1. A deposition apparatus to deposit deposition particles on an object, comprising:
a first vacuum chamber to accommodate the object;
a target provided in the first vacuum chamber to discharge the deposition particles to the object;
a sputter source to support the target and to cause the target to discharge the deposition particles;
a second vacuum chamber provided to communicate with the first vacuum chamber; and
an ion beam source coupled to the second vacuum chamber to discharge an ion beam to the object.
2. The deposition apparatus according to claim 1, wherein the first vacuum chamber and the second vacuum chamber are respectively provided with a first vacuum pump and a second vacuum pump to control respective vacuum levels thereof.
3. The deposition apparatus according to claim 1, further comprising:
an object support coupled to the first vacuum chamber to support the object.
4. The deposition apparatus according to claim 1, further comprising:
a chamber connecting part provided between the first vacuum chamber and the second vacuum chamber to pass the ion beam discharged from the ion beam source therethorugh.
5. The deposition apparatus according to claim 1, wherein the object comprises a core of a glass lens mold.
6. The deposition apparatus according to claim 1, wherein the first vacuum chamber maintains a vacuum level substantially from 0.001 to 0.01 torr, and the second vacuum chamber maintains a vacuum level substantially from 0.00001 to 0.0001 torr.
7. The deposition apparatus according to claim 1, wherein the ion beam discharged from the ion beam source has energy of substantially 1 through 10 keV.
8. The deposition apparatus according to claim 1, wherein the object comprises a semiconductor substrate.
9. The deposition apparatus according to claim 1, wherein the target comprises one of gold, silver, platinum, or Rhenium.
10. A deposition apparatus comprising:
a sputtering vacuum chamber to accommodate an object and a deposition material therein and having a sputtering unit to form a plasma around the deposition materials to cause particles of the deposition material to be deposited on the object;
an ion beam vacuum chamber having an ion beam source to discharge a high energy ion beam; and
a connection portion to communicate between the sputtering vacuum chamber and the ion beam vacuum chamber to direct the discharged high energy ion beam toward the object to increase adherence of the particles of the deposition material to the object.
11. The deposition apparatus according to claim 10, wherein the sputtering vacuum chamber maintains a first vacuum level and the ion beam vacuum chamber maintains a second vacuum level.
12. The deposition apparatus according to claim 10, wherein the sputtering vacuum chamber is filled with argon gas and the sputtering unit applies a negative voltage to the deposition material to cause the argon gas to form the plasma around the deposition material.
13. The deposition apparatus according to claim 10, wherein when the high energy ion beam is direct toward the object, the high energy ion beam forms a mixing layer between the object and the deposition particles to assist the deposition particles to adhere to the object.
14. A deposition apparatus comprising:
a first vacuum chamber to accommodate an object and a target therein;
a sputter source provided in the first vacuum chamber to form a plasma around the target to generate deposition particles from the target to be deposited on the object;
a second vacuum chamber to communicate with the first vacuum chamber; and
an ion beam source therein to discharge an ion beam toward the object to form a mixing layer between the object and the deposition particles to increase adherence of the deposition particles to the object.
15. The deposition apparatus according to claim 14, wherein the first vacuum chamber maintains a first vacuum level and the second vacuum chamber maintains a second vacuum level, and the first vacuum level is greater than the second vacuum level.
16. A deposition apparatus comprising:
a first vacuum chamber maintaining a first vacuum level and including:
an object to receive deposition particles;
a deposition material; and
a sputter source to support the deposition material and to provide a negative charge to the deposition material to generate the deposition particles to be deposited on the object; and
a second vacuum chamber communicating with the first vacuum chamber and maintaining a second vacuum level different from the first vacuum level, the second vacuum chamber including:
an ion beam source to discharge an ion beam into the first vacuum chamber toward the object to transmit energy to the deposition particles adhering to the object.
17. The deposition apparatus according to claim 16, wherein the first vacuum level is greater than the second vacuum level.
18. The deposition apparatus according to claim 16, wherein the first vacuum level is at least ten times greater than the second vacuum level.
19. The deposition apparatus according to claim 16, wherein the first vacuum level is approximately 100 times greater than the second vacuum level.
20. A method of depositing deposition particles on an object, comprising:
sputtering deposition particles toward on object by forming plasma around a deposition material at a first vacuum level; and
discharging an ion beam toward the object to transmit energy to the sputtered deposition particles to increase an adherence level of the deposition particles to the object.
21. The method according to claim 20, wherein the ion beam is discharged at a vacuum level different than the first vacuum level.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method, comprising:
determining, at a mobile unit, whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of user data over a scheduled uplink shared channel; and
encoding, at the mobile unit and in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, the user data and at least one bit to form encoded information for transmission using said at least one second resource, said at least one bit indicating whether the mobile unit is transmitting the scheduling request.
2. The method of claim 1, wherein determining that said at least one first resource is allocated concurrently with said at least one second resource comprises determining that a timeslot for transmission of the scheduling request is allocated concurrently with a timeslot for transmission of the user data.
