1. A vacuum-processing method using a vacuum-processing apparatus comprising a vacuum vessel whose inside being capable of being evacuated, a processing chamber arranged in said vacuum vessel and a heater for heating a circumferential wall of said processing chamber, a cooling plate located outside the processing chamber and arranged at a position to oppose said circumferential wall of said processing chamber for cooling said circumferential wall of said processing chamber, and a mechanism for moving said cooling plate so as to change a distance between said cooling plate and said circumferential wall of said processing chamber, characterized in that said vacuum-processing method comprises the steps of (a) arranging a substrate in said processing chamber, (b) subjecting said substrate arranged in said processing chamber to a surface treatment while maintaining said substrate at a prescribed temperature and introducing a processing gas into said processing chamber, and (c) restraining a temperature rise of said circumferential wall of said processing chamber which is occurred in said step (b), by virtue of a heat exchange action between said cooling plate and said circumferential wall of said processing chamber.
2. The vacuum-processing method according to claim 1, wherein in said step (c), a distance between said cooling plate and said circumferential wall of said processing chamber is changed, whereby a heat exchange magnitude between said cooling plate and said circumferential wall of said processing chamber is changed.
3. The vacuum-processing method according to claim 2, wherein said heat exchange magnitude between said cooling plate and said circumferential wall of said processing chamber is changed by changing said distance between said cooling plate and said circumferential wall of said processing chamber, wherein said surface treatment for said substrate is conducted while maintaining said circumferential wall of said processing chamber at a temperature in a prescribed temperature range.
4. The vacuum-processing method according to claim 1 which further includes a step of contacting said cooling plate to said circumferential wall of said processing chamber after said surface treatment for said substrate is completed.
5. The vacuum-processing method according to claim 1, wherein said vacuum-processing apparatus has a transportation means for transporting an elongated substrate as said substrate, said processing chamber comprises a plurality of vacuum-processing chambers arranged along a transportation passage of said elongated substrate, said vacuum vessel including one or more of said plurality of vacuum-processing chambers, wherein in said step (b), said elongated substrate is subjected to said surface treatment sequentially in said plurality of vacuum-processing chambers while transporting said elongated substrate to sequentially pass through said plurality of vacuum-processing chambers.
6. The vacuum-processing method according to claim 5, wherein said surface treatment for said elongated substrate includes formation of a photoelectric conversion element comprising a plurality of semiconductor layers including one or more amorphous semiconductor layers stacked on said elongated substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A system for generating an entity diagram, comprising:
a memory to store program code; and
a processor to execute the program code to perform a process to generate the entity diagram, the process comprising:
generating the entity diagram with one or more entities and one or more relationships;
grouping the one or more entities by a first dimension into one or more groups, wherein the first dimension corresponds to a first attribute of the one or more entities;
grouping the one or more entities by a second dimension into one or more groups, wherein the second dimension corresponds to a second attribute of the one or more entities;
rearranging the entities based on the grouping according to the first dimension by determining a total length of relationship links in the entity diagram;
rearranging the entities based on the grouping according to the second dimension by determining a minimum total length of relationship links in the entity diagram, comprising:
selecting a first possible position for a first entity within a selected one of the second dimension groups;
determining a first total length of relationship links associated with the first possible position;
selecting a second possible position for the first entity within the selected one of the second dimension groups;
determining a second total length of relationship links associated with the second possible position; and
determining the minimum total length of relationship links based on at least the first total length of relationship links and the second total length of relationship links;
adjusting one or more relationship links corresponding to the one or more relationships; and
providing an updated entity diagram.
2. The system of claim 1, wherein the process further comprises:
determining the first dimension; and
determining the second dimension.
3. The system of claim 1, wherein the rearranging the entities based on the grouping according to the second dimension further comprises:
comparing the first total length of relationship links and the second total length of relationship links; and
repositioning the first selected entity based on a result of the comparison.
4. The system of claim 1, wherein the grouping the one or more entities by a second dimension into one or more groups further comprises:
positioning one or more entities within a selected one of the second dimension groups based on a total depth of the group.
5. The system of claim 4, wherein the rearranging the entities based on the grouping according to the second dimension further comprises:
repositioning the one or more entities within the selected group based on a total length of relationship links.
6. The system of claim 1, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
adjusting one or more relationship marks.
7. The system of claim 6, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
adjusting one or more connection points.
8. The system of claim 7, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
adding or deleting one or more turning points.
9. The system of claim 1, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
determining whether a relationship is a one-to-one relationship.
10. The system of claim 9, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
connecting two entities corresponding to the one-to-one relationship with a minimal number of turning points.
11. The system of claim 9, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
determining positions of one or more entities associated with the relationship; and
connecting the one or more entities with a minimal number of turning points.
12. The system of claim 11, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
identifying one or more overlapping relationship links; and
adjusting the identified relationship links.
13. The system of claim 11, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
identifying one or more overlapping relationship marks; and
adjusting the identified relationship marks.
14. The system of claim 1, wherein the process further comprises:
ordering groups along the first dimension by a first rule.
