1. A method for deposition of a thin film of solid electrolyte comprising lithium phosphorous oxynitride said method comprising:
directing an electron beam from a gas discharge electron gun onto the surface of Li3PO4 contained within a crucible in a vacuum chamber to evaporate Li3PO4 without the formation of Li3PO4 droplets, wherein said gas discharge electron gun comprises a cold cathode and a hollow anode, and said gas discharge electron gun produces a high voltage smoldering discharge; and
introducing nitrogen into said vacuum chamber to produce a nitrogen pressure greater than 10 Pascal;
wherein nitrogen is partially ionized in said chamber by electrons generated by said gas discharge electron gun,
wherein said Li3PO4 vapor reacts with said ionized nitrogen to form a layer comprising lithium phosphorus oxynitride on the surface of a substrate contained within said vacuum chamber.
2. The method of claim 1 wherein said electron beam is scanned across the surface of said Li3PO4 so as to prevent the electron beam from penetrating to a depth that leads to formation of Li3PO4 droplets.
3. The method of claim 1 or 2 wherein the specific surface-density of energy in the electron beam is decreased by defocusing said electron beam to prevent the formation of Li3PO4 droplets.
4. The method of claim 1, wherein the management of the electron beam parameters in the evaporation mode are controlled by a feedback sensor that senses vapor density and the absence of Li3PO4 droplets in the vapor phase.
5. The method of claim 1 wherein said nitrogen pressure is from 10 to 15 Pascals.
6. The method of claim 1 wherein said lithium phosphorus oxynitride is formed on said surface by diffusion.
7. The method of claim 1 wherein said lithium phosphorus oxynitride is formed on said surface by ion-plating.
8. The method of claim 1 wherein the ionization of nitrogen is by said electron beam and high frequency discharge.
9. The method of claim 1 wherein the ionization of nitrogen is not by high frequency discharge from an external ionizer.
10. The method of claim 1 wherein the interaction of said electron beam with said Li3PO4 vapor causes partial ionization of the Li3PO4 vapor, and wherein electrons reflected from the surface of said Li3PO4 cause additional ionization of said Li3PO4 vapor.
11. The method of claim 9 wherein additional ionization of Li3PO4 vapor is caused by at least one of spiral and helical motion of the reflected electrons due to a magnetic field that is executed in pulse mode by means of pulses of the same polarity at differing amplitude.
12. The method of claim 1 further comprising cleaning the surface of said substrate prior to the formation of said layer comprising lithium phosphorus oxynitride, wherein said cleaning comprises treating said surface by impinging ions in a smoldering discharge plasma onto said substrate surface.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A variable delivery fuel supply device which comprises:
a fuel injection valve for injecting fuel to respective cylinders of an internal combustion engine,
a fuel pump which sucks fuel from a fuel intake port through an intake valve into a pressurizing chamber by a reciprocating movement of a plunger in a cylinder to pressurize the fuel and supplies the pressurized fuel into the fuel injection valves through a discharge valve,
a damper chamber having a pressure damper, which is communicated with the fuel passage at a position between the fuel intake port and the intake valve in the fuel pump,
a relief passage for communicating the pressurizing chamber of the fuel pump with said fuel passage, and
an electromagnetic valve for opening and closing the relief passage, which is adapted to control an amount of pressurized fuel to be supplied to the fuel injection valves by relieving pressurized fuel in the pressurizing chamber to said fuel passage at the time of opening the valve,
wherein the damper chamber having a pressure damper is formed integrally with the fuel pump, and
wherein the relief passage is communicated with the fuel passage between the damper chamber, including a pressure damper, and the intake valve.
2. A variable delivery fuel supply device which comprises:
a fuel injection valve for injecting fuel to respective cylinders of an internal combustion engine,
a fuel pump which sucks fuel from a fuel intake port through an intake valve into a pressurizing chamber by a reciprocating movement of a plunger in a cylinder to pressurize the fuel and supplies the pressurized fuel into the fuel injection valves through a discharge valve,
a damper chamber having a pressure damper, which is communicated with the fuel passage at a position between the fuel intake port and the intake valve in the fuel pump,
a relief passage for communicating the pressurizing chamber of the fuel pump with said fuel passage, and
an electromagnetic valve for opening and closing the relief passage, which is adapted to control an amount of pressurized fuel to be supplied to the fuel injection valves by relieving pressurized fuel in the pressurizing chamber to said fuel passage at the time of opening the valve,
wherein an orifice is formed in the relief passage, and
wherein the orifice is disposed at the connecting point of the relief passage to the fuel passage between a location where the damper chamber communicates with the fuel passage and the intake valve.
