1. A method of manufacturing a thin film transistor comprising the steps of:
forming a semiconductor film on one major surface of a substrate;
forming a first gate insulating film and a second gate insulating film sequentially in this order on said semiconductor film, wherein said first gate insulating film is a silicon oxide film and said second gate insulating film is a silicon nitride film;
forming a gate electrode on said second gate insulating film;
removing a part of said second gate insulating film except a region covered by said gate electrode such that a thickness of the second gate insulating film is reduced; and
after removing said second gate insulating film, doping ions into said semiconductor film, via said second gate insulating film having a reduced thickness and the first gate insulating film, with said gate electrode acting as a doping mask.
2. The method according to claim 1, wherein said second gate insulating film is a supply source for supplying hydrogen to said semiconductor film.
3. The method according to claim 2, wherein hydrogen contained in said second gate insulating film is introduced into said semiconductor film by a predetermined annealing process.
4. The method according to claim 2, wherein said semiconductor film is a poly-silicon film.
5. The method according to claim 1, wherein after said gate electrode is formed in a predetermined pattern, said second gate insulating film is removed by etching with said gate electrode acting as a mask.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A power supply device adapted for supplying power for an external electronic product, comprising:
a main body defining a receiving cavity therein, an inner face of the main body being designated as a contact surface through which the receiving cavity is open to form an opening;
a battery disposed in the receiving cavity of the main body;
a metallic plate disposed in the receiving cavity of the main body and covering the battery;
a metallic ring mounted around the opening of the receiving cavity; and
a cover disposed at the opening of the receiving cavity of the main body, the metallic ring being positioned between the cover and the main body and heated by the high-frequency heating for fusion of the cover and the main body to seal up the battery in the receiving cavity,
wherein the metallic plate is located between the battery and acting parts by the high-frequency heating to separate the energy of the high-frequency heating from the battery, the main body or the cover are provided with a connecting element of which one end is exposed in the receiving cavity to electrically connect the battery and the other end is exposed outside the power supply device to electrically connect the external electronic product.
2. The power supply device as claimed in claim 1, wherein the main body is of a flexible strip body and adapted for being worn on the human body, the contact surface of the main body is a curved surface suitable for the human body, the outer face of the cover opposite to the metallic plate is a curved surface and is abreast with the contact surface of the main body.
3. The power supply device as claimed in claim 1, wherein the assembly of the cover and the main body is achieved by the snap-fit of a snapping rib which is protruded on the inner face of the cover and is close to the peripheral edge of the cover, and a snapping slot which is opened by the contact surface of the main body being concaved inward and around the opening of the receiving cavity, the metallic ring is mounted in the snapping slot of the main body and positioned by the snapping rib of the cover to fuse the snapping rib of the cover with the sidewalls of the snapping slot of the main body together after the metallic ring is heated by the high-frequency heating.
4. The power supply device as claimed in claim 1, wherein the power supply device further includes a loading plate disposed in the receiving cavity of the main body and located between the battery and the inner sidewall of the receiving cavity, the edges of the metallic plate are bent and extend opposite to the cover to connect with the loading plate, the battery is enclosed between the metallic plate and the loading plate.
5. The power supply device as claimed in claim 4, wherein the battery, the metallic plate and the loading plate are combined into one unit to be directly placed in the receiving cavity of the main body in assembly, and then fixed in the receiving cavity by adhesive.
6. The power supply device as claimed in claim 1, wherein the connecting element and the battery are electrically connected with a charge and discharge module.
7. The power supply device as claimed in claim 1, wherein the main body, the battery, the metallic plate and the cover are of curved shape tally with specific parts of the human body for wearing the external electronic product on the human body.
8. A method of assembling a power supply device, comprising the steps:
providing a main body, a battery, a metallic plate and a cover, defining a contact surface of the main body and forming a receiving cavity in the main body and an opening through the contact surface, equipping a connecting element in the main body or the cover, assembling the battery and the metallic plate into the receiving cavity with the battery electrically connecting with the connecting element;
providing and mounting a metallic ring around the opening of the receiving cavity, and then placing the cover at the opening of the receiving cavity to seal up the receiving cavity and retain the battery, the metallic plate and the metallic ring; and
heating the metallic ring by the high-frequency heating to fuse the cover and the main body together to seal up the battery in the receiving cavity, wherein the metallic plate is located between the battery and acting parts by the high-frequency heating to separate the energy of the high-frequency heating from the battery.
9. The method as claimed in claim 8, further comprising the step of providing a loading plate and assembling the battery between the loading plate and the metallic plate into one unit, then placing the one unit in the receiving cavity of the main body.
10. The method as claimed in claim 8, wherein the main body is of a flexible strip body and adapted for being worn on the human body, the contact surface of the main body is a curved surface suitable for the human body, the outer face of the cover opposite to the metallic plate is a curved surface and is abreast with the contact surface of the main body.
11. The method as claimed in claim 8, wherein the assembly of the cover and the main body is achieved by the snap-fit of a snapping rib which is protruded on the inner face of the cover and is close to the peripheral edge of the cover, and a snapping slot which is opened by the contact surface of the main body being concaved inward and around the opening of the receiving cavity, the metallic ring is mounted in the snapping slot of the main body and positioned by the snapping rib of the cover to fuse the snapping rib of the cover with the sidewalls of the snapping slot of the main body together after the metallic ring is heated by the high-frequency heating.