1. A process for electrolytically processing a microfeature workpiece as the working electrode with a first processing fluid and a counter electrode comprising:
contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid comprising first processing fluid species including a copper ion, an anion, and a complexing agent, wherein the ratio between the concentration of the copper ion and the concentration of the complexing agent is in the range from 1:25 to 25:1;
contacting the counter electrode with a second processing fluid;
producing an electrochemical reaction at the counter electrode; and
substantially preventing movement of cationic species between the first processing fluid and the second processing fluid and substantially preventing movement of the complexing agent between the first processing fluid and the second processing fluid.
2. The process of claim 1, wherein the step of substantially preventing movement of cationic species between the first processing fluid and the second processing fluid comprises providing an anion permeable barrier between the first processing fluid and the second processing fluid.
3. The process of claim 2, wherein the anion permeable barrier is an anion exchange membrane.
4. The process of claim 3, further comprising the step of passing the anion between the first processing fluid and the second processing fluid through the anion exchange membrane.
5. The process of claim 1, wherein the working electrode is a cathode, and the counter electrode is an anode.
6. The process of claim 5, further comprising the step of electrolytically depositing the copper ion onto the surface of the microfeature workpiece.
7. The process of claim 6, wherein the first processing fluid further includes a counter anion of the copper ion and the process further comprises the step of passing the counter anion from the first processing fluid to the second processing fluid through the anion exchange membrane.
8. The process of claim 5, wherein the anode is an inert anode.
9. The process of claim 5, wherein the anode is a consumable anode.
10. The process of claim 5, wherein the surface of the microfeature workpiece onto which the copper ion is deposited comprises a seed material.
11. The process of claim 5, wherein the surface of the microfeature workpiece onto which the copper ion is deposited comprises a barrier material.
12. The process of claim 1, wherein the first processing fluid has a pH greater than 7.0.
13. The process of claim 1, further comprising the step of adding a copper ion to the first processing fluid.
14. The process of claim 13, wherein the copper ion is added to the first processing fluid by adding a copper metal salt to the first processing fluid.
15. The process of claim 1, wherein the first processing fluid species further include a pH adjustment agent and a buffer.
16. The process of claim 15, further comprising the step of adding a pH adjustment agent to the second processing fluid.
17. The process of claim 15, wherein the second processing fluid comprises a pH adjustment agent and a buffer.
18. The process of claim 17, wherein buffer concentration in the first processing fluid is equal to or less than buffer concentration in the second processing fluid.
19. The process of claim 1, wherein the concentration of the anion in the first processing fluid is greater than the concentration of the anion in the second processing fluid.
20. The process of claim 1, wherein the complexing agent is selected from the group consisting of ethylene diamine, ethylene diamine tetraacetic acid and its salts, cyclam, porphrin, bipyridyl, pyrolle, thiophene, and polyamines.
21. The process of claim 1, wherein the complexing agent is selected from compounds that contain a nitrogen-containing chelating group R\u2014NR2\u2014R1, where R is any alkyl or aromatic group and R1 and R2 are H, alkyl or aryl organic groups or polymer chains.
22. The process of claim 1, wherein the complexing agent includes chemical compounds having at least one part with the chemical structure COOR1\u2014COHR2R3 where R1 is an organic group covalently bound to the carboxylate group (COO), R2 is either hydrogen or an organic group, and R3 is either hydrogen or an organic group.
23. The process of claim 22, wherein the complexing agent is selected from the group consisting of citric acid and salts thereof, tartaric acid and salts thereof, diethyltartrate, diisopropyltartrate, and dimethyltartrate.
24. The process of claim 1, wherein pH of the first processing fluid is substantially equal to pH of the second processing fluid.
25. The process of claim 1, wherein the counter electrode comprises multiple electrodes.
26. The process of claim 1, wherein the working electrode comprises multiple electrodes.
27. The process of claim 1, wherein the working electrode is an anode, and the counter electrode is a cathode.
28. The process of claim 27, further comprising electrolytic dissolution of copper on the surface of the microfeature workpiece.
