1. An LED lighting unit comprising:
a first light source including a blue LED configured to emit blue light and a phosphor material configured to wavelength-convert at least a part of the blue light emitted from the blue LED to red wavelength light and green wavelength light, the phosphor material configured to emit more red wavelength light than green wavelength light, and the first light source configured to emit light having a color temperature located substantially on a blackbody locus;
a second light source including a blue LED configured to emit blue light and a second phosphor material configured to wavelength-convert at least a part of the blue light emitted from the blue LED to red wavelength light and green wavelength light, the second phosphor material configured to emit more green wavelength light than red wavelength light, and the second light source configured to emit light having a higher color temperature substantially on the blackbody locus than a color temperature of light emitted from the first light source;
a third light source including a blue LED configured to emit blue light and a third phosphor material configured to wavelength-convert at least a part of the blue light emitted from the blue LED to at least one of a green wavelength light and a yellow wavelength light, and the third light source configured to emit light located within at least one of a green color area and a yellow color area in an xy chromaticity diagram; and
a lens located in a direction of light-emission of light emitted from the first light source, the second light source and the third light source, and the lens being configured to control a mixture of the light emitted from the first light source, the second light source and the third light source, wherein the light emitted from each of the first light source, the second light source and the third light source maintains an emission intensity of more than 20 percent of a maximum emission intensity of a respective one of the first light source, the second light source and the third light source when emitting light within a wavelength range of at least from 470 nm to 600 nm.
2. The LED lighting unit according to claim 1, wherein the light emitted from the first light source has a color temperature of substantially 2,800 K, the light emitted from the second light source has a color temperature of substantially 7,000 K, and the light emitted from the third light source is located within a green color area in the xy chromaticity diagram.
3. The LED lighting unit according to claim 2, wherein the light emitted from each of the first light source, the second light source and the third light source maintains an emission intensity of more than 20 percent of a maximum emission intensity of a respective one of the first light source, the second light source and the third light source when emitting light within a wavelength range of from 450 nm to 600 nm.
4. The LED light unit according to claim 1, wherein the light emitted from the first light source has a color temperature of substantially 2,000 K, the light emitted from the second light source has a color temperature of substantially 7,000 K, and the light emitted from the third light source is located within a green color area in the xy chromaticity diagram.
5. The LED lighting unit according to claim 4, wherein the light emitted from each of the first light source, the second light source and the third light source maintains an emission intensity of more than 20 percent of a maximum emission intensity of a respective one of the first light source, the second light source, and the third light source when emitting light within a wavelength range of from 470 nm to 660 nm.
6. The LED lighting unit according to claim 1, further comprising:
a first power supply for controlling a driving current to the first light source, a second power supply for controlling a driving current to the second light source, and a third power supply for controlling a driving current to the third light source, wherein both the first power supply and the second power supply control a beam ratio of light emitted from the first light source to light emitted from the second light source, and the third power supply controls a beam ratio of light emitted from the third light source to both light emitted from the first light source and light emitted from the second light source.
7. The LED lighting unit according to claim 2, further comprising:
a first power supply for controlling a driving current to the first light source, a second power supply for controlling a driving current to the second light source and a third power supply for controlling a driving current to the third light source, wherein both the first power supply and the second power supply control a beam ratio of light emitted from the first light source to light emitted from the second light source, and the third power supply controls a beam ratio of light emitted from the third light source to both light emitted from the first light source and light emitted from the second light source.
8. The LED lighting unit according to claim 3, further comprising:
a first power supply for controlling a driving current to the first light source, a second power supply for controlling a driving current to the second light source and a third power supply for controlling a driving current to the third light source, wherein both the first power supply and the second power supply control a beam ratio of light emitted from the first light source to light emitted from the second light source, and the third power supply controls a beam ratio of light emitted from the third light source to both light emitted from the first light source and light emitted from the second light source.
9. The LED lighting unit according to claim 4, further comprising:
a first power supply for controlling a driving current to the first light source, a second power supply for controlling a driving current to the second light source and a third power supply for controlling a driving current to the third light source, wherein both the first power supply and the second power supply control a beam ratio of light emitted from the first light source to light emitted from the second light source, and the third power supply controls a beam ratio of light emitted from the third light source to both light emitted from the first light source and light emitted from the second light source.
10. The LED lighting unit according to claim 5, further comprising:
a first power supply for controlling a driving current to the first light source, a second power supply for controlling a driving current to the second light source and a third power supply for controlling a driving current to the third light source, wherein both the first power supply and the second power supply control a beam ratio of light emitted from the first light source to light emitted from the second light source, and the third power supply controls a beam ratio of light emitted from the third light source to both light emitted from the first light source and light emitted from the second light source.
