1. A solar energy apparatus, comprising in combination:
a) a primary reflector for reflecting and focusing the sunlight and a secondary reflector to reflect the focused sunlight,
b) a fiber optics cable located to conduct the light from the secondary reflector toward an optoelectric chip located in heat transfer relation to a heat sink.
2. The combination of claim 1 wherein the chip is located in alignment with the fiber optics cable extending toward the rear of the primary reflector.
3. The combination of claim 1 wherein the fiber optics cable extends in generally axial direction along the center axis of the primary reflector.
4. The combination of claim 1 wherein the heat sink includes a fluid channel system that extends proximate the fiber optics cable and receives fluid from a cooling system using said fluid as a chip coolant.
5. The combination of claim 4 wherein the heat sink includes a cooling radiator positioned at the back sides of the primary reflector.
6. The combination of claim 4 wherein the fluid channel system is configured to use convection for movement of the fluid from the heat generating chip to a heat radiator.
7. The method of cooling an optoelectric chip used in a solar energy apparatus, that includes the steps:
a) providing a primary reflector for reflecting and focusing the sunlight and a secondary reflector to reflect the focused sunlight,
b) and providing a fiber optics cable to conduct the sun light from the secondary reflector toward an optoelectric chip located in heat transfer relative to a heat sink.
8. The method of claim 7 wherein the fiber optics cable is extended in generally axial direction along the center axis of the primary reflector.
9. The method of claim 7 wherein the heat sink is provided to include a fluid channel system that extends along the fiber optics cable and wherein the fluid channel system is configured to receive fluid from a cooling system using said fluid as coolant.
10. The method of claim 9 wherein a cooling radiator is provided at the back of the primary reflector, and is configured as part of the heat sink.
11. The method of claim 9 wherein the fluid channel system is configured to use convection for movement of the fluid from the heat generating chip source to the radiator.
12. The method of cooling an optoelectric chip used in a solar energy apparatus, that includes using reflectors for reflecting and focusing the sunlight onto the face of a fiber optics cable that conducts the light to an optoelectric chip located behind a reflector associated with a heat sink.
13. The method of claim 12 including providing and employing a sun azimuth tracking apparatus carrying said reflector, cable and chip.
14. The method of claim 12 including providing a light focusing lens in the light path between the cable and chip, there being fluid coolant in said path.
15. Solar energy conversion apparatus comprising, in combination
a) an optoelectric chip,
b) a fiber optic configured to transmit solar energy toward said chip.
c) and solar energy reflector means configured to direct solar energy into said fiber optic,
d) said reflector means encompassing at least part of said fiber optic.
16. The combination of claim 15 including means forming fluid coolant paths that extend from said chip along said fiber optic, then to a heat transfer structure, and then back to the chip.
17. The combination of claim 15 wherein said reflector means include first and second solar reflectors, the first reflector having a mid portion associated with the chip, and the second reflector associated with an end of the fiber optic remote from the chip.
18. The combination of claim 17 wherein the second reflector is configured to receive solar energy from the first reflector, and to direct said energy into said end of the fiber optic.
19. The combination of claim 15 including sun azimuth tracking apparatus carrying said reflector means, said fiber optic, and said chip.
20. The combination of claim 15 including a light focusing lens between the cable and chip, and there being fluid coolant located between the cable and chip.
21. Solar energy conversion apparatus comprising, in combination
c) an optoelectric chip,
d) a fiber optic configured to transmit solar energy toward said chip.
c) and solar energy reflector means configured to direct solar energy into said fiber optic,
d) said reflector means encompassing at least part of said fiber optic,
e) there being means forming fluid coolant paths that extend from said chip along said fiber optic, then to a heat transfer structure, having centrifugal and centripetal flow paths, at least one of which contains a mesh, and then back to the chip,
f) said reflector means including first and second reflectors, the first reflector having a mid portion associated with the chip, and the second reflector associated with an ed of the fiber optic remote from the chip, the fiber optic also passing through said mix-portion,
g) said second reflector configured to receive solar energy from the first reflector, and to direct said energy into said end of the fiber optic,
h) and including sun azimuth tracking apparatus carrying said reflector means, said fiber optic, and said chip,
i) and there being a light focusing lens between the cable and chip, and there also being fluid coolant located between the cable and chip.
