1. A computer-implemented method, comprising:
storing a library having a plurality of reference spectra, each reference spectrum of the plurality of reference spectra having a stored associated index value;
measuring a sequence of spectra in-situ during polishing to obtain measured spectra;
for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum to generate a sequence of best matching reference spectra;
determining the associated index value for each best matching spectrum from the sequence of best matching reference spectra to generate a sequence of index values;
fitting a linear function to the sequence of index values; and
halting the polishing either when the linear function matches or exceeds a target index or when the associated index value from the determining step matches or exceeds the target index.
2. The method of claim 1, wherein the index value represents a time during the polishing at which the reference spectrum is expected to be observed.
3. The method of claim 1, wherein each reference spectrum in the library has a unique index value.
4. The method of claim 1, wherein the index values for each reference spectrum in the library change monotonically as polishing progresses.
5. The method of claim 1, wherein the index values are whole numbers.
6. The method of claim 1, further comprising:
binning spectra from the measured spectra into two or more radial zones;
wherein the steps of finding a best matching reference spectrum to generate a sequence of best matching reference spectrum to generate a sequence of best matching reference spectra, determining an associated index value for each best matching spectrum from the sequence of best matching spectra to generate a sequence of index values and fitting a linear function to the sequence of index values are performed for each of the two or more radial zones independently of one another.
7. The method of claim 6, wherein a first of the two or more radial zones is an inner zone and a second of the two or more radial zones is an annular zone.
8. The method of claim 6, further comprising adjusting a polishing rate in at least one radial zone of the two or more radial zones.
9. The method of claim 8, wherein adjusting the polishing rate comprising causing an endpoint to occur when an entirety of the substrate has a flat surface.
10. The method of claim 6, wherein determining the associated index value for each best matching spectrum from the sequence of best matching spectra to generate a sequence of index values includes determining an associated index value from two different libraries of reference spectra.
11. The method of claim 10, wherein fitting a linear function to the sequence of index values includes fitting a linear function to each sequence that corresponds to each library to obtain two different linear functions, the method further comprising:
for each zone and for each sequence of index values from each library, forming an index trace; and
determining which of the linear functions has a better goodness of fit to the index trace for each zone.
12. The method of claim 11, wherein halting polishing includes halting polishing when the linear function with the better goodness of fit to the index trace for each zone includes an index value that matches or exceeds the target index value.
13. A computer implemented method comprising:
obtaining a sequence of current spectra from a substrate undergoing polishing;
storing a plurality of predetermined spectra and a plurality of index values, each spectrum from the plurality of predetermined spectra associated with an index value representative of a degree of polishing;
for each current spectrum in the sequence, selecting a particular spectrum from the plurality of predetermined spectra that best fits the current spectrum and determining the index value of the particular spectrum that is the best fit to create a sequence of index values;
determining a polishing endpoint using the sequence of index values; and
halting the polishing when the polishing endpoint is reached.
14. The method of claim 13, wherein selecting a particular spectrum from the plurality of predetermined spectra includes determining which spectrum from the plurality of predetermined spectra is a closest fit to the current spectrum.
15. The method of claim 13, further comprising forming an index trace from the index values.
16. The method of claim 15, further comprising determining an endpoint index value that is associated with a reference spectrum, wherein determining a polishing endpoint includes determining when the index trace reaches the endpoint index value.
17. The method of claim 15, further comprising smoothing the index trace.
18. The method of claim 13, wherein the index values are integers.
19. The method of claim 13, wherein the index values represent a number of platen rotations.
20. The method of claim 13, wherein the index value represents a time during the polishing at which the predetermined spectrum is expected to be observed.
21. The method of claim 13, wherein each predetermined spectrum has a unique index value.
22. The method of claim 13, wherein the index values for each predetermined spectrum change monotomically as polishing progresses.
23. A computer readable storage device storing a computer program, which, when executed by a computer processor, causes the computer processor to perform operations comprising:
receiving measurements of a sequence of spectra in-situ during polishing to obtain measured spectra;
for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum to generate a sequence of best matching reference spectra, wherein a library having a plurality of reference spectra is stored, each reference spectrum of the plurality of reference spectra having a stored associated index value;
determining the associated index value for each best matching spectrum from the sequence of best matching reference spectra to generate a sequence of index values;
fitting a linear function to the sequence of index values; and
halting the polishing either when the linear function matches or exceeds a target index or when the associated index value from the determining step matches or exceeds the target index.
24. A computer readable storage device storing a computer program, which, when executed by a computer processor, causes the computer processor to perform operations comprising:
obtaining a sequence of current spectra from a substrate undergoing polishing;
for each current spectrum in the sequence, selecting a particular spectrum from a plurality of predetermined spectra that best fits the current spectrum and determining an index value of the particular spectrum that is the best fit to create a sequence of index values, wherein a plurality of predetermined spectra and a plurality of index values are stored and each spectrum from the plurality of predetermined spectra is associated with an index value representative of a degree of polishing;
determining a polishing endpoint using the sequence of index values; and
halting the polishing when the polishing endpoint is reached.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of preventing or inhibiting vertebral compression fractures comprising:
providing a composition comprising a PDGF solution disposed in a biocompatible matrix; and,
applying the composition to at least one vertebral body.
2. The method of claim 1, wherein applying comprises injecting the at least one vertebral body with the composition.
3. The method of claim 1, wherein the at least one vertebral body comprises a high risk vertebral body.
4. A method for promoting or accelerating bone formation in a vertebral body comprising:
providing a composition comprising a PDGF solution disposed in a biocompatible matrix; and,
applying the composition to at least one vertebral body.
5. The method of claim 4, further comprising providing at least one pharmaceutical composition; and,
administering the pharmaceutical composition locally to a patient.
6. The method of claim 5, wherein administering the pharmaceutical composition locally comprises disposing the pharmaceutical composition in or around the at least one vertebral body.
7. The method of claim 4, further comprising providing at least one pharmaceutical composition; and,
administering the pharmaceutical composition systemically to a patient.
8. The method of claim 7, wherein administering the pharmaceutical composition systemically comprises oral administration, intravenous administration, or combinations thereof.
9. The method of claim 5, wherein the patient is an individual with osteoporosis.
10. The method of claim 5, wherein the patient is an individual that has undergone kyphoplasty or vertebroplasty.
11. A composition for promoting bone formation in a vertebral body comprising:
a solution comprising platelet derived growth factor (PDGF);
a biocompatible matrix; and,
at least one contrast agent,
wherein the solution and the contrast agent are disposed in the biocompatible matrix.
12. The composition of claim 11, wherein the at least one contrast agent comprises a cationic contrast agent, an anionic contrast agent, a non-ionic contrast agent, or combinations thereof.
13. The composition of claim 11, wherein the contrast agent comprises an iodo-compound.
14. The composition of claim 13, wherein the iodo-compound comprises (S)-N,N\u2032-bis2-hydroxy-1-(hydroxymethyl)-ethyl-2,4,6-triiodo-5-lactamidoisophthalamide or derivatives thereof.