1. A method of manufacturing a semiconductor device, comprising:
forming a P-poly gate and an N-poly gate on a P type element region and an N element region, respectively, of a semiconductor substrate electrically isolated by an element isolating layer;
shielding the P type element region and lightly ion-doping the N type impurities selectively to a predetermined N-LDD region around the N-poly gate;
forming an oxide layer for regulating the ion-implantation on the front face of the semiconductor substrate so as to cover the P-poly gate and the N-poly gate;
shielding the N type element region and lightly ion-doping the P type impurities selectively to a predetermined P-LDD region around the P-poly gate using the oxide layer for regulating the ion-implantation as a buffer mask;
removing the oxide layer for regulating the ion-implantation, forming spacers to the respective P-poly gate and the N-poly gate, and heavily ion-doping the P type and N type impurities selectively to a predetermined P-sourcedrain region and a predetermined N-sourcedrain region around the P-poly gate and the N-poly gate, respectively, using the respective spacers as buffer masks; and
annealing the semiconductor substrate so as to diffuse the P type and N type impurities doped to the predetermined P-LDD and N-LDD regions and the predetermined P-sourcedrain and N-sourcedrain regions.
2. The method of claim 1, wherein the oxide layer for regulating the ion-implantation is formed by a PECVD process at the temperature of 200\u02dc400\xb0 C.
3. The method of claim 1, wherein the oxide layer for regulating the ion-implantation is a Tetra Ethyl Ortho Silicate (TEOS) film.
4. The method of claim 1, wherein the oxide layer for regulating the ion-implantation has the thickness of 100\u02dc500 \u212b.
5. A method of manufacturing a semiconductor device, comprising:
forming a P-poly gate and an N-poly gate on a P type element region and an N element region, respectively, of a semiconductor substrate electrically isolated by an element isolating layer;
forming an oxide layer for a spacer on the front face of the semiconductor substrate so as to cover the P-poly gate and the N-poly gate;
shielding the N type element region, patterning the oxide layer for the spacer formed on the P type element region to form a first scale P-spacer on a sidewall of the P-poly gate, and lightly ion-doping the P type impurities selectively to a predetermined P-LDD region around the P-poly gate using the P-spacer as a buffer mask;
shielding the P type element region, patterning the oxide layer for the spacer formed on the N type element region to form a second scale N-spacer on a sidewall of the N-poly gate, and lightly ion-doping the N type impurities selectively to a predetermined N-LDD region around the N-poly gate using the N-spacer as a buffer mask;
heavily ion-doping the P type and N type impurities selectively to a predetermined P-sourcedrain region and a predetermined N-sourcedrain region around the P-poly gate and the N-poly gate, respectively; and
annealing the semiconductor substrate so as to diffuse the P type and N type impurities doped to the predetermined P-LDD and N-LDD regions and the predetermined P-sourcedrain and N-sourcedrain regions.
6. The method of claim 5, wherein the oxide layer for spacer is formed at the temperature of 700\u02dc900\xb0 C.
7. The method of claim 5, wherein the oxide layer for spacer has the thickness of 100\u02dc500 \u212b.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method in a communications system for transmitting delay sensitive packets, the method comprising:
receiving in the communications system a data rate control index from a mobile station for use in transmitting the delay sensitive packets to the mobile station to form a received data rate control index;
selecting by the communications system a transmission format using the received data rate control index to form a selected transmission format, wherein the selected transmission format uses a payload size that is smaller than a largest compatible payload size for another transmission format corresponding to the received data rate control index and that is smaller than a total size of delay sensitive packets waiting to be transmitted and is selected to reduce transmission time of the delay sensitive packets by reducing a number of time slots that are expected to be used to decode the delay sensitive packets; and
transmitting by the communications system the delay sensitive packets to the mobile station using the selected transmission format.
2. The method of claim 1, wherein the selected transmission format also identifies a number of time slots over which the delay sensitive packets are transmitted and wherein the transmitting step comprises:
placing data from a number of delay sensitive packets in a payload having the payload size to form a completed payload;
transmitting the completed payload in a selected time slot;
re-transmitting the completed payload in subsequent time slots as identified by the selected transmission format; and
halting re-transmitting of the completed payload if the mobile station acknowledges decoding of the completed payload.
3. The method of claim 1, wherein another transmission format is a canonical transmission format for the received data rate control index.
4. The method of claim 1, wherein the delay sensitive packets are voice data packets.
5. The method of claim 1, wherein the selecting step comprises:
searching a data structure containing data transmission formats for the selected transmission format using the received data rate control index to select a data transmission format from a plurality of data transmission formats corresponding to the received data rate control index.
