1. A method for sharing position data between location-sharing-enabled wireless devices using a location-sharing server, the method comprising:
maintaining a user database associating users with respective ones of the location-sharing-enabled wireless devices;
organizing the users in lists responsive to input from the users; and
establishing a position-sharing relationship between a first of the users, associated with a first of the wireless devices, and a second of the users, associated with a second of the wireless devices, by:
receiving instructions from the first wireless device to request a location of the second wireless;
conveying the request to the second wireless device;
receiving a response from the second wireless device agreeing to share the location of the second wireless device for a time period;
receiving GPS position data from the second wireless device; and
conveying the GPS position data to the first wireless device over the time period.
2. The method of claim 1, further comprising, if the position-sharing relationship is established, receiving second GPS position data from the first wireless device and conveying the second GPS position data to the second wireless device.
3. The method of claim 1, further comprising serving a map to the first wireless device.
4. The method of claim 3, further comprising iconically depicting the first user and the second user on the map.
5. The method of claim 4, further comprising, during the time period, receiving updated GPS position data from the second wireless device and iconically depicting the second user at a second position indicative of the updated GPS position data.
6. The method of claim 1, wherein the instructions from the first wireless device specify the time period for expiration of the position-sharing relationship.
7. The method of claim 1, wherein establishing the position-sharing relationship comprises suggesting a default time period for expiration of the position-sharing relationship.
8. The method of claim 1, further comprising displaying on the first wireless device a distance from the first wireless device to each of a plurality of other wireless devices of users in the list of the first user.
9. The method of claim 8, further comprising displaying, on the first wireless device and responsive to a command from the first wireless device, a latitude and a longitude of a selected one of the plurality of other wireless devices.
10. The method of claim 8, further comprising displaying, on the first wireless device and responsive to a command from the first wireless device, a location of a selected one of the plurality of other wireless devices on a map.
11. The method of claim 1, further comprising displaying the GPS position data on the first wireless device with a last-reported time for the GPS position.
12. The method of claim 1, wherein the location-sharing-enabled wireless devices are Buddy-Watch enabled.
13. A location-sharing system comprising:
location-sharing-enabled wireless devices, each device associated with a user and having a GPS receiver; and
a location-sharing server coupled to the wireless device via a wide-area network, the server having:
a database associating the users with respective ones of the location-sharing-enabled wireless devices and organizing the users in lists; and
software for establishing a position-sharing relationship between a first of the users, associated with a first of the wireless devices, and a second of the users, associated with a second of the wireless devices, by:
receiving instructions from the first wireless device to request a location of the second wireless;
conveying the request to the second wireless device;
receiving a response from the second wireless device agreeing to share the location of the second wireless device for a time period;
receiving GPS position data from the second wireless device; and
conveying the GPS position data to the first wireless device over the time period.
14. The system of claim 13, the software, contingent upon the establishment of the position-sharing relationship, conveying second position data indicating a location of the first wireless device to the second wireless device.
15. The system of claim 13, the server further serving maps to the first wireless device depicting the GPS position data during the time period.
16. The system of claim 15, the wireless devices including second software to communicate with the server during the time period, the first wireless device iconically depicting the second user at a second position indicative of updated GPS position data.
17. The system of claim 13, wherein the instructions from the first wireless device specify the time period for expiration of the position-sharing relationship.
18. The system of claim 13, the wireless devices including second software to establish the position-sharing relationship and suggest a default time period for expiration of the position-sharing relationships.
19. The system of claim 13, wherein the location-sharing-enabled wireless devices are Buddy-Watch enabled.
20. A non-transitory computer-readable storage medium storing instructions that, when executed on one or more servers, cause the servers to perform a method comprising:
maintaining a user database associating users with respective location-sharing-enabled wireless devices;
organizing the users in lists responsive to input from the users; and
establishing a position-sharing relationship between a first of the users, associated with a first of the wireless devices, and a second of the users, associated with a second of the wireless devices, by:
receiving instructions from the first wireless device to request a location of the second wireless;
conveying the request to the second wireless device;
receiving a response from the second wireless device agreeing to share the location of the second wireless device for a time period;
receiving GPS position data from the second wireless device; and
conveying the GPS position data to the first wireless device over the time period.
21. The computer-readable storage medium of claim 20, further comprising, during the time period, receiving updated GPS position data from the second wireless device and iconically depicting the second user at a second position indicative of the updated GPS position data.
