1. A method of transmitting feedback information at a user equipment (UE) in a multi-carrier wireless communication system, the method comprising: when single carrier is assigned to the UE, receiving signals through an assigned forward link carrier; and transmitting, through an assigned reverse link carrier corresponding to the assigned forward link carrier, feedback information including hybrid automatic repeat request (HARQ) feedback information related to the signals received through the assigned forward link carrier; and when multi-carriers are assigned to the UE in a such way that a new carrier is additionally assigned to the UE in addition to the assigned single carrier, receiving a first signal through the assigned forward link carrier of the multi-carriers assigned to the UE; receiving a second signal through an additionally assigned new forward link carrier of the multi-carriers assigned to the UE, the second signal being different from the first signal; and transmitting first HARQ feedback information related to the first signal and second HARQ feedback information related to the second signal, wherein the first HARQ feedback information related to the first signal received through the assigned forward link carrier is transmitted by the UE through the assigned reverse link carrier, wherein the second HARQ feedback information related to the second signal received through the additionally assigned new forward link carrier is also transmitted by the UE only through the assigned reverse link carrier among the assigned reverse link carrier and an additionally assigned new reverse link carrier configured for the UE, wherein, when the single carrier is assigned to the UE, the HARQ feedback information is transmitted through a control channel of the assigned forward link carrier, wherein, when the multi-carriers are assigned to the UE, the second HARQ feedback information related to the second signal is not transmitted by the UE through a control channel of the additionally assigned new reverse link carrier, wherein the assigned forward link carrier and the additionally assigned new forward link carrier are different forward link carriers, wherein the assigned reverse link carrier and the additionally assigned new reverse link carrier are different reverse link carriers, and wherein the feedback information comprises information indicating a best pilot type for a best channel condition of each antenna from among predefined pilot types of different sub-carriers.
2. The method of claim 1, further comprising:
when the multi-carriers are assigned to the UE, transmitting first feedback information related to the first signal and second feedback information related to the second signal.
3. A method of receiving feedback information at a base station (BS) in a multi-carrier wireless communication system, the method comprising: when single carrier is assigned to a user equipment (UE), transmitting signals through an assigned forward link carrier; and receiving, through an assigned reverse link carrier corresponding to the assigned forward link carrier, feedback information including hybrid automatic repeat request (HARQ) feedback information related to the signals received through the assigned forward link carrier; and when multi-carriers are assigned to the UE in a such way that a new carrier is additionally assigned to the UE in addition to the assigned single carrier, transmitting a first signal through the assigned forward link carrier of the multi-carriers assigned to the UE; transmitting a second signal through an additionally assigned new forward link carrier of the multi-carriers assigned to the UE, the second signal being different from the first signal; and receiving first HARQ feedback information related to the first signal and second HARQ feedback information related to the second signal, wherein the first HARQ feedback information related to the first signal transmitted through the assigned forward link carrier is received from the UE through the assigned reverse link carrier, wherein the second HARQ feedback information related to the second signal transmitted through the additionally assigned new forward link carrier is also received from the UE only through the assigned reverse link carrier among the assigned reverse link carrier and an additionally assigned new reverse link carrier configured for the UE, wherein, when the single carrier is assigned to the UE, the HARQ feedback information is transmitted through a control channel of the assigned forward link carrier, wherein, when the multi-carriers are assigned to the UE, the second HARQ feedback information related to the second signal is not received from the UE through a control channel of the additionally assigned new reverse link carrier, wherein the assigned forward link carrier and the additionally assigned new forward link carrier are different forward link carriers, and wherein the assigned reverse link carrier and the additionally assigned new reverse link carrier are different reverse link carriers, and wherein the feedback information comprises information indicating a best pilot type for a best channel condition of each antenna from among predefined pilot types of different sub-carriers.
4. The method of claim 3, further comprising:
when the multi-carriers are assigned to the UE, receiving first feedback information related to the first signal and second feedback information related to the second signal.
5. The method of claim 1, further comprising:
when single carrier is assigned to the UE,
transmitting, through the assigned reverse link carrier corresponding to the assigned forward link carrier, channel quality information (CQI) related to the assigned forward link carrier, and
when the multi-carriers are assigned to the UE,
transmitting first CQI related to the assigned forward link carrier; and
transmitting second CQI related to the additionally assigned new forward link carrier,
wherein the first CQI related to the assigned forward link carrier is transmitted through the assigned reverse link carrier, and the second CQI related to the additionally assigned new forward link carrier is transmitted only through the assigned reverse link carrier among the assigned reverse link carrier and an additionally assigned new reverse link carrier configured for the UE,
wherein, when the single carrier is assigned to the UE, the CQI is transmitted through a control channel of the assigned reverse link carrier, and
wherein, when the multi-carriers are assigned to the UE, the second CQI is not transmitted through a control channel of the additionally assigned new reverse link carrier.
