1. A method for fabricating a capacitor of a semiconductor device, the method comprising the steps of:
i) forming an insulating interlayer including a storage node contact hole on a semiconductor substrate;
ii) forming a polysilicon layer on the insulating interlayer including the storage node contact hole;
iii) forming a sacrificial resist layer on the polysilicon layer, thereby filling the storage node contact hole with the sacrificial resist layer;
iv) selectively removing the sacrificial resist layer in such a manner that the sacrificial resist layer remains only in the storage node contact hole;
v) implanting ions into the upper surface of an exposed upper surface of the polysilicon layer;
vi) oxidizing an ion-implanted portion of the polysilicon layer after removing the remaining sacrificial resist layer;
vii) growing an MPS layer on a surface of the polysilicon layer after removing the oxidized portion of the polysilicon layer; and
viii) forming a dielectric layer and an upper electrode on the polysilicon layer including the MPS layer.
2. The method as claimed in claim 1, wherein the ions used in step v) include oxygen O2 and nitrogen N2.
3. The method as claimed in claim 1, wherein the sacrificial resist layer is etched through an etch back process in such a manner that the sacrificial resist layer remains only in the storage node contact hole.
4. The method as claimed in claim 1, wherein the oxidized portion of the polysilicon layer is removed through a cleaning process.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of producing a peptide or protein expression library in vitro which displays a population of peptides or proteins, wherein the peptides or proteins are specifically associated with the DNA encoding them through covalent binding of the peptides or proteins to the encoding DNA, said method comprising at least the following steps:
1) preparing a genetic library of a population of DNA molecules, each DNA molecule comprising:
(a) a nucleotide sequence encoding a binding moiety comprising an amino acid sequence which is a cis-acting DNA binding protein which binds specifically to the DNA encoding sequence through covalent binding of the amino acid sequence to DNA, and
(b) a nucleotide sequence encoding a display moiety comprising an amino acid sequence for display, and wherein the display moiety comprises at least one site of attachment for the binding moiety, and
2) expressing the genetic library thus formed whereby the population of peptides or proteins is produced each specifically associated with the DNA encoding sequence through covalent binding.
2. The method as claimed in claim 1 wherein expression of the genetic library is performed in vitro in a cellular system with at least one copy of a single library member expressed per host cell or organism.
3. The method as claimed in claim 1 wherein expression of the genetic library is performed in vitro, and is cell-free expression.
4. The method as claimed in claim 1 wherein said cis-acting protein is the P2 A protein.
5. The method as claimed in claim 3 wherein said expression is performed in the presence of a mis-match oligonucleotide which hybridizes to the DNA adjacent to the attachment site on both sides but that does not hybridize to the attachment site.
6. The method as claimed in claim 1 wherein said amino acid sequence for display is up to 40 amino acid residues.
7. The method as claimed in claim 1 wherein said amino acid sequence for display is generated by, or comprises DNA fragments from, cloning.
8. A method as claimed in claim 1 wherein said binding moiety is P2A modified by replacement of tyrosine at amino acid position 450 with phenylalanine.
9. A method of identifying a specific target-binding peptide or protein, said method comprising:
a) contacting a peptide expression library produced according to the method of claim 1 with a target molecule,
b) selecting and isolating a library member that binds to said target molecule, and
c) isolating from said library member the peptide or protein that is bound to said target molecule.
10. The method as claimed in claim 9 further comprising isolating from said library member the DNA sequence encoding the peptide or protein that binds specifically to said target molecule.
11. A method of assaying for the presence of a target molecule in a sample, said method comprising
(a) contacting said sample with a molecular probe comprising
(i) a peptide or protein target-binding moiety that selectively binds to said target molecule, wherein said target-binding moiety is covalently bound to DNA encoding said target-binding moiety and
(ii) a reporter moiety
wherein said contacting is effected under conditions such that said target-binding moiety can bind target molecule present in said sample selectively; and
(b) detecting the presence of reporter moiety bound to said target-bound molecular probe.
12. The method according to claim 1, wherein said nucleic acid encoding said amino acid sequence for display is generated by amplification by PCR.
13. The method according to claim 1 wherein the cis-acting protein is \u03c6X174.