22. The computer-readable storage medium of claim 20, wherein the instructions from the first wireless device specify the time period for expiration of the position-sharing relationship.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A cleaning method comprising:
holding a cleaning member with a substrate-holding member for holding a substrate while exposure light is irradiated onto the substrate in a photolithography process, without the substrate being held by the substrate-holding member, the cleaning member having substantially the same external shape as the substrate, and an outer diameter that is smaller than an outer diameter of the substrate so that a gap is provided from the outer diameter of the cleaning member to another member which surrounds the substrate when the substrate is held by the substrate-holding member; and
supplying a liquid to a space over the gap for cleaning at least part of the substrate-holding member.
2. The cleaning method according to claim 1, wherein the supplied liquid contacts a region of part of the substrate-holding member at an outer side of an edge of the cleaning member.
3. The cleaning method according to claim 2, wherein
the substrate-holding member comprises a first peripheral wall having a first top face that is opposite a peripheral region of a rear face of the substrate when the substrate-holding member is used to hold the substrate, and
said holding of the cleaning member causes the cleaning member to be held by the substrate-holding member such that at least part of the first top face of the first peripheral wall is opened to thereby contact the supplied liquid.
4. The cleaning method according to claim 3, wherein
the external shape of the cleaning member is substantially the same as the first peripheral wall,
the outer diameter of the cleaning member is smaller than an outer rim of the first peripheral wall so that said supplying causes said at least part of the first top face of the first peripheral wall to contact the supplied liquid, and
the cleaning member has substantially the same thickness as the substrate.
5. The cleaning method according to claim 4, wherein the outer diameter of the cleaning member is smaller than an inner rim of the first top face of the first peripheral wall so that said supplying causes said at least part of the first top face of the first peripheral wall to contact the supplied liquid.
6. The cleaning method according to claim 3, wherein
the substrate-holding member comprises a supporting member that is disposed at an inner side of the first peripheral wall for supporting a rear face of the substrate when the substrate-holding member is used to hold the substrate, and
when the substrate-holding member is used to hold the substrate, the supporting member supports the rear face of the substrate by creation of negative pressure in a space surrounded by the first peripheral wall.
7. The cleaning method according to claim 3, wherein
the substrate-holding member comprises a second peripheral wall arranged such as to surround the first peripheral wall, and
the region comprises a region between the first peripheral wall and the second peripheral wall.
8. The cleaning method according to claim 3, wherein the region comprises the first top face of the first peripheral wall.
9. The cleaning method according to claim 3, wherein
the substrate-holding member comprises a first suction hole that is formed at an outer side of the first peripheral wall and can suck liquid, and
the method further comprises:
causing the first suction hole to suck at least part of the supplied liquid.
10. The cleaning method according to claim 3, wherein
the substrate-holding member comprises a second suction hole that is formed at an inner side of the first peripheral wall and can suck liquid, and
the method further comprises:
causing the second suction hole to suck at least part of the supplied liquid.
11. The cleaning method according to claim 1, further comprising:
moving the substrate-holding member holding the cleaning member such that at least part of the substrate-holding member is opposite a liquid confinement member; and
forming a liquid immersion region with the supplied liquid between the cleaning member and the substrate-holding member, and the liquid confinement member.
12. The cleaning method according to claim 11, wherein the liquid is supplied to the space from a liquid supply port of the liquid confinement member.
13. The cleaning method according to claim 12, wherein
the liquid confinement member comprises a liquid collection port, and
the method comprises:
performing, in parallel,
a liquid supply operation to supply the liquid from the liquid supply port and
at least part of a liquid collection operation to collect the supplied liquid via the liquid collection port.
14. The cleaning method according to claim 13, further comprising:
relatively moving the substrate-holding member holding the cleaning member and the liquid confinement member while performing the liquid supply operation from the liquid supply port and said at least part of the liquid collection operation via the liquid collection port in parallel.
15. The cleaning method according to claim 11, wherein the liquid confinement member comprises a liquid ejection hole, and the method further comprises:
forming a rapid flow of liquid in the liquid immersion region by ejection of the liquid from the liquid ejection hole.
16. The cleaning method according to claim 1, further comprising:
irradiating light having a photochemical cleaning function onto the substrate-holding member.