15. The system of claim 5, wherein the repositioning the one or more entities within the selected group based on a total length of relationship links further comprises:
determining possible positions of the one or more entities;
determining total lengths of relationship links corresponding to the possible positions;
determining a group layout based on the total lengths of relationship links for the possible positions; and
repositioning the one or more entities based on the group layout.
16. The system of claim 5, wherein the repositioning the one or more entities within the selected group based on a total length of relationship links further comprises:
determining possible positions of the one or more entities;
determining total lengths of relationship links corresponding to the possible positions;
swapping positions of two entities;
determining a group layout based on the total lengths of relationship links for the possible positions; and
repositioning the one or more entities based on the group layout.
17. A method for generating an entity diagram, comprising:
performing a process for generating the entity diagram through an interaction of a user with an entity diagram presentation architecture, the process including:
generating the entity diagram with one or more entities and one or more relationships;
grouping the one or more entities by a first dimension into one or more groups, wherein the first dimension corresponds to a first attribute of the one or more entities;
grouping the one or more entities by a second dimension into one or more groups, wherein the second dimension corresponds to a second attribute of the one or more entities;
rearranging the entities based on the grouping according to the first dimension by determining a total length of relationship links in the entity diagram;
rearranging the entities based on the grouping according to the second dimension by determining a minimum total length of relationship links in the entity diagram, comprising:
selecting a first possible position for a first entity within a selected one of the second dimension groups;
determining a first total length of relationship links associated with the first possible position;
selecting a second possible position for the first entity within the selected one of the second dimension groups;
determining a second total length of relationship links associated with the second possible position; and
determining the minimum total length of relationship links based on at least the first total length of relationship links and the second total length of relationship links;
adjusting one or more relationship links corresponding to the one or more relationships; and
providing an updated entity diagram.
18. The method of claim 17, wherein the process further comprises:
determining the first dimension; and
determining the second dimension.
19. The method of claim 17, wherein the rearranging the entities based on the grouping according to the second dimension further comprises:
comparing the first total length of relationship links and the second total length of relationship links; and
repositioning the first selected entity based on a result of the comparison.
20. The method of claim 17, wherein the rearranging the entities based on the grouping according to the second dimension further comprises:
positioning one or more entities within a selected one of the second dimension groups based on a total depth of the group.
21. The method of claim 20, wherein the rearranging the entities based on the grouping according to the second dimension further comprises:
repositioning the one or more entities within the selected group based on a total length of relationship links.
22. The method of claim 17, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
adjusting one or more relationship marks.
23. The method of claim 22, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
adjusting one or more connection points.
24. The method of claim 23, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
adding or deleting one or more turning points.
25. The method of claim 17, wherein the process further comprises:
ordering groups along the first dimension by a first rule.
26. The method of claim 17, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
determining whether a relationship is a one-to-one relationship.
27. The method of claim 26, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
connecting two entities corresponding to the one-to-one relationship with a minimal number of turning points.
28. The system of claim 26, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
determining positions of one or more entities associated with the relationship; and
connecting the one or more entities with a minimal number of turning points.
29. The system of claim 28, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
identifying one or more overlapping relationship links; and
adjusting the identified relationship links.
30. The system of claim 28, wherein the adjusting one or more relationship links corresponding to the one or more relationships further comprises:
identifying one or more overlapping relationship marks; and
adjusting the identified relationship marks.
31. The method of claim 21, wherein the repositioning the one or more entities within the selected group based on a total length of relationship links further comprises:
determining possible positions of the one or more entities;
determining total lengths of relationship links corresponding to the possible positions;
determining a group layout based on the total lengths of relationship links for the possible positions; and
repositioning the one or more entities based on the group layout.
32. The method of claim 21, wherein the repositioning the one or more entities within the selected group based on a total length of relationship links further comprises:
determining possible positions of the one or more entities;
determining total lengths of relationship links corresponding to the possible positions;
swapping positions of two entities;
determining a group layout based on the total lengths of relationship links for the possible positions; and
repositioning the one or more entities based on the group layout.
33. A method for generating an entity diagram, comprising:
generating the entity diagram with one or more entities and one or more relationships;
grouping the one or more entities by a first dimension into one or more groups, wherein the first dimension corresponds to a first data attribute of the one or more entities;
grouping the one or more entities by a second dimension into one or more groups, wherein the second dimension corresponds to a second data attribute of the one or more entities;
rearranging the entities based on the grouping according to the first dimension by determining a total length of relationship links in the entity diagram;
rearranging the entities based on the grouping according to the second dimension by determining a minimum total length of relationship links in the entity diagram, comprising:
selecting a first possible position for a first entity within a selected one of the second dimension groups;
determining a first total length of relationship links associated with the first possible position;
selecting a second possible position for the first entity within the selected one of the second dimension groups;
determining a second total length of relationship links associated with the second possible position; and
determining the minimum total length of relationship links based on at least the first total length of relationship links and the second total length of relationship links;
adjusting one or more relationship links corresponding to the one or more relationships; and
providing an updated entity diagram.
34. The method of claim 33, wherein the one or more relationships are associated with the one or more entities.
35. The method of claim 34, wherein the second dimension is a second attribute associated with the one or more relationships.