1. An exposure apparatus comprising:
an illumination optical system for illuminating a pattern of a reflection mask, by using light from a light source, wherein said illumination optical system includes:
a field stop that defines an illuminated area on the reflection mask, and has an opening; and
an imaging system for directing the light from the opening in the field stop into the reflection mask, the imaging system being a coaxial optical system; and
a projection optical system for projecting the pattern on the reflection mask onto a substrate, wherein a principal ray of the imaging system at a side of the reflection mask forming an inclination angle to a common axis of the coaxial optical system, the inclination angle being approximately equal to an angle between a principal ray of said projection optical system at the side of the reflection mask and a normal to a surface of the reflection mask.
2. An exposure apparatus according to claim 1, wherein said illumination optical system includes a plane mirror for reflecting light from the imaging system and for introducing the same into the reflection mask.
3. An exposure apparatus according to claim 1, wherein the principal ray of the imaging system at a side of the field stop is approximately parallel to the common axis.
4. An exposure apparatus according to claim 1, wherein said illumination optical system has an aperture stop at a pupil surface in the imaging system.
5. An exposure apparatus according to claim 4, wherein the aperture stop has an opening, and said illumination optical system has a mechanism for changing a size or a shape of the opening in the aperture stop.
6. An exposure apparatus according to claim 1, wherein the field stop includes a masking blade that includes plural light-shielding plates.
7. An exposure apparatus according to claim 1, wherein the field stop includes an arc slit that has an arc opening.
8. An exposure apparatus according to claim 7, wherein the arc opening has a curvature center on the common axis.
9. An exposure apparatus according to claim 1, wherein the field stop includes:
a masking blade that includes plural light-shielding plates; and
an arc slit that has an arc opening.
10. An exposure apparatus according to claim 1, wherein said illumination optical system includes:
a reflection integrator for forming plural secondary light sources using the light from the light source; and
a mirror system for superimposing light from plural secondary light sources on the field stop and for forming the arc illuminated area, wherein the arc illuminated area has a curvature center on the common axis.
11. An exposure apparatus according to claim 1, wherein the imaging system includes four mirrors.
12. An exposure apparatus according to claim 11, wherein first and fourth mirrors in the four mirrors from the field stop have concave reflective surfaces.
13. An exposure apparatus according to claim 11, wherein a third mirror in the four mirrors from the field stop has a convex reflective surface.
14. An exposure apparatus according to claim 11, wherein a second mirror in the four mirrors from the field stop has a concave reflective surface.
15. An exposure apparatus according to claim 1, wherein the imaging system has a pupil surface, and includes a mirror that has a reflective surface at the pupil surface.
16. An exposure apparatus according to claim 1, wherein the light from the light source has a wavelength of 200 nm or smaller.
17. An exposure apparatus according to claim 16, wherein the light from the light source has a wavelength between 5 nm and 20 nm.
18. A device fabricating method comprising the steps of:
exposing an object using an exposure apparatus; and
developing the exposed object,
wherein said exposure apparatus includes:
an illumination optical system for illuminating a pattern of a reflection mask, by using light from a light source, wherein said illumination optical system includes:
a field stop that defines an illuminated area on the reflection mask, and has an opening; and
an imaging system for directing the light from the opening in the field stop into the reflection mask, the imaging system being a coaxial optical system; and
a projection optical system for projecting the pattern on the reflection mask onto a substrate, wherein a principal ray of the imaging system at a side of the reflection mask forming an inclination angle to a common axis of the coaxial optical system, the inclination angle being approximately equal to an angle between a principal ray of said projection optical system at the side of the reflection mask and a normal to a surface of the reflection mask.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An antenna comprising:
a first loop electrode that has an external shape of a regular polygon or circle and that includes a pair of open ends;
feeding portions arranged inside the first loop electrode;
a second loop electrode connected to the feeding portions;
a coupling electrode that couples the first loop electrode and the second loop electrode to each other; and
a plate electrode that includes an opening and a slit portion that communicates with the opening; wherein
the coupling electrode and a portion of the first loop electrode are located in a peripheral portion of the plate electrode;
the second loop electrode is located in a peripheral portion surrounding the opening; and
opposing portions of the slit portion define the feeding portions.
2. The antenna according to claim 1, wherein the feeding portions are arranged in a substantially central portion of the first loop electrode.
3. The antenna according to claim 1, wherein the first loop electrode and the second loop electrode have respective shapes that are symmetrical or substantially symmetrical about a virtual straight line passing through the open ends and the feeding portions.
4. The antenna according to claim 1, wherein the first loop electrode has an external shape that is square or substantially square.
5. The antenna according to claim 4, wherein an electrical length of a portion of the first loop electrode along a side where the open end is provided is shorter than a length of the side.
6. The antenna according to claim 1, further comprising a substrate that is square or substantially square, wherein the plate electrode is located on the plate and has an external shape that is triangular or substantially triangular.
7. The antenna according to claim 1, further comprising a substrate that is circular or substantially circular, wherein the plate electrode is located on the plate and has an external shape that is semicircular or substantially semicircular.
8. The antenna according to claim 1, wherein the opening has a shape that is circular or substantially circular.
9. The antenna according to claim 1, wherein the opening has a shape that is square or substantially square.
10. The antenna according to claim 1, wherein the opening has a shape that is rectangular or substantially rectangular.
11. The antenna according to claim 1, wherein an electrical length of the first loop electrode is about half of a wavelength of a signal received or transmitted by the antenna.
12. The antenna according to claim 1, wherein the first loop electrode and the second loop electrode are independent from each other such that adjustment of the second loop electrode does not affect the first loop electrode.
13. The antenna according to claim 1, wherein the first loop electrode, the second loop electrode, and the coupling electrode are respectively defined by line conductors.
14. The antenna according to claim 13, wherein a connection portion between the coupling electrode and the second loop electrode is located at a position that is spaced apart from the feeding portions.
15. An antenna comprising:
a first loop electrode that has an external shape of a regular polygon or circle and that includes a pair of open ends;
feeding portions arranged inside the first loop electrode;
a second loop electrode connected to the feeding portions;
a coupling electrode that couples the first loop electrode and the second loop electrode to each other; wherein
the first loop electrode defines a radiation portion and the second loop electrode defines an impedance matching portion.
16. A wireless communication device comprising:
a first loop electrode that has an external shape of a regular polygon or circle and that includes a pair of open ends;
feeding portions arranged inside the first loop electrode;
a second loop electrode connected to the feeding portions;
a coupling electrode that couples the first loop electrode and the second loop electrode to each other;
a plate electrode that includes an opening and a slit portion that communicates with the opening; and
a wireless communication element coupled to the feeding portions; wherein
the coupling electrode and a portion of the first loop electrode are located in a peripheral portion of the plate electrode;
the second loop electrode is located in a peripheral portion surrounding the opening; and
opposing portions of the slit portion define the feeding portions.
17. The wireless communication device according to claim 16, wherein the wireless communication element is mounted on the feeding portions.
18. The wireless communication device according to claim 16, wherein the wireless communication element is a chip component.
19. The wireless communication device according to claim 16, further comprising a substrate, wherein the wireless communication element is mounted on the substrate and connected to the feeding portions through connection paths.