17. The cleaning method according to claim 16, wherein the light comprises the exposure light.
18. A device manufacturing method comprising:
holding a cleaning member with a substrate-holding member for holding a substrate while exposure light is irradiated onto the substrate in a photolithographic process, without the substrate being held by the substrate-holding member, the cleaning member having substantially the same external shape as the substrate, and an outer diameter that is smaller than an outer diameter of the substrate so that a gap is provided from the outer diameter of the cleaning member to another member which surrounds the substrate when the substrate is held by the substrate-holding member;
cleaning at least part of the substrate-holding member by supplying a liquid to a space over the gap;
after said cleaning, holding a substrate by use of the substrate-holding member; and
exposing the substrate held by the substrate-holding member with exposure light.
19. The device manufacturing method according to claim 18, wherein the supplied liquid contacts a region of part of the substrate-holding member at an outer side of an edge of the cleaning member.
20. The device manufacturing method according to claim 19, wherein
the substrate-holding member comprises a first peripheral wall having a first top face that is opposite a peripheral region of a rear face of the substrate when the substrate-holding member is used to hold the substrate, and
said holding of the cleaning member causes the cleaning member to be held by the substrate-holding member such that at least part of the first top face of the first peripheral wall is opened to thereby contact the supplied liquid.
21. The device manufacturing method according to claim 20, wherein
the external shape of the cleaning member is substantially the same as the first peripheral wall,
the outer diameter of the cleaning member is smaller than an outer rim of the first peripheral wall so that said supplying causes said at least part of the first top face of the first peripheral wall to contact the supplied liquid, and
the cleaning member has substantially the same thickness as the substrate.
22. The device manufacturing method according to claim 21, wherein the outer diameter of the cleaning member is smaller than an inner rim of the first top face of the first peripheral wall so that said supplying causes said at least part of the first top face of the first peripheral wall to contact the supplied liquid.
23. The device manufacturing method according to claim 20, wherein
the substrate-holding member comprises a supporting member that is disposed at an inner side of the first peripheral wall for supporting a rear face of the substrate, and
the supporting member supports the rear face of the substrate by creation of negative pressure in a space surrounded by the first peripheral wall.
24. The device manufacturing method according to claim 20, wherein
the substrate-holding member comprises a second peripheral wall arranged such as to surround the first peripheral wall, and
the region comprises a region between the first peripheral wall and the second peripheral wall.
25. The device manufacturing method according to claim 20, wherein the region comprises the first top face of the first peripheral wall.
26. The device manufacturing method according to claim 20, wherein
the substrate-holding member comprises a first suction hole that is formed at an outer side of the first peripheral wall and can suck liquid, and
the method further comprises:
causing the first suction hole to suck at least part of the supplied liquid.
27. The device manufacturing method according to claim 20, wherein
the substrate-holding member comprises a second suction hole that is formed at an inner side of the first peripheral wall and can suck liquid, and
the method further comprises:
causing the second suction hole to suck at least part of the supplied liquid.
28. The device manufacturing method according to claim 18, further comprising:
moving the substrate-holding member holding the cleaning member such that at least part of the substrate-holding member is opposite a liquid confinement member; and
forming a liquid immersion region with the supplied liquid between the cleaning member and the substrate-holding member, and the liquid confinement member.
29. The device manufacturing method according to claim 28, wherein the liquid is supplied to the space from a liquid supply port of the liquid confinement member.
30. The device manufacturing method according to claim 29, wherein
the liquid confinement member comprises a liquid collection port, and
the method comprises:
performing, in parallel,
a liquid supply operation to supply the liquid from the liquid supply port and,
at least part of a liquid collection operation to collect the supplied liquid via the liquid collection port.
31. The device manufacturing method according to claim 30, further comprising:
relatively moving the substrate-holding member holding the cleaning member and the liquid confinement member while performing the liquid supply operation from the liquid supply port and said at least part of the liquid collection operation via the liquid collection port in parallel.
32. The device manufacturing method according to claim 28, wherein the liquid confinement member comprises a liquid ejection hole, and the method further comprises:
forming a rapid flow of liquid in the liquid immersion region by ejection of the liquid from the liquid ejection hole.
33. The device manufacturing method according to claim 18, further comprising:
irradiating light having a photochemical cleaning function onto the substrate-holding member.
34. The device manufacturing method according to claim 33, wherein the light comprises the exposure light.