1. A method of forming patterns of a semiconductor device, comprising:
forming a material film on a substrate;
forming a hard mask on the material film;
forming a first mold mask pattern and a second mold mask pattern on the hard mask;
forming a pair of first spacers to cover opposite sidewalls of the first mold mask pattern, and a pair of second spacers to cover opposite sidewalls of the second mold mask pattern;
forming a first gap and a second gap to expose the hard mask by removing the first mold mask pattern and the second mold mask pattern, the first gap being formed between the pair of first spacers and the second gap being formed between the pair of second spacers;
forming a mask pattern on the hard mask to cover the first gap and expose the second gap;
forming an auxiliary pattern to cover the second gap;
removing the mask pattern; and
forming a hard mask pattern by patterning the hard mask using the first spacers, the second spacers and the auxiliary pattern as a mask.
2. The method of claim 1, wherein the forming the mask pattern comprises:
forming a mask film to cover the first spacers and the second spacers;
forming a photoresist pattern on the mask film to cover the mask film above the first gap and expose the mask film above the second gap; and
forming the mask pattern by patterning the mask film using the photoresist pattern.
3. The method of claim 2, wherein the forming the mask pattern further comprises, before forming the photoresist pattern, forming an antireflection film on the mask film.
4. The method of claim 1, wherein the mask pattern exposes inner sidewalls of the pair of second spacers, and covers outer sidewalls of the pair of second spacers.
5. The method of claim 4, wherein the mask pattern includes a recess to expose the second gap, and the recess has a width equal to or larger than the second gap.
6. The method of claim 5, wherein the mask pattern includes a first mask film pattern to cover the pair of first spacers and the pair of second spacers and a second mask film pattern to cover the first mask film pattern, and the first and second mask film patterns include the recess.
7. The method of claim 6, wherein the forming the auxiliary pattern comprises:
forming an auxiliary film on the second mask film pattern, the auxiliary film filling the recess; and
forming the auxiliary pattern by removing the auxiliary film and the second mask film pattern, the first mask film pattern is exposed.
8. The method of claim 7, wherein the first mask film pattern is a SOH film pattern, and the second mask film pattern is a SiON film pattern.
9. The method of claim 1, wherein the pair of first spacers, the pair of second spacers and the auxiliary pattern include the same material.
10. The method of claim 1, wherein the auxiliary pattern includes silicon oxide.
11. The method of claim 1, further comprising patterning the material film using the hard mask pattern.
12. A method of forming patterns of a semiconductor device, comprising:
forming a hard mask on a substrate;
forming a plurality of mold mask patterns on the hard mask;
forming a plurality of pairs of spacers on the hard mask, each of the pairs of spacers covering opposite sidewalls of each of the mold mask patterns;
exposing the hard mask between each of the pairs of spacers by removing the plurality of mold mask patterns;
forming a mask pattern on the hard mask to cover the spacers, the mask pattern exposing the hard mask between inner sidewalls of at least one of the pairs of spacers;
forming an auxiliary pattern to cover the exposed hard mask; and
removing the mask pattern.
13. The method of claim 12, wherein the forming the mask pattern comprises:
forming a mask film on the hard mask to cover the pairs of spacers;
forming a photoresist on the mask film;
forming a opening in the photoresist to form a photoresist pattern, the opening being formed on a region between at least one of the pairs of spacers; and
forming the mask pattern using the photoresist pattern.
14. The method of claim 12, wherein the auxiliary pattern and the pairs of spacers include the same material.
15. The method of claim 12, wherein the auxiliary pattern includes silicon oxide.
16. A method of forming patterns of a semiconductor device, comprising:
forming a material film on a substrate;
forming a hard mask on the material film;
forming a first mold mask pattern and a second mold mask pattern on the hard mask;
forming a pair of first spacers to cover opposite sidewalls of the first mold mask pattern, and a pair of second spacers to cover opposite sidewalls of the second mold mask pattern;
forming a first gap and a second gap to expose the hard mask by removing the first mold mask pattern and the second mold mask pattern, the first gap being formed between the pair of first spacers and the second gap being formed between the pair of second spacers;
forming a mask pattern on the hard mask to cover the first gap and expose the second gap;
forming an auxiliary pattern to cover the second gap;
removing the mask pattern;
forming a hard mask pattern by patterning the hard mask using the first spacers, the second spacers and the auxiliary pattern as a mask; and
forming trenches in the material film by etching the material film using the hard mask pattern as an etching mask.