29. The process of claim 27, wherein the cathode is an inert electrode in contact with the second processing fluid.
30. The process of claim 29, wherein the second processing fluid includes an anion and a cation.
31. The process of claim 30, wherein reduction of chemical species in the second processing fluid occurs at the cathode.
32. The process of claim 31, wherein non-anionic chemical species in the first processing fluid are separated from the inert cathode by an anion permeable barrier.
33. The process of claim 27, wherein the second processing fluid further includes a counter anion of copper present on the surface of the microfeature workpiece and the process further comprises passing the counter anion from the second processing fluid to the first processing fluid through an anion permeable barrier.
34. The process of claim 27, wherein the first processing fluid has a pH less than 7.0.
35. The process of claim 27, further comprising the step of adding an anion to the second processing fluid.
36. The process of claim 35, wherein the anion is added to the second processing fluid by adding an acid to the second processing fluid.
37. The process of claim 27, wherein the first processing fluid species further include a adjustment agent and a buffer.
38. The process of claim 37, further comprising the step of adding a pH adjustment agent to the second processing fluid.
39. The process of claim 37, wherein the second processing fluid comprises a pH adjustment agent and a buffer.
40. The process of claim 39, wherein buffer concentration in the first processing fluid is equal to or greater than buffer concentration in the second processing fluid.
41. The process of claim 1, wherein the copper ion is a cation of a copper salt and the anion is a counter ion of the copper ion of the copper salt, the second processing fluid comprising the anion, concentration of the anion in the second processing fluid being greater than concentration of the anion in the first processing fluid.
42. The process of claim 1, further comprising the step of electrolytically dissolving metal from the surface of the microfeature workpiece.
43. A process for electrolytically processing a microfeature workpiece with a first processing fluid and an inert anode comprising:
contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid including a copper ion to be deposited onto the surface of the microfeature workpiece, a counter anion to the copper ion, and a complexing agent, wherein the ratio between the concentration of the copper ion and the concentration of the complexing agent is in the range from 1:25 to 25:1;
contacting the inert anode with a second processing fluid, an anion permeable barrier located between the first processing fluid and the second processing fluid;
producing an oxidizing agent at the inert anode;
adding a copper ion to the first processing fluid;
passing the counter anion from first processing fluid to the second processing fluid through the anion permeable barrier;
substantially preventing movement of cationic species between the first processing fluid and the second processing fluid and substantially prevent movement of the complexing agent between the first processing fluid and the second processing fluid; and
depositing the copper ion in the first processing fluid onto the surface of the microelectronic workpiece.
44. A process for electrolytically processing a microfeature workpiece with a first processing fluid and an inert anode comprising:
contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid comprising first processing fluid species including a copper ion to be deposited onto the surface of the microelectronic workpiece, and a complexing agent, wherein the ratio between the concentration of the copper ion and the concentration of the complexing agent is in the range from 1:25 to 25:1; and
contacting the inert anode with a second processing fluid that includes a buffer and a pH adjustment agent, an anion permeable barrier located between the first processing fluid and the second processing fluid to allow movement of anionic species between the first processing fluid and the second processing fluid, to substantially prevent movement of cationic species between the first processing fluid and the second processing fluid, and to substantially prevent movement of the complexing agent between the first processing fluid and the second processing fluid.
45. The process of claim 44, wherein the buffer is boric acid.
46. The process of claim 44, wherein the pH adjustment agent is tetramethylammonium hydroxide.
47. A process for electrolytically processing a microfeature workpiece with a first processing fluid and cathode comprising:
contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid including an anion, a cation, and a complexing agent, wherein the ratio between the concentration of the cation and the concentration of the complexing agent is in the range of 1:25 and 25:1;
contacting the anode with a second processing fluid containing the anion, an anion permeable barrier located between the first processing fluid and the second processing fluid;
reducing chemical species in the second processing fluid;
adding acid to the second processing fluid;
passing the anion from the second processing fluid to the first processing fluid through the anion permeable harrier, and substantial preventing the movement of cationic species and complexing agent between the first processing fluid and the second processing fluid; and
electrolytically dissolving copper from the surface of the microfeature workpiece.