6. The method of claim 3, further comprising:
when single carrier is assigned to the UE,
receiving, through the assigned reverse link carrier corresponding to the assigned forward link carrier, channel quality information (CQI) related to the assigned forward link carrier, and
when the multi-carriers are assigned to the UE,
receiving first CQI related to the assigned forward link carrier; and
receiving second CQI related to the additionally assigned new forward link carrier,
wherein the first CQI related to the assigned forward link carrier is received through the assigned reverse link carrier, and the second CQI related to the additionally assigned new forward link carrier is received only through the assigned reverse link carrier among the assigned reverse link carrier and an additionally assigned new reverse link carrier configured for the UE,
wherein, when the single carrier is assigned to the UE, the CQI is transmitted through a control channel of the assigned reverse link carrier, and
wherein, when the multi-carriers are assigned to the UE, the second CQI is not received through a control channel of the additionally assigned new reverse link carrier.
7. A user equipment (UE) configured to transmit feedback information in a multi-carrier wireless communication system, the UE comprising: an antenna; a radio frequency (RF) unit configured to transmit and receive signals via the antenna; and a processor operatively connected to the RF unit and configured to when single carrier is assigned to the UE, receive signals through an assigned forward link carrier; and transmit, through an assigned reverse link carrier corresponding to the assigned forward link carrier, feedback information including hybrid automatic repeat request (HARQ) feedback information related to the signals received through the assigned forward link carrier; and when multi-carriers are assigned to the UE in a such way that a new carrier is additionally assigned in addition to the assigned single carrier, receive a first signal through the assigned forward link carrier of the multi-carriers assigned to the UE; receive a second signal through an additionally assigned new forward link carrier of the multi-carriers assigned to the UE, the second signal being different from the first signal; and transmit first HARQ feedback information related to the first signal and second HARQ feedback information related to the second signal, wherein the first HARQ feedback information related to the first signal received through the assigned forward link carrier is transmitted by the UE through the assigned reverse link carrier, wherein the second HARQ feedback information related to the second signal received through the additionally assigned new forward link carrier is also transmitted by the UE only through the assigned reverse link carrier among the assigned reverse link carrier and additionally assigned new reverse link carrier configured for the UE, wherein, when the single carrier is assigned to the UE, the HARQ feedback information is transmitted through a control channel of the assigned forward link carrier, wherein, when the multi-carriers are assigned to the UE, the second HARQ feedback information related to the second signal is not transmitted by the UE through a control channel of the additionally assigned new reverse link carrier, wherein the assigned forward link carrier and the additionally assigned new forward link carrier are different forward link carriers, wherein the assigned reverse link carrier and the additionally assigned new reverse link carrier are different reverse link carriers, and wherein the feedback information comprises information indicating a best pilot type for a best channel condition of each antenna from among predefined pilot types of different sub-carriers.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A plasma chamber, comprising:
a lower electrode having a surface for supporting a substrate, the lower electrode is coupled with a radio frequency (RF) power supply;
an upper electrode disposed over the lower electrode, the upper electrode being electrically grounded;
an upper dielectric ring surrounding the upper electrode, the upper dielectric ring adjusted using a mechanism for setting a vertical position of the upper dielectric ring;
an upper electrode extension surrounding the upper dielectric ring, the upper electrode extension being electrically grounded;
a lower dielectric ring surrounding the lower electrode, the lower dielectric ring set at a level that is below a level of the surface of the lower electrode; and
a lower electrode extension surrounding the lower dielectric ring, the lower electrode extension arranged opposite the upper electrode extension;
wherein an edge processing region is defined between the upper and lower dielectric rings and the upper and lower electrode extensions, and when the substrate is present on the surface of the lower electrode, an edge of the substrate extends into the edge processing region.
2. The chamber of claim 1, wherein the mechanism for setting the vertical position of the upper dielectric ring has positions that place the upper dielectric ring closer toward the lower dielectric ring or away from the lower dielectric ring.
3. The chamber of claim 1, wherein upper dielectric ring is settable into positions that are (a) substantially parallel to the upper electrode, (b) protrude past a level of the upper electrode and toward the lower dielectric ring, or (c) recess away from the level of the upper electrode and away from the lower dielectric ring.
