What is claimed is:
1. A method of fabricating a semiconductor wafer support chuck apparatus said apparatus having a first sintered layer and a second sintered layer, said method comprising the steps of:
providing said first sintered layer having a plurality of gas distribution ports; providing said second sintered layer having a plurality of grooves;
stacking said first sintered layer on top of said second sintered layer;
disposing a diffusion bonding layer between said first sintered layer and said second sintered layer; and resintering said stacked first and second sintered layers.
2. The method of claim 1 wherein said first and second sintered layers are made from a ceramic material.
3. The method of claim 1 wherein said diffusion bonding layer comprises a ceramic material.
4. The method of claim 3 wherein said diffusion bonding layer is an unfired green tape.
5. The method of claim 1 wherein prior to providing said first and second sintered layers, said first and second sintered layers are individually formed.
6. The method of claim 5 wherein said forming step comprises the step of providing a plurality of electrostatic chuck elements in said first sintered layer prior to sintering said first sintered layer.
7. The method of claim 6 wherein said forming step further comprises the step of forming a plurality of holes in said first sintered layer prior to sintering said first sintered layer.
8. The method of claim 7 wherein a first portion of said plurality of holes are said plurality of gas distribution ports.
9. The method of claim 8 wherein a second portion of said plurality of holes are a plurality of chucking element feedthroughs.
10. The method of claim 8 wherein said forming step further comprises the step of providing said plurality of grooves in said second sintered layer prior to sintering said second sintered layer.
11. The method of claim 10 wherein said forming step further comprises filling said first portion of said plurality of holes and said plurality of grooves with a filler paste therein prior to sintering said first and second sintered layers.
12. The method of claim 11 wherein said filler paste is an organic binder.
13. The method of claim 12 wherein said organic binder is polymethyl methacrylate (PMMA).
14. The method of claim 9 wherein said forming step further comprises the step of providing a metallic material in said second portion of said plurality of holes.
15. The method of claim 14 wherein said metallic material is selected from the group comprising molybdenum and tungsten.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of conducting biological materials in soft tissue, the method comprising:
inserting an elongated conduit device into the soft tissue and through a defect in the soft tissue, the conduit device being externally threaded; and
conducting biological materials along at least one longitudinal channel defined on an outer surface of the conduit device into the soft tissue.
2. The method of claim 1, further comprising connecting with the elongated conduit device areas of tissue having different vascularities.
3. The method of claim 2, further comprising tenting the soft tissue over the at least one longitudinal channel without obstructing the channel.
4. The method of claim 3, wherein tenting the soft tissue over the at least one longitudinal channel without obstructing the channel includes tenting soft tissue over a V-shaped cross-section of the at least one longitudinal channel.
5. The method of claim 3, wherein tenting the soft tissue over the at least one longitudinal channel without obstructing the channel includes tenting soft tissue over a narrow slot of a keyhole cross-section of the at least one longitudinal channel.
6. The method of claim 1, wherein conducting biological materials includes delivering biological materials externally into the channel during or after implantation.
7. The method of claim 1, wherein conducting biological materials includes attaching biological gels in the channels before implantation.
8. The method of claim 1, wherein delivering biological materials includes providing a nutrient path from the tissue to the defect through the channels.
9. The method of claim 1, further comprising coupling the conduit device to a tissue fixation device.
10. The method of claim 9, wherein coupling the conduit device to a tissue fixation device includes forming a flexible strand loop between the conduit device and the fixation device.
11. The method of claim 10, wherein the loop passes through an internal longitudinal bore of the conduit device.
12. The method of claim 10, wherein the loop passes through the longitudinal channel of the conduit device.
13. A method of conducting biological materials in soft tissue, the method comprising:
inserting an externally threaded elongated body in meniscal tissue, the elongated body having a plurality of external longitudinal channels, each longitudinal channel being open to an outer surface of the elongated body and having a keyhole shaped cross-section with a substantially circular portion and a narrow opening to the outer surface of the elongated body, each longitudinal channel extending between a first area of the meniscal tissue having a first vascularity and a second area of the meniscal tissue having a second vascularity different from the first vascularity; and
delivering biological materials from the first area to the second area through at the circular portion of the least one longitudinal channel.
14. The method of claim 13, further comprising tenting the meniscal tissue over the narrow openings of the longitudinal channels without obstructing the circular portion of the longitudinal channels.
15. The method of claim 13, further comprising:
delivering biological materials to the channel during or after implantation.
16. The method of claim 13, further comprising:
attaching biological materials to the channel before implantation.
17. A method of conducting biological materials in soft tissue, the method comprising:
passing a suture strand through a longitudinal bore of a conduit device, the conduit device having an externally threaded elongated body, the elongated body having a plurality of external longitudinal channels;
coupling the suture strand with a fixation device, the fixation device inserted through a meniscal defect;
returning the suture strand through the longitudinal bore of the conduit device to form a suture loop;
inserting the conduit device through the meniscal defect such that each longitudinal channel extends between a first area having a first vascularity and a second area having a second vascularity different from the first vascularity;
delivering biological materials from the first area to the second area through the longitudinal channels; and
securing the suture loop with a knot.
18. The method of claim 17, wherein delivering biological materials from the first area to the second area through the longitudinal channels comprises delivering biological materials through a substantially circular portion of a keyhole-shaped cross-section of each of the longitudinal channels.
19. The method of claim 18, further comprising tenting the meniscal tissue over narrow slots of the keyhole shaped cross-sections of the corresponding longitudinal channels without obstructing the circular portion of the longitudinal channels.
20. The method of claim 17, wherein delivering biological materials from the first area to the second area through the longitudinal channels comprises delivering biological materials through a substantially V-shaped cross-section of each of the longitudinal channels.
21. The method of claim 17, wherein inserting the conduit device through the meniscal defect comprises positioning the conduit to span a meniscal tear.
22. The method of claim 21, further comprising
passing the suture strand through a second fixation device and a second conduit device; and
closing the meniscal tear.