48. A process for electrolytically processing a microfeature workpiece as the working electrode with a first processing fluid and a counter electrode comprising:
contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid comprising first processing fluid species including a cation, an anion, and a complexing agent, wherein the ratio between the concentration of the cation and the concentration of the complexing agent is in the range from 1:25 to 25:1;
contacting the counter electrode with a second processing fluid;
producing an electrochemical reaction at the counter electrode; and
substantially preventing movement of cationic species between the first processing fluid and the second processing fluid and substantially preventing movement of the complexing agent between the first processing fluid and the second processing fluid.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A lighter with an automatic locking device, the lighter comprising:
an elongated housing having opposed sides;
an ignition button and a safety button extending through and supported by the housing;
the ignition and safety buttons being arranged on said opposed respective sides;
a biasing member operatively connected to the safety button;
an actuating member that is separately pivotally supported from yet operatively responsive to the ignition button for controlling an ignition source;
wherein, when a force is exerted on both the ignition button and the safety button, the fuel source is opened and the ignition source is activated to light the lighter, and when the force on the ignition and safety buttons is released, the fuel source is closed, the ignition source is de-activated, and the safety button automatically returns to a locked or off position wherein the safety button is supported to slide in the longitudinal direction of the housing while the ignition button is supported to pivot into the housing.
2. The lighter of claim 1 wherein the housing has upper and lower ends and the safety button is located on one side of the housing at a position that is closer to the upper end of the housing than the location of the ignition button so as to more naturally match the buttons to the hand position of the user.
3. The lighter of claim 2 wherein the safety button has a shaft that slides in the longitudinal direction and the biasing member comprises a coil spring supported at the bottom of the safety button shaft to normally urge the safety button to an upper position.
4. The lighter of claim 3 wherein said actuating member has an arm that is disposed between the safety button shaft and the ignition button to prevent actuation of the ignition button when the safety button is in its locked position.
5. The lighter of claim 4 wherein the actuating member also has a second arm that actuates the ignition source.
6. The lighter of claim 5 wherein the arms are disposed at an acute angle to each other.
7. The lighter of claim 1 wherein the actuating member is supported at a pivot point that is above the ignition button.
8. A lighter with an automatic locking device, the lighter comprising:
an elongated housing having opposed sides;
an ignition button and a safety button extending through and supported by the housing;
the ignition and safety buttons being arranged on said opposed respective sides;
a biasing member operatively connected to the safety button;
an actuating member that is separately pivotally supported from yet operatively responsive to the ignition button for controlling an ignition source;
wherein, when a force is exerted on both the ignition button and the safety button, the fuel source is opened and the ignition source is activated to light the lighter, and when the force on the ignition and safety buttons is released, the fuel source is closed, the ignition source is de-activated, and the safety button automatically returns to a locked or off position wherein the safety button is supported to slide in the longitudinal direction of the housing while the ignition button is supported to pivot into the housing
said actuating member has two arms, one arm for contacting the ignition source and the other arm for engaging between the buttons to prevent actuation of the ignition button when the safety button is in its locked position.
9. The lighter of claim 8 wherein the ignition source is disposed over said one arm.
10. A lighter with an automatic locking device, the lighter comprising:
a longitudinal housing having upper and lower ends and one and another opposed side walls;
an ignition button extending through and supported by said housing disposed between said upper and lower ends and arranged on said one side wall of said housing;
a safety button extending through and supported by said housing disposed between said upper and lower ends and arranged on said another side wall of said housing;
a biasing member operatively connected to the safety button to normally bias the safety button to a locked position;
an actuating member operatively connected to the ignition button and to an ignition source;
said actuating member being independently pivotally supported adjacent said ignition and safety buttons;
said actuating member having an arm that is urged by said ignition button to an igniting position when said safety button is at its released position and blocks said ignition button when said safety button is in its locked position;
wherein, when a force is exerted on both the ignition button and the safety button, the ignition button is free to move to its ignition position, and when the force on the ignition and safety buttons is released, the safety button automatically returns to its locked position
wherein the safety button is supported to slide in the longitudinal direction of the housing while the ignition button is supported to pivot into the housing.