17. The method of claim 16, wherein the forming the mask pattern comprises:
forming a mask film to cover the first spacers and the second spacers;
forming a photoresist pattern on the mask film to cover the mask film above the first gap and expose the mask film above the second gap; and
forming the mask pattern by patterning the mask film using the photoresist pattern.
18. The method of claim 16, further comprising forming wirings in the trenches.
19. The method of claim 16, wherein forming wrings in the trenches comprises:
forming a conductive material to fill the trenches; and
performing a planarizing process on the conductive material.
20. The method of claim 16, wherein the auxiliary pattern and the pairs of spacers include silicon oxide.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A fin and tube type heat-exchanger comprising:
a plurality of cooling fins arranged at predetermined intervals, each cooling fin having a number of joint holes which are formed on the surfaces thereof and arranged in at least one or more stages and a number of slits disposed at spaces between the joint holes formed on each stage in one surface of the cooling fins, each slit having a projecting segment which has an open portion opened correspondingly to the direction of air flow and a pair of standing segments formed at both sides of the projecting segment for guiding the direction of air flow, the projecting segments of the slits being projected in the same direction from the surface of each cooling fin, the slits being grouped by five rows; and,
a plurality of heat tubes passing through the joint holes of each cooling fin and joined with the joint holes respectively, each heat tube having the diameter of 56 mm or smaller and allowing refrigerant to move therein.
2. A fin and tube type heat-exchanger as claimed in claim 1, wherein the standing segments are inclined at a predetermined angle in such a manner that the open portions of the slits of first, second, fourth and fifth rows on the basis of the direction of air flow are gradually reduced toward the slit of a third row, and wherein the standing segments of the slit of the third row are formed in such a manner that the slit of the third row is in the form of a rectangle so that the open portion thereof has the width generally uniform.
3. A fin and tube type heat-exchanger as claimed in claim 1, wherein the distance between the centers of two joint holes, which are arranged side by side at the same stage of the cooling fin, is 19 mm20 mm, and the distance between the center of one joint hole formed at one stage of the cooling fin and the center of another joint hole formed at another stage of the cooling fin is 0 mm11 mm.
4. A fin and tube type heat-exchanger comprising:
a plurality of cooling fins arranged at predetermined intervals, each cooling fin having a number of joint holes which are formed on the surfaces thereof and arranged in at least one or more stages and a number of slits disposed at spaces between the joint holes formed on each stage in one surface of the cooling fins, each slit having a projecting segment which has an open portion opened correspondingly to the direction of air flow and a pair of standing segments formed at both sides of the projecting segment for guiding the direction of air flow, the projecting segments of the slits being projected in the same direction from the surface of each cooling fin, the slits being grouped by five rows, wherein the slits of first and fifth rows on the basis of the direction of air flow are divided into three unit slits and the slits of second, third and fourth rows are in a single segment respectively; and,
a plurality of heat tubes passing through the joint holes of each cooling fin and joined with the joint holes respectively, each heat tube having the diameter of 56 mm or smaller and allowing refrigerant to move therein.
5. A fin and tube type heat-exchanger as claimed in claim 4, wherein the standing segments are inclined at predetermined angles so that the unit slits, located at the center, of three unit slits of the first and fifth rows are in the form of an equiangular trapezoid, in which the open portions are gradually reduced toward each other’s row and the unit slits located at both sides of the central unit slits are in the form of a parallelogram inclined toward the central unit slits,
wherein the standing segments of the second and fourth rows are inclined at a predetermined angle, so that the unit slits of the second and fourth rows are in the form of an equiangular trapezoid, in which the open portions are gradually reduced toward the unit slit of the third row, and
wherein the unit slit of the third row is in the form of a rectangle, in which the open portion has the width generally uniform.
6. A fin and tube type heat-exchanger as claimed in claim 4, wherein the distance between the centers of two joint holes, which are arranged side by side at the same stage of the cooling fin, is 19 mm20 mm, and the distance between the center of one joint hole formed at one stage of the cooling fin and the center of another joint hole formed at another stage of the cooling fin is 10 mm11 mm.
7. A fin and tube type heat-exchanger comprising:
a plurality of cooling fins arranged at predetermined intervals, each cooling fin having a number of joint holes which are formed on the surfaces thereof and arranged in at least one or more stages and a number of slits disposed at spaces between the joint holes formed on each stage in one surface of the cooling fins, each slit having a projecting segment which has an open portion opened correspondingly to the direction of air flow and a pair of standing segments formed at both sides of the projecting segment for guiding the direction of air flow, the projecting segments of the slits being projected in the same direction from the surface of each cooling fin, the slits being grouped by four rows, wherein each slit of each row is divided into two unit slits; and,
a plurality of heat tubes passing through the joint holes of each cooling fin and joined with the joint holes respectively, each heat tube having the diameter of 56 mm or smaller and allowing refrigerant to move therein.