6. The method of claim 1, wherein the method is implemented in a base transceiver station in the communications system.
7. The method of claim 1, wherein the method is performed by a scheduler.
8. A computer program product comprising a non-transitory computer-readable storage medium encoded with computer-executable instructions for transmitting delay sensitive packets, comprising:
computer-executable instructions encoded on the non-transitory computer-readable storage medium for receiving a data rate control index from a mobile station for use in transmitting the delay sensitive packets to the mobile station to form a received data rate control index;
computer-executable instructions encoded on the non-transitory computer-readable storage medium for selecting a transmission format using the received data rate control index to form a selected transmission format, wherein the selected transmission format uses a payload size that is smaller than a largest compatible payload size for another transmission format corresponding to the received data rate control index and that is smaller than a total size of delay sensitive packets waiting to be transmitted and is selected to reduce transmission time of the delay sensitive packets by reducing a number of time slots that are expected to be used to decode the delay sensitive packets; and
computer-executable instructions encoded on the non-transitory computer-readable storage medium for transmitting the delay sensitive packets to the mobile station using the selected transmission format.
9. The computer program product of claim 8, wherein the selected transmission format also identifies a number of time slots over which the delay sensitive packets are transmitted and wherein the computer-executable instructions for transmitting comprises:
computer-executable instructions encoded on the non-transitory computer-readable storage medium for placing data from a number of delay sensitive packets in a payload having the payload size to form a completed payload;
computer-executable instructions encoded on the non-transitory computer-readable storage medium for transmitting the completed payload in a selected time slot;
computer-executable instructions encoded on the non-transitory computer-readable storage medium for re-transmitting the completed payload in subsequent time slots as identified by the selected transmission format; and
computer-executable instructions encoded on the non-transitory computer-readable storage medium for halting re-transmitting of the completed payload if the mobile station acknowledges decoding of the completed payload.
10. The computer program product of claim 8, wherein another transmission format is a canonical transmission format for the received data rate control index.
11. The computer program product of claim 8, wherein the delay sensitive packets are voice data packets.
12. The computer program product of claim 8, wherein the computer-executable instructions encoded on the non-transitory computer-readable storage medium for selecting a transmission format comprises:
computer-executable instructions encoded on the non-transitory computer-readable storage medium for searching a data structure containing data transmission formats for the selected transmission format using the received data rate control index to select a data transmission format from a plurality of data transmission formats corresponding to the received data rate control index.
13. The computer program product of claim 8, wherein the computer-executable instructions are encoded on a non-transitory computer-readable storage medium in a base transceiver station in a communications system.
14. The computer program product of claim 8, wherein the computer-executable instructions are encoded on a non-transitory computer-readable storage medium in a scheduler.
15. A communications system comprising:
a base transceiver station having a plurality of buffers, wherein the plurality of buffers are used to store packets for transmission by the base transceiver station to a mobile station; and
a scheduling module, wherein the scheduling module receives a data rate control index from the mobile station for use in transmitting the delay sensitive packets to the mobile station to form a received data rate control index; selects a transmission format using the received data rate control index to form a selected transmission format, wherein the selected transmission format uses a payload size that is smaller than a largest compatible payload size for another transmission format corresponding to the received data rate control index and that is smaller than a total size of delay sensitive packets waiting in the buffers to be transmitted and is selected to reduce transmission time of the delay sensitive packets by reducing a number of time slots that are expected to be used to decode the delay sensitive packets; and transmits the delay sensitive packets to the mobile station using the selected transmission format.
16. The communications system of claim 15, wherein the scheduling module is located in the base transceiver station.
17. The communications system of claim 15, wherein the selected transmission format also identifies a number of time slots over which the delay sensitive packets are transmitted and wherein the scheduling module in transmitting the delay sensitive packets, places data from a number of delay sensitive packets in a payload having the payload size to form a completed payload; transmits the completed payload in a selected time slot; re-transmits the completed payload in subsequent time slots as identified by the selected transmission format; and halts re-transmitting of the completed payload if the mobile station acknowledges decoding of the completed payload.
18. The communications system of claim 15, wherein the delay sensitive packets are voice data packets.
19. The communications system of claim 15, wherein the scheduling module selects the selected transmission format by searching a data structure containing data transmission formats using the received data rate control index to select a data transmission format from a plurality of data transmission formats corresponding to the received data rate control index.