11. The lighter of claim 10 wherein the safety button is located on one side of the housing at a position that is closer to the upper end of the housing than the location of the ignition button so as to more naturally match the buttons to the hand position of the user.
12. The lighter of claim 10 wherein the safety button has a shaft that slides in the longitudinal direction and the biasing member comprises a coil spring supported at the bottom of the safety button shaft to normally urge the safety button to an upper position.
13. The lighter of claim 12 wherein said actuating member has an arm that is disposed between the safety button shaft and the ignition button to prevent actuation of the ignition button when the safety button is in its locked position.
14. The lighter of claim 13 wherein the actuating member also has a second arm that actuates an ignition source.
15. The lighter of claim 14 wherein the arms are disposed at an acute angle to each other.
16. The lighter of claim 10 wherein the actuating member is supported at a pivot point that is above the ignition button.
17. The lighter of claim 16 the actuating member has two arms, one arm for contacting the ignition source and the other arm for engaging between the buttons.
18. The lighter of claim 17 wherein the ignition source is disposed over said one arm.
19. The lighter of claim 10 wherein the safety button is normally biased to an upper position and is manually operated to a lower position.
20. A lighter with an automatic locking device, the lighter comprising:
a longitudinal housing having upper and lower ends and one and another opposed side walls;
an ignition button extending through and supported by said housing disposed between said upper and lower ends and arranged on said one side wall of said housing;
a safety button extending through and supported by said housing disposed between said upper and lower ends and arranged on said another side wall of said housing;
a biasing member operatively connected to the safety button to normally bias the safety button to a locked position;
an actuating member operatively connected to the ignition button and to an ignition source;
said actuating member being independently pivotally supported adjacent said ignition and safety buttons;
said actuating member having an arm that is urged by said ignition button to an igniting position when said safety button is at its released position and blocks said ignition button when said safety button is in its locked position;
wherein, when a force is exerted on both the ignition button and the safety button, the ignition button is free to move to its ignition position, and when the force on the ignition and safety buttons is released, the safety button automatically returns to its locked position
wherein the safety button is supported to slide in the longitudinal direction of the housing while the ignition button is supported to pivot into the housing;
wherein the safety button is located on one side of the housing at a position that is closer to the upper end of the housing than the location of the ignition button so as to more naturally match the buttons to the hand position of the user; wherein the safety button is supported to slide in the longitudinal direction of the housing while the ignition button is supported to pivot into the housing; wherein the safety button has a shaft that slides in the longitudinal direction and the biasing member comprises a coil spring supported at the bottom of the safety button shaft to normally urge the safety button to an upper position; wherein said actuating member has an arm that is disposed between the safety button shaft and the ignition button to prevent actuation of the ignition button when the safety button is in its locked position; wherein the actuating member also has a second arm that actuates an ignition source; wherein the ignition source is disposed over said second arm; wherein the safety button is normally biased to an upper position and is manually operated to a lower position; wherein a separating wall is disposed between the actuating member shaft and the ignition button; and wherein the ignition button has a rounded upper end that engages with said one arm.
21. A lighter with an automatic locking device, the lighter comprising:
an elongated housing having opposed sides;
an ignition button and a safety button, both supported by the housing;
the ignition and safety buttons being arranged on said opposed respective sides;
a biasing member operatively connected to the safety button;
an actuating member that is operatively responsive to the ignition button for controlling an ignition source;
a pivot for pivotally supporting said actuating member;
wherein, when both the ignition button and the safety button are operated, the actuating member is in a first position enabling the operation of the ignition button to activate the ignition source, and when the ignition button and the safety button are both released the actuating member pivots to a second position to re-engage the safety button, thereby placing the lighter in the locked or off position wherein the safety button is supported to slide in the longitudinal direction of the housing wile the ignition button is supported to pivot into the housing.
22. The lighter of claim 21 wherein the safety button has a shaft that slides in the longitudinal direction and the actuating member has one arm that is disposed between the safety button shaft and the ignition button to prevent actuation of the ignition button when the safety button is in its locked position, and another arm for contacting the ignition source.