8. A fin and tube type heat-exchanger as claimed in claim 7, wherein the standing segments are inclined inwardly in such a manner that the unit slits of first and second rows on the basis of the direction of air flow are in the form of a parallelogram, which are inclined toward the center of the slit group on the basis of the center between the unit slits of the second row and the unit slits of a third row, and
wherein the standing segments of the slits of third and fourth rows are inclined outwardly in such a manner that the unit slits of the third and fourth rows are symmetric with the unit slits of the second and first rows.
9. A fin and tube type heat-exchanger as claimed in claim 7, wherein the distance between the centers of two joint holes, which are arranged side by side at the same stage of the cooling fin, is 19 mm20 mm, and the distance between the center of one joint hole formed at one stage of the cooling fin and the center of another joint hole formed at another stage of the cooling fin is 10 mm11 mm.
10. A fin and tube type heat-exchanger comprising:
a plurality of cooling fins arranged at predetermined intervals, each cooling fin having a number of joint holes which are formed on the surfaces thereof and arranged in at least one or more stages and a number of slits disposed at spaces between the joint holes formed on each stage in one surface of the cooling fins, each slit having a projecting segment which has an open portion opened correspondingly to the direction of air flow and a pair of standing segments formed at both sides of the projecting segment for guiding the direction of air flow, the projecting segments of the slits being projected in the same direction from the surface of each cooling fin, the slits being grouped by four rows, wherein the slits of first and fourth rows, on the basis of the direction of air flow, of the slits of four rows are divided into three unit slits and the slits of second and third rows are in a single segment respectively; and,
a plurality of heat tubes passing through the joint holes of each cooling fin and joined with the joint holes respectively, each heat tube having the diameter of 56 mm or smaller and allowing refrigerant to move therein.
11. A fin and tube type heat-exchanger as claimed in claim 10, wherein the standing segments are inclined at a predetermined angle in such a manner that the unit slits, located at the centers, of the unit slits of the first and fourth rows are in the form of an equiangular trapezoid, in which the open portions are gradually reduced toward the second row or the third row and the standing segments of the unit slits located at both sides of the central unit slits are inclined at a predetermined angle in such a manner that the unit slits located at both sides of the central unit slits are in the form of a parallelogram, which are inclined toward the central unit slits, and
wherein the standing segments of the second and third rows are inclined at a predetermined angle in such a manner that the slits of the second and third rows are in the form of an equiangular trapezoid, in which the open portions are gradually reduced toward each other’s row.
12. A fin and tube type heat-exchanger as claimed in claim 10, wherein the distance between the centers of two joint holes, which are arranged side by side at the same stage of the cooling fin, is 19 mm20 mm, and the distance between the center of one joint hole formed at one stage of the cooling fin and the center of another joint hole formed at another stage of the cooling fin is 10 mm11 mm.
13. A fin and tube type heat-exchanger comprising:
a plurality of cooling fins arranged at predetermined intervals, each cooling fin having a number of joint holes which are formed on the surfaces thereof and arranged in at least one or more stages and a number of slits disposed at spaces between the joint holes formed on each stage in one surface of the cooling fins, each slit having a projecting segment which has an open portion opened correspondingly to the direction of air flow and a pair of standing segments formed at both sides of the projecting segment for guiding the direction of air flow, the projecting segments of the slits being projected in the same direction from the surface of each cooling fin, the slits being grouped by four rows, wherein the slits of first and fourth rows, on the basis of the direction of air flow, of the slits of four rows are divided into three unit slits and the slits of second and third rows are divided into two unit slits; and,
a plurality of heat tubes passing through the joint holes of each cooling fin and joined with the joint holes respectively, each heat tube having the diameter of 56 mm or smaller and allowing refrigerant to move therein.
14. A fin and tube type heat-exchanger as claimed in claim 13, wherein the standing segments are inclined at a predetermined angle in such a manner that the unit slits, located at the centers, of the unit slits of the first and fourth rows are in the form of an equiangular trapezoid, in which the open portions are gradually reduced toward the slit of the second row and the standing segments of the unit slits located at both sides of the central unit slits are inclined inwardly at a predetermined angle in such a manner that the unit slits located at both sides of the central unit slits are in the form of a parallelogram, which are inclined toward the central unit slits, and
wherein the standing segments of the second and third rows are inclined inwardly at a predetermined angle in such a manner that the slits of the second and third rows are in the form of a parallelogram so that the air flows toward the center of them.
