1. A method for routing data between an originating station and a destination station, the data comprising a source address associated with a node that originally sent the data, comprising:
adding to the data an identifier associated with the originating station; and
forwarding the data from the originating station to the destination station, wherein the destination station is configured to learn, using a processor, based at least in part on the identifier, an association between the node that originally sent the data and the originating station, where the association is used to determine the originating station is the correct destination station among a plurality of destination stations to forward data traffic addressed back to the source address associated with the node.
2. A method as recited in claim 1, wherein the destination station is configured to learn the association between the node that originally sent the data and the originating station at least in part by associating the source address associated with the node that originally sent the data with the identifier.
3. A method as recited in claim 1, wherein the source address comprises a control word, identifier, or label that is used to identify the node that originally sent the data without an additional MAC address lookup.
4. A method as recited in claim 1, wherein the source address comprises a MAC address.
5. A method as recited in claim 1, wherein the data comprises an Ethernet frame.
6. A method as recited in claim 5, wherein the Ethernet frame is encapsulated.
7. A method as recited in claim 5, wherein the Ethernet frame is forwarded via an MPLS tunnel between the originating station and the destination station.
8. A method as recited in claim 1, wherein the identifier comprises an IP address.
9. A method as recited in claim 8, wherein the destination station is configured to learn the association between the node that originally sent the data and the originating station at least in part by storing the identifier as an IP next hop address for the source address.
10. A method as recited in claim 1, wherein the destination station is configured to forward to the originating station, based at least in part on the learned association between the node that originally sent the data and the originating station, data addressed to the source address.
11. A method as recited in claim 10, wherein data addressed to the source address is forward by the destination station to the originating station via a tunnel associated with the originating station.
12. An edge router, comprising:
a communication interface; and
a processor coupled to the communication interface and configured to:
add to data to be routed to a destination station an identifier associated with the edge router; and
forward the data to the destination station via the communication interface;
wherein the destination station is configured to learn, based at least in part on the identifier, an association between the node that originally sent the data and the edge router, where the association is used to determine the edge router is the correct edge router among a plurality of edge routers to forward data traffic addressed back to the source address associated with the node.
13. An edge router as recited in claim 12, wherein the destination station is configured to learn the association between the node that originally sent the data and the originating station at least in part by associating the source address associated with the node that originally sent the data with the identifier.
14. An edge router as recited in claim 12, wherein the source address comprises a control word, identifier, or label that is used to identify the node that originally sent the data without an additional MAC address lookup.
15. An edge router as recited in claim 12, wherein the data comprises an Ethernet frame.
16. An edge router as recited in claim 15, wherein the Ethernet frame is forwarded via an MPLS tunnel between the originating station and the destination station.
17. An edge router as recited in claim 12, wherein the identifier comprises an IP address.
18. A computer program product for routing data between an originating station and a destination station, the data comprising a source address associated with a node that originally sent the data, the computer program product being embodied in a computer readable storage medium and comprising computer instructions for execution by a computer processor for performing the steps of:
adding to the data identifier associated with the originating station; and
forwarding the data from the originating station to the destination station;
wherein the destination station is configured to learn, using a processor, based at least in part on the identifier, an association between the node that originally sent the data and the originating station, where the association is used to determine the originating station is the correct destination station among a plurality of destination stations to forward data traffic addressed back to the source address associated with the node.
19. A computer program product as recited in claim 18, wherein the identifier comprises an IP address.
20. A computer program product as recited in claim 19, wherein the destination station is configured to learn the association between the node that originally sent the data and the originating station at least in part by storing the IP address as an IP next hop address for the source address.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An aqueous-based composition for removing silica containing etch residue a from a sub-micron patterned inorganic substrate comprising a blend of:
(a) from about 3 to about 20 weight percent of a weak organic acid having a pKa value between 3-5; and
(b) about 1 to about 5 weight percent of an inorganic ionizable fluorine salt.
2. The composition of claim 1 wherein the fluorine salt is an inorganic amine conjugate fluorine salt.
3. The composition of claim 2 wherein the fluorine salt is ammonium fluoride.
4. The composition of claim 1 containing 2-5 parts by weight of an organic amine buffering aid and a mixture of about 0.01 to about 1.0 parts of each of a non-ionic fluorinated and a non-ionic based surfactant.
5. A liquid solvating composition of claim 1, which includes also from about 2 to about 5 weight percent of an organic amine, used to adjust the buffer to pH between 5-6.
6. The composition of claim 1 wherein (a) is present in amounts of about 5 to about 10 weight percent and (b) is present in amounts of about 1 to about 3 weight percent.
7. The composition of claim 1 wherein the weak acid is citric acid.
8. The composition of claim 1 wherein the fluorine agent is ammonium bifluoride.
9. The composition of claim 2 wherein the organic amine is diglycolamine.
10. In a method for removing silicon containing etch residue from an inorganic substrate the improvement characterized in that the etch residue to be removed is contacted with the solvating composition of claim 1 for a period of time effective to completely remove said etch residue.
11. In a method for removing silicon containing etch residue from an inorganic substrate the improvement characterized in that the etch residue to be removed is contacted with the solvating composition of claim 9 for a period of time effective to completely remove said etch residue.
12. The method of claim 10 wherein the inorganic substrate is a spinning wafer and the wafer surface is contacted with the solvating composition by directing the composition at approximately 90\xb0 to the wafer surface by a jet stream that moves from the edge to the center of the wafer.