3. The method of claim 1, wherein encoding the user data and said at least one bit comprises modifying a coding algorithm used to encode the user data and said at least one bit so that the encoded information indicative of the user data and said at least one bit can be transmitted over the scheduled uplink shared channel using said at least one second resource.
4. The method of claim 3, wherein encoding the user data and said at least one bit comprises using puncturing to encode the user data for transmission so that the encoded information indicative of the user data and said at least one bit can be transmitted over the scheduled uplink shared channel using said at least one second resource.
5. The method of claim 1, wherein encoding the user data and said at least one bit comprises encoding the user data and a plurality of bits indicative of at least one of a scheduling request, channel quality information, an acknowledgment message, and a non-acknowledgment message.
6. The method of claim 1, comprising transmitting the encoded information over the scheduled uplink shared channel using said at least one second resource.
7. A method, comprising:
determining, at the base station, whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of user data over a scheduled uplink shared channel; and
decoding, at the base station and in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, received information indicative of the user data and at least one bit, said at least one bit indicating whether a mobile unit is transmitting the scheduling request.
8. The method of claim 7, wherein determining that said at least one first resource is allocated concurrently with said at least one second resource comprises determining that a timeslot for transmission of the scheduling request is allocated concurrently with a timeslot for transmission of the user data.
9. The method of claim 7, wherein decoding the received information indicative of the user data and said at least one bit comprises decoding the received information using a coding algorithm selected to encode the user data and said at least one bit so that the encoded information indicative of the user data and said at least one bit can be transmitted over the scheduled uplink shared channel using said at least one second resource.
10. The method of claim 9, wherein decoding the received information indicative of the user data and said at least one bit comprises decoding the received information that was encoded using at least one of puncturing or repetition.
11. The method of claim 7, comprising determining whether the mobile unit transmitted at least one of a scheduling request, channel quality information, an acknowledgment message, and a non-acknowledgment message based upon said at least one decoded bit.
12. A method, comprising:
determining, at a mobile unit, whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of other control information over the unscheduled uplink control channel; and
modulating, at the mobile unit and in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, the scheduling request and the other control information into one symbol for transmission using said at least one second resource.
13. The method of claim 12, wherein determining whether said at least one first resource is allocated concurrently with said at least one second resource comprises determining that transmission of the scheduling request is scheduled concurrently with transmission of at least one of an acknowledgment message or a non-acknowledgment message.
14. The method of claim 12, wherein modulating the scheduling request and the other control information comprises modulating the scheduling request and the other control information using a higher order modulation scheme than the modulation scheme used to modulate the other control information alone to form modulated information for transmission using said at least one second resource.
15. The method of claim 12, wherein modulating the scheduling request and the other control information comprises allocating a larger resource to accommodate scheduling requests and other control information.
16. The method of claim 12, wherein modulating the scheduling request and the other control information comprises modulating the scheduling request and the other control information using a multiplexing scheme that avoids increasing the peak-to-average power ratio.
17. The method of claim 12, comprising transmitting information indicative of the symbol over the unscheduled uplink control channel using said at least one second resource.
18. A method, comprising:
determining, at a base station, whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of other control information over the unscheduled uplink control channel; and
demodulating, at the base station and in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, a symbol comprising information indicative of the scheduling request and the other control information, the symbol being received over the unscheduled uplink control channel using said at least one second resource.
19. The method of claim 18, wherein determining whether said at least one first resource is allocated concurrently with said at least one second resource comprises determining that transmission of the scheduling request is scheduled concurrently with transmission of at least one of an acknowledgment message and a non-acknowledgment message.
20. The method of claim 18, wherein demodulating the received symbol comprises demodulating the received symbol using a higher order modulation scheme than a modulation scheme used to modulate the other control information alone to form a symbol for transmission using said at least one second resource.
21. The method of claim 17, wherein demodulating the received modulated information comprises demodulating the received symbol that is multiplexed with a scheme that avoids increasing the peak-to-average power ratio.
22. A mobile unit, comprising:
a processing unit configured to:
determine whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of user data over a scheduled uplink shared channel; and
encode, in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, the user data and at least one bit to form encoded information for transmission using said at least one second resource, said at least one bit indicating whether the mobile unit is transmitting the scheduling request.
23. A base station, comprising:
a processing unit configured to:
determine whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of user data over a scheduled uplink shared channel; and
decode, in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, received information indicative of the user data and at least one bit, said at least one bit indicating whether a mobile unit is transmitting the scheduling request.
24. A mobile unit, comprising:
a processing unit configured to:
determine whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of other control information over the unscheduled uplink control channel; and
modulate, in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, the scheduling request and the other control information into one symbol for transmission using said at least one second resource.
25. A base station, comprising:
a processing unit configured to:
determine whether at least one first resource for transmission of a scheduling request over an unscheduled uplink control channel is allocated concurrently with at least one second resource for transmission of other control information over the unscheduled uplink control channel; and
demodulate, in response to determining that said at least one first resource is allocated concurrently with said at least one second resource, a symbol comprising information indicative of the scheduling request and the other control information, the symbol being received over the unscheduled uplink control channel using said at least one second resource.