15. A fin and tube type heat-exchanger as claimed in claim 13, wherein the distance between the centers of two joint holes, which are arranged side by side at the same stage of the cooling fin, is 19 mm20 mm, and the distance between the center of one joint hole formed at one stage of the cooling fin and the center of another joint hole formed at another stage of the cooling fin is 10 mm11 mm.
16. A fin and tube type heat-exchanger comprising:
a plurality of cooling fins arranged at predetermined intervals, each cooling fin having a number of joint holes which are formed on the surfaces thereof and arranged in at least one or more stages and a number of slits disposed at spaces between the joint holes formed on each stage in one surface of the cooling fins, each slit having a projecting segment which has an open portion opened correspondingly to the direction of air flow and a pair of standing segments formed at both sides of the projecting segment for guiding the direction of air flow, the projecting segments of the slits being projected in the same direction from the surface of each cooling fin, the slits being grouped by four rows, wherein the slits of first and fourth rows, on the basis of the direction of air flow, of the slits of four rows are divided into two unit slits and the slits of second and third rows are in a single segment respectively; and,
a plurality of heat tubes passing through the joint holes of each cooling fin and joined with the joint holes respectively, each heat tube having the diameter of 56 mm or smaller and allowing refrigerant to move therein.
17. A fin and tube type heat-exchanger as claimed in claim 16, wherein the standing segments are inclined at a predetermined angle in such a manner that the unit slits of the first and fourth rows are in the form of a parallelogram, which are inclined toward the center of them, and
wherein the standing segments of the second and third rows are inclined at a predetermined angle in such a manner that the slits of the second and third rows are in the form of an equiangular trapezoid, in which the open portions are gradually reduced toward each other’s row.
18. A fin and tube type heat-exchanger as claimed in claim 16, wherein the distance between the centers of two joint holes, which are arranged side by side at the same stage of the cooling fin, is 19 mm20 mm, and the distance between the center of one joint hole formed at one stage of the cooling fin and the center of another joint hole formed at another stage of the cooling fin is 10 mm11 mm.
19. A fin and tube type heat-exchanger comprising:
a plurality of cooling fins arranged at predetermined intervals, each cooling fin having a number of joint holes which are formed on the surfaces thereof and arranged in at least one or more stages and a number of slits disposed at spaces between the joint holes formed on each stage in one surface of the cooling fins, each slit having a projecting segment which has an open portion opened correspondingly to the direction of air flow and a pair of standing segments formed at both sides of the projecting segment for guiding the direction of air flow, the projecting segments of the slits being projected in the same direction from the surface of each cooling fin, the slits being grouped by five rows, wherein the slits of first and fifth rows, on the basis of the direction of air flow, of the slits of five rows are divided into three unit slits, the slits of second and fourth rows are divided into two unit slits and the slit of a third row is in a single segment; and,
a plurality of heat tubes passing through the joint holes of each cooling fin and joined with the joint holes respectively, each heat tube having the diameter of 56 mm or smaller and allowing refrigerant to move therein.
20. A fin and tube type heat-exchanger as claimed in claim 19, wherein the standing segments of the unit slits, located at the center, of the first and fourth rows are inclined at a predetermined angle in such a manner that the unit slits, located at the center respectively, of three unit slits of the first and fourth rows are in the form of an equiangular trapezoid, in which the open portions are gradually reduced toward each other’s row, and the standing segments of the unit slits located at both sides of the central unit slits are inclined at a predetermined angle in such a manner that the unit slits located at both sides of the central unit slits are in the form of a parallelogram, which are inclined toward the central unit slits,
wherein the standing segments of the unit slits of the second and fourth rows are inclined at a predetermined angle in such a manner that the unit slits of the second and fourth rows are in the form of a parallelogram, which are inclined toward the center of the slit of the third row, and
wherein the standing segments of the slit of the third row are formed in such a manner that the slit of the third row is in the form of a rectangle, in which the open portion is generally uniform.
21. A fin and tube type heat-exchanger as claimed in claim 19, wherein the distance between the centers of two joint holes, which are arranged side by side at the same stage of the cooling fin, is 19 mm20 mm, and the distance between the center of one joint hole formed at one stage of the cooling fin and the center of another joint hole formed at another stage of the cooling fin is 10 mm11 mm.