4. The chamber of claim 1, wherein the vertical position is along an orientation that is substantially perpendicular to the surface of the lower electrode.
5. The chamber of claim 1, wherein the vertical position is controlled by controlling the upper dielectric ring at a plurality of points on a top surface of the upper dielectric ring.
6. The chamber of claim 1, wherein the vertical position is controlled to modify an area covered by the edge processing region, wherein the area defines an amount of area of the edge of the substrate that is processed.
7. A plasma chamber, comprising:
a lower electrode having a surface for supporting a substrate, the lower electrode coupled with a radio frequency (RF) power supply;
an upper electrode disposed over the lower electrode, the upper electrode being electrically grounded;
an upper dielectric ring surrounding the upper electrode, the upper dielectric ring moved using a mechanism for setting a vertical position of the upper dielectric ring separate from a position of the upper electrode;
an upper electrode extension surrounding the upper dielectric ring, the upper electrode extension being electrically grounded;
a lower electrode extension surrounding the lower dielectric ring, the lower electrode extension arranged opposite the upper electrode extension;
wherein an edge processing region is defined between the upper and lower electrode extensions, and when the substrate is present on the surface of the lower electrode, an edge of the substrate extends into the edge processing region.
8. The chamber of claim 7, wherein the vertical position is along an orientation that is substantially perpendicular to the surface of the lower electrode.
9. The chamber of claim 7, further comprising:
a lower dielectric ring positioned between the lower electrode and the lower electrode extension such that the lower dielectric ring surrounds the lower electrode.
10. The chamber of claim 7, wherein the upper dielectric ring is settable into positions that are (a) substantially parallel to the upper electrode, (b) protrude past a level of the upper electrode and toward the lower dielectric ring, or (c) recess away from the level of the upper electrode and away from the lower dielectric ring.
11. The chamber of claim 7, wherein the upper dielectric ring is calibrated to generate a measurement of the vertical position at various points on a lower surface of the upper dielectric ring.
12. The chamber of claim 7, wherein the upper dielectric ring is moved using the mechanism for setting the vertical position of the upper dielectric ring separately from a position of the upper electrode extension.
13. A system for controlling a size of an edge exclusion region, comprising:
an upper electrode;
an upper plasma exclusion zone (PEZ) ring configured to reduce an effect of plasma on the upper electrode;
a system controller configured to generate signals regarding a first position and a second position of the upper PEZ ring;
an actuator; and
a position controller configured to control the actuator based on the signals to achieve the first position and the second position, wherein the first and second positions are achieved independent of movement of the upper electrode.
14. The system of claim 13, further comprising a lower PEZ ring positioned below the upper PEZ ring, wherein an edge processing region is formed between the upper PEZ ring and the lower PEZ ring, wherein the first position corresponds to a first volume of the edge processing region and the second position corresponds to a second volume of the edge processing region.
15. The system of claim 13, further comprising:
an input device, wherein the system controller is configured to receive the first position and the second position from a user via the input device; and
a memory device, wherein the system controller is configured to access the first position and the second position from the memory device,
wherein the actuator includes a link or a positioning mechanism, wherein the link includes a lead screw, a rod, a toothgear, or a pinset,
wherein the positioning mechanism includes a bellow or a bladder.
16. The system of claim 13, further comprising:
a vacuum pump configured to generate a vacuum within the actuator,
wherein the position controller is configured to control a position of the actuator via the vacuum pump; and
a spacer configured to stop movement of the upper PEZ ring when the upper PEZ ring reaches the first position or the second position.
17. A method for bevel edge cleaning, the method comprising:
positioning a lower electrode below an upper electrode;
placing an upper electrode extension peripheral to the upper electrode;
placing a lower electrode extension peripheral to the lower electrode; and
situating an upper plasma exclusion zone (PEZ) ring between the upper electrode and the upper electrode extension; and
engaging the PEZ ring with multiple positions while maintaining the upper electrode at a position.
18. The method of claim 17, wherein engaging the PEZ ring includes engaging the PEZ ring with multiple positions while maintaining the upper electrode extension at a position.
19. The method of claim 17, wherein the multiple positions include a level above a level of a lower surface of the upper electrode, a level at the level of the lower surface of the upper electrode, and a level below a level of the lower surface of the upper electrode.
20. The method of claim 17, wherein engaging the PEZ ring with multiple positions while maintaining the upper electrode at the position is performed to change an area of a bevel edge of a substrate that is etched.