1. A charged particle beam apparatus, comprising:
an irradiation optical system for irradiating and scanning a charged particle beam emitted from a charged particle source on a sample;
a detection optical system having a detector that detects charged particles generated from the sample by irradiation of the charged particle beam and converts the detected charged particles into an electric signal at a predetermined sampling period; and
an image processing unit for forming an image based on the electric signal from the detector,
wherein the image processing unit counts the number of the charged particles detected for each pixel from an electric signal pulse at each sampling time, and forms an image based on wave height values of the electric signal pulse.
2. The charged particle beam apparatus according to claim 1,
wherein the image processing unit compares the electric signal pulse obtained at the each sampling time with the electric signal pulse at the latest sampling time, and detects a peak of the wave height values for the each pixel based on a wave height value at a point in time when updating of only either one of a maximum value and a minimum value of the wave height values stops.
3. The charged particle beam apparatus according to claim 2,
wherein the wave height values that were subjected to the peak detection for each pixel are discriminated into a plurality of wave height areas and a luminance of the pixel is set based on a count value for each wave height area after the discrimination.
4. The charged particle beam apparatus according to claim 3,
wherein the image processing unit performs peak detection of the wave height values for each of pixels for one line of which the image data is configured.
5. The charged particle beam apparatus according to claim 3,
wherein the detector is an annular shaped detector, and is arranged on an optical axis of the irradiation optical system.
6. The charged particle beam apparatus according to claim 5,
wherein the annular shaped detector has an opening that enables the charged particle beam to pass through in a center of the detector and a sensitive surface of the detector facing the sample is divided into a plurality of segments.
7. The charged particle beam apparatus according to claim 3,
further comprising a deflector for deflecting the charged particles generated from the sample by the irradiation of the charged particle beam out of an optical axis of the irradiation optical system,
wherein the detector is arranged on a trajectory of the charged particles that are deflected by the deflector.
8. The charged particle beam apparatus according to claim 2,
wherein the wave height values that were subjected to the peak detection for each pixel are discriminated into a plurality of wave height areas, image data configured of a plurality of pixels is generated for each wave height area after the discrimination, and pieces of image data for the each wave height area are synthesized.
9. The charged particle beam apparatus according to claim 8,
wherein deconvolution processing is performed on the image data formed for the each wave height area, and pieces of the image data after the processing are synthesized.
10. The charged particle beam apparatus according to claim 8,
wherein the image processing unit performs peak detection of the wave height values for each of pixels for one line of which the image data is configured.
11. The charged particle beam apparatus according to claim 8,
wherein the detector is an annular shaped detector, and is arranged on an optical axis of the irradiation optical system.
12. The charged particle beam apparatus according to claim 8,
further comprising a deflector for deflecting the charged particles generated from the sample by the irradiation of the charged particle beam out of an optical axis of the irradiation optical system,
wherein the detector is arranged on a trajectory of the charged particles that are deflected by the deflector.
13. The charged particle beam apparatus according to claim 2,
wherein the wave height values that were subjected to the peak detection for each pixel are discriminated into a plurality of wave height areas, and
wherein image data is formed based on only the wave height values included in a predetermined wave height area.
14. The charged particle beam apparatus according to claim 13,
wherein the image processing unit performs peak detection of the wave height values for each of pixels for one line of which the image data is configured.
15. The charged particle beam apparatus according to claim 13,
wherein the detector is an annular shaped detector, and is arranged on an optical axis of the irradiation optical system.
16. The charged particle beam apparatus according to claim 13,
further comprising a deflector for deflecting the charged particles generated from the sample by the irradiation of the charged particle beam out of an optical axis of the irradiation optical system,
wherein the detector is arranged on a trajectory of the charged particles that are deflected by the deflector.
17. The charged particle beam apparatus according to claim 2,
wherein the image processing unit performs peak detection of the wave height values for each of pixels for one line of which image data is configured.
18. An image forming method of a charged particle beam apparatus that irradiates a charged particle beam on a sample, detects charged particles generated from the sample, and forms an image, comprising the steps of:
a step for converting the detected charged particles into an electric signal at a predetermined sampling period;
a step for counting the number of the detected charged particles for each pixel from an electric signal pulse at each sampling time; and
a step for forming an image based on wave height values of the electric signal pulse.
19. The image forming method of a charged particle beam apparatus according to claim 18, further comprising the steps of:
a step for comparing the electric signal pulse obtained at the each sampling time with the electric signal pulse obtained at the latest sampling time;
a step for updating a maximum value or a minimum value of the wave height values according to a comparison result; and
a step for detecting a peak of the wave height values for the each pixel based on the wave height value at a point in time when updating of either only one of the maximum value or the minimum value of the wave height values stops.