3. A variable delivery fuel supply device which comprises:
a fuel injection valve for injecting fuel to respective cylinders of an internal combustion engine,
a fuel pump which sucks fuel from a fuel intake port through an intake valve into a pressurizing chamber by a reciprocating movement of a plunger in a cylinder to pressurize the fuel and supplies the pressurized fuel into the fuel injection valves through a discharge valve,
a damper chamber having a pressure damper, which is communicated with the fuel passage at a position between the fuel intake port and the intake valve in the fuel pump,
a relief passage for communicating the pressurizing chamber of the fuel pump with said fuel passage, and
an electromagnetic valve for opening and closing the relief passage, which is adapted to control an amount of pressurized fuel to be supplied to the fuel injection valves by relieving pressurized fuel in the pressurizing chamber to said fuel passage at the time of opening the valve,
wherein the damper chamber having a pressure damper is formed integrally with the fuel pump,
wherein an orifice is formed in the relief passage, and
wherein the orifice is disposed at the connecting point of the relief passage to the fuel passage between a location where the damper chamber communicates with the fuel passage and the intake valve.
4. A variable delivery fuel supply device which comprises:
a fuel injection valve for injecting fuel to respective cylinders of an internal combustion engine,
a fuel pump which sucks fuel from a fuel intake port through an intake valve into a pressurizing chamber by a reciprocating movement of a plunger in a cylinder to pressurize the fuel and supplies the pressurized fuel into the fuel injection valves through a discharge valve,
a damper chamber having a pressure damper, which is communicated with the fuel passage at a position between the fuel intake port and the intake valve in the fuel pump,
a relief passage for communicating the pressurizing chamber of the fuel pump with said fuel passage, and
an electromagnetic valve for opening and closing the relief passage, which is adapted to control an amount of pressurized fuel to be supplied to the fuel injection valves by relieving pressurized fuel in the pressurizing chamber to said fuel passage at the time of opening the valve,
wherein the relief passage is communicated with the fuel passage between the damper chamber including a pressure damper and the intake valve,
wherein an orifice is formed in the relief passage, and
wherein the orifice is disposed at the connecting point of the relief passage to the fuel passage between a location where the damper chamber communicates with the fuel passage and the intake valve.
5. A variable delivery fuel supply device which comprises:
a fuel injection valve for injecting fuel to respective cylinders of an internal combustion engine,
a fuel pump which sucks fuel from a fuel intake port through an intake valve into a pressurizing chamber by a reciprocating movement of a plunger in a cylinder to pressurize the fuel and supplies the pressurized fuel into the fuel injection valves through a discharge valve,
a damper chamber having a pressure damper, which is communicated with the fuel passage at a position between the fuel intake port and the intake valve in the fuel pump,
a relief passage for communicating the pressurizing chamber of the fuel pump with said fuel passage, and
an electromagnetic valve for opening and closing the relief passage, which is adapted to control an amount of pressurized fuel to be supplied to the fuel injection valves by relieving pressurized fuel in the pressurizing chamber to said fuel passage at the time of opening the valve,
wherein the relief passage is disposed such that fuel which is relieved enters into the fuel passage at a position downstream of the damper chamber.
6. The variable delivery fuel supply device according to claim 5, wherein the damper chamber having a pressure damper is formed integrally with the fuel pump.
7. The variable delivery fuel supply device according to claim 5, wherein the relief passage is communicated with the fuel passage between the damper chamber including a pressure damper and the intake valve.
8. The variable delivery fuel supply device according to claim 6, wherein the relief passage is communicated with the fuel passage between the damper chamber, including a pressure damper, and the intake valve.
9. The variable delivery fuel supply device according to claim 5, wherein an orifice is formed in the relief passage.
10. The variable delivery fuel supply device according to claim 6, wherein an orifice is formed in the relief passage.
11. The variable delivery fuel supply device according to claim 7, wherein an orifice is formed in the relief passage.
12. The variable delivery fuel supply device according to claim 5, wherein the pressure damper is formed of metallic bellows.
13. The variable delivery fuel supply device according to claim 5, wherein the pressure damper is formed of a metallic diaphragm.
14. The variable delivery fuel supply device according to claim 9, wherein the orifice is disposed at the connecting point of the relief passage to the fuel passage between a location where the damper chamber communicates with the fuel passage and the intake valve.
15. The variable delivery fuel supply device according to claim 9, wherein the orifice formed in the relief passage is opened at a downstream side of the fuel passage with respect to the pressure damper.
16. The variable delivery fuel supply device according to claim 10, wherein the orifice is disposed at the connecting point of the relief passage to the fuel passage between a location where the damper chamber communicates with the fuel passage and the intake valve.
17. The variable delivery fuel supply device according to claim 10, wherein the orifice formed in the relief passage is opened at a downstream side of the fuel passage with respect to the pressure damper.
18. The variable delivery fuel supply device according to claim 11, wherein the orifice is disposed at the connecting point of the relief passage to the fuel passage between a location where the damper chamber communicates with the fuel passage and the intake valve.
19. The variable delivery fuel supply device according to claim 11, wherein the orifice formed in the relief passage is opened at a downstream side of the fuel passage with respect to the pressure damper.