogen between a lower surface and an upper surface of the film.
12. The method of claim 1, wherein the substrate comprises exposed copper, the method further comprising forming a nitrogen doped silicon carbide film directly over the exposed copper.
13. The method of claim 1, wherein one of the first or the second organo-silicon precursors are cyclic siloxanes.
14. The method of claim 1, wherein one of the first or the second organo-silicon precursors are alkoxy silanes.
15. The method of claim 1, wherein one of the first or the second organo-silicon precursors are alkyl silanes.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A method for creating a virtual film or video production comprising the steps of:
positioning an articulated puppet to be filmed in front of a key-color background screen; said puppet including an articulating mechanism having a color that matches that of said key-color background screen and being connected to said puppet at a plurality of separated locations, said articulated puppet being capable of movement in three directions in response to corresponding movements of said articulating mechanism, two if said three directions forming a plane and the third direction forming an angle with respect to said plane;
filming movements of said articulated puppet and said articulating mechanism;
creating a virtual background to appear in said film; and
combining said film and said virtual background whereby said articulated puppet appears in said virtual background minus any appearance of said articulating mechanism.
2. The method of claim 1 wherein said articulating mechanism is only connected to said articulated puppet at said separated locations.
3. The method of claim 1 wherein the portion of said puppet between said locations has another color that does not match that of said key-color background screen.
4. The method of claim 1 wherein said articulated puppet is positioned on a set further including additional supporting objects, some of said additional supporting objects having said color that matches that of said key-color background screen.
5. The method of claim 1 wherein said step of filming in done in real-time.
6. The method of claim 1 wherein said step of combining is done in real-time.
7. The method of claim 1 wherein said angle is orthogonal to said plane.
8. An articulated puppet for use with a key-color background screen comprising an articulated mechanism having said key-color and being connected to said puppet at a plurality of separated locations, said articulated puppet being capable of movement in three directions in response to corresponding movements of said articulating mechanism, two if said three directions forming a plane and the third direction forming an angle with respect to said plane.
9. The articulated puppet of claim 7 wherein the portion of said puppet between said locations has a color that does not match said key-color.
10. The articulated puppet of claim 7 wherein said articulated mechanism is only connected said locations.
11. The articulated puppet of claim 7 where said angle is orthogonal to said plane.
12. A film or video produced in accordance with the method comprising the steps of positioning an articulated puppet to be filmed on a set in front of a key-color background screen, said articulated puppet including an articulating mechanism having a first color that matches that of said key-color screen and is connected to said puppet at a plurality of separated locations, and said articulated puppet being capable of movement in three directions in response to corresponding movements of said articulating mechanism, two if said three directions forming a plane and the third direction forming an angle with respect to said plane;
providing said articulating mechanism prior to commencement of filming, with an associated color which matches that of said key-color background screen;
filming movements of said puppet and said articulating mechanism;
creating a virtual background to appear in said film; and
combining said film and said virtual background whereby said puppet appears in said virtual background minus any appearance of said articulating mechanism.
13. Apparatus for improved puppetry for film andor video productions, said apparatus comprising
a key-color background screen;
a source for creating a virtual background;
a puppet having an articulated mechanism, said mechanism having said key-color and being connected to said puppet at a plurality of separated locations, said articulated puppet being capable of movement in three directions in response to corresponding movements of said articulating mechanism, two if said three directions forming a plane and the third direction forming an angle with respect to said plane;
a camera for recording images of said puppet against the background of the key-color screen; and
apparatus for combining said image and said virtual background and removing from said combined image the appearance of said articulating mechanism.
14. The apparatus of claim 12 further including a monitor to display said combined image.