1. A low refractive index SiO2 film comprising an SiO2 film with a low refractive index element introduced thereinto, the low refractive index element being at least one member selected from the group consisting of a fluorine atom, an alkyl group having 1 to 4 carbon atoms, and an alkyl group having 1 to 4 carbon atoms with a part or the whole of hydrogen atoms substituted by a fluorine atom.
2. The low refractive index SiO2 film according to claim 1, which is adapted for use as an antireflection film.
3. The low refractive index SiO2 film according to claim 1, which has been prepared by CVD using at least one starting material selected from the group consisting of a gas containing a fluorine atoms, a starting material containing a silicon atom and an alkyl group having 1 to 4 carbon atoms, and a starting material containing a silicon atom and an alkyl group having 1 to 4 carbon atoms with a part or the whole of hydrogen atoms substituted by a fluorine atom.
4. The low refractive index SiO2 filmaccording to claim 3, wherein the gas containing a fluorine atom is selected from the group consisting of CF4, C2F6, C3F6, and SF6.
5. The low refractive index SiO2 film according to claim 3, wherein the starting material containing a silicon atom and an alkyl group having 1 to 4 carbon atoms comprises at least one compound selected from the group consisting of HMDSO, TMDSO, octamethylcyclotetrasiloxane, TEOS, MTMOS, methylsilane, dimethylsilane, trimethylsilane, diethylsilane, propylsilane, and phenylsilane.
6. The low refractive index SiO2 film according to claim 3, wherein the starting material containing a silicon atom and an alkyl group having 1 to 4 carbon atoms with a part or the whole of hydrogen atoms substituted by a fluorine atom comprises at least one compound selected from the group consisting of HMDSO, TMDSO, octamethylcyclotetrasiloxane, TEOS, MTMOS, methylsilane, dimethylsilane, trimethylsilane, diethylsilane, propylsilane, and phenylsilane, a part or the whole of hydrogen atoms in each of said compounds being substituted by a fluorine atom.
7. A process for producing a low refractive index SiO2 film, comprising forming a thin film on a substrate by CVD using a starting material gas comprising a gas containing a fluorine atom, a gas containing a silicon atom and an alkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms with a part or the whole of hydrogen atoms substituted by a fluorine atom, and a gas containing an oxygen atom.
8. A process for producing a low refractive index SiO2 film, comprising the steps of:
(1) introducing a mixed gas, comprising a gas containing a fluorine atom, a volatile gas of an organic compound containing a silicon atom and an alkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms with a part or the whole of hydrogen atoms substituted by a fluorine atom, and a gas containing an oxygen atom, into a vacuum chamber maintained in a vacuum of 103 to 1 mmHg (Torr) and bringing the mixed gas to a plasma stream by glow discharge; and
(2) bringing the plasma stream into contact with the surface of a substrate disposed within the vacuum chamber to form a thin film on the substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An articulated sun shade apparatus comprising a fan member disposed endwise upon an elongate telescopic arm portion, said arm portion rotationally connected at a first pivot point slidingly securable along the length of an elongate base portion, wherein said arm portion is securable between a stowed position, disposed in contact and parallel with the base portion, and a deployed position, pivoted away from said base portion, whereby the fan member is moveable between a collapsed situation and a flared situation to position a plurality of blades adjacently disposed within a circular section appropriate to cast shade with precision, as desired.
2. The articulated sun shade apparatus of claim 1 wherein the telescopic arm portion includes a plurality of telescoping extensible members slidingly extendable longitudinally therein, each of said plurality of telescoping extensible members securable to increase a length of the arm portion as desired.
3. The articulated sun shade apparatus of claim 2 wherein the telescopic arm portion is pivotally attached to the base portion at said first pivot point, said first pivot point rotatable through three-hundred-and-sixty degrees around an axis perpendicular with respect to the base portion.
4. The articulated sun shade apparatus of claim 3 wherein the fan member is disposed moveable between the collapsed situation and the flared situation within a flared fan seat.
5. The articulated sun shade apparatus of claim 4 wherein the flared fan seat is pivotally attached to the telescopic arm portion at a second pivot point, said second pivot point rotatable through three-hundred-and-sixty degrees around an axis congruent with the arm portion.
6. The articulated sun shade apparatus of claim 5 wherein the elongate base portion further comprises an elongate recessed channel disposed longitudinally thereatop, said recessed channel disposed to receive the telescopic arm portion therein when said arm portion is moved to the stowed position.
7. The articulated sun shade apparatus of claim 6 wherein the base portion further includes a plurality of hasp members fastenable together to secure the arm portion interior to the recessed channel when said arm portion is moved to the sowed position.
8. The articulated sun shade apparatus of claim 7 wherein the first pivot point is slidingly securable along the length of the recessed channel when the telescopic arm portion is moved to the deployed position.
9. An articulated sun shade apparatus comprising:
an elongate base portion having a recessed channel longitudinally disposed between a first end and a second end thereof;
a plurality of hasp members disposed upon the base portion, said plurality of hasp members securable between a closed position and an open position;
a rotatable first pivot point slidingly disposed securable along the length of the recessed channel, said first pivot point rotatable through three-hundred-and-sixty degrees around an axis perpendicular relative the elongate base portion;
a telescopic arm portion disposed upon the first pivot point, said telescopic arm portion having a plurality of telescopically extensible members slidinglly disposed therein, said telescopic arm portion pivotal upon the first pivot point through at least one-hundred-and-eighty-degrees from a stowed position, disposed parallel and in contact with the elongate base portion interior to the recessed channel, and a deployed position, situated apart from the base portion and extended, as desired;
a second pivot point disposed endwise upon the telescopic arm portion, said second pivot point rotatable through three-hundred-and-sixty-degrees;
a flared fan seat disposed pivotally upon the second pivot point, said fan seat pivotal thereon through at least one-hundred-and-eighty degrees; and
a fan member disposed seated in the fan seat, said fan member having a plurality of blades dispositional between a collapsed situation, with said plurality of blades disposed in parallel relative one another, and a flared situation, with each of said plurality of blades spread to rest adjacently comprising a circular section;
wherein the arm portion is securable in the recessed channel when disposed in the stowed position engaged at each of the plurality of hasp members and the fan member is positional upon the telescopic arm portion through three-hundred-and-sixty degrees relative the elongate base portion, when said telescopic arm portion is moved to the deployed situation, said fan member thereby situational in the flared position to produce precision application of shading, as desired, occupying any point located hemispherically relative the base portion and delimited thereat by the length of the arm portion.