1.-58. (canceled)
59. A multi-band communication device, comprising:
a composite right and left handed (CRLH) metamaterial device configured to divide or combine power, including:
a plurality of branch CRLH transmission lines, each of the plurality of branch CRLH transmission lines comprising one or more CRLH unit cells having a right handed series inductance, a right handed shunt capacitance, a series capacitance, and a shunt inductance; and
a signal line electrically connected to each of the plurality of branch CRLH transmission lines;
wherein the signal line is configured to:
receive power signals from each of the plurality of branch CRLH transmission lines and to output a corresponding combined power signal; and
receive a power signal from another component and distribute the power signal amongst the plurality of branch CRLH transmission lines; and
an antenna coupled to the CRLH metamaterial device.
60. The multi-band communication device of claim 59, wherein the multi-band communication device is configured to operate in at least one communication network selected from the group consisting of: a Wi-Fi communication network, a WiMAX communication network, a cellular communication network, and a GSM communication network.
61. The multi-band communication device of claim 59, wherein the multi-band communication device is a dual-band communication device.
62. The multi-band communication device of claim 59, wherein a respective branch CRLH transmission line has an electrical length that corresponds to a phase of a 90 degree integer multiple of an operating signal frequency.
63. The multi-band communication device of claim 59, wherein a respective branch CRLH transmission line has an electrical length that corresponds to a phase of zero degrees.
64. The multi-band communication device of claim 59, wherein a respective one of the one or more CRLH unit cells has a structure in which the right handed series inductance, the right handed shunt capacitance, the series capacitance, and the shunt inductance are spatially distributed in the cell.
65. The multi-band communication device of claim 59, wherein a respective one of the one or more CRLH unit cells has a structure with lumped circuit elements that exhibit the right handed series inductance, the right handed shunt capacitance, the series capacitance, and the shunt inductance, respectively.
66. The multi-band communication device of claim 59, wherein a respective one of the one or more CRLH unit cells comprises a meander microstrip.
67. A multi-band communication device, comprising:
a composite right and left handed (CRLH) metamaterial device configured to divide or combine power, including:
a CRLH transmission line comprising a plurality of CRLH unit cells coupled in series, each of the plurality of CRLH unit cells structured to have a first electrical length that corresponds to a phase of zero degrees, 180 degrees, or a multiple of 180 degrees at a first signal frequency and a second, different electrical length that corresponds to a phase of zero degrees, 180 degrees, or a multiple of 180 degrees at a second, different signal frequency, wherein at least one of the plurality of CRLH unit cells has a third electrical length that corresponds to a phase of 90 degrees or an odd multiple of 90 degrees at the first signal frequency and a fourth electrical length that is different from the third electrical length and corresponds to a phase of 90 degrees or an odd multiple of 90 degrees at the second signal frequency; and
an antenna coupled to the CRLH metamaterial device.
68. The multi-band communication device of claim 67, wherein the multi-band communication device is configured to operate in at least one communication network selected from the group consisting of: a Wi-Fi communication network, a WiMAX communication network, a cellular communication network, and a GSM communication network.
69. The multi-band communication device of claim 67, wherein the multi-band communication device is a dual-band communication device.
70. The multi-band communication device of claim 67, wherein a respective one of the plurality of CRLH unit cells has a right handed series inductance, a right handed shunt capacitance, a series capacitance, and a shunt inductance.
71. The multi-band communication device of claim 70, wherein the respective one of the plurality of CRLH unit cells has a structure in which the right handed series inductance, the right handed shunt capacitance, the series capacitance, and the shunt inductance are spatially distributed in the cell.
72. The multi-band communication device of claim 70, wherein the respective one of the plurality of CRLH unit cells has a structure with lumped circuit elements that exhibit the right handed series inductance, the right handed shunt capacitance, the series capacitance, and the shunt inductance, respectively.
73. The multi-band communication device of claim 67, wherein a respective one of the one or more CRLH unit cells comprises a meander microstrip.
74. A multi-band communication device, comprising:
a composite right and left handed (CRLH) metamaterial device configured to divide or combine power, including:
a dual-band CRLH transmission line comprising a plurality of CRLH unit cells coupled in series, each of the plurality of CRLH unit cells having a first electrical length that is a multiple of +\u2212180 degrees at a first signal frequency and a second, different electrical length that is a different multiple of +\u2212180 degrees at a second signal frequency, wherein at least one of the plurality of CRLH unit cells has a third electrical length that is an odd multiple of +\u221290 degrees at the first signal frequency and a fourth, different electrical length that is a different odd multiple of +\u221290 degrees at the second signal frequency; and
an antenna coupled to the CRLH metamaterial device.
75. The multi-band communication device of claim 74, wherein the multi-band communication device is configured to operate in at least one communication network selected from the group consisting of: a Wi-Fi communication network, a WiMAX communication network, a cellular communication network, and a GSM communication network.
76. The multi-band communication device of claim 74, wherein the multi-band communication device is a dual-band communication device.
77. The multi-band communication device of claim 74, wherein the first, second, third and fourth electrical lengths correspond to phase values of 0, 360, 90, and 270 degrees, respectively.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1.-19. (canceled)
20. A method of manufacture of an optical waveguide structure comprising the steps of
providing a multilayer semiconductor wafer comprising a III-V semiconductor substrate, a III-V semiconductor top layer and an etch stop layer sandwiched therebetween, the etch stop layer comprising aluminum and phosphorous; and
etching through the top layer to the etch stop layer by use of a dry etch containing chlorine to provide two spaced apart recesses defining the optical waveguide therebetween.
21. The method as claimed in claim 20 wherein the III-V semiconductor top layer comprises a plurality of III-V semiconductor layers.
22. The method as claimed in claim 20, wherein the III-V semiconductor top layer comprises at least one GaAs layer.
23. The method as claimed in claim 20, wherein the III-V semiconductor top layer comprises at least one AlGaAs layer, the AlGaAs layer preferably having the composition AlzGa1\u2212zAs where z is in the range 0.1 to 0.95.
24. The method as claimed in claim 20, wherein the dry etch is a chlorine containing precursor.
25. The method as claimed in claim 24 wherein the chlorine containing precursor comprises chlorine gas.
26. The method as claimed in claim 24, wherein the chlorine containing precursor comprises BCl3.
27. The method as claimed in claim 24, wherein the chlorine containing precursor comprises CCl4.
28-37. (canceled)
38. A method as claimed in claim 23, wherein z is in the range of about 0.2 to about 0.35.
39. A method as claimed in claim 38, wherein z is about 0.24.