22. The method of cooling an optoelectric chip used in a solar energy apparatus, that includes the steps:
a) providing a primary reflector for reflecting and focusing the sunlight and a secondary reflector to reflect the focused sunlight,
b) and providing a fiber optics cable to conduct the sun light from the secondary reflector toward an optoelectric chip located in heat transfer relation to a heat sink,
c) said fiber optics cable extended in generally axial direction along the center axis of the primary reflector, and through the center of the primary reflector,
d) and wherein the heat sink is provided to include a fluid channel system that extends along the fiber optics cable and wherein the fluid channel system is configured to receive fluid from a cooling system using said fluid as coolant,
e) a cooling radiator being provided at the back side of the primary reflector, and configured as part of the head sink,
f) and wherein the fluid channel system is configured to use convection for movement of the fluid from the heat generating chip source to the radiator.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of evaluating an optical metrology tool, comprising:
utilizing an optical tool characterization pad for use in assisting in the evaluation of an optical metrology tool;
providing multiple characterization sites of a similar characterization structure upon the characterization pad; and
designating at least some of the characterization sites as either acceptable for use or not, wherein based upon the designation, after the designation at least some of the characterization sites are not utilized for evaluation of the optical metrology tool.
2. The method of claim 1, wherein a single pad calibration process is utilized.
3. The method of claim 1, wherein a dual pad calibration process is utilized.
4. The method of claim 1, wherein the optical metrology tool is a reflectometer.
5. The method of claim 1, wherein the designation of sites as acceptable for use or not is based at least in part upon an initial pre-characterization of the characterization pad.
6. The method of claim 1, wherein the designation of sites as acceptable for use or not is based, at least in part, upon a determination made after at least some use of the characterization pad.
7. The method of claim 6, wherein upon determination of a first characterization site being not acceptable for use, a second characterization site is subsequently utilized.
8. The method of claim 7, wherein the optical metrology tool automatically moves from the first characterization site to the second characterization site upon determination of the first characterization site being not acceptable for use.
9. A method of calibrating an optical metrology tool, comprising:
providing a calibration pad for use in a calibration process of the optical metrology tool;
partitioning the calibration pad into a plurality of calibration sites, the calibration sites having similar calibration structures;
utilizing a first calibration site of the calibration pad for calibrating the optical metrology tool;
detecting that the first calibration site does not satisfy a criteria for use of the first calibration site; and
switching from use of the first calibration site to use of a second calibration of the calibration pad for calibrating the optical metrology tool based upon the detection of the first calibration site not satisfying the criteria.
10. The method of claim 9, wherein the criteria is based on reflectance ratio data.
11. The method of claim 10, wherein the switching from use of the first calibration site to use of a second calibration of the calibration pad is based upon a calculated contamination thickness exceeding a predetermined set limit, the calculated contamination thickness being obtained by using reflectance ratio data.
12. The method of claim 9, wherein the criteria is based upon a figure of merit value.
13. The method of claim 12, wherein the figure of merit value is indicative of calibration accuracy.
14. The method of claim 9, wherein the criteria is based upon a calculated airborne molecular containment thickness.
15. The method of claim 9, wherein contamination of the calibration pad varies as the sample pad ages.
16. The method of claim 9, wherein contamination of the calibration pad varies from multiple uses of the calibration pad.
17. The method of claim 9, wherein a frequency of calibration site changes may be indicative of a sample andor environmental cleanliness condition.
18. The method of claim 9, wherein monitoring of the frequency of calibration site changes may provide feedback regarding a manufacturing process.