1. A thin film transistor substrate comprising:
a substrate;
a gate electrode arranged on the substrate;
a semiconductor pattern arranged on the gate electrode, the semiconductor pattern including a source area, a drain area, and a channel area;
a first etch stop pattern arranged on the semiconductor pattern to cover the channel area;
a second etch stop pattern arranged on the first etch stop pattern;
a source electrode arranged on the semiconductor pattern in the source area; and
a drain electrode arranged on the semiconductor pattern in the drain area and spaced apart from the source electrode.
2. The thin film transistor substrate of claim 1, wherein the first etch stop pattern comprises silicon oxide, and the second etch stop pattern comprises silicon nitride.
3. The thin film transistor substrate of claim 2, wherein the first etch stop pattern has a thickness of about 150 angstroms to about 200 angstroms, and a ratio of a thickness of the first etch stop pattern to a thickness of the second etch stop pattern is about 1:4 to about 1:6.
4. The thin film transistor substrate of claim 1, wherein the first etch stop pattern and the second etch stop pattern have a same shape in a plan view.
5. The thin film transistor substrate of claim 1, wherein the semiconductor pattern comprises polysilicon.
6. A display apparatus comprising:
a first substrate including a display area;
a second substrate facing the first substrate;
a plurality of pixels arranged on the first substrate in the display area; and
a thin film transistor arranged on the first substrate to switch a data signal applied to each pixel,
wherein the thin film transistor comprises:
a gate electrode arranged on the first substrate;
a semiconductor pattern arranged on the gate electrode, the semiconductor pattern including a source area, a drain area, and a channel area;
a first etch stop pattern arranged on the semiconductor pattern to cover the channel area;
a second etch stop pattern arranged on the first etch stop pattern;
a source electrode arranged on the semiconductor pattern in the source area; and
a drain electrode arranged on the semiconductor pattern in the drain area and spaced apart from the source electrode.
7. The display apparatus of claim 6, wherein the first etch stop pattern comprises silicon oxide, and the second etch stop pattern comprises silicon nitride.
8. The display apparatus of claim 7, wherein the first etch stop pattern has a thickness of about 150 angstroms to about 200 angstroms, and a ratio of a thickness of the first etch stop pattern to a thickness of the second etch stop pattern is about 1:4 to about 1:6.
9. The display apparatus of claim 6, wherein the first etch stop pattern and the second etch stop pattern have a same shape in a plan view
10. The display apparatus of claim 6, wherein the semiconductor pattern comprises polysilicon.
11. The display apparatus of claim 6, wherein each pixel comprises:
a first electrode arranged on the first substrate in the display area and electrically connected to the drain electrode;
an organic light emitting layer arranged on the first electrode; and
a second electrode arranged on the organic light emitting layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. An endoscopic surgical instrument for deploying a two part fastener having a male fastener part and a female fastener part, comprising:
a tube having a proximal end and a distal end;
an end effector coupled to said distal end of said tube, said end effector configured to hold the male fastener part and the female fastener part in opposed relation;
an actuator coupled to said proximal end of said tube and configured to actuate the end effector; and
a shearing device proximate said end effector and configured to shear off a tip of said male fastener part after the male and female fastener parts are moved into a locking relation.
2. The endoscopic surgical instrument of claim 1, wherein said end effector comprises first and second effector arms connected in pivotal relation, wherein the first effector arm is configured to hold the male fastener and the second effector arm is configured to hold the female fastener.
3. The endoscopic surgical instrument of claim 2, wherein said effector arms each include a frame member and an ejector arm, wherein said frame member and said ejector arm are configured to move in a sliding relation so as to eject the respective male and female fastener parts in said locking relation from the end effector.
4. The endoscopic surgical instrument of claim 2, wherein said shearing device is positioned at a distal end of said second effector arm.
5. The endoscopic surgical instrument of claim 4, wherein said shearing device includes a hole defined by said second effector arm, the hole having an edge that is capable of shearing the tip.
6. The endoscopic surgical instrument of claim 1, wherein said male fastener part includes a base and a shaft pivotally connected to the base.
7. The endoscopic surgical instrument of claim 6, wherein the shaft is pivotally connected to the base by a hinge.
8. The endoscopic surgical instrument of claim 6, wherein said shaft is configured to move between a first position in which the shaft is positioned in substantially the same plane as the base and a second position in which the shaft is positioned substantially perpendicular to said base.
9. The endoscopic surgical instrument of claim 1, wherein said male fastener part includes a base and a shaft connected to the base, wherein the shaft includes a plurality of detent positions.
10. The endoscopic surgical instrument of claim 9, wherein the female fastener part is capable of resting in said locking relation at each of said detent positions.
11. The endoscopic surgical instrument of claim 1, wherein said tube is a flexible tube.
12. The endoscopic surgical instrument of claim 1, further comprising at least one control member extending through the tube and connecting at a proximal end to the actuator and at a distal end to the end effector.
13. An endoscopic surgical instrument for deploying a two part fastener having a male fastener part and a female fastener part, comprising:
a tube having a proximal end and a distal end;
an end effector coupled to said distal end of said tube, said end effector configured to hold the male fastener part and the female fastener part in opposed relation, the male fastener part including a shaft having a plurality of detent positions; and
an actuator coupled to said proximal end of said tube and said actuator configured to actuate the end effector.
14. The endoscopic surgical instrument of claim 13, wherein the female fastener part is capable of resting in a locking relation at each of said detent positions.
15. The endoscopic surgical instrument of claim 13, wherein said male fastener part includes a base and a shaft pivotally connected to the base.
16. The endoscopic surgical instrument of claim 15, wherein the shaft is pivotally connected to the base by a hinge.
17. The endoscopic surgical instrument of claim 15, wherein said shaft is configured to move between a first position in which the shaft is positioned in substantially the same plane as the base and a second position in which the shaft is positioned substantially perpendicular to said base.
18. An endoscopic surgical instrument for deploying a two part fastener having a male fastener part and a female fastener part, comprising:
a tube having a proximal end and a distal end;
an end effector coupled to said distal end of said tube, said end effector configured to hold the male fastener part and the female fastener part in opposed relation, said male fastener part including a base and a shaft pivotally connected to the base; and
an actuator coupled to said proximal end of said tube and said actuator configured to actuate the end effector.
19. The endoscopic surgical instrument of claim 18, wherein the shaft is pivotally connected to the base by a hinge.
20. The endoscopic surgical instrument of claim 19, wherein said shaft is configured to move between a first position in which the shaft is positioned in substantially the same plane as the base and a second position in which the shaft is positioned substantially perpendicular to said base.
21. An endoscopic surgical instrument for deploying a two part fastener having a male fastener part and a female fastener part, comprising:
a tube having a proximal end and a distal end;
an end effector coupled to said distal end of said tube, said end effector configured to hold the male fastener part and the female fastener part in opposed relation, wherein said male fastener part includes a base and a shaft pivotally connected to the base, the shaft having a plurality of detent positions;
an actuator coupled to said proximal end of said tube and said actuator configured to actuate the end effector; and
a shearing device proximate said end effector and configured to shear off a tip of said male fastener part after the male and female fastener parts are moved into a locking relation.
22. The endoscopic surgical instrument of claim 21, wherein said female fastener part is capable of resting in said locking relation at each of said detent positions.
23. The endoscopic surgical instrument of claim 21, wherein the shaft is pivotally connected to the base by a hinge.
24. The endoscopic surgical instrument of claim 23, wherein said shaft is configured to move between a first position in which the shaft is positioned in substantially the same plane as the base and a second position in which the shaft is positioned substantially perpendicular to said base.