20. The image forming method of a charged particle beam apparatus according to claim 19, further comprising the steps of:
a step for discriminating the wave height values that were subjected to the peak detection for each pixel into a plurality of wave height areas previously set; and
a step for setting a luminance of the pixel based on a count value for each wave height area that was subjected to the discrimination.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A sucker assembly, comprising:
a sucker;
a pull bar secured on the sucker;
a hollow pressing member mounted on the pull bar and pressing the sucker;
an elastic member mounted on the pull bar and biased between the sucker and the pressing member;
a control handle pivotally mounted on the pressing member; and
a pivot shaft extending through the control handle, the pressing member and the pull bar to connect the control handle with the pull bar;
wherein the pressing member has a first side pressing the sucker;
the first side of the pressing member has a periphery provided with a hollow mounting seat protruding outward from the pressing member;
the mounting seat of the pressing member has an end face provided with a fixing recess;
the sucker assembly further comprises an adjusting bushing mounted in the fixing recess of the mounting seat.
2. The sucker assembly of claim 1, wherein the fixing recess of the mounting seat is located beside and flush with a periphery of the sucker.
3. The sucker assembly of claim 1, wherein the fixing recess of the mounting seat has a substantially C-shaped profile.
4. The sucker assembly of claim 1, wherein the adjusting bushing has a substantially C-shaped profile.
5. A sucker assembly, comprising:
a sucker;
a pull bar secured on the sucker;
a hollow pressing member mounted on the pull bar and pressing the sucker;
an elastic member mounted on the pull bar and biased between the sucker and the pressing member;
a control handle pivotally mounted on the pressing member; and
a pivot shaft extending through the control handle, the pressing member and the pull bar to connect the control handle with the pull bar;
wherein the pressing member has a first side pressing the sucker;
the first side of the pressing member has a periphery provided with a hollow mounting seat protruding outward from the pressing member;
the mounting seat of the pressing member has an end face provided with a fixing recess;
the pressing member has a disk shape;
the pressing member has a central portion provided with a passage to allow passage of the pull bar;
the pressing member has a second side provided with a hollow protruding pivot seat connected to the passage;
the pivot seat of the pressing member has two opposite sidewalls each formed with an elongate guide slot connected to the passage;
the guide slot of the pivot seat extends in an axial direction of the pivot seat;
the control handle pivotally mounted on the pivot seat of the pressing member and has a first end provided with an eccentric pivot portion which is pivotally mounted on the pivot shaft in an eccentric manner and is movable to press the pressing member to move the pressing member toward the sucker;
the control handle has a second end provided with a driving portion;
the pivot portion of the control handle has an inner portion formed with a receiving recess to receive the pivot seat of the pressing member;
the pivot portion of the control handle has two opposite sidewalls each formed with a pivot hole pivotally mounted on the pivot shaft in an eccentric manner;
the pivot hole of the pivot portion is connected to the receiving recess;
the pull bar is movably mounted in the passage of the pressing member and the pivot seat of the pressing member;
the pull bar has a first end secured on the sucker and a second end formed with a fixing hole to allow passage of the pivot shaft;
the fixing hole of the pull bar is aligned with the guide slot of the pivot seat;
the pivot shaft in turn extends through the pivot hole of the control handle, the guide slot of the pivot seat and the fixing hole of the pull bar to pivotally connect the control handle with the pivot seat of the pressing member and the pull bar and to attach the pull bar to the pivot seat of the pressing member;
the pivot shaft is movable in the guide slot of the pivot seat the pivot seat of the pressing member has a periphery provided with a hanging hook;
the hanging hook of the pressing member has a side provided with a pressing lug;
the pressing lug of the pressing member has an arcuate shape and is located beside the fixing recess of the mounting seat;
the pressing lug of the pressing member is adapted for abutting a surface to clamp a sheet of paper between the pressing lug of the pressing member and the surface.
6. The sucker assembly of claim 1, wherein
the sucker is adapted for abutting a surface;
the fixing recess of the mounting seat is adapted for receiving a hanging rod of a support rack and is adapted for abutting the surface;
the hanging rod of the support rack is locked onto the surface by the fixing recess of the mounting seat;
the support rack contacts with the surface exactly and closely.
7. The sucker assembly of claim 5, wherein the hanging hook of the pressing member has a distal end provided with a ball.
8. The sucker assembly of claim 5, wherein the mounting seat of the pressing member is integrally combined with the hanging hook.
9. The sucker assembly of claim 5, wherein the mounting seat of the pressing member is spaced from the hanging hook.