11. The LED lighting unit according to claim 1, wherein a mixture of light, including light emitted from the first light source, light emitted from the second light source, and light emitted from the third light source, has a color temperature located substantially on the blackbody locus.
12. The LED lighting unit according to claim 2, wherein a mixture of light, including light emitted from the first light source, light emitted from the second light source, and light emitted from the third light source, has a color temperature located substantially on the blackbody locus.
13. The LED lighting unit according to claim 4, wherein a mixture of light, including light emitted from the first light source, light emitted from the second light source, and light emitted from the third light source, has a color temperature located substantially on the blackbody locus.
14. The LED lighting unit according to claim 6, wherein a mixture of light, including light emitted from the first light source, light emitted from the second light source, and light emitted from the third light source, has a color temperature located substantially on the blackbody locus.
15. The LED lighting unit according to claim 7, wherein a mixture of light, including light emitted from the first light source, light emitted from the second light source, and light emitted from the third light source, has a color temperature located substantially on the blackbody locus.
16. The LED lighting unit according to claim 9, wherein a mixture of light, including light emitted from the first light source, light emitted from the second light source, and light emitted from the third light source, has a color temperature located substantially on the blackbody locus.
17. The LED lighting unit according to claim 1, wherein the phosphor material is a mixture of red phosphor wavelength converting material and green phosphor wavelength converting material, and the second phosphor material is a mixture of red phosphor wavelength converting material and green phosphor wavelength converting material.
18. An LED lighting unit comprising:
a first light source including a blue LED configured to emit blue light and a phosphor configured to wavelength-convert at least a part of the blue light emitted from the blue LED to red wavelength light and green wavelength light, the phosphor configured to emit more red wavelength light than green wavelength light, and the first light source configured to emit light having a color temperature located substantially on a blackbody locus;
a first power supply for controlling a driving current to the first light source;
a second light source including a blue LED configured to emit blue light and a second phosphor material configured to wavelength-convert at least a part of the blue light emitted from the blue LED to red wavelength light and green wavelength light, the second phosphor material configured to emit more green wavelength light than red wavelength light, and the second light source configured to emit light having a higher color temperature substantially on the blackbody locus than a color temperature of light emitted from the first light source;
a second power supply for controlling a driving current to the second light source;
a third light source including a blue LED configured to emit blue light and a third phosphor material configured to wavelength-convert at least a part of the blue light emitted from the blue LED to at least one of a green wavelength light and a yellow wavelength light, and the third light source configured to emit light located within at least one of a green color area and a yellow color area in an xy chromaticity diagram;
a third power supply for controlling a driving current to the third light source; and
a lens located in a direction of light-emission of light emitted from the first light source, the second light source and the third light source, and the lens being configured to control a mixture of the light emitted from each of the first light source, the second light source and the third light source, wherein both the first power supply and the second power supply control a beam ratio of light emitted from the first light source to light emitted from the second light source and locate a mixture light emitted from the first and the second light sources at a position on a virtual line connecting the lights emitted from the first and the second light sources located substantially on the blackbody locus, and the third power supply controls a beam ratio of light emitted from the third light source to the mixture light emitted from the first light source and the second light source and locate the mixture of the light emitted from each of the first, the second and the third light sources at another position on another virtual line connecting the position on the virtual line connecting the lights emitted from the first and the second light sources and the light emitted from the third light source in the xy chromaticity diagram, and wherein the another virtual line intersects the blackbody locus between the lights emitted from the first and the second light sources located substantially on the blackbody locus.
19. The LED lighting unit according to claim 18, wherein the mixture of the light emitted from the first light source, the second light source, and the third light source has a color temperature located substantially on a blackbody locus.
20. The LED lighting unit according to claim 18, wherein both light emitted from the first light source and light emitted from the second light source have color temperatures located substantially on a blackbody locus.
21. The LED lighting unit according to claim 20, wherein a mixture of light emitted from the first light source, the second light source, and the third light source has a color temperature located substantially on a blackbody locus.
22. The LED lighting unit according to claim 18, wherein the phosphor material is a mixture of red phosphor wavelength converting material and green phosphor wavelength converting material, and the second phosphor material is a mixture of red phosphor wavelength converting material and green phosphor wavelength converting material.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A charged particle beam apparatus system comprising a circuit pattern inspection apparatus that irradiates a charged particle beam on a plurality of areas of a circuit pattern, detects secondary charged particles generated from the circuit pattern to form images of the irradiated areas, and compares the images of the plurality of areas to thereby detect a defect or a foreign-particle in the circuit, and a charged particle beam apparatus that is used for observation or analysis of the defect specified by means of the pattern inspection apparatus,
wherein charging is formed by means of irradiation of the charged particle beam or carbon-base deposit is formed on the irradiated area as the result of interaction between the charged particle beam and gas that is remaining in the circuit pattern inspection apparatus or generated from the sample, and the charging or deposit is used as a mark in the charged particle beam apparatus,
wherein a gas introduction mechanism for spraying gas onto the circuit pattern is provided in the pattern inspection apparatus,
wherein a cooling unit for cooling the circuit pattern is provided, and
wherein the charged particle beam is irradiated onto a portion including the defect or the foreign-particle in the circuit such that a temperature of the portion is kept at a temperature higher than the environmental temperature.
2. A charged particle beam apparatus system comprising a circuit pattern inspection apparatus that irradiates a charged particle beam on a plurality of areas of a circuit pattern, detects secondary charged particles generated from the circuit pattern to form images of the irradiated areas, and compares the images of the plurality of areas to thereby detect a defect or a foreign-particle in the circuit, and a charged particle beam apparatus that is used for observation or analysis of the defect specified by means of the pattern inspection apparatus,
wherein charging is formed by means of irradiation of the charged particle beam or carbon-base deposit is formed on the irradiated area as the result of interaction between the charged particle beam and gas that is remaining in the circuit pattern inspection apparatus or generated from the sample, and the charging or deposit is used as a mark in the charged particle beam apparatus,
wherein the charged particle beam is irradiated onto the circuit pattern including the defect or the foreign-particle such that a temperature of the circuit pattern is kept at a temperature higher than the environmental temperature so as to cause charging on the circuit pattern in the pattern inspection apparatus and to form a mark on the periphery of the defect or the foreign-particle in the circuit.
3. A method for forming an image in which a charged particle beam is scanned on a sample to form an image of the scanned area, wherein the charged particle beam is irradiated selectively onto a specified portion including the defect or the foreign-particle in a circuit such that a temperature of the portion is kept at a temperature higher than the environmental temperature and the charging formed by the irradiation is used as a mark in the image so as to cause charging on the specified portion that is different from charging of the scanned area other than the specified portion.
4. An inspection method in which a charged particle beam is scanned onto a semiconductor device in a first charged particle beam apparatus to form an image of the scanned area, the charged particle beam is irradiated selectively onto a specified portion so as to cause charging on the specified portion including a defect or a foreign-particle such that a temperature of the portion is kept at a temperature higher than the environmental temperature that is different from charging of the scanned area other than the specified portion, the semiconductor device is transferred to a second charged particle beam apparatus keeping the charging condition, and the charged particle beam is irradiated onto the portion to be inspected that is specified by the charging for inspection of the portion.
5. A charged particle beam apparatus system comprising a circuit pattern inspection apparatus that irradiates a charged particle beam on a plurality of areas of a circuit pattern, detects secondary charged particles generated from the circuit pattern to form images of the irradiated areas, and compares the formed images of the plurality of areas to thereby detect a defect or a foreign-particle in the circuit, and comprising a charged particle beam apparatus that irradiates a charged particle beam onto the defect, the area including foreign-particle, or the peripheral area that has been detected by means of the circuit pattern inspection apparatus and detects charged particles released from the defect or the area including foreign-particle to thereby form an image of the defect or the area including foreign-particle, and wherein the charged particle beam is irradiated onto a portion including the defect or the foreign-particle such that a temperature of the portion is kept at a temperature higher than the environmental temperature,
wherein a mark for specifying the foreign-particle or defect detected by means of the circuit pattern inspection apparatus is formed by means of irradiation of the charged particle beam so that charging on the mark is different from that on the area other than the mark, and the field of view is matched for forming an image of the defect or the area including foreign-particle in the charged particle beam apparatus based on the formed mark.
6. A circuit pattern inspection apparatus that irradiates a charged particle beam onto a plurality of areas of a circuit pattern and detects secondary charged particles released from the circuit pattern to form an image of the irradiated areas, and compares a plurality of formed images to detect a defect or a foreign-particle of the circuit,
wherein a mark that can be used for specifying the detected defect or foreign-particle of the circuit is formed in the form of charging by means of irradiation of the charged particle beam, and wherein the charged particle beam is irradiated onto a portion including the defect or the foreign-particle such that a temperature of the portion is kept at a temperature higher than the environmental temperature.