1. A method for fabricating a capacitor comprising the steps of:
forming a lower electrode of a metal over a substrate;
forming a capacitor dielectric film of an oxide dielectric film on the lower electrode;
depositing a metal film on the capacitor dielectric film;
performing a thermal processing in a hydrogen-content atmosphere after the step of depositing the metal film; and
patterning the metal film to form an upper electrode of the metal film after the step of performing the thermal processing.
2. A method for fabricating a capacitor according to claim 1, wherein the step of forming the upper electrode comprises the steps of:
depositing a metal film;
subjecting the metal film to a thermal processing in a hydrogen-content atmosphere; and
patterning the metal film to form the upper electrode of the metal film.
3. A method for fabricating a semiconductor device comprising the steps of:
forming a lower electrode of a metal over a semiconductor substrate;
forming a capacitor dielectric film of an oxide dielectric film on the lower electrode;
depositing a metal film on the capacitor dielectric film;
performing a thermal processing in a hydrogen-content atmosphere after the step of depositing the metal film; and
patterning the metal film to form an upper electrode of the metal film after the step of performing the thermal processing.
4. A method for fabricating a semiconductor device according to claim 3, wherein
conditions of chemical vapor deposition for forming the lower electrode and the metal film are controlled so that an oxygen concentration in the upper electrode is higher than that the lower electrode.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of generating nanoparticles from a single microparticle, comprising the steps of:
dispensing a target stream of microparticles of material from a source;
focusing a light source onto the target stream;
heating the target stream with the light source;
generating flux-specific bursts of nanoparticles from the heated target stream; and
varying at least one of a size of the microparticle and a repetition rate of the light source to control the flux of nanoparticles generated.
2. The method of claim 1, wherein the microparticles include: at least two basic constituents, a nanoparticle material (NPM) and an evaporant.
3. The method of claim 2, wherein the NPM includes a metal with a low melting point.
4. The method of claim 2, wherein the NPM includes a non metal with a relatively high melting point.
5. The method of claim 2, wherein the NPM includes at least one selected from the group consisting of: Lithium, Aluminum, Antimony, Arsenic, Astatine, Barium, Bismuth, Cadmium, Calcium, Cerium, Cesium, Copper, Gallium, Germanium, Gold, Indium, Lanthanum, Lead, Magnesium, Plutonium, Potassium, Prascodymium, Radium, Rubidium, Selenium, Silver, Sodium, Strontium, Sulphur, Tellurium, Thallium, Tin, Ytterbium, and Zinc.
6. The method of claim 2, wherein the evaporant includes at least one liquid selected from the group consisting of: water, alcohol, methane, and any liquid with a low boiling point.
7. The method of claim 2, wherein the heating step includes:
raising temperature of the target-stream above a boiling point of the evaporant and below that of the NPM.
8. The method of claim 1, wherein the generated nanoparticles are nano-droplets, the method further comprising the step of:
converting the nano-droplets to solid nanoparticles.
9. The method of claim 8, wherein the converting step includes the step of:
cooling the nano-droplets to below a melting point.
10. The method of claim 9, wherein the cooling step further includes the step of:
passing the nano-droplets through an environment selected from one of: a partial vacuum, a gas curtain, and a gas enclosure.
11. The method of claim 8, further comprising the step of:
collecting the solid nanoparticles on a collector plate.
12. The method of claim 1, wherein the microparticles include a size varying from approximately 1 micron diameter to approximately 500 microns in diameter.
13. The method of claim 1, wherein the light source includes: a laser source.
14. The method of claim 1, wherein the heating occurs over a time of picoseconds to microseconds.
15. The method of claim 1, wherein the microparticles in the target stream include a predetermined diameter and the light source includes sufficient energy to cause the evaporant within the target stream to undergo fast evaporation under superheating.
16. The method of claim 1, wherein the microparticles in the target stream include a diameter of approximately 30 microns and energy from the light source is approximately 1 \u03bcJ (micro joules).
17. The method of claim 1, further comprising the step of:
using the method of generating nanoparticles from a single microparticle as a target material source for high-power short wavelength incoherent light sources.
18. The method of claim 1, further comprising the step of:
using the method of generating nanoparticles from a single microparticle as a target material source for EUV lithography.
19. The method of claim 1, further comprising the step of:
using the method of generating nanoparticles from a single microparticle as a target material source for advanced microscopy.
20. The method of claim 1, further comprising the step of:
using the method of generating nanoparticles from a single microparticle as a target material source for precision metrology.
21. A method of generating nanoparticles from a single microparticle, comprising the steps of:
dispensing a target stream of microparticles of material from a source;
focusing a light source onto the target stream;
heating the target stream with the light source;
generating flux-specific bursts of nano-droplets from the heated target stream; and
converting the nano-droplets to solid nanoparticles.
22. The method of claim 21, wherein the microparticles include: at least two basic constituents, a nanoparticle material (NPM) and an evaporant.
23. The method of claim 22, wherein the NPM includes a metal with a low melting point.
24. The method of claim 22, wherein the NPM includes a non metal with a relatively high melting point.
25. The method of claim 22, wherein the NPM includes at least one selected from the group consisting of: Lithium, Aluminum, Antimony, Arsenic, Astaline, Barium, Bismuth, Cadmium, Calcium, Cerium, Cesium, Copper, Gallium, Germanium, Gold, Indium, Lanthanum, Lead, Magnesium, Plutonium, Plutonium, Potassium, Praseodymium, Radium, Rubidium, Selenium, Silver, Sodium, Strontium, Sulphur, Tellurium, Thallium, Tin, Ytterbium, and Zinc.
26. The method of claim 22, wherein the evaporant includes at least one liquid selected from the group consisting of: water, alcohol, methane, and any liquid with a low booing point.
27. The method of claim 21, wherein the converting step includes the step of:
cooling the nano-droplets to below a melting point.
28. The method of claim 27, wherein the cooling step further includes the step of:
passing the nano-droplets through an environment selected from one of: a partial vacuum, a gas curtain, and a gas enclosure.
29. The method of claim 21, further comprising the step of:
collecting the solid nanoparticles on a collector plate.
30. The method of claim 21, wherein the microparticles include a size varying from approximately 1 micron diameter to approximately 500 microns in diameter.
31. The method of claim 21, wherein the microparticles in the target stream include a predetermined diameter and the light source includes sufficient energy to cause the evaporant within the target stream to undergo